200845116 1 九、發明說明： 【發明所屬之技術領域】 本發明係關於/種无罩益，特別是關於利用一殼罩及 底座之結合以供置放一光罩，並藉由該殼罩内側之數個 抵接件予以導正及定位該光罩的光罩倉。 【先前技術】 習用光罩盒，如中華民國公告第M296467號「光罩各 及應用於光罩盒内之金屬_及導正結構」新型專利，ς 參照第1圖所示，其包含-框體U、一底座12、一200845116 1 IX. DESCRIPTION OF THE INVENTION: TECHNICAL FIELD OF THE INVENTION The present invention relates to the use of a cover and a base for placing a reticle, and by the inside of the cover The plurality of abutments guide and position the photomask bin of the reticle. [Prior Art] A conventional mask case, such as the Republic of China Announcement No. M296467, "New Type of Photomask and Metal _ and Guide Structure Applied in Photomask Case", ς Refer to Figure 1, which contains a frame Body U, a base 12, a
、數個第—導正臂14及數個第二導正臂15。該底座^可 拆卸的扣合於該框體11内’域底座U 塊m承托-光罩16之下表面；該殼體13係覆 。及該^座12;各該第一導正臂η配置於該殼體13: !:且ΐ該第一導正臂14分別具有一第-弧形部⑷，以 β亥弟一弧形部141相互連接之一第二弧形部142，用以 =別抵接該光罩16之上表面及二相對側面；各該第二導正A plurality of first guiding arms 14 and a plurality of second guiding arms 15 are provided. The base is detachably fastened to the frame body 11. The base U block m supports the lower surface of the reticle 16; the casing 13 is covered. And the first guiding arm η is disposed in the housing 13: !: and the first guiding arm 14 has a first arc-shaped portion (4), respectively, and an arc-shaped portion 141 is connected to one of the second curved portions 142 for abutting against the upper surface of the reticle 16 and the opposite sides; each of the second guides
:上二置於該,殼？=3之内侧，用以對應抵接該光罩16之 ’糟*，虽該光罩16置放於 即可利用該第-導正臂14及第 ：用二罩-内*， 罩16形成-定位作用，並可15確實抵接該光 整功能。 供錢罩16適當之歸位調 一般而言，該習用光罩盒 點，例如：由於該第二弧形部14=::仍具有：列缺 形部141之一側，故告診筮一 ’、體連接於該第一弧 上表面時，則會直接連^弧^ 141抵接該光罩16之 光罩16之侧面，使得該光罩7弧形部⑽進-步壓迨該 罩16之側面容易因該第二弧形 5 200845116 參 部142的抵接作用力過大而造成損壞；另外，亦由於該第 二弧形部142會受該第一弧形部141之連動而過度抵緊該 光罩16之侧面，於長期間使用下仍會產生變形或斷裂等情 形’故導致其使用壽命較短。再者，習用光罩盒於使用過 私中，假使係採用人為放置方式將該光罩16置放於該底座 12之承托塊121時，則容易因放置時之視線受阻導致該光 罩16置放後的位置產生極大誤差，造成該光罩μ之一侧 自其中一承把塊121上掉落，使該光罩16之底面係容易直 • 接碰撞該底座12之上表面，進而導致該光罩16之底面因 碰撞而損壞。基於上述原因，有必要進一步改良上述習用 光罩盒。 —有鑑於此’本發明改良上述習用光罩盒之缺點，其係 藉由數個抵接件予以定位一光罩，該抵接件之一侧形成一 第一彈性片，用以抵接該光罩之一上表面，該抵接件之另 -側形成-第二彈性片，用以抵接誠罩之—侧面。藉此 該第-彈性片及第二彈性片係分別獨立形成於該抵接件之 不同侧邊，故可避免該第—彈性片直接連動該第二彈性 ，用以防止該第二彈性片抵接該光罩之侧面的力量過大， 進而確保該光罩之品質，且亦可防止該第二彈性 形或斷裂等情形，因此能提升該光罩盒之使用壽命。& 【發明内容】 本發明之主要目的係提供一種光罩盒，其係藉由數個 ，接件定位-光=’該抵接狀不同侧邊分卿立形— 第-彈性片及-第二彈性片，以避免該第二彈性片過 緊該光罩及產生變形斷裂等情形，使得本發明具ς栋 用壽命及使用便利性之功效。 6 200845116 本發明之次要目的係提供一種光罩盒，立係藉由 2數個承托件之頂緣分別形成不同高度m緣及 ^—弧緣’以便該光罩之—侧不慎自其中—承托件上 广不會直接碰撞該底紅上表面，; 免該光罩碰撞損壞之功效。 肩了避 根據本發明之光罩盒，其包含—底座、—殼罩 抵該底ΐ之上表面設置數個承托件以供承托-光罩 罩it罩係覆盍結合該底座，各該抵接件分別結合於該殼 内侧’该抵接件之一侧向下形成一第一彈性片 =下形成—第二彈性片，以分職接該鮮之上表面及 作用’並使該第一彈性片及第二彈性片可 成於該抵接件之不同側邊，使得該第一彈性片 M、靜動该弟二彈性片，進而可有效避免該第二彈性 片過度抵緊該光罩之㈣造成損壞情形。 【實施方式】 易懂為及f他目的、特徵及優點能更明顯 作詳細說明如^ : 實施例’並配合所附圖式， 含-』庙7第」圖所不，本發明較佳實施例之光罩盒係包 置放ς破罩3及數個抵接件4。該底座2可供承托 L盒===用;龜结合該底座2以構成- 侧邊分別獨立形成一第一彈性片41及- 。“二Γ罩Γ分別抵接於該光罩5之上表面及侧面 接件4確實定料光部時’即可利用各該抵 疋位镇先罩5，U有效防止該光罩5產生垂直或 7 200845116 水平偏移情形。 圖所示’本發明較佳實施例之底座2係 Γ V 22 ' 23 座2之上表面且。各該承托件21分別設置於該底 表面且郇近該底座2之 該光罩5。該承托件21之了用以確貝承托 第-孤缝919 員緣係形成一第一弧緣211及一 弟一弧緣212，以利用該第一弧緣 該光罩5時所產生之磨擦。^承托 二弧緣212彼此之間形成一預定隔"弧緣211與該第 之高度略低於該第-弧缘^之？;距離’該第二弧緣212 由該第-弧缘? 度’如第6圖所示，藉 光罩ΐ::自If弧緣212之高度差設計，使該 表面。又該承托件21之配置數量 =2:使該光罩5置放於各該承托件21上時，各 =1可，於該光罩5之下表面的各角隅位置各 達到別由四個承托件21平均負擔，進而 2之二Γ-T第田2圖所示，前述定位槽22係設置於該底座 i HI 於該殼罩3覆蓋結合該底座2時提供- ί = 3該限位件23分別設置於該底座2之上表面且 〗之周緣f置，各該限位件23較佳係相對位於 托件21之側邊·，藉此使該光罩5置放於各該承技件 ^保該光罩5係位於各該限位件23之間，以避 超出該底座2之周緣位置。該抵靠板24設置於 j 之一側周緣，以供該光罩5之-侧抵靠定位。誃 %曰25相對環設於誠座2之上表_周緣_位置，= 8 200845116 供該殼罩3之預定部位嵌設結合。 碎請參照第2及5圖所示，本發明較佳實施例之殼罩3 可透擇由一殼體31及一内罩32所組成。該殼體31係設有 一把手311、數個卡扣部312及一嵌接部313。該把手3Π 設置於該殼體31之頂面，以便利用該把手311搬運該光罩 盒至不同地點；各該卡扣部312對應該底座2之定位槽22 没置於该殼體31之相對二側底緣，以便該殼罩3覆蓋該底 座2 %可對應卡接各該定位槽22形成定位；該嵌接部 對應該底座2之環槽25設置於該殼體31之内侧，以便對 應喪接該環槽25形成定位。_罩32可藉由如螺接、卡 扣或焊接等各翻定方式結合於該殼體31之_，於如圖 所示之貝％例中，该殼體31之頂面設有數個具有螺孔之固 定柱32卜以供螺絲穿設後可直接螺接該殼體31内侧相對 個Γ位孔〔未緣不〕，以便該内罩32於該殼體31 内作業：另外，該内罩32較佳係為一金屬罩體 而隆根2该内罩32之内部時可形成-金屬屏蔽保 ，用以有效維持該光罩5之品質。^料現冢之屋生 請參照第3圖所示，本發明軔杜 係分別固定於該殼罩3之内罩32 = 1例之各抵接件4 Z内側，各該抵接件4相互 之間具有一預定間隔距離，以便分 面及各侧邊。該抵接件4係具有一 表 吉、查垃兮諠 j ϊ / 、 八 弟一侧（a )，以及垂 直連接該弟一侧（a )之一第二侧 有-第-彈性片4卜-第二彈性^ ，該抵接件4設 43。該第-彈性片41自該抵接件4之2 =-限：凸部 斜延伸形成’且該第-彈性片41 ’（ a )向下傾 ^禾端形成一彎弧段411， 9 200845116: The second is placed in the shell? The inner side of =3 is used to correspond to the 'bad*' of the photomask 16, and although the photomask 16 is placed, the first guide arm 14 and the second cover-inner *, the cover 16 can be formed. - Positioning action, and 15 can indeed abut the finishing function. Appropriate homing of the money cover 16 In general, the conventional reticle box point, for example, because the second curved portion 14=:: still has one side of the column missing portion 141, so the consultation When the body is connected to the upper surface of the first arc, the side of the reticle 16 of the reticle 16 is directly connected to the arc 141, so that the curved portion (10) of the reticle 7 is pressed against the hood. The side of the 16 is easily damaged by the abutting force of the second curved portion 5 200845116 the reference portion 142; in addition, the second curved portion 142 is excessively affected by the linkage of the first curved portion 141 Tightening the side of the reticle 16 will cause deformation or breakage during use for a long period of time, which results in a short service life. Moreover, the conventional photomask case is used in a private state. If the photomask 16 is placed on the support block 121 of the base 12 by artificial placement, the photomask 16 is easily blocked due to the line of sight when placed. The position after the placement causes a great error, causing one side of the reticle μ to fall from one of the handle blocks 121, so that the bottom surface of the reticle 16 can easily collide with the upper surface of the pedestal 12, thereby causing The bottom surface of the reticle 16 is damaged by the collision. For the above reasons, it is necessary to further improve the above conventional photomask case. In view of the above, the present invention improves the disadvantages of the conventional photomask case by positioning a photomask by a plurality of abutting members, and a side of the abutting member forms a first elastic piece for abutting the One of the upper surfaces of the reticle, the other side of the abutting member forms a second elastic piece for abutting the side surface of the hood. The first elastic piece and the second elastic piece are respectively formed on different sides of the abutting member, so that the second elastic piece can be prevented from directly interlocking the second elastic piece to prevent the second elastic piece from coming into contact with the second elastic piece. The force of the side of the reticle is too large, thereby ensuring the quality of the reticle, and also preventing the second elastic shape or breakage, etc., thereby improving the service life of the reticle. < SUMMARY OF THE INVENTION The main object of the present invention is to provide a photomask case which is positioned by a plurality of pieces, and the light is fixed by the different sides of the contact type - the first elastic piece and the - The second elastic piece prevents the second elastic piece from over-tightening the reticle and causing deformation and breakage, etc., so that the invention has the advantages of the service life and the convenience of use. 6 200845116 The secondary object of the present invention is to provide a reticle housing, which is formed by forming a different height m edge and a rim edge by the top edges of the two receiving members so that the rim of the reticle is inadvertently Among them, the support member will not directly collide with the upper red surface, and the effect of the blister collision damage. The reticle box according to the present invention is provided with a base and a cover, and a plurality of receiving members are disposed on the upper surface of the bottom cover for supporting the hood cover and the pedestal cover The abutting members are respectively coupled to the inner side of the casing. A side of the abutting member forms a first elastic piece=lower forming-second elastic piece to separate the fresh upper surface and act to make the The first elastic piece and the second elastic piece may be formed on different sides of the abutting piece, so that the first elastic piece M and the second elastic piece are statically moved, thereby effectively preventing the second elastic piece from excessively abutting the (4) The damage caused by the mask. [Embodiment] It is obvious that the purpose, features and advantages of the invention can be more clearly explained. For example, the embodiment is combined with the drawings, including the "the temple 7" diagram, and the preferred embodiment of the invention is implemented. For example, the reticle box is provided with a tamper cover 3 and a plurality of abutting members 4. The base 2 can be used for supporting the L-box ===; the turtle is combined with the base 2 to constitute a side-side separately forming a first elastic piece 41 and - respectively. "When the two Γ Γ 抵 抵 抵 之上 之上 之上 之上 之上 之上 之上 确实 ' ' ' ' ' ' ' ' ' 即可 即可 即可 即可 即可 即可 即可 即可 即可 即可 即可 即可 即可 即可 即可 即可 即可 即可 即可 即可 即可 即可 即可Or 7 200845116 horizontal offset situation. The figure shows that the base 2 of the preferred embodiment of the present invention is a top surface of the pedestal V 22 '23 2 and each of the support members 21 is disposed on the bottom surface and adjacent to the bottom surface. The reticle 5 of the base 2. The support member 21 is configured to form a first arc edge 211 and a first arc edge 212 to ensure the use of the first arc The friction generated when the mask 5 is obtained. ^ The two arc edges 212 form a predetermined gap between each other " the arc edge 211 and the first height is slightly lower than the first arc edge ^; The second arc edge 212 is formed by the first arc edge degree as shown in Fig. 6, by the height difference of the mask edge ΐ:: from the If arc edge 212, and the surface is placed. =2: When the reticle 5 is placed on each of the susceptors 21, each of the yokes is =1, and the corners of the lower surface of the reticle 5 are each placed at an average load of the four cradle members 21. And then 2nd Γ-T 2, the positioning groove 22 is disposed on the base i HI when the cover 3 is covered and coupled with the base 2 - ί = 3, the limiting member 23 is respectively disposed on the upper surface of the base 2 and the periphery of the base f, each of the limiting members 23 is preferably located opposite to the side of the supporting member 21, thereby placing the reticle 5 on each of the technical components to ensure that the reticle 5 is located in each of the limiting members Between 23, to avoid the peripheral position of the base 2. The abutting plate 24 is disposed on one side of the j side for the side of the reticle 5 to abut. 誃% 曰 25 is relatively ring-shaped in the seat 2 above table_perimeter_position, = 8 200845116 for the predetermined part of the cover 3 to be embedded and combined. Please refer to the second and fifth figures, the cover 3 of the preferred embodiment of the present invention can be selectively The housing 31 is composed of a handle 311, a plurality of latching portions 312 and an engaging portion 313. The handles 3 are disposed on the top surface of the housing 31 to utilize the housing 31. The handle 311 carries the reticle to different locations; the locating slots 22 of the latching portions 312 corresponding to the base 2 are not placed on opposite side edges of the housing 31, so that the cover 3 covers the base 2 % can be correspondingly engaged with each of the positioning slots 22 to form a positioning; the engaging portion corresponds to the ring groove 25 of the base 2 is disposed on the inner side of the housing 31 so as to correspondingly splicing the ring groove 25 to form a positioning. The housing 31 is coupled to the housing 31 by screwing, snapping or soldering. In the example shown in the figure, the top surface of the housing 31 is provided with a plurality of fixings having screw holes. The post 32 can be screwed directly to the opposite inner side of the housing 31 so that the inner cover 32 can work in the housing 31. In addition, the inner cover 32 is preferably When the metal cover is a metal cover and the interior of the inner cover 32 is formed, the metal shield can be formed to effectively maintain the quality of the light cover 5. Please refer to FIG. 3 for the present invention. The present invention is fixed to the inner side of the inner cover 32 of the cover 3 = 1 for each of the abutting members 4 Z, and the abutting members 4 are mutually There is a predetermined separation distance between them to face the sides and the sides. The abutting member 4 has a watch, a squirrel j ϊ / , an eight-seat side (a), and a second side of the one side (a) vertically connected to the first side - a - elastic sheet 4 - a second elasticity ^, the abutment 4 is provided 43. The first elastic piece 41 is formed by 2 =- limit of the abutting member 4: the convex portion is obliquely formed and the first elastic piece 41' (a) is inclined downward to form a curved portion 411, 9 200845116
該彎弧段411之底面則形成—凸點412，使該第一彈性片 41抵接該光罩〃5時可形成點接觸，以相對減少該光罩5表 面之磨損。該第二彈性片42自該抵接件4之第二侧（b) 向下傾斜延伸形成，該第二彈性片42末端形成-彎弧段 42卜以便抵接該光罩5之—侧面，藉此使該第一彈性片41 及第二彈性Μ 42係分關均成於該抵接件4之不同侧邊 ’使該第-彈性片41無法連動該第二彈性片42。該限位凸 部43設置於該抵接件4之底部且位於第—彈性片41 二彈性片42,間，以有效防止該第—彈性片41及第二彈 性片42抵接孩忒光罩5時產生過度彎折之情形。 请多照弟2、4及5®所示’ t本發縣罩盒欲提供該 光罩5置放時，可人為放置方式或其他適#方式將該 光罩5置放於該底座2之承托件21上，該承托件21之第 -弧緣211係托抵於該光罩5之下表面，並使該光罩5相 對位於該限位件23之間，以利用該限位件23初步限制該 H 心如第5圖所示，再將該殼罩3 覆蓋結合該底座2 ’使該殼罩3之卡扣部312可直接扣合該 底座2之定位槽22。此時’各該抵接件4之第—彈性片41 的凸點4丨2係抵接該光罩5之上表面，以防止該光罩5垂 請參照第3及5圖所示，前述各該抵接件4中，其較 佳可於其中至少-個抵接件4’之另一側形成一延伸部44 ’該延伸部44相對位於該第一彈性片犯之另一侧，且該 延伸部44之了侧向下傾斜延伸形成至少—導推板45。藉^ 使該抵接件4抵接該光罩5之—侧面時，可利用該導推板 45將該光罩5朝該底座2之抵靠板24方向推移作動，以便 該光罩5之另-侧可確實頂抵該抵靠板以形成定位。 200845116 直位移，並賴由該限位凸部43防止該第一彈 度料變形。各該第二彈性片42之彎弧段421係分別抵^ 該=5之相i二側面，以防止該μ 5水』 策2少了抵接件4、導推板45係用以推移導正= 及魏靠板24之間，用以更進一步防止該光罩^^移5 。猎ί ’本發明衫盒可提供該群3置放其内部，以利 用该第一彈性片41及第-彈性# 45> # # # 之定朽a h上洋片42轉貝抵接該光罩形成 • 作用’並可提供該光罩5適當的歸位調整功能。 所述$相較於第1圖之制光罩盒的第—弧形部 -接該光罩16時會直接連動該第二弧形部142過度壓 軍、16之侧面，進而產生該光罩16之侧面容易磨損 λ弟—導正# 15容易變形或斷裂等缺點。本發 ，抵接件4之不同侧邊所分別獨立形成的第-彈性片 彈片42 ’使得該第—彈性片41抵接該光罩16時不 曰:，该第二彈性片42進—步壓迫該光罩 5之侧面，以避 忒第—彈性片42過度抵緊該光罩5之側面造成磨損，且 亦可有贿止該第二彈性片42變形或斷裂。再者，如第6 圖所不，S利用人為放置方式將該光罩5置放於該底座2 j承托件2\的第一狐緣211時，假使不慎造成該光罩5之 #偏移掉落’亦可藉由該第二弧緣212輔助承接該光罩5 之底避免該光罩5之底面直接碰撞該底座2之上表 S ’其確實可達到防止該光罩5之底面碰撞損壞的功能。 、，然本發明已利用上述較佳實施例揭示，然其並非用 以^疋本發明’任何熟習此技藝者在不脫離本發明之精神 和範圍之内’相對上述實施例進行各種更動與修改仍屬本 11 200845116 發明所保護之技術範疇，因此本發明之保護範圍當視後附 之申請專利範圍所界定者為準。The bottom surface of the curved portion 411 is formed with a bump 412 to make a point contact when the first elastic piece 41 abuts the mask 5 to relatively reduce the wear of the surface of the mask 5. The second elastic piece 42 is formed to extend obliquely downward from the second side (b) of the abutting member 4, and the end of the second elastic piece 42 forms a curved portion 42 so as to abut the side of the photomask 5. Thereby, the first elastic piece 41 and the second elastic piece 42 are separated and formed on different sides of the abutting piece 4 such that the first elastic piece 41 cannot interlock the second elastic piece 42. The limiting protrusion 43 is disposed at the bottom of the abutting member 4 and between the two elastic pieces 42 of the first elastic piece 41 to effectively prevent the first elastic piece 41 and the second elastic piece 42 from abutting the child mask. At 5 o'clock, there was a situation of excessive bending. Please refer to the 2nd, 4th, and 5th's. The hair mask 5 is placed on the base 2 when you want to provide the mask 5. You can place it on the base 2 by human placement or other methods. On the receiving member 21, the first arc edge 211 of the receiving member 21 is coupled to the lower surface of the reticle 5, and the reticle 5 is relatively located between the limiting members 23 to utilize the limit. The member 23 initially restricts the H-heart as shown in FIG. 5, and the cover 3 is covered with the base 2' so that the buckle portion 312 of the cover 3 can directly engage the positioning groove 22 of the base 2. At this time, the bump 4丨2 of the first elastic sheet 41 of each of the abutting members 4 abuts against the upper surface of the mask 5 to prevent the mask 5 from falling as shown in FIGS. 3 and 5, Each of the abutting members 4 preferably has an extending portion 44 on the other side of the at least one abutting member 4'. The extending portion 44 is opposite to the other side of the first elastic piece, and The extension portion 44 has a side that extends obliquely downward to form at least a guide plate 45. When the abutting member 4 abuts the side surface of the reticle 5, the illuminating plate 45 can be used to move the reticle 5 toward the abutting plate 24 of the base 2 so that the reticle 5 The other side can surely abut the abutment plate to form a position. 200845116 is directly displaced, and the limit protrusion 43 prevents the first elastic material from being deformed. Each of the curved portions 421 of the second elastic piece 42 respectively abuts the two sides of the phase 5 of the phase 5 to prevent the μ 5 water from being less than the abutting member 4 and the guiding plate 45 for being pushed out. Positive = and Wei between the board 24, to further prevent the mask from moving 5 .猎 ' 'The present invention shirt box can provide the group 3 placed inside, to use the first elastic sheet 41 and the first - elastic # 45 > # # # 定 ah ah 上 上 上 42 42 42 42 42 42 42 42 42 42 42 42 42 The formation of the 'function' and the appropriate homing adjustment function of the reticle 5 can be provided. Compared with the first curved portion of the mask case of FIG. 1 , when the photomask 16 is connected, the second curved portion 142 is directly connected to the side of the curved portion 142 to generate the mask. The side of the 16 is easy to wear, and the shortcomings such as easy deformation or breakage. In the present invention, the first elastic piece 42' which is independently formed on the different sides of the abutting member 4 makes the first elastic piece 41 abut against the reticle 16: the second elastic piece 42 advances The side surface of the reticle 5 is pressed to prevent the first elastic sheet 42 from being excessively abutted against the side surface of the reticle 5, and the second elastic piece 42 may be deformed or broken. Furthermore, as shown in FIG. 6, the S is placed on the first fox edge 211 of the support member 2\ of the base 2 j by an artificial placement method, and the photomask 5 is inadvertently caused. Offset drop ' can also assist the bottom of the reticle 5 by the second arc edge 212 to prevent the bottom surface of the reticle 5 from directly colliding with the top surface S of the pedestal 2, which can indeed prevent the reticle 5 from being prevented. The function of the bottom collision damage. The present invention has been disclosed by the above-described embodiments, and it is not intended to be construed as a <Desc/Clms Page number> It is still within the technical scope of the invention as claimed in the present invention, and therefore the scope of the invention is defined by the scope of the appended claims.
12 200845116 【圖式簡單說明】 第1圖：習用光罩盒之組合剖視示意圖。 第2圖：本發明較佳實施例光罩盒之分解立體圖。 第3圖：本發明較佳實施例光罩盒之抵接件的分解立體圖 〇 弟4圖·本發明較佳實施例光罩盒之殼罩及底座未結合前 之剖視圖。 第5圖：本發明較佳實施例光罩盒供光罩之殼罩及底座結 φ 合後之剖視圖 第6圖：本發明較佳實施例光罩盒於光罩一侧偏移脫落後 防止碰撞之剖視圖。 【主要元件符號說明】 11 框體 12 底座 121 承托塊 13 殼體 14 第一導正臂 141 第一弧形部 142 第二弧形部 15 第二導正臂 16 光罩 2 底座 21 承托件 211 第一弧緣 212 第二弧緣 22 定位槽 23 限位件 24 抵靠板 25 環槽 3 殼罩 31 殼體 311 把手 312 卡扣部 313 嵌接部 32 内罩 321 固定柱 4 抵接件 4， 抵接件 13 200845116 41 第一彈性片 411 412 凸點 42 421 彎弧段 43 44 延伸部 45 5 光罩 彎弧段 第二彈性片 限位凸部 導推板12 200845116 [Simple description of the diagram] Figure 1: Schematic diagram of the combination of the conventional mask box. Fig. 2 is an exploded perspective view of a photomask case in accordance with a preferred embodiment of the present invention. Figure 3 is an exploded perspective view of the abutment member of the photomask case in accordance with a preferred embodiment of the present invention. Figure 4 is a cross-sectional view of the cover of the photomask case and the base of the preferred embodiment of the present invention before being joined. Fig. 5 is a cross-sectional view showing a cover of a photomask cover and a base of a photomask according to a preferred embodiment of the present invention. Fig. 6 is a view showing a mask of the preferred embodiment of the present invention. A cross-sectional view of the collision. [Main component symbol description] 11 frame 12 base 121 support block 13 housing 14 first guide arm 141 first curved portion 142 second curved portion 15 second guide arm 16 photomask 2 base 21 support 211 first arc edge 212 second arc edge 22 positioning groove 23 limiting member 24 abutting plate 25 ring groove 3 casing 31 casing 311 handle 312 fastening portion 313 engagement portion 32 inner cover 321 fixing column 4 abutting 4, abutting piece 13 200845116 41 first elastic piece 411 412 convex point 42 421 curved arc section 43 44 extension part 45 5 mask curved section second elastic piece limiting convex part guide plate
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