TW200838796A - Twin-tube type water-cooling ozone generation tube assembly - Google Patents

Twin-tube type water-cooling ozone generation tube assembly Download PDF

Info

Publication number
TW200838796A
TW200838796A TW96109950A TW96109950A TW200838796A TW 200838796 A TW200838796 A TW 200838796A TW 96109950 A TW96109950 A TW 96109950A TW 96109950 A TW96109950 A TW 96109950A TW 200838796 A TW200838796 A TW 200838796A
Authority
TW
Taiwan
Prior art keywords
tube
channels
module
water
ozone
Prior art date
Application number
TW96109950A
Other languages
Chinese (zh)
Inventor
Huei-Tarng Liou
Original Assignee
Huei-Tarng Liou
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Huei-Tarng Liou filed Critical Huei-Tarng Liou
Priority to TW96109950A priority Critical patent/TW200838796A/en
Publication of TW200838796A publication Critical patent/TW200838796A/en

Links

Abstract

A water cooling ozone generation tube assembly includes a twin-tube type ozone generation tube module and a tube holder. The twin-tube type ozone generation tube module has an internal tube and an external tube. The ozone generation tube assembly of the present invention is cooled with water. Both the internal tube and the external tube of the tube module are cooled with water to improve cooling effect and further increase the throughput of ozone generation. When mass production ozone is necessary, the ozone generation tube assembly may be configured to include more than one ozone generation tube assemblies.

Description

200838796 九、發明說明: 【發明所屬之技術領域】 其中每-管模組具有-内管及一外管,且内管與外管 組 本發明係、關於-種雙管式水冷臭氧產生n更明確地 說,本發明係關於包括多個臭氧產生管模組的臭氧產生管 皆由水冷卻 【先前技術】200838796 IX. Description of the invention: [Technical field of the invention] wherein each tube module has an inner tube and an outer tube, and the inner tube and the outer tube group are related to the invention, and the double tube type water-cooled ozone is generated. Specifically, the present invention relates to an ozone generating tube including a plurality of ozone generating tube modules, all of which are cooled by water [Prior Art]

臭氧通常被應用於處理將用於半導體工業、水產品工 業、游泳池、家庭等中之水。在臭氧製造之_典型梦程 中,引導含氧氣體通過臭氧產生管中之一施加了高壓的高 壓放電區。當穿過臭氧產生管時,氧將被離子化。门 US 4,1(^783揭示在-臭氧產生t中製造臭氧的類似特 被。如圖1所展不’臭氧產生器包含若干個 管卜每-管丨具有一内壁U、一外壁lb、一入口 5 = 口將空氣(或另-含氧氣體)導納入壁㈣^之間的環形腔 室3,_及一出口 6,該出口用來自腔室3中抽空濃化之氣 體。第一電極12上覆内壁la之内側之中位部分,且第二電 極8上覆外壁lb之外侧的中位部分並與電極12相對。當產 生器運作時,對電極12及8施加高壓,此在電極之間導致 一電弧且產生臭氧。 在放電反應中,產生大量的熱能。為放電反應之發生提 供腔室的臭氧產生管必須耐受因此所產生之熱量。在多種 ί月況下六氧之生產率應足夠大以滿足實際需要。因此, 在六氧產生官中將產生更多的熱量。熱量經常導致管子升 118269.doc 200838796 至一極南之溫度,此可能損壞管子或降低管子之壽命。因 此’對於用於較高速率之臭氧產生的臭氧產生系統而言, 減少熱量為一重要之問題。Ozone is commonly used to treat water that will be used in the semiconductor industry, aquatic products industry, swimming pools, homes, and the like. In the typical dream process of ozone production, an oxygen-containing gas is introduced through a high-pressure discharge zone in which one of the ozone generating tubes is applied. When passing through the ozone generating tube, oxygen will be ionized. Door US 4,1 (^783 discloses a similar feature for producing ozone in ozone generation t. As shown in Fig. 1, the ozone generator comprises a plurality of tubes each having an inner wall U and an outer wall lb, An inlet 5 = port directs air (or another oxygen-containing gas) into the annular chamber 3, between the wall (4), and an outlet 6, which is evacuated from the chamber 3 by a concentrated gas. The electrode 12 covers the inner portion of the inner wall 1a, and the second electrode 8 covers the middle portion of the outer side of the outer wall 1b and is opposite to the electrode 12. When the generator operates, the electrodes 12 and 8 are applied with high voltage. An electric arc is generated between the electrodes and ozone is generated. In the discharge reaction, a large amount of thermal energy is generated. The ozone generating tube that provides the chamber for the occurrence of the discharge reaction must withstand the heat thus generated. Under various conditions, the six oxygen Productivity should be large enough to meet actual needs. Therefore, more heat will be generated in the hexa-oxide generator. Heat often causes the tube to rise to a temperature of 118,269.doc to 200838796 to a south, which may damage the tube or reduce the life of the tube. So 'for higher speeds For ozone generation systems generate ozone, reducing the amount of heat is an issue of importance.

在臭氧產生工業中,水冷卻通常用於減少臭氧產生管中 所產生之熱量。然而,現有技樹水平僅涉及冷卻臭氧產生 為之外管。眾所熟知,在放電過程中,内管中之溫度亦極 尚。因此,本發明之一目標在於,藉由在溫度高至足以損 壞官子之處進行冷卻而改良對内臭氧產生管之冷卻效果。 本舍明之另一目標在於提供具有充分冷卻效果的用以產 生較南臭氧產生速率的構件P 【發明内容】 本發明提供一種雙管臭氧產生管,此處内管與外管皆由 水冷卻以有效地減少其中所產生之熱量。 為達成有效地冷卻臭氧產生管之目標,本發明之臭氧產 土系統進一步含有一管固持器,其不僅將臭氧產生管固定 就位而^提供—腔室以使得冷卻水可穿過,且藉此帶走 自管轉移至管固持器之熱量。 +為達成提供—較高之臭氧生產率的目標,可藉由以—所 ,之方式堆疊t固持器而將根據本發明之臭氧產生管裝配 在一起ο 藉:參看本發明之圖式及以下之較佳實施 之目軚之特定手段對於彼等熟習此項 技術者將變得顯而易見。 【實施方式】 118269.doc 200838796 μ圖1,臭氧產生管組100包含雙管式臭氧產生管模組 80及官固持器7〇。管組⑽之兩端如圖2中所展示般密封。 管模組8〇包含-鋁管10、-管狀電極30、一内石英管5〇 及-外石英管60。作為管模組8〇之最内環的銘管】〇具有一 入水口 12及―出水口 14。銘管1G被圍繞於管狀電極30中, 且一環形間隙形成在銘管10與管狀電極3〇之間。用絕緣層 2〇填滿環形間隙以便使銘flG與管狀電極%彼此保持電; 緣。絕緣層20亦用來將銘管_定於管狀電極财。絕緣 由選自_之材料製成。内石英管50經配置為圍繞 s “㈣’且外石英管6〇經配置為圍繞内石英管以便 形成一環形空間52。藉由密封内石英管50及外石英管60之 ^端而閉合環狀空間52之兩端。氣體入口 M提供於外石英 官6〇之-端處’且氣體出口吨供於外石英管之另一端 處。 提供管固持器顺圍繞管模請。管固持㈣具有至少 —個入水口 72及至少一個出水口 74。 在運作期間’將30’_ ¥至4〇,_ v之高壓施加於管狀 電極3〇及管固持器7〇上’且管狀電極30用作陽極且管固持 器7〇用作陰極或接地雷托 ♦ 口符 /接也電極。管狀電極30與内石英管50之内 側接觸。為增力口肉c & 央& 50與管狀電極3〇之間的 將内石英管50之内側铲獻〇 個石:1 一金屬覆層40。由於施加於兩 1固石央官50、60卜夕古网 之古、w i,石英管中將產生高熱能及因此 眾所熟知,金屬霜展 *後層不可耐受高溫。如圖中所展示,經 118269.doc 200838796 由入水口 12供給冷卻水。因此,内石英管5〇中所產生之熱 量可由經由出水口 14流出管子50的冷卻水帶走。管子50之 表面因此將保持一相對較低之溫度以便不會使其上之金屬 覆層損壞。覆層可自各種材料中選擇而不用考慮其熔點, 且在此情況下,具有較低之熔點但具有良好導電性及良好 抗腐餘性能的金為較佳的。In the ozone generation industry, water cooling is often used to reduce the amount of heat generated in the ozone generating tubes. However, the current skill level only involves cooling the ozone to create an outer tube. It is well known that during discharge, the temperature in the inner tube is also extremely high. Accordingly, it is an object of the present invention to improve the cooling effect of the inner ozone generating tube by cooling at a temperature high enough to damage the official. Another object of the present invention is to provide a member P having a sufficient cooling effect for generating a relatively south ozone generation rate. [Invention] The present invention provides a double tube ozone generating tube, in which both the inner tube and the outer tube are cooled by water. Effectively reduce the amount of heat generated in it. In order to achieve the goal of effectively cooling the ozone generating tube, the ozone producing system of the present invention further comprises a tube holder which not only fixes the ozone generating tube in place but also provides a chamber so that the cooling water can pass through and borrow This takes away the heat transferred from the tube to the tube holder. + In order to achieve the goal of providing a higher ozone productivity, the ozone generating tubes according to the present invention can be assembled by stacking the t holders in the manner of the present invention: by referring to the drawings of the present invention and the following Particular means of achieving the preferred embodiments will become apparent to those skilled in the art. [Embodiment] 118269.doc 200838796 μ FIG. 1 , the ozone generating tube set 100 includes a double tube ozone generating tube module 80 and an official holding unit 7 . Both ends of the tube set (10) are sealed as shown in FIG. The tube module 8A includes an aluminum tube 10, a tubular electrode 30, an inner quartz tube 5, and an outer quartz tube 60. The inner tube of the innermost ring of the tube module 8 has a water inlet 12 and a water outlet 14. The tube 1G is surrounded in the tubular electrode 30, and an annular gap is formed between the tube 10 and the tubular electrode 3''. The annular gap is filled with an insulating layer 2〇 to keep the electrode flG and the tubular electrode % electrically connected to each other; The insulating layer 20 is also used to set the tube to the tubular electrode. The insulation is made of a material selected from _. The inner quartz tube 50 is configured to surround the s "(4)" and the outer quartz tube 6 is configured to surround the inner quartz tube to form an annular space 52. The ring is closed by sealing the ends of the inner quartz tube 50 and the outer quartz tube 60. Both ends of the space 52. The gas inlet M is provided at the end of the outer quartz and the gas outlet is supplied to the other end of the outer quartz tube. The tube holder is provided to surround the tube mold. The tube is held (4) At least one water inlet 72 and at least one water outlet 74. During operation, 'a high pressure of 30'_¥ to 4〇,_v is applied to the tubular electrode 3〇 and the tube holder 7' and the tubular electrode 30 is used as The anode and the tube holder 7 are used as a cathode or a grounded retort. The tangential/connected electrode. The tubular electrode 30 is in contact with the inner side of the inner quartz tube 50. It is a force-increasing meat c &&& 50 & tubular electrode 3 Between the 〇 将 将 内 内 石英 石英 : : : : : : : : : : : : : : : : : : : : : : : : : : : : : : : : : : : : : : : : : High heat energy and therefore well known, metal frost show * the back layer can not withstand high temperatures. As shown in the figure Cooling water is supplied from the water inlet 12 via 118269.doc 200838796. Therefore, the heat generated in the inner quartz tube 5 can be carried away by the cooling water flowing out of the tube 50 through the water outlet 14. The surface of the tube 50 will therefore remain relatively relatively Low temperature so as not to damage the metal coating on it. The coating can be selected from a variety of materials without regard to its melting point, and in this case, has a lower melting point but has good electrical conductivity and good corrosion resistance. The gold of performance is preferred.

由於應不使鋁管10直接接觸其中之冷卻水,所以較佳對 銘管10之表面進行陽極化處理。 在一較佳之實施例中,如圖所展示之管固持器7〇由兩半 70及70構成。管固持器7〇經組態以便其可輕易地彼此連 接。多個管模組係必要的以便產生大量之臭氧。圖5展示 將裒5又於官固持器中之管模組堆疊起來的狀態。在同時操 作多個官模組的情況下,可提高產生臭氧的能力。 為易於裝配,管固持器7〇可由兩半70,及70”形成。出於 經濟性之目的,可使兩半70,及70”相同。 如圖3所展示,管固持器7〇,及7〇"各包含一入水口72及一 尺 配置官固持器70以便使其與管模組80直接接 觸^二確地说,與外石英管60之外表面接觸。管子70之 „觸吕之側被較佳地製成圓柱形表面以便更佳地盘 管模組80之表面八 矿甶配δ。以類似於藉由經過其中之冷卻 走内石英管50中所違座 曰 的方式’將外石英管60中所 移至管固持器7G且由穿過管固持㈣之冷卻 如圖1及圖3所展示 管固持器70之單一半邊之一較佳實 118269.doc 200838796 施例具有一上水平表面73及一下水平表面73,,一左垂直表 面75及一右垂直表面75,,且因此形成四個角。兩個半圓柱 形表面76對稱地形成於上水平表面73及下水平表面73,上。 第一對通道78對稱地分別形成於左垂直表面75上靠近左上 角及左下角處。第二對通道78,對稱地分別形成於右垂直表 面75’上靠近右上角及右下角處。第二對通道78,與第一對 通道78對稱'。參看圖3,該等通道中之每一者具有一向内 寬度W!及一向外寬度W2,且向内寬度%大於向外寬度 如圖1及圖5所展示,—垂直夾具9〇經製作成配合由兩充 垂直相鄰之管固持器半邊7G,及7G"的下通道及上通道所开 成之通道,且用以將管固持器半邊7〇,與7〇"連接在—起。/ 圖5展示複數個連接在一起之管固持器半邊,直中包/ 有管模請。在圖5及圖6中,卩垂直方式堆疊的管固持^ 由垂直夾具9G連接且形成兩個單獨之堆疊。管固持哭之兩 個堆疊進—步由—在堆疊之頂部之水平夾具92及在㈣之 底部之另-夾具連接。水平夾具92經製作成配合由最 兩個水平㈣之管固持器所形成的通道。另—水 ::由最下之兩個水平相鄰之管固持器之下通道所形成的 所選擇之製作管固持器7〇之較佳材料為銘,此係 之成本低廉,且紹具,、為. 认 好的熱轉移性能及導電性。. 外,可藉由擠壓製程將紹輕易地 …此 避免加工所浪費之材料。 ’、、、而之形狀,且可 H8269.doc 200838796 本發明亦可以其他特定模式實施而不脫離本發明之精 神。因此’以上提及之實施例應視作例示性而非限制性 的。所有與申請專利範圍及均等物之涵義及範圍一致之變 化當屬於本發明所主張之範疇。 【圖式簡單說明】 圖1為本發明之臭氧產生管組之透視圖;Since the aluminum pipe 10 should not be directly contacted with the cooling water therein, it is preferable to anodize the surface of the tube 10. In a preferred embodiment, the tube holder 7 shown as shown is comprised of two halves 70 and 70. The tube holders 7 are configured so that they can be easily connected to each other. Multiple tube modules are necessary to generate a large amount of ozone. Figure 5 shows the state in which the tube modules of the crucible 5 and the official holder are stacked. In the case of operating multiple official modules at the same time, the ability to generate ozone can be improved. For ease of assembly, the tube holder 7 can be formed from two halves 70, and 70". For economical purposes, the two halves 70, and 70" can be made identical. As shown in FIG. 3, the tube holders 7〇, and 7〇" each include a water inlet 72 and a one-foot configuration official holder 70 for direct contact with the tube module 80. The outer surface of the tube 60 is in contact. The side of the tube 70 is preferably formed into a cylindrical surface for better alignment of the surface of the coil module 80 with δ. Similar to the inner quartz tube 50 by cooling therethrough. The method of violating the squatting 'moves the outer quartz tube 60 to the tube holder 7G and is held by the tube (4). One of the single half sides of the tube holder 70 shown in Figures 1 and 3 is preferably 118269. Doc 200838796 The embodiment has an upper horizontal surface 73 and a lower horizontal surface 73, a left vertical surface 75 and a right vertical surface 75, and thus four corners. The two semi-cylindrical surfaces 76 are symmetrically formed on the upper level. The first pair of channels 78 are symmetrically formed on the left vertical surface 75 near the upper left corner and the lower left corner, respectively. The second pair of channels 78 are symmetrically formed on the right vertical surface 75', respectively. Near the upper right corner and the lower right corner. The second pair of channels 78 are symmetric with the first pair of channels 78. Referring to Figure 3, each of the channels has an inward width W! and an outward width W2, and inward Width% is greater than the outward width as shown in Figures 1 and 5, vertical 9〇 is made to match the 7G of the vertically adjacent tube holder 7G, and the 7G" lower channel and the upper channel are opened, and used to hold the tube holder half 7〇, and 7〇&quot Connected to -. Figure 5 shows a plurality of tube holder halves connected together, straight in the package / with tube mold. In Figure 5 and Figure 6, the vertical stack of tubes is held by the vertical clamp 9G Connect and form two separate stacks. The tube holds the two stacks of crying - the horizontal clamp 92 at the top of the stack and the other clamp at the bottom of the (4). The horizontal clamp 92 is made to fit the two The channel formed by the horizontal (4) tube holder. The other water: the selected material of the selected tube holder 7 formed by the lower two horizontally adjacent tube holders is preferably Ming, the cost of this system is low, and the equipment is good, and the heat transfer performance and conductivity are recognized. In addition, it can be easily done by the extrusion process... This avoids the waste of processing materials. And the shape, and can be H8269.doc 200838796 The invention can also be other special The mode is implemented without departing from the spirit of the invention. Therefore, the above-mentioned embodiments are to be considered as illustrative and not restrictive, and all changes in the meaning and scope of the claims and equivalents BRIEF DESCRIPTION OF THE DRAWINGS Fig. 1 is a perspective view of an ozone generating tube set of the present invention;

圖2為沿圖.3中之線2-2所截得之橫截面圖; 圖3為沿圖2中之線3_3所截得之橫截面圖; 圖4展示臭氧產生管組之内部; 圖5展示臭氧產生管組由多個管模組構成之狀態;及 圖6展示了圖5中未展示之臭氧產生管組的端視圖。 【主要元件符號說明】 10 鋁管 12 弟一電極 14 出水口 20 絕緣層 30 管狀電極 40 金屬覆層 50 内石英管 54 氣體入π 56 氧體出口 60 外石英管 70 管固持器 70' 管固持器 之半邊 118269.doc •10- 200838796Figure 2 is a cross-sectional view taken along line 2-2 of Figure 3. Figure 3 is a cross-sectional view taken along line 3-3 of Figure 2; Figure 4 shows the interior of the ozone generating tube set; 5 shows the state in which the ozone generating tube group is composed of a plurality of tube modules; and FIG. 6 shows an end view of the ozone generating tube group not shown in FIG. [Main component symbol description] 10 Aluminum tube 12 Brother one electrode 14 Water outlet 20 Insulation layer 30 Tubular electrode 40 Metal coating 50 Inner quartz tube 54 Gas into π 56 Oxygen outlet 60 Outer quartz tube 70 Tube holder 70' Tube holding Half of the device 118269.doc •10- 200838796

70" 管固持器之半邊 72 入水口 73 上水平表面 73, 下水平表面 74 出水口 75 左垂直表面 75! 右垂直表面 76 半圓柱形表面 78 第一對通道 IV 第二對通道 80 管模組 90 垂直夾具 92 水平夾具 100 臭氧產生管組 W! 向内寬度 w2 向外寬度 118269.doc70" half of the tube holder 72 water inlet 73 upper horizontal surface 73, lower horizontal surface 74 water outlet 75 left vertical surface 75! right vertical surface 76 semi-cylindrical surface 78 first pair of channels IV second pair of channels 80 tube module 90 Vertical clamp 92 Horizontal clamp 100 Ozone generating tube set W! Inward width w2 Outer width 118269.doc

Claims (1)

200838796 十、申請專利範圍·· 1· 一種雙管式臭氧產生 王&杈組,其句合· 一鋁管,其中具有— · 一 水口及一出水口; 一圍%該鋁管之警狀電極; . 一填滿該鋁管與謗管狀# #+π • -内石英管,心 之間的絕緣層; . 有一金屬覆層;及 且在八内表面上鍍敷 外石英營,並psn >JL Φ 、兀该内石英管且在其間留出 ^ , 空間,該環形命fl夕工 /、门召出一裱形 該外石英管之Γ# >端皆閉合’且—氣體人σ提供在 另一端處。^處且一氣體出口提供在該外石英管之 2·如請求項丨之模組,其 〇 士主 …亥孟屬覆層之材料為金。 3·如睛求項2之模組,其中該 &在其外表面經陽極化。 種水冷钾臭氧產生管組,其包含: :請求項3之雙管式臭氧產生管模組;及 • 水:=持器,其中具有至少—個入水口及至少-個出 且/、圍繞該臭氧產生管模組。 5·如請求項4之管組, 丁成s囡持态由兩個相同之半邊 形成。 < 6. 項5之管組’其中該管固持器之每 入水口及—出水口。 千透具有200838796 X. Patent application scope·· 1· A double-tube type ozone generation king & 杈 group, its sentence combination · an aluminum tube, which has — · a nozzle and a water outlet; Electrode; a fill of the aluminum tube and the 谤 tubular # # + π • - inner quartz tube, the insulation between the core; . has a metal coating; and on the inner surface of the eight plated outer quartz camp, and psn >JL Φ, 兀 the inner quartz tube and leave ^, space between them, the ring life flan work /, the door calls out a shape of the outer quartz tube Γ # > end are closed 'and - gas people σ is provided at the other end. ^ and a gas outlet is provided in the outer quartz tube 2, such as the module of the request item, and the material of the gentleman's main coating is gold. 3. The module of claim 2, wherein the & is anodized on its outer surface. A water-cooled potassium ozone generating tube set comprising: the double-tube ozone generating tube module of claim 3; and • a water:= holder having at least one water inlet and at least one out and/or surrounding Ozone generating tube module. 5. If the tube group of claim 4, the Ding Cheng s囡 state is formed by two identical halves. < 6. The tube group of item 5, wherein each of the tube holders has a water inlet and a water outlet. Thousands of 如請求項6之管組 半圓柱形外表面, 面。 ,其中該管固持器之每一半邊具有一 以用於配合該臭氧產生管模組的外表 118269.doc 200838796 8. 9.A semi-cylindrical outer surface, such as the tube set of claim 6. Where each half of the tube holder has a surface for mating with the ozone generating tube module 118269.doc 200838796 8. 如請求項7之管組,其進一步包 # 乂匕3後數個如請求項3之臭 乳產生管,模組及該等管固持器 1 ά 才。口您甶爽持構件垂直及/或水 平連接之相等數目之單一半邊。 如请求項8之管組,其中該管固持器之單一半邊包含: 形成四個角的一上水平表面及一下水平表面及一左垂 直表面及-右垂直表面’兩個半圓柱形表面對稱地形成 於該上水平表面及該下水平表面上,一第一對通道對稱 地二別形成於該左垂直表面上靠近左上角及左下角處, 一第二對通道對稱地分別形成於該右垂直表面上靠近右 上角及右下角處,該第二對通道與該第一對通道對稱, 該等通道中之每一者具有一向内寬度及一向外寬度,且 該向内寬度大於該向外寬度。 10.如請求項9之管組,其中該夾持構件包含··For example, in the group of claim 7, the further package # 乂匕3 is followed by a plurality of scent generating tubes, modules and the tube holders 1 of claim 3. The mouth is the same as the single half of the vertical and/or horizontal connection of the component. The tube set of claim 8, wherein the single half of the tube holder comprises: an upper horizontal surface forming a four corner and a lower horizontal surface and a left vertical surface and a right vertical surface 'the two semi-cylindrical surfaces are symmetrically Formed on the upper horizontal surface and the lower horizontal surface, a first pair of channels are symmetrically formed on the left vertical surface near the upper left corner and the lower left corner, and a second pair of channels are symmetrically formed on the right vertical The second pair of channels are symmetrical with the first pair of channels on the surface, and each of the channels has an inward width and an outward width, and the inward width is greater than the outward width . 10. The tube set of claim 9, wherein the clamping member comprises 複數個垂直夾具,其每一者經製作成配合由兩個垂直 相鄰之管固持器之下通道及上通道所形成之通道;及 兩個水平夾具,其中一者經製作成配合由最上之兩個 水平相鄰之管固持器之上通道所形成之通道,同時另— 水平夾具經製作成配合由最下之兩個水平相鄰之管固持 器之下通道所形成之通道。 11 ·如請求項1 〇之管組,其中該絕緣層由橡膠製成。 I18269.doca plurality of vertical clamps, each of which is formed to fit a passage formed by the lower and upper passages of the two vertically adjacent tube holders; and two horizontal clamps, one of which is made to fit the uppermost The channels formed by the channels above the two horizontally adjacent tube holders, while the other horizontal clamps are made to fit the channels formed by the channels below the lower two horizontally adjacent tube holders. 11. The group of claim 1 wherein the insulating layer is made of rubber. I18269.doc
TW96109950A 2007-03-22 2007-03-22 Twin-tube type water-cooling ozone generation tube assembly TW200838796A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
TW96109950A TW200838796A (en) 2007-03-22 2007-03-22 Twin-tube type water-cooling ozone generation tube assembly

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
TW96109950A TW200838796A (en) 2007-03-22 2007-03-22 Twin-tube type water-cooling ozone generation tube assembly

Publications (1)

Publication Number Publication Date
TW200838796A true TW200838796A (en) 2008-10-01

Family

ID=44820658

Family Applications (1)

Application Number Title Priority Date Filing Date
TW96109950A TW200838796A (en) 2007-03-22 2007-03-22 Twin-tube type water-cooling ozone generation tube assembly

Country Status (1)

Country Link
TW (1) TW200838796A (en)

Similar Documents

Publication Publication Date Title
JPH09504772A (en) Ozone and other reactive gas generation cells and systems
KR101544329B1 (en) Plasma generation device, cvd device and plasma treatment particle generation device
TWI352368B (en) Plasma head and plasma-discharging device using th
JP2006196677A (en) Plasma processing device, and semiconductor element manufactured by the same
TW200833182A (en) Applicators and cooling systems for a plasma device
JP2010180478A (en) Hydrogen-oxygen mixed gas generating apparatus
KR20020002262A (en) Ozone generator
CN116081577B (en) High-purity high-concentration clean plate-type ozone generator and system
TW201249263A (en) Immersible plasma coil assembly and method for operating the same
CN101003363A (en) Double cooled ozone discharging tube
TW200838796A (en) Twin-tube type water-cooling ozone generation tube assembly
US20080233021A1 (en) Twin-tube type water-cooling ozone generation tube assembly
JP6539670B2 (en) Power supply unit
US20200216969A1 (en) Electrode for an electrolysis process
US20080025883A1 (en) Ozone generator
JP6552469B2 (en) Plasma generation apparatus and method, and fine particle production apparatus and method using the same
CN105025649B (en) The apparatus and method of inductively hot plasma are generated under a kind of low pressure
JP3000080B1 (en) Water-cooled electrode
JP2012121754A (en) Ozone generator
WO2014183432A1 (en) Integrated heat-dissipation thyristor
TWI314339B (en) Plasma processing apparatus
JP6721364B2 (en) Ozone generator
JP5981323B2 (en) Ozone generator
JP2008031002A (en) Ozone generator, ozone generator module, and stack assembly of ozone generators
CN218812079U (en) Heating device and coating reaction chamber