TW200826205A - Temperature controlling system of gas cabinet and operating method thereof - Google Patents

Abstract

A temperature controlling system is provided. The system includes a gas cabinet, a heating/cooling apparatus, a controller, and a pressure sensor. At least one gas cylinder is placed inside the gas cabinet. The heating/cooling apparatus connects with the gas cabinet to regulate inside temperature of the gas cabinet. The controller connects to the heating/cooling apparatus. The pressure sensor loading on the outlet of the gas cylinder is coupled to the controller. According to signals generated by the pressure sensor, the controller modulates the heating/cooling apparatus. Hence, the inside temperature of the gas cabinet is regulated, and the gas cylinder is either heated or cooled.

Description

200826205 pt.ap773 22072twf.doc/g IX. Description of the invention: [Technical field to which the invention pertains] / The present invention relates to a gas delivery system for use in a semiconductor process, and more particularly to a heating/cooling device , to the gas cabinet (Gas Cabinet) system. Work 1 milk [prior art]

In the semiconductor process, almost every process equipment requires a variety of gases. Therefore, semiconductor process equipment requires an individual processing system to transfer the required process gases. The gas delivery system ^ refers to the gas from the gas cylinder (Gas Cylinder) through various valves and fittings to each process machine. The planning of the body transport system, along with the characteristics of various gases, has a simple to non-f complex design. At present, the supply of various gases required for the semi-conducting process is usually the remainder of the gas steel stored in the size. The gas is placed in a gas cabinet that is continuously vented to prevent gas (4). The commonly used gas cylinders are high-pressure cylinders that can be classified into gaseous and liquid steel liters depending on the gas characteristics they are filled with. Fluorinated crane (VI) (WF heart, three gasification gas (Qing), three gasification _α3), two gas Weiqing and other gases commonly used in semiconductor manufacturing process, because of its low vapor pressure, at room temperature The medium is in a liquid state (liquid gas is filled and stored in a gas cylinder. The inside of the cylinder is in a liquid/gas state under working pressure, and the liquid gas in the cylinder is heated by the cylinder itself and the environment to make the liquid base. The formation of gaseous vapor is the source of gas supply. As the liquid level in the cylinder (four) body drops, the pressure inside the cylinder will also change. In the ring 5 200826205 pt.ap773 22072twf.doc / g = insufficient heat provided Under the circumstance, the stable demand of the pressure inside the cylinder depends on the supply of gas to the gas supply state in the semi-*脰 table. The wonderful gas becomes the heat of the gas environment, but the effect is limited. The force limit of the knife will cause the pressure to be unstable. Therefore, when using this kind of gas, it must be in: f cylinder, and promote the inner energy of the gas cylinder: < σ σ hot gas gas supply. Vaporization' to provide a stable habit : The gas cylinder used in the heating mode, the main = force, the crotch CDA heating system, and the bottom electric heating plus "ί : The direct heating method can not be evenly sentenced j to the liquid (four) bone cylinder heating. This u Λ f, ... B refills the gas cylinder, it is easy to rayan 丄# The contact area is small, so the heat conduction effect is not good. = Coronation: The method is easy to cause the temperature difference inside the cylinder to increase, wt = milk due to the lower temperature of the top of the cylinder and again Condensation: into = liquid ^ - Dan cylinders inside the formation of droplets, will cause ^: into a stable 'and affect the gas supply · ^ the power does not need to consume a lot of power, easy ::: gas; there is spontaneous combustion or Will Erna anti-::::1 for the Ministry of "anti-Lishui system fire extinguishing" must be treated to it, so in a more cautious way to come to Du Xianshu ^ into the 仏 to cause harm ', rational & some of the dangerous gas is necessary In view of the above, it is an object of the present invention to provide a temperature control system for a gas hub that can efficiently heat or cool a gas Weilin line to pressure the supply gas. Keep stable. ', this hair A further object of the present invention is to provide a gas cabinet temperature control method which can comprehensively heat a gas cylinder and effectively solve the problem of gas lag. The invention proposes a gas cabinet temperature control system, the system includes: internal for releasing Wei The body of the gas cabinet, the heating/cooling device for adjusting the internal temperature of the gas cabinet body, the controller for connecting the heating/cooling device, and the force sensor disposed on the gas gas and tilted to the controller. The control unit controls the temperature of the light cooling cabinet body (4) according to the signal of the pressure sensor, and then heats or cools the potassium gas cylinder. According to the preferred embodiment of the present invention, the air shaft temperature control system, The heating/cooling material comprises: a first machine disposed inside the gas cabinet body: and ^= outside the cabinet body and connecting the second unit of the first unit, the person, and the heat pump connecting the music unit and the second unit . Among them, the heat pump in the twisting / 々 敦 敦 is connected to the above controller. ',,, according to a preferred embodiment of the present invention, the temperature control (four) system, the upper = includes the re-seven state between the pressure sensor and the gas cylinder output port, and is set in the gas cabinet body measurement Device. Bean towel H丨^ 卩 (10) is connected to the controller's gas sensible heat/cooling device, according to the signal of the body sensor, control the 加 clothing: £ Κ week the internal temperature of the whole body. According to the air brake temperature control system of the preferred embodiment of the present invention, the material of the gas woven 'internal material is pure M body, and the gas is in the atmospheric dust. Under the force of (4) which 3), the whole gas Ding Erqi (C4F6), or the gas is the second gasification gas, the temperature control of the gas cabinet of the invention (four) is powerful (2 cold 3 medium - can hold _ in the gas _ The heating is reduced by hot air, and the control cabinet=this degree. Moreover, the controller can sense the crying temperature control heating/cooling device according to the force of the cylinder outlet to adjust the inside of the gas cabinet body, and raise the gas cabinet by heating/cooling device. The body ^^ steel = 卜's t heat, can provide a stable (four) gas supply. The rolling mill Μ degree control (four) is unified in the gas enthalpy and downstream condensation problems, help to stabilize; - Gas cabinet temperature control method, the above gas cabinet temperature control system. The gas cabinet temperature control system includes 3 cabinets on the upper cabinet, and the gas cabinet body is connected to adjust the gas cabinet system. „17 Α, / cooling device, connection heating / The power of the cooling device i,,; 2 and: set: the output of the Kaoka bottle is connected to the controller i The crying ^ μ degree control method adjusts the heating/cooling device according to the pressure sensing to adjust the internal temperature of the air shaft body, thereby heating or cooling the gas _ watt. The gas cabinet temperature according to the preferred embodiment of the present invention The control method control system further comprises a milk sensor disposed inside the airbag body and coupled to the body sensor. When the gas sensor detects that the gas leaks, the hunting controller controls the heating/cooling crack to reduce the gas cabinet body. Internal 200826205 pt.ap773 22072twf.doc/g Temperature 'so that the saturation pressure in the gas cylinder is lower than the atmospheric pressure. The temperature control method of the month of the month, using the heating / cooling device can continue to cost _ to the lack of heating, job The ship carries out comprehensive heat. 1 The invention is controlled by (4) according to the pressure of the pressure finger, and the control ', ,, / cold part device' is used to adjust the temperature inside the gas cabinet body. In addition, when the gas cylinder, the internal gas When the sensor detects a gas leak, the controller can also switch the heating/cooling device to the cooling mode. When the temperature in the air core is lowered, the pressure in the gas cylinder is also followed. The invention is advantageous in preventing the gas from continuing and decreasing. Therefore, the present invention can provide a comprehensive heating mode of the gas cylinder to stabilize the gas supply amount and help prevent the gas from being trapped. The above and other objects, features and advantages of the present invention will become more apparent from the following description. The gas cabinet temperature control system cracking diagram is shown. Referring to Figure 1, the gas cabinet temperature control system 100 includes a gas cabinet body 1〇4, a heating/cooling device 106, a controller 1〇8, and a pressure sensor n〇. Fc reheater 112, and gas sensor 114. The interior of the gas cabinet body 104 is used, for example, for placing a gas cylinder. The gas cylinder outlet 102a is connected to the use end 116. Heating/cooling device == For example, connected to the gas cabinet body 104 to adjust the gas cabinet body] internal temperature. The controller 108 is, for example, connected to a heating/cooling device to control the addition or cooling mode of the cold heading device 106 to 200826205 pt.ap773 22072twf.doc/g. Placed on the gas cylinder output port 102a HJ: The detector 110 is, for example, 112, for example, two sub-coupled to the controller '(10). Reheater

The Li device 114 is disposed, for example, inside the gas cabinet body 104.

The sub-coupling is connected to the controller 108. II Package 2: For the gas cabinet device with continuous exhaust, its basic structure, including U in the inner center of the bracket (not shown). This

The gas stored inside the m wide 1Q2 is, for example, a gas. The low-vapor green gas is at atmospheric pressure such as trifluorocarbon gas, perfluorobutadiene, or gasification heating/cooling device 106, for example, by the first unit, the second unit y6b, and the heat pump i〇6c. Composition. The first unit 1〇6& is, for example, an indoor unit, which is disposed inside the cabinet body 1〇4. The second unit 1 is, for example, an external unit which is disposed outside the cabinet body 1〇4 and is connected to the first unit 1〇6a. The heat pump 106c is, for example, a variable frequency heat pump that simultaneously connects the first unit 106a with the first unit i〇6b. The controller log is connected to the heat pump 1〇6c. The heating/cooling device 丨06 is used to raise the internal temperature of the gas cabinet body 哙4, so that the heat pump 106c starts to operate, and the second unit 1〇6b recovers the indoor space, and the heat energy released by the factory or the factory building . Then, the heat energy recovered by the second unit 1〇6b is transferred to the first unit 106a, and the inside of the gas cabinet body 104 is heated by the fixed ventilation exhaust to adjust the internal ambient temperature of the cabinet body 1〇4. The internal temperature of the gas cabinet body 104 rises, and the gas in the gas cylinder 1〇2 can reach the saturation pressure, which helps the gas in the gas cylinder 1〇2 to change from a liquid state in the liquid state of the gas cylinder to the gaseous state. Moreover, the gas cylinder can be heated more efficiently by using an indirect comprehensive heating gas cylinder 102. Moreover, the heat pump 106c can transfer heat in a space at a certain temperature to a space of another temperature. Since the heating coefficient of performance (c〇p) is about 4 times higher than the general electric heat, the energy efficiency is higher than that of the conventional heating system, and the released cold energy can be recycled and reused. Therefore, the heating/cooling device 1〇6 can heat the inside of the cabinet body 104 more efficiently and reduce waste of energy. In addition, the ambient temperature of the 1〇4 N part of the gas cabinet body does not exceed the peach level, so the heat pump type enthalpy/cold unit 1〇6 can improve the safety of the gas cabinet system. The pressure sensor 110 is disposed, for example, inside the gas cabinet body 1〇4 and coupled to the controller 108. The controller 108 receives the signal from the pressure sensor 11A, based on the signal from the pressure sensor 11Q. That is, when the inside of the gas cabinet body 1〇4 is heated by the heating/cold cooling device 1〇6, the operation of the heat pump lG6e is controlled by the pressure of the detection body cylinder outlet port 1Q2a, and the adjustment of the first unit 1G6a is performed. The wind temperature, in turn, heats or cools the gas cylinder 102. In the aspect of f, when the gas phase pressure in the supply line is greater than or equal to, and, the vapor pressure, condensation tends to occur. The reheater 112, which is disposed between the pressure 1 and the gas cylinder wheel exit 102a, can be used to increase the temperature in the official road. Heating by the reheater 112 helps to avoid the generation of droplets' and reduces the problem of condensation at the rear end of the road. 5 carving gas " bean sensing 114 can detect whether there is inside the gas cabinet body 104. Since the pressure sensor 11 is connected to the controller 1〇8, the control unit 8 controls the heating/cooling device 200826205 pt.ap773 22072twf.doc/g 106 by the signal of the gas sensing 1 114. The heating/cooling device 16 can heat or cool the inside of the gas cabinet body to adjust the temperature of the gas cylinder 102.

In view of the above, the cabinet temperature control system 1 having such a configuration, since the controller 108 can control the heating/cooling t 106 via the signal of the pressure sensor 110. Therefore, the heating/cold device can efficiently heat or cool the inside of the gas cabinet body 104. In particular, the heating/cooling device 106 is provided with a second unit i〇6b capable of recovering and utilizing the heat energy generated in the room. Therefore, the heating/cooling device 1〇6 can increase the heating efficiency inside the gas cabinet body 〇4. Moreover, by adjusting the temperature inside the gas cabinet body 1〇4, the gas cylinder 1〇2 can be indirectly heated or cooled in a comprehensive manner, and the gas supply amount can be further stabilized. Next, the gas cabinet temperature control method of the present invention will be described. As shown in Fig. 1, when the gas is to be supplied to the end port 16, the switch of the gas cylinder 1〇2 placed inside the gas cabinet body 104 is opened, and the gas helmet is passed through the gas cylinder output port 102a and the reheater. 112. The pressure sensor 11 is supplied to the use end 116. The gas stored inside the gas cylinder 1〇2 is, for example, a gas with a lower vapor pressure. Therefore, the temperature of the gas cylinder body 1〇4 is controlled by the heating/cooling device 1〇6 to heat the gas cylinder, and the internal gas of the gas cylinder 102 is changed from a liquid state to a gaseous state, thereby providing a required gas supply amount. Then, the gas pressure of the gas cylinder output port l〇2a is detected by the force sensor 110. Pressure 11() transmits the detected pressure to controller 108. The controller 1〇8 compares this pressure with the standard value, and controls the heating/cooling device 1G6 based on the comparison result so that the heating/cooling device is 1% heated 200826205 pt.ap773 22072twf.doc/g or the cooling mode. For example, when the gas output pressure value measured by the ink force sensor 110 is less than the standard value, the controller 108 switches the heating/cooling device 1〇6 to the heating mode to increase the temperature inside the gas cabinet body 104. The gas cabinet body j〇4, the temperature of the part is increased, and the temperature of the gas cylinder 1〇2 is also increased, which helps the gas in the gas cylinder 102 to change from a liquid state to a gas state, thereby increasing the gas rotation amount. When the gas wheel pressure value measured by the pressure sensor 110 is greater than the standard value, the existing operating condition of the system is maintained. Conversely, when the gas output pressure value measured by the pressure sensor 110 is greater than the standard value, the controller 108 switches the heating/cooling device 106 to the cooling mode to lower the temperature inside the gas cabinet body 104. The internal temperature of the gas cabinet body 104 is lowered, and the temperature of the gas cylinder 1 cylinder 102 is also lowered, and the gas inside the gas cylinder 1 〇 2 is slowed from a liquid state to a gaseous state to reduce the gas output. *, on the other hand, the gas sensor 114 is disposed inside the gas cabinet body 1〇4 and is lightly connected to the controller. Once the gas in the gas cylinder 1 () 2 is externally piped to the inside of the gas cabinet body 1Q4, it can be immediately detected by the gas sensor 114 for proper disposal. The controller 108 controls the heating/cooling device 1〇6 by the signal of the gas sensor 114 to adjust the internal temperature of the body 104. For example, when the gas sensor 114 detects a gas leak inside the gas cabinet body 〇4, the signal is transmitted to the controller 1〇8. The controller 〇8 controls the heating/cooling device 1〇6 and immediately switches to the cooling mode to lower the internal temperature of the gas body 104. Gas cabinet body 1Q4 (four) ambient temperature reduction ^ body cylinder 102 is also fully cooled, Lang gas cylinder 1 〇 2 inside ^ 200826205 pt.ap773 22072twf.doc / g body saturation pressure will drop to atmospheric thickness six in the Qing / Gentry Xin 下. Since the chyle stored inside the gas cylinder 102 is formed by a liquid under a large milk pressure (4), it helps the pure money to be simplified (4). ', (4) Zhuang 罟 本 本 本 本 气 气 气 气 气 气 气 气 气 气 气 气 气 气 气 气 气 气 气 气 气 气 气 气 气 气 气 气 气 气 气 气 气 气 气 气 气 气 气 气 气 气 气 气 气 气Indirect comprehensive ΓΙΙ = small temperature difference and large heat exchange area. In the mouth of the limb cylinder, it can increase the gas supply of liquid gas. Moreover, the printing of the inner and the stable outlet is placed in the pressure sensing. Correction and gas cylinders can help reduce liquid _ generation, solve the cold energy in the back section, and high efficiency. Combined with the outdoor unit to recover the heat energy in the room, the dream heart rate "hustle" and reduce the energy wave. Therefore, the heat generation ~= = = ' is a comprehensive supply of gas cylinders to assist the supply of gas such as gas. The gas cabinet temperature control method of the present invention 蕻 system, the Lili~face heating of the gas cylinder indium 询 Γ air temperature control. The corrector «cylinder outlet body itr=' control heating/cooling device to adjust the gas planting part of the gas °2_卜' Μ body ❹ (9) 贞 _ have gas cabinet body and peptide leakage, the k number is transmitted to the controller. Control the cooling device to switch to the cooling mode, with Wei (4)::: to immediately heat / able to stop ^ ^ 0 缞 disturb temperature reduction, and safe. Although the present invention has been disclosed in the preferred embodiment as above, it is not limited to 200826205 pt.ap773 22072twf.doc/g, and anyone skilled in the art, The scope of protection of the present invention is defined by the scope of the appended claims, unless otherwise claimed. BRIEF DESCRIPTION OF THE DRAWINGS Figure 1 is a block diagram of a gas cabinet temperature control system in accordance with an embodiment of the present invention. [Main component symbol description] 100: gas cabinet temperature control system 102: gas cylinder 102a: gas cylinder output port 104: gas cabinet body 106: heating/cooling device 106a, 106b: unit 106c: heat pump 108: controller 110 Detector 112: reheater 114 · gas sensor 116: use end

Claims (1)

200826205 pt.ap773 22072twf.doc/g X. Patent application scope: 1. A gas cabinet temperature control system, comprising: a gas cabinet body for placing at least one gas cylinder therein; a heating/cooling device connecting the gas cabinet a body for adjusting an internal temperature of the gas cabinet body; a controller connecting the heating/cooling device; and a pressure sensor disposed at an output port of the gas cylinder and coupled to the controller, the control According to the signal of the pressure sensor, the heating/cooling device is controlled to adjust the internal temperature of the gas cabinet body to heat or cool the gas cylinder. 2. The gas cabinet temperature control system according to claim 1, wherein the heating/cooling device comprises: a first unit disposed inside the gas cabinet body; and a second unit disposed on the gas cabinet body Externally, and connected to the first unit; and a heat pump connecting the first unit and the second unit. (_ 3. The gas cabinet temperature control system according to claim 2, wherein the controller is connected to the heat pump. 4. The gas cabinet temperature control system according to claim 1 of the patent application, further includes The heat exchanger is disposed between the pressure sensor and the outlet of the gas cylinder. 5. The gas cabinet temperature control system according to claim 1, further comprising: a gas sensor disposed at The inside of the gas cabinet body is coupled to the 16 200826205 pt.ap773 22072twf.d〇c/g = set: the signal of the gas sensor, controlling the heating / mourning the internal temperature of the cabinet body. The gas cylinder (4)# ^^ temperature control system, gas. The low vapor pressure stored in the liquid state under atmospheric pressure 7 · The patent range of the patent 4, wherein the low vapor pressure f is the milk core temperature Control system, one of which is - 虱 乱 、, Wang 丁 butadiene or tungsten fluoride (VI) cabinet 夭 夭 檀 temperature control method, suitable for a gas cabinet system, the gas is connected to the gas cabinet / Use 1 set = heat / cooling set; connect 3 copies a controller for the internal temperature of the gas cylinder to be added to the -t outlet enthalpy device of the gas cylinder; the method includes: the pressure sensing to the controller is set to adjust the internal temperature of the air shaft body to heat Or cooling the gas, wherein: the air temperature control method according to item 8 of the patent scope, the clock system=the system further comprises being disposed inside the airbag body, and is transferred to the gas sensor to detect that the gas has a moon The gas pressure in the gas cylinder is lower than the atmospheric pressure in seven degrees. The gas cylinder temperature control method described in item 8 of the patent application is for storing the low steam in the liquid state under atmospheric pressure. 17 200826205 pt.ap / / J 22072twf.doc / g gas pressure gas. 11. The gas cabinet temperature control method according to claim 10, wherein the low vapor pressure gas is chlorine trifluoride or perfluorocarbon One of a diene or tungsten fluoride (VI). 18