TW200825824A - Method for checking design rule of layout and computer readable recording medium for storing program thereof - Google Patents

Abstract

A method for checking a design rule of layout and a computer readable recording medium for storing program thereof are provided. A layout comprising a plurality of layers is united so as to generate a flag layer to check the layout, through which any information about characters in the layout can be identified. Characters in the layout can be used in general command file to inspect the checking of the design rule for the purpose of saving time and manual effort.

Description

200825824 UMCD-2005-0072 19631twf.doc/n IX. Description of the Invention: [Technical Field] The present invention relates to a method for checking layout rule design rules, and in particular to a layer property according to a layout diagram To review the layout design rules. [Prior Art] In the design and development of semiconductor wafers, Design Rule Check (DRC) is a program that examines whether semiconductor integrated circuits follow topological lay out rules (TLRs). The topology rules will have unique rules depending on the process technology and the limitations of the instrumentation between the fabs. Please refer to FIG. 1, which is a conventional flow chart for examining whether the semiconductor integrated circuit conforms to the design method of the design rule. The steps are as follows: Port • First, as shown in step 110, provide one that contains several m厗 days, as shown in step 12〇, manually

The technology of the Spear King, the conditions of the fab, and the top layout of the H. Then, if the step is the same as the decision, the layout rule is correspondingly removed, and the corresponding command is taken from the database 140 determined in advance - (10). = (hidden mand file) The command block uses the design rule to check the U pair 2 = 15° is examined and inspected based on any design maps found during this process. in. - Check the results (10) 200825824 UMCD-2005-0072 19631 twf.doc/n On the traditional design rules riding (4), the process technology is designed with different command slots. Moreover, since the current household rule checking tool cannot provide information of a certain 3 heads and all the Chinese, it is necessary to manually select the corresponding life reading by the size of (4). It is a matter of life or money, or it is necessary to select a design rule from the command library according to the characteristics of the chip, and it will take a considerable amount of time.

The process that affects the entire ic design. SUMMARY OF THE INVENTION In view of the above, an object of the present invention is to provide a method for inspecting a layout design rule that can find out the characteristics of a certain layout picture and then enter the design rule check according to its characteristics. A further object of the present invention is to provide a computer readable recording medium whereby the recording medium finds the layout characteristics to be inspected and performs design rule checking in accordance with this characteristic. It is still another object of the present invention to provide a method for inspecting a layout design rule, inspecting a layer and comparing it to a flag layer, and performing an identification rule based on the size of the flag layer pattern. Based on the above and other objects, the present invention provides a method for checking the layout design rules to examine whether a layout conforms to design rules. The layout design rule checking method of the present invention includes a layout map having a plurality of layers, a flag layer obtained by combining some or all of the layers in the layout map, and checking the layout map according to the flag layer. 5 200825824 UMCD-2005-0072 19631 twf.doc/n A method for checking a layout design rule according to a preferred embodiment of the present invention, wherein if a layer is compared to a flag layer and the result is an empty set, it represents The layer does not exist in the layout. On the other hand, if the result of the comparison is a non-empty set, it means that the layer exists in the layout. Among the existing layers, the layer above the top is the top layer of the layout, and the remaining layers are called internal layers. The design rule check will check whether the top and inner layers violate the design rules with different rules. According to a preferred embodiment of the present invention, the layout pattern design rule checking method compares the layout map with the flag layer to determine the top layer of the layout map. The first step is to set the graphic T〇PMn equal to the layout image. The graph of the maximum number of layers within. The second step is to check if the flag layer BULK and the pattern TOPMN& have no intersection, then set the pattern N0JV [N_BULK is the flag layer BULK pattern, otherwise set n〇_MnJBULK to be an empty set. The third step is to check each layer of the layout map one by one from top to bottom. If the layer MEi of the i-th layer in the layout has an intersection with the graphic NO_Mi+1_BULK, set the graphic TOPMi to the graphic MEi of the i layer, otherwise set the TOPMi For an empty set, i in the third step is an integer greater than 〇 and less than N. If the graphic NOJVIi+1JBULK does not intersect with the graphic TOPMi, the graphic NOJ^JBULK is set equal to NO_Mi+1JBULK, otherwise the NOJVIi-BULK is set to an empty set. The final step is to combine the graphs TOPMn to TOPMj to obtain the top layer of the layout graph, where j represents the minimum number of layers in the layout that may be the top layer. 6 200825824 UMCD-2005-0072 19631twf.doc/n The method for checking the layout design rule according to the preferred embodiment of the present invention can determine the large-scale identification according to the comparison result between the flag layer and a reference size. The identified rule or small size identification rule is above this layout design rule check. The results obtained by comparing the flag layer with the layout map will be used as parameters in a general command file for proper design rule checking. From another point of view, the present invention proposes a computer readable recording medium which can be stored by a computer in a computer. The program in this recording medium will include an instruction to read a layout map containing several layers, a flag layer obtained by combining several or all layers in the layout map, and checking whether the layout map is followed according to the flag layer. Design rules. According to a preferred embodiment of the present invention, the computer can read the recording medium, and the program of the media towel includes instructions for comparing the layer of the layout towel with the flag layer, and if the comparison result is an empty set, the representative The layer does not exist. If the result of the flag layering is a non-empty set, it means that the layer exists in the layout: the top layer in the existing layer will be regarded as the top @ layer of the layout, and the remaining layers will be It is the inner layer of the prefecture. The design rule check will depend on whether the layer is the top layer and different inspection rules. According to a preferred embodiment of the present invention, the computer can read the recording medium, and the media towel sets the layout G and the flag layer to the first fingerprint of the most dead layer of the layout map. The largest possible number of layers in this layout. The second instruction is to check if the flag layer bulk 200825824 UMCD-2005-0072 1963 ltwf.doc/n and the graphic TOPMN do not intersect, then set the pattern NO_Mn_BULK as the pattern of the flag layer BULK, otherwise set NO_Mn_BULK to be an empty set. The third instruction is to inspect the layers of the layout map one by one from top to bottom. If the i-th layer layer MEi in the layout map has an intersection with the graphic NO_Mi+1_BULK, the graphic TOPMi is set as the graphic of the i-layer MEi, otherwise the TOPMi is set. An empty set, in this step i is an integer greater than 〇 and less than n. If the shape NO-Mi+1-BULK does not intersect with the graphic TOPMi, the setting is equal to NO-Mi+1-BULK, otherwise the NO-Mi-BULK is set to an empty set. The last instruction is to associate the graphs t〇PMn~TOPMj to obtain the graph of the top layer in the layout graph, where j is the minimum value of the number of layers in the layout that may become the top layer.

According to a preferred embodiment of the present invention, the computer can read the recording medium, and the program instructions in the above media also include the flag (4)_融一I

The program in the recorded media checks by comparing the layout and the number of flags and using the parameters in the command file to make the design parameters to obtain the required parameters.

Compare these layers with the flag layer to check the layer size and compare the pattern size of the flag layer with a reference size to perform the authentication rule. According to a preferred embodiment of the present invention, a method for checking a layout design rule, wherein comparing the layers to the flag layer and inspecting the layers includes comparing the layers in the layout with the flag layer respectively If the comparison result is an empty collection, it means that this layer does not exist in the layout. In all, among the layers in the layout, the top layer is called the top layer of the layout, and the remaining layers are called internal layers. The top-level rule check will be used for the design rule check of the top layer, while the internal rule check is used to check the inner layer inside the layout. The invention adopts a layout drawing design rule checking method, which obtains the characteristics of the layout picture according to the flag layer generated by the layout drawing, and then generates appropriate parameters according to the content characteristics thereof, and is used in a general command file for setting. 1 check. This method eliminates the need to manually select the command file to be used to check the design rules according to different process technologies or wafer characteristics. The above and other objects, features, and advantages of the present invention will become more apparent from the understanding of the appended claims. [Embodiment] Embodiment 2 FIG. 2 is a flow chart showing a method for inspecting a layout design rule according to a preferred embodiment of the present invention. As shown in FIG. 2, the method mainly utilizes a layout design rule checking method and a general command file 24〇, for a 200825824 UMCD-2005-0072 1963 ltwf.doc/n, for example, an overall distribution system (glGbal distribmiQn system , in the format of the GDS) format riding design check (4), and the result of the rule check 260. First, as shown in step 210, a layout is provided, which has a majority of layers. In this real _ towel, this layout format file. Part or all of the layer of the figure). In this example, the flag will be called BULK, and the layout is combined as shown in step 220 to obtain a flag layer (Hag all the layers in the layout map to obtain a layer 0. 230, according to the banner layer layout diagram, where 'can be based on the needs of the user' is performed in step 230, and the item can be checked. The controller can write the command to check the item in advance to the command floor of the pass =. 3 is a flow chart showing the sub-steps in the step (10) of the ship according to the present invention. Please refer to FIG. 3. As shown in the step, compare the layers of the layout with the flag layer. If the comparison between the -® layer and the flag layer is an empty set, then the layer is an empty layer (step 320); if one of the layers is a layer, the flag layer is less than the light collection. The result is that the top layer of the non-empty 2 layer is called the most layer of the layout map, and the other layer that is present and not the top layer is the map layer D layer (step 33G). , will be a top-level rule 200825824 UMCD-2005-0072 19631twf.doc/n The uppermost layer of the floor plan is checked (step 340), and the inner layer of the floor plan is checked with an internal layer rule (step 350). Please refer to FIG. 3 and FIG. 4. In step 330 of FIG. 3, the layout is discriminated. The detailed method of the uppermost layer of the figure is as follows: First, the graphic T〇pM\ is equal to the graphic MEN of the Nth layer in the layout, where N is the maximum number of layers of the layout (step 410). Step 420 is to check if If the flag layer BULK does not have an intersection with the graphic T〇PMn, the map is set; NO_MN_BULK is equal to the pattern of the flag layer BULK, otherwise the pattern NO_MN-BULK is set to be an empty set. In step 430, if If the layer MEi of the i-th layer in the layout map intersects with the pattern NO-Mi+1JBULK, the graphic TOPMi is set equal to the graphic MEi of the layer of the i-th layer in the layout image, otherwise a and the graphic TOPM{ is an empty set. An integer greater than 〇 and less than n. Step 440 is to check that if the pattern NO-Mi+1-BULK does not intersect with the graphic TOPMi, then the graph no-Mi-BULK is equal to the pattern NO-Mi+1-BULK, Otherwise, set the pattern NO_Mi-BULK to be an empty set. The generated pattern TOPMi will be equal to the pattern of the layer i only when the value of i is not the highest number of layers in the layout map, otherwise it will be set as an empty set. In step 450, the joint pattern TOPMN~TOPMj can obtain this. The graph of the top layer in the layout diagram, where j represents the minimum value of the possible range of the top layer in the layout diagram. In this layout diagram design rule checking method, the layout diagram can also be found by comparing the flag layer with the layout diagram. The top-level graph of Central Africa. First check whether the graph MEi of the i-th layer in the layout map and NO_Mi+1J3ULK intersect. If there is no intersection, the graphic COMMU is set equal to the graphic MEi, and if there is an intersection, 11 200825824 UMCD-2005-0072 19631twf.doc/n sets the COMMi to be an empty set. The meaning of COMMi's graph is not equal to that of an empty set. This is the graph of the layer i that is not the topmost layer in the layout. Where i is an integer greater than 0 and less than N.

If N is the maximum number of possible layers for this layout. Let the graph Lsiv^q be equal to the graph of the N-1th layer in this layout. This layout design check method is checked from the N-1th layer to the first layer one by one, if the graph c〇M]VL

If 1C (K is an integer greater than 〇 and less than N-1) and the graph NOJVIk+2JBULK intersects, set LSMk equal to COMMk, otherwise set LSMk to be an empty set. Only the graph LSMk corresponding to the layer below the top layer in the layout graph will not be an empty set. Therefore, the LSMm~LSMi can be used to obtain the graph below the top layer in the top layer of the layout. The following will take an example of a layout that can accommodate up to 11 layers. FIG. 5 is a diagram showing an example of a design rule check command file for the Calibre program of the Mentor company according to an embodiment of the present invention. Please note that Figure 5 only shows part of the general command file to facilitate the clear description of the embodiment. The flag layer BULK is made to be a union of the metal layer 1 to the metal layer 11 in the layout as shown in step 220 of Fig. 2 previously described. Referring to the command code block 51 in FIG. 5, if the graphic information of the uppermost layer is to be known from the layout of the GDS format, the first step is to set the graphic TOPMn to the graphic of the nth metal layer MEn. Next, the contents of TOPMi and NOJVti_BULK are set as described in steps 420 to 440 of Fig. 4, where i is an integer greater than 〇 less than 11. In this embodiment, it is assumed that the uppermost layer in the layout map is the 10th metal layer, and the first to third metal layers must be stored in the process. 2008 200825824 UMCD-2005-0072 1963 ltwf.doc/n Possible range Therefore, in the layout map (GDS file), the minimum value j is 4 as the top picture. Θ曰 Please refer to Fig. 4 and Fig. 5' at the same time as step 41() to step 45〇. After executing the “t〇PM11 = copyme11” command, the graphic τ〇 is set to be the same as the Η metal (4) _, * set. Since the flag layer ancestors and the _TOTMll^ of the U layer are empty sets, it is impossible to generate an intersection, so "N〇 Mu bulk is executed.

=BULK NOT INTERACT T〇PMl i" command, one does not contain

The flag layer NO_M„__BULK of the 11th metal layer will be set to the BULK metal layer, that is, the 10th metal layer must be intersected with the pattern NO-Mn-BULK which has been set to BULK, so the rTOpM1〇= After the ME10 INTERACTNO-Mil-BULK command, the TOPMl will be itself. In the present embodiment, it is assumed that the uppermost metal layer in the layout map is the first 设为 is set as the pattern ME10. In addition, since there is an intersection between NO-MuJBULK and TOPM10, NOJVIiBULK will be set to an empty set after executing the "NO M10 BULK = NO-Mil-BULK NOT INTERACT TOPM10" command. After executing the "TOPM9 = ME9 INTERACT NOJVI10 JBULK" command, the pattern ME9 of the ninth metal layer and the NO_M10_BULK of the empty set in this example do not produce an intersection, so the TOPM9 will be set to an empty set. The value of TOPM8~TOPM4 is obtained by analogy. In the method of comparing the flag layer with the layout map to obtain the uppermost layer, in this example, only the TOPM10 corresponding to the uppermost layer 10 is designated as ME1(), and the graphics TOPM4 to TOPM9 and TOPMu are all set to be empty. set. Combine the graphic TOPM4 to the graphic 13 200825824 UMCD-2005-0072 1963 ltwf.doc/n TOPMU to get the image as the top layer in this layout. For the above example, please refer to the command code block 52 of Figure 5. After executing the "COMMIO = (ME10 NOT INTERACT NO - Mil-BULK) NOT TOPMIO" command, the pattern of the first metal layer in this layout will intersect with the pattern NO_MU-BULK, so the graphic COMMag〇 is an empty set. And the ninth metal layer and the 集合_Μι〇_Βυχκ ρ with the empty set do not produce an intersection, so after executing the "COMM9 = (ΜΕ9 NOT INTERACT NO-M10-BULK) NOT TOPM9" command, the graphic COMM9 will be set to the figure of the 9th metal layer ME9. By analogy, the command code block 520 can be pushed down to see if the other layers are internal layers in the layout. Referring to the command code block 540 of FIG. 5, the command "LSM10 = COPY COMM10" is to set the LSM 10 to the graphic COMM10, which is an empty set in this embodiment. Since the graphic COMM9 (here, the ME9 graphic) will intersect with NO-Mu-BULK, the graphic LSM9 is the comm9 graphic after executing the "LSM9 = COMM9 i INTERACT NO-MilJBULK" command. Since the graphic comm8 (here, the ME8 graphic) and the graphic NO_M1GJBULK (the empty set here) do not produce an intersection, the value of the graphic LSM8 will be set after executing the "LSM8 = COMM8 INTERACT NOJV[10_BULK" instruction. Empty collection. By analogy, the pattern LSMi corresponding to the next layer of the layout (the upper layer is assumed to be the 10th metal layer ME1() in this embodiment) will be equal to the pattern COMMi, and the LSMk of the remaining layers will be 200825824 UMCD-2005-0072 19631 twf.doc/n

Empty collection. Therefore, in this example, the lower layer of the uppermost layer in the LSM decoration map can be obtained as the ninth metal layer 9). The suction pattern (in this embodiment, the command code block 52 〇 and the command code block 53 are assumed in FIG. 5 to automatically analyze the uppermost layer in the layout; the layer, the fixed interposer (10) (10)), and the internal via plug. Information. The command stone block 550 is the previously obtained variable value.

In the required parameter position, the conventional technique must be used to open the layout slot of the GD s format, and the layout is checked (4) - _ is the uppermost metal layer. Take the 1P5M process as an example. 'Users need money to confirm this layout. ^ The layer is placed on the 5th metal layer, and then manually selected from multiple (command files) for 1? The command building performs the design rule check on the layout diagram. The embodiment of the invention only needs to use a single command. The second layer is automatically judged by the second layer, so the invention can be automatically designed without manual means. The rule check: The user can perform other check items in step 230 according to his needs, and write the command of the item to be checked in advance to the common command file. & 6 The sub-steps in step 230 are not described in accordance with an embodiment of the present invention. The process is as follows: Figure 2 and Figure 6. Step 220 combines some or all of the layers of the layout to obtain a flag layer. This example is the cloth 15 200825824 UMCD-2005-0072 19631twfdoc/n The king layer in the figure is combined to obtain the flag layer called NUB. In Figure 2, in step 23, the layout is checked according to the flag layer, which can produce the corner of the slab, rule (dieC 〇 Rnermle) The required information. The step of Figure 6 is to compare the flag layer obtained by all the layers in the layout_ with the winter layer. As shown in step 620, when the size of the flag layer is larger than this For the tea test size, a large size rule is determined. If the size of the flag layer is smaller than the reference size, a small size is paid (such as step 63G). The method for applying the identification rule is first to set the picture, B. - BCQR is equal to the corner pattern of the flag layer, and then the layout %, the graph % of the hth metal layer is intersected with the graph B - BC 〇 R, and the intersection result is set to the graph METhCA, where h is greater than 〇 and less than The integer of N+1 'n is the maximum number of layers in the layout diagram. Finally, check whether there are some graphics in the graph METhCA that are not arranged at a 45-degree angle. Take a layout diagram with a maximum number of layers as 6 as an example. In the embodiment of the present invention, an example of a design rule check command file used in the Cadence DRACULA program. As shown in the command code block 71, first, s-PSUB and B-PSUB are set according to the size of the flag layer PSUB. Value. In this case the flag The standard layer PSUB is a combination of the layers 1 to 6 of the figure 6. If the size of the flag layer PSUB is between 〇~i〇〇mm2, the graphic s_psuB is set to PSUB, and the graphic B-PSUB is an empty set; On the other hand, if the size of the flag layer exceeds 100 mm2, the graphic B-PSUB will be set as the flag of the flag layer psuB and the graphic S-PSUB is an empty set. The command code block 72 is the flag 4 layer PSUB The size identification rule 'is the program part 16 200825824 UMCD-2005-0072 19631twf.doc/n when the size of the flag layer psuB exceeds 100 mm2. The command code 721 is a range in which the corner pattern B_BCOR is specified according to the graphic B-PSUB. In the present embodiment, BJBCOR is a pattern of four squares each having a side length of 340 um from the inner corner of four dies. The command code block 723 is a graph in which the graphic METKA to the graphic METfA are respectively set to intersect with the BJBCOR in the layer 1 to the layer 6. The command code block 725 is a pattern that is arranged at a 45 degree angle from the graphic METiCA to the graphic MET0CA. The command code block claw finds the graphic METiCA to the graphic which is not arranged at a 45 degree angle in the graphic MET^CA, and regards it as an error and outputs it. The command code block 730 checks for errors in accordance with the small size authentication rule using a similar process. The command code 731 is a range of the corner pattern S-BCOR used in setting the small-size clock rule check. In the present embodiment, the pattern S-BCOR is a pattern composed of four squares of the legs of the (2) legs from the corners of the four wafers. The command code blocks 733, 735, and 737 are patterns in which the layer i to the layer 6 are checked, and the corner _ intersection # is not arranged at a 45-degree angle, which is regarded as an error and is rotated. \ 啼 必 must shoot the layout icon in the GDS format, and then manually determine the size of the layout map ' And the results of the domain readers read the command file (four) capacity, so that the corresponding size of the reward. In Yu Zhilin, the invention can automatically determine that the layout map is small after executing the command code block 71〇. If the size of the flag layer is between G and 2, due to the collection, the verification result will be affected by the large-scale verification of the command code block 72; otherwise, if the flag is 200825824 UMCD- 2005-0072 19631twf.doc/n The layer size exceeds i〇〇mm2. Since the graphic SJPSUB is an empty set, after performing the rule design check and executing the small-size authentication rule described in the command code block 73(), Will affect the inspection results. Different from the prior art, the present invention does not need to manually check the size of the layout map, and only needs to use a single command file, and can be used for the layout check whether the rule should be checked with a large size or a small size. checking. Third Embodiment \ The user can perform other inspection items in step 23 of FIG. 2 according to his needs, for example, checking whether a specific layer exists in the layout diagram, and writing the command to check the item in advance. The order is broadcast 24 times. A flag layer generated by grouping all the layers in the layout can be used to check if a particular layer exists in this layout. An example of checking whether the layer NPLUS exists in the layout of the -GDS format will be exemplified below to illustrate another possible embodiment of the present invention. Figure 8 is an illustration of a design rule check command file for the Mentor Calibre program in accordance with an embodiment of the present invention. Referring to Fig. 8, in order to clearly explain the gist of the embodiment, Fig. 8 only shows part of the contents of the general command file. The command code block 81 defines ACTIVE-NW and ACTIVEjS according to the relationship between the diffusion DIFF pattern and the N-well NWEL pattern, and then deviates from the relationship between the ACTIVE-NW and the ACTIVE-Ps and the layer Npujs, respectively. NDIF and NTAP. As shown in the command block 82〇, if the layer NPLUS is combined with a flag obtained by all the layers in the layout map, 200825824 UMCD-2005-0072 1963 ltwf.doc/n BULK, the layer NPLtjS exists. In this layout, therefore, the graphic X is set as the graphic of the flag layer BULK; otherwise, if the layer NPLUS and the flag layer BULK do not intersect, it means that the layer NpLUS does not exist, so the graphic X is set to an empty set. The command code block 830 is used to output the check result. If the graphic ndif has an intersection with the graphic X, the graphic NDIF is deducted from the image of the layer NPLUS and output. If the graphic NTAP and the graphic X intersect, the graphic NTAP is subtracted from the graphic of the layer NPLUS and output. Therefore, the use of the inspection layer NPLUS is the result of the transition to the layout towel (the result of the inspection is stored in a region variable X), and the two definitions of the NDIF and NTAp are defined in the command code block 81G. Perform design rule checks. In order to check whether a certain layer exists in the layout map, the prior art needs to open the layout of the GDS format, and then the layout_ must be checked using the manual = method. However, compared with the known technology, Ben Ming uses a banner sound generated by the associated sets of layers in the layout.

It is true that it is determined whether a certain (four) layer exists in this figure, and the inspection result is automatically output. Q Fig. 9 is a program flow (4) of the layout design rule check according to the preferred embodiment of the present invention. In the recording medium, the recording medium can be a hard disk, a compact disc or a magnetic disk. For example, 200825824 UMCD-2005-0072 19631twf.doc/n Referring to FIG. 9, this program can be used to check in this embodiment. The layout of the GDS format conforms to the design rules. As shown in step 910, the program will read the layout map containing a plurality of layers. Step 920 shows that the program can connect several layers or all layers in the layout diagram. The set is to obtain a flag layer. In step 93, the layout layer is checked according to the flag layer to follow the design rule. The above steps 920 and 930 can be implemented by referring to the above embodiments, and therefore are not described herein. The conventional technology needs to open the layout file of the GDS format, and obtain the information of the layout map by manual inspection, and then find out the applicable life to check the design rules according to the information. According to the technique of the present invention, the comparison between the flag layer and the layout map can provide information such as the layer below the top layer of the top layer 'internal layer' of the layout layer, and the layer layer can be used to bully the layout. _ 验 大 财 是 是 是 小 小 小 小 小 小 小 小 小 小 小 小 小 小 小 小 小 小 小 小 小 小 小 小 自动 自动 自动 自动 自动 自动 自动 自动 自动 自动 自动 自动 自动 自动 自动 自动 自动 自动 自动Diagram. The layout of the layout diagram design rules and the number of procedures is as follows: Steps 1〇10 are provided - one contains more than all Qi, α θ. Step ig2g is based on this layout Figure, the layer in which p or dip is performed to obtain the -flag layer. Step 20 200825824 UMCD-2005-0072 1963 ltwfdoc/n == The layers of the flag and the handle, and check this The layer 1 step 4〇 is to compare the pattern of the flag layer with a reference size. The above steps _, and 1 〇 40 can be referred to the above embodiments, so Not here 赘 = as described in the prior art, f manually review the layout, = find Brother turned over the layout of the order of the Wei line rules. This hairbe = can be compared by the comparison of the layer and the flag layer, the parameters of the design file when the design check is 'like the largest layer, the largest_lower ~ s graphics 'the graphics of the internal layer, or the range of the size of the layout, etc., to automatically carry out the design rule check., on the silk, in the layout control rule checking method of the present invention, and can be read, recorded media, By comparing the flag layer and the layout map, the parameters required for the early-command file are generated, and the corresponding design rule check is performed according to the parameters. The automated result can not only save the time, but also It can reduce the errors caused by manual discrimination and enter the production efficiency of the semiconductor industry. The present invention has been disclosed in the above preferred embodiments, and it is not intended to limit the invention, and it is possible to make some modifications and refinements without departing from the spirit of the invention. The scope of the invention is defined by the scope of the appended claims. [Simple Description of the Drawings] Figure 1 shows the flow chart of the conventional layout drawing design rule check. 21 200825824 UMCD-2005-0072 1963 ltwf.doc/n Figure 2 and Figure 1D show the flow chart of the layout design rule checking method. FIG. 3 is a flow chart showing a method for inspecting a layout map according to a flag layer in a layout drawing design rule checking method. Figure 4 depicts a flow chart not comparing the layout and flag layers to obtain the top layer method. 5, 7, and 8 illustrate an example of a program design check rule. FIG. 6 is a flow chart showing a method for determining a dimensioning rule. Figure 9 is a flow diagram of a program stored on a computer readable recording medium and functioning to check whether a layout diagram follows design rules. [Main component symbol description] 110~160: The steps of the conventional layout design rule check. 210 to 260 - The steps of the layout design rule checking method of the preferred embodiment of the present invention. 310 to 350: The steps of the method of checking the layout map by the flag layer in the preferred embodiment of the present invention. 410 to 450: The preferred embodiment of the present invention compares the floor plan and the flag layer to obtain the steps of the top layer method. 510, 520, 530, 540, 550, 710, 720, 721, 723, 725, 727, 730, 731, 733, 735, 737, 810, 820, 830: a program area according to a preferred embodiment of the present invention Piece. 610-630: The steps of the method for determining the size identification rule described in the preferred embodiment of the present invention. 22 200825824 UMCD-2005-0072 19631 tw.doc/n 910 930 930 - The steps of the preferred embodiment of the present invention are stored in the recording medium and function to check whether a layout conforms to the design rules. '1010 to 1030: steps of the layout pattern design rule checking method of the preferred embodiment of the present invention. Γ 23

Claims (1)

200825824 UMCD-2005-0072 19631twf.doc/n X. Applying for the patent garden: 1.- The layout design depends on the inspection material, (4) Checking the layout, the method includes: providing the layout, wherein the layout includes a plurality of layers; a portion of the layers of the layout map or all (four) layers are joined to obtain a flag layer; and the layout map is checked according to the flag layer. Γ , 2 · If you want to check the layout design rules mentioned in item 1 of the patent application scope, the layout map is a file in the GDS (global distribution system) format. 3. If the application refers to the layout design of the layout item, the flag layer is the union of all the layers in the layout. 4) If the layout drawing design rule is checked according to the scope of the patent application, the step of checking the layout according to the flag layer includes: respectively performing the layers of the layout map and the flag layer Comparison: χ If the comparison between a layer in the layer and the flag layer is an empty set, it means that the layer is an empty layer; and ^, if a layer in the layers and the flag layer The comparison result is not an empty set, and in the layers in which the comparison result is a non-empty set, the layer of the layer is the uppermost layer in the layout diagram, and the inner layer in the layout diagram is below; the layer is Examine the topmost layer in the layout with a top-level rule; and examine the internal layers in the layout with an internal layer rule. 24 200825824 UMCD-2005-0072 1963 ltwf.doc/n 5. The method for checking the layout design rules described in claim 4, wherein the layers of the layout are compared with the flag layer respectively The step includes: setting a graph topmn equal to a pattern of the Nth layer layer MEn in the layout diagram, where N is the maximum number of layers of the layout map; if the flag layer BULK and the graphic TOPMN have no intersection, setting the map y N〇JV[n-BULK is equal to the pattern of the flag layer BULK, otherwise the graphic NO_MN-BULK is set as an empty set; if the i-th layer layer MEi and the graphic N〇JV[i+1__BULK in the layout map have In the intersection, the graphic T〇pMi is set equal to the graphic of the 苐i layer MEi in the layout, otherwise the graphic TQp]^ is an empty set, where i is an integer greater than 0 and less than N; if the graphic NO_Mi+1 If there is no intersection between a BULK and the graphic TOPMi, the graphic NO_Mi-BULK is equal to the graphic NOJMi+1-BULK, otherwise the graphic NO_MuBULK is set as an empty set; and the graphics TOPMN~TOPMj are combined to obtain the uppermost layer in the layout picture, Where j is represented as the top in the layout The minimum possible range of layers. 6) The method for checking a layout design rule according to item 5 of the patent application scope, wherein the step of respectively comparing the layers of the layout map with the flag layer further comprises: if the i-th layer in the layout diagram If the layer MEi and the graphic NO JV[i+1-BULK have no intersection, the graphic cOMMi is set equal to the graphic of the layer, otherwise the graphic COMMi is set as an empty set; 1 25 200825824 UMCD-2005-0072 19631twf.doc/n where the graphic COMMU indicates The graphics in the layout diagram that are not the topmost layer. 7. The method for checking a layout design rule according to item 6 of the patent application scope, wherein the step of respectively comparing the layers of the layout map with the flag layer comprises: the undetermined graphic LSM>m is equal to the layout In the figure, the graph of the N-1th layer layer MEn]; and the intersection of the θ right graph COMMk and the graph NOJV[k+2—BULK, the graph LSMk is equal to c〇MMk, otherwise the graph LSMk is set to an empty set, wherein k is an integer greater than 〇 and smaller than the team ;; where the graphic LSMk represents the graphic of the layer below the uppermost layer in the layout. 8. The method for checking the layout rule of the first item according to the first item of the claimant, wherein the step of checking the layout according to the flag layer comprises: comparing the graphic size of the flag layer with a reference size; If the size of the flag layer is larger than the reference size, a large size identification rule is performed; and when the size of the flag layer is smaller than the reference size, a small size identification rule is performed. 9.^t Please refer to the method for checking the layout design rule described in item 8 of the patent scope, wherein the large-scale identification rule includes: setting the graphic B_B〇) R is equal to the corner pattern of the flag layer; Layer layer MEh graphics and graphics - the parent set, and set the intersection result to the graphic METhCA, where 26 200825824 UMCD-2005-0072 19631twf.doc/nh is an integer greater than G and less than N + l ' * N is the layout The maximum number of layers; and the shape inspection pattern METhCA 以 silk to 45 degrees Xiao Qi part of the figure 10. If you apply for the full-time layout of the first floor layout design rule inspection method, according to the flag layer to check the layout The steps include: - if the flag layer intersects with one of the specified layers in the layout, - The program processes the layout®, and closes the layout of the second program. /11. A computer-readable recording medium for storing a program executable on a computer system, the program for checking - a layout diagram, and the second instruction includes the following instructions: ° A reading the layout map, wherein The layout map includes a plurality of layers; some or all of the layers of the layout map are collected to obtain a flag layer; and the layout map is checked according to the flag layer. 12. The computer-readable recording medium according to claim 11, wherein the layout is GDS (gl〇bal distributi〇n, a long-form file. ° 13) as described in item n of the patent application scope The computer can read the record 'where the flag layer S is the union of all the layers in the layout diagram. M. The computer-readable recording medium as described in claim 11 of the patent application' ^ is checked according to the flag layer The instructions of the layout diagram include: respectively comparing the layers of the layout map with the flag layer: 27 200825824 UMCD-2005-0072 1963 ltwf.doc/n If a layer in the layers and the flag If the comparison of the layer is empty, it means that the layer is an empty layer; and if the comparison between a layer in the layer and the flag layer is not an empty set, the comparison result is non-empty. Among the layers of the collection, the uppermost layer is the uppermost layer in the layout, and the other layers below it are the inner layers in the layout; 曰... check the top layer in the layout with a top-level rule ; and check with an internal layer rule The internal layer in the layout diagram. 15. The computer-readable recording medium of claim 14, wherein the instructions for respectively comparing the layers of the layout map with the flag layer include: ^ setting a graphic T0PMn is equal to the pattern of the Nth layer layer MEn in the layout diagram, where N is the maximum number of layers of the layout map; if the flag layer BULK has no intersection with the graphic TOPMN, the setting pattern N〇-MnJBULK is equal to the flag The pattern of the layer BULK, otherwise the graphic ncLMnJ3ULK is set as an empty set; if the i-th layer MEi in the layout has an intersection with the graphic NG-Mw-BULK, the setting graphic TOPMi is equal to the ith layer MEi in the layout Graphic, otherwise set the graphic TOPMi to be an empty set 'where i is an integer greater than 0 and less than N; if the graphic NO_Mi+1JBULK has no intersection with the graphic TOPMi, the set graphic NOJMLBULK is equal to the graphic NO_Mi+1_BULK, otherwise the set graphic NOjviiJBULK is an empty set; And 28 200825824 UMCD-2005-0072 1963 ltwf.doc/n The map is opened y TOPM=~TOPMj to obtain the top layer in the layout, where j is represented in the layout The minimum value of the uppermost layer. 16. The computer-readable recording medium as described in claim 15 of the patent application, wherein the layers of the map and the flag are respectively included: T Γ The i-th layer layer MEi in the layout map has no intersection with the step NO_Mi+1-BULK, and the set graph is equal to the graph of the layer ^, otherwise the set graph C〇MMi is an empty set; 曰1 where the graphic COMMi indicates the layout map The belt of the top layer of Central Africa. 17. The computer-readable readable two-body as described in claim 16 of the patent application section compares the layers of the layout map with the flag layer, and sets the graphic LSMNel to be equal to the pattern of the Nith 円MEg in the layout map. And the θ layer if the graphic COMCOM and the graphic N〇—Mk+2—BULK have an intersection, the shot pattern LSMk is equal to C〇MMk, otherwise the set graph B is called empty=close, where k is greater than 〇 and less than the team Integer; Wood where the graphic LSMk represents the layer below the topmost layer in the layout. 18. The computer readable recording medium of claim n, wherein the instruction to check the layout according to the flag layer comprises: comparing the graphic size of the flag layer with a reference size; 29 200825824 UMCD -2005-0072 19631twf.doc/n If the size of the flag layer is larger than the reference size, a large-scale identification rule is performed; and if the size of the flag layer is smaller than the reference size, a small Dimensional identification rules. 19. The computer-readable recording medium according to claim 18, wherein the large-scale identification rule comprises: setting a graphic BJBCOR equal to a corner pattern of the flag layer; and setting a second layer of the MEh in the far layout The intersection of the graphic and the graphic B-BCOR, and setting the intersection result as the graphic METhCA, where h is an integer greater than 〇 and less than N+1, and N is the maximum number of layers of the layout; and checking whether the graphic METhCA is not Part of the graphic with a 45 degree angle configuration. 20. The computer-readable recording medium of claim n, wherein the instruction to check the layout map according to the flag layer comprises: if the flag layer intersects with a designated layer in the layout map, The floor plan is processed in a first program, otherwise the floor plan is processed in a second program. a method for inspecting a layout design rule for inspecting a layout diagram. The method includes: providing the layout map, wherein the layout map includes a plurality of layers; and some or all of the layers of the layout map Performing a union to obtain a flag layer; comparing the layers with the flag layer, and checking the layers accordingly; and eight 30 200825824 UMCD-2005-0072 19631twf.doc/n than the car flag layer The graphic size and a reference size are used to perform an identified rule. 22. If the layout design rule check mentioned in item 21 of the patent application scope is checked, 'the layout picture is the file of GDS ( gl〇bal along the system) format. 23. If the layout design rule check mentioned in item 21 of the patent application scope is checked, the flag layer is the union of all the layers in the layout. f. 24. The layout design rule check as described in claim 21 of the scope of the patent application, wherein the steps of checking the layers of the layer and the flag layer are included: The layers are compared with the flag layer; 比较 the comparison between a layer in the right layer and the flag layer is empty wood 5, indicating that the layer is an empty layer; a certain layer in the layer - the layer and If the comparison result of the flag layer is not =, the result is a light collection of the layer towels, the uppermost layer is the uppermost layer in the layout picture, and the other layers below it are the cloth sentence _ middle The inner layer; the topmost layer in the layout is checked with a top-level rule; and the inner layer in the layout is checked with an internal layer rule. 25·如巾明专利|& 围24th floor plan design rule inspection method, the towel is divided into the layout of the map of the _ and Lai standard; the steps of the rut include: 叮 set о shape Tqpmn is equal to the layer Με of the layout layer, where Ν is the maximum number of layers of the layout; Ν 31 200825824 UMCD-2005-0072 19631twf.doc/n If the flag layer BULK and the graphic T〇PMN If there is no intersection, the graph NO_MnJBULK is set equal to the graph of the flag layer BULK, otherwise the graph NOJBULK is set as an empty set; if the i-th layer layer MEi in the layout map and the graph NOJV[i+1 JBULK have an intersection, the graph TOPMi is set. Equal to the figure of the i-th layer layer MEi in the layout diagram, otherwise the graphic TOPMi is set to be an empty set, where i is an integer greater than 0 and less than N; if the graphic NO_Mi+1_BULK has no intersection with the graphic TOPM, the graphic NO__MiJBULK is set equal to the graphic NO_Mi+1 JBULK, otherwise the graphic NO_Mi_BULK is set as an empty set; and the graphics TOPMN~TOPMj are combined to obtain the uppermost layer in the layout, where j is the highest possible range in the layout as the uppermost layer Value. 26. The method for checking a layout design rule according to claim 25, wherein the step of comparing the layers of the layout with the flag layer further comprises: if the i-th layer in the layout If the layer MEi has no intersection with the graphic N0-Mi+1-BULK, the graphic is set equal to the graphic of the layer MEi, otherwise the graphic COMMi is set to be an empty set; wherein the graphic represents the graphic of the non-top layer in the layout. 27·If Shen 4 specializes in the method of checking the layout design rules described in item 26, the steps of comparing the layers of the layout map with the flag layer respectively include: 32 200825824 UMCD-2005-0072 19631twf.doc/n sets the graph LSMN-1 equal to the graph of the N_][layer layer MEn-] in the layout; and if the graph COMCOM has an intersection with the graph NO_Mk+2JBULK, the graph LSMk is set equal to COMMk, otherwise the graph is set LSMk is an empty set, where k is an integer greater than 〇 and less than N-1; where graph 1^1]\^ represents the layer of the layer below the topmost layer in the layout. 28. The method of checking a layout design rule according to claim 21, wherein comparing the graphic size of the flag layer with the reference size and performing the identification rule comprises: comparing the graphic size of the flag layer with The reference size, if the size of the flag layer is larger than the reference size, performs a large size identification rule; and if the size of the flag layer is smaller than the reference size, a small size identification rule is performed. 29. The method for inspecting a layout design rule according to the item μ of the patent application scope, wherein the large-scale identification rule comprises: e and the graphic B-BCOR is dedicated to the corner graphic of the flag layer; The pattern of the layer h layer MEh intersects with the pattern B-BCOR, and the intersection result is set to the graph eMEThCA, where h is an integer greater than 0 and less than N+1, and N is the maximum number of layers of the layout; and There are some graphics in the METhCA that are not configured at a 45-degree angle. 33 33 200825824 UMCD-2U05-0072 1963 ltwf.doc/n 30. The method for checking the layout design rule according to claim 21 of the patent application scope, further comprising: if the flag layer and one of the layout layers are specified If there is an intersection, the layout is processed by the first program, otherwise the layout is processed by the second program.