200825217 九、發明說明: 【發明所屬之技術領域】 本發明尤指其提供—齡電化學加工時,不僅可確實增 二電ΐ工具確保導電溶解的性能,進而 合研施权電極裝置。 ^’現今光電、半導體、醫療器材等產業,對於盆使 件如沖壓料材、加工板材之表面精度及潔淨度的要求均曰益: ,因此微精細加工已為目前發展的主流加工技並中電 工又為微精細加巧相當具有_發展的技術。 予加 電化學加工係利用金屬在電解液中的^ ^型,其係將工件接於電源系統之陽極,電加 2兩極間保持適當距離,以供電解液流動,進㈣ 機型’ ί不僅可加工各種複雜之形狀,且加工時不ΐΞ it L有加I精度高及生產鱗高之伽;由於全屬= 以隔離金屬工件表面及溶液,而降低金屬J的化ί ’ 之保護層而降低溶解的發生,凸部 較厚 除,即可使凸部加速溶解,進“化^壞去 解:::r表面,達到光滑 整合匹配電化學;具上111找設拖光磨頭,以 =磨頭方式卻有如下』弊 而拋 磨路徑隹:^旦ϊί:,?由於工件表面之拋光研 辦磨凹㈣響藏’ _光麵單—方式之轉動將 5 200825217 無法確實將鈍化層破璜, 2 ·由於純進行電姆fi’而降低電化學及拋光的效果 而其表面相對】電;:二工件表面係呈高低起麵 整,則該距離的改變將會無適時因應調 不佳,如遇溝槽=角織布等結構之磨材,其強度 起,因此使用時極易破裂’或因勾拉而致使表面凸 經驗前事研發與製作 試作,終究研創出—種可輕㈣=3,域長期努力之研究與 電極工具確保導電溶解的性能,日進而效果’且可使 為本發明之設計宗旨。相大幅改善習式之缺弊,此即 【發明内容】 係於機殼内固設有内:灰:裝置,其 ,係對機殼内環齒之位置 各行星 本發明之次-目的係提供一 2 匕:及拋先的效果。 傳動軸係_殼上方連結驅“ j極裝置,其 工具Γ傳動軸與驅動軸間;=以 ;=頭,材與工件接觸的面壓力,自動調整iLi:; 件的距離;糟此’利用該預壓調整機構 二^ 佳絲,_料電轉雜能,飾^ 6 200825217 本發明之另—目的係提供一種複合研磨拋光之電極裝置,A 拋?磨頭之磨材係為辦尼龍刷,触於破壞去除鈍化層 2 有較佳之去除效果並可有效提高使用壽命。 ^ 【實施方式】 為使貝審查委員對本發明作更進一步之瞭解,茲舉 實施例並配合圖式,說明如后: 請參閱第1圖,本發明係於機座丄〇之 讯 :内=111之機殼i i,機座i 〇内設有一驅動源=口; 驅1至減速箱14内,該減速箱14下方連結二 動軸15轉動,-穿伸機座1 〇、機殼200825217 IX. INSTRUCTIONS: [Technical Field to Be Invented by the Invention] The present invention particularly relates to an electro-mechanical process that provides an electro-mechanical process that not only can surely increase the performance of the electro-disintegration tool to ensure the conductive dissolution, but also the electrode device. ^' Today's optoelectronics, semiconductors, medical equipment and other industries are beneficial to the surface precision and cleanliness of potting parts such as stamped materials and processed sheets: Therefore, micro-fine processing has become the mainstream processing technology and current electrician It is also a technology that has been developed for micro-fines. The electrochemical processing system utilizes the type of metal in the electrolyte, which connects the workpiece to the anode of the power supply system, and maintains an appropriate distance between the two electrodes for the electrolyte to flow, and enters (4) the model ' It can process a variety of complex shapes, and it does not process when it is processed. It has a high precision and a high scale of production scale. Since it is all = to isolate the metal workpiece surface and solution, it reduces the protective layer of metal J. Reduce the occurrence of dissolution, thicker convex part, can accelerate the dissolution of the convex part, into the "chemical ^ bad to solve: :: r surface, to achieve smooth integration matching electrochemical; with 111 to find a drag grinding head, to = Grinding head method has the following disadvantages: polishing path 隹: ^ ϊ ϊ : , 由于 由于 由于 由于 由于 由于 ^ ^ ^ ^ ^ ^ ^ ^ ^ ^ ^ ^ ^ ^ ^ ^ ^ ^ ^ ^ ^ ^ ^ ^ ^ ^ ^ ^ ^ ^ ^ ^ ^ ^ ^ 由于 由于Breaking, 2 · The effect of reducing the electrochemical and polishing effect due to the pure electric electrode fi', and the surface of the workpiece is relatively opposite; the surface of the workpiece is high and low, and the change of the distance will not be adjusted in time. Good, in the case of grooves, angle woven fabrics, etc. When it is used, it is easy to break when it is used, or it is caused by the hooking, which leads to the development and production of the surface convex experience. After all, it is researched and created. The light can be light (4) = 3, the long-term research of the domain and the electrode tool ensure the performance of conductive dissolution. , and then the effect 'can be the design purpose of the present invention. The substantial improvement of the shortcomings of the practice, this is the [invention] is fixed inside the casing: gray: device, it is the case The position of the inner ring teeth of the planets of the present invention provides a 2 匕: and the effect of throwing the first. The drive shaft system _ the upper part of the shell drive "j pole device, the tool Γ between the drive shaft and the drive shaft; ; = head, the surface pressure of the material in contact with the workpiece, automatically adjust the distance of the iLi:; pieces; the use of the pre-pressure adjustment mechanism two ^ Jiasi, _ material electric conversion energy, decoration ^ 6 200825217 another of the present invention - The purpose is to provide a composite grinding and polishing electrode device, A throw? The grinding head is made of nylon brush, which is used to remove the passivation layer. It has better removal effect and can effectively improve the service life. ^ [Embodiment] In order to make the present invention further understand the present invention, the following embodiments are described with reference to the drawings, and the following is illustrated: Referring to Figure 1, the present invention is based on the frame: The housing ii of the 111 is provided with a driving source=port in the base i; the driving 1 is inside the reduction box 14, and the two moving shafts 15 are rotated under the reduction box 14 to extend the housing 1 and the casing
旋轉,其中,傳動軸16與驅動G Γ: ? ?=,機_於驅動軸15内開設軸孔 y 上1内套置一可由螺栓15 2控制升降之壓 板15 3以及-為彈簧之彈性件丄5 4 ί ^ 4當2時’即可經由壓板1 5 3壓抵彈性件 之轴端軸1 6之預壓力,又該傳動轴1 6 之她%爛3又有長槽工6丄, 套㈣由該導銷i 5 5不僅驅動軸丄==巧2 ,並可於傳動軸16受壓時沿著導雜Ί c ^ 6轉動 機座1 0上設有連接電線工^之石山席5作直線升降位移;另 管19,該通管!9並連接於一^定^ ^以及流通電解液之通 於固定環2 0環設有長孔n ^ ?衣2 Q,而傳姉1 6相對 之軸管1 6 3内H^電解液通人傳動轴1 6 結固設電極工具21,該微調機構 以具Γ:=ΐ====164、165以移動電 而帶動電極工具2_出電 7 200825217 .數個之位置’係以上下連結片2 2、2 3架置 齒111嘴*,丁各^^^使各行星齒輪2 4可與機殼内環 磨材之拋光磨頭2 5。1441, 下方再連結以矽砂尼龍刷2 6為 2 5上連結之作公轉齡,且各拖光磨頭 ^ ^ rnmmi 2 5 1 ; 面作公轉與自轉的多重運動工件3 0表 破壞^除1到增進電化學及樾光件3 〇表面之鈍化層 *其i表電0表面係呈高低起伏狀態, 將會影響導電溶解的性㉟了因此為改變’該距離的改變 ,工件3 G表面於最佳雜位置,本持與 2 6與金屬工件3 〇表面接觸的面壓 刷 以確性能’達到光清平整的的距離位置, 低起伏狀態,其於電化學加工溶解 | 南 物膜之鈍化層3 i,該鈍化層3丄: ::、表面會生成氧化 而降低溶解的發生,凸部則形成較、 解發生,因此利用抛光磨頭2 5上之石夕砂歸 方式’可將凸部較薄之鈍化層3 i破壞絲,即可使 解,進而反覆不斷的進行純化、去除及溶解,以逐^ ^ 面,達到光滑平整的拋光需求。 十件表Rotation, wherein the drive shaft 16 and the drive G Γ: ? =, the machine _ opens the shaft hole y in the drive shaft 15 1 is placed inside the sleeve 1 can be controlled by the bolt 15 2 to lift and lower the pressure plate 15 3 and - the elastic member of the spring丄5 4 ί ^ 4 When 2 o', it can be pressed against the pre-pressure of the shaft end shaft 16 of the elastic member via the pressure plate 1 5 3, and the transmission shaft 16 is too bad and has a long groove 6 丄. The sleeve (4) is not only driven by the guide pin i 5 5 but also has a shaft 丄 == 2 and can be connected to the wire base 10 on the rotating base 10 when the transmission shaft 16 is pressed. 5 for linear lifting displacement; another tube 19, the tube! 9 and connected to a ^ ^ ^ ^ and the flow of electrolyte through the fixed ring 20 ring with a long hole n ^ clothing 2 Q, and the transfer of 16 6 relative to the shaft tube 1 6 3 H ^ electrolyte The human drive shaft 16 is fixed with an electrode tool 21, and the fine adjustment mechanism drives the electrode tool 2_ to discharge electricity with the following: ΐ:=ΐ====164, 165. The number of positions is 'above' Connecting piece 2 2, 2 3 mounting teeth 111 mouth *, Ding each ^^^ so that each planetary gear 2 4 can be polished with the inner ring of the casing ring grinding machine 2 5.1441, and then connected with a sandpaper nylon brush 2 6 is the connection length of 2 5, and each of the dragging heads ^ ^ rnmmi 2 5 1 ; multiple movements of the surface for revolution and rotation 3 0 table destruction ^ 1 to promote electrochemical and calendering 3 The passivation layer on the surface of the crucible has a high and low undulation state, which will affect the conductivity of the conductive 35. Therefore, in order to change the change of the distance, the surface of the workpiece 3 G is at the optimum miscellaneous position. 6 The surface pressure brush which is in contact with the surface of the metal workpiece 3 确 is sure to achieve the performance of the position of the light leveling, low undulation, and it is dissolved in the electrochemical process | 3 i, the passivation layer 3丄: ::, the surface will generate oxidation to reduce the occurrence of dissolution, and the convex portion will form a relatively solution, so the use of the polishing head 25 on the stone-sand method can be used to The thinner passivation layer 3 i destroys the wire, so that the solution can be further purified, removed and dissolved repeatedly, so as to achieve a smooth and flat polishing requirement. Ten pieces
據此,本發明不僅可確實增進電化學及拋光的 電極工具確保導電溶解的性能,又石夕砂尼龍刷為磨材亦可有U 8 200825217 尚使,壽命,實為一深具實用性及進步性之設計,然未見有相同 =產品及刊物公開,從而允符發明專利申請要件,爰依法提出申 【圖式簡單說明】 布丄圍 第2圖 第3圖 第4圖 第5圖 本發明之架構示意圖。 本發明於電化學加工時之動作示意圖。 本發明拋光磨頭公轉與自轉之示意圖。 (一)。 (二)。Accordingly, the present invention can not only ensure the electrochemical and polishing electrode tools to ensure the performance of conductive dissolution, but also the stone material of the Shi Xi sand nylon brush can also have U 8 200825217, the life, is a practical and Progressive design, but there is no such thing as the same = product and publication disclosure, so as to allow for the invention patent application requirements, 提出 提出 提出 [ [ [ [ [ [ [ [ [ 丄 第 第 第 第 第 第 第 第 第 第 第 第 第 第 第 第 第 第 第 第 第 第 第 第 第Schematic diagram of the architecture of the invention. The schematic diagram of the operation of the present invention in electrochemical processing. The schematic diagram of the revolution and the rotation of the polishing head of the present invention. (One). (two).
本發明拋光磨頭於研磨拋光時之動作放大示意 ,b圖:本發明拋光磨頭於研磨拋光時之動作放大示意 1主要元件符號說明】 … 本發明部分: 〇 :機座 丄 η 丄 機殼 1 1 1 :内環齒 1 2 驅動源 1 3 :傳動組 1 5 驅動轴 1 Ί 5 ] L :軸孔 1 5 2 :螺栓 1 5 4 :彈性件 1 5 5 :導銷 1 6 : :傳動軸 1 6 ] L ·長槽 1 6 2 :長孔口 1 6 4 :螺帽 1 6 5 :螺帽 1 7 電線 1 8 :碳刷 20 固定環 1 4 電極工具 2 2 :上連結片 2 r\ 行星齒輪 2 5 :拋光磨頭 3 0 :工件 3 1 :純化層 1 η… 14:減速箱 1 5 3 :壓板 1 6 3 :軸管 1 9 :通管 2 3 :下連結片 2 6 :矽砂尼龍刷 9The action of the polishing head of the invention in the grinding and polishing is enlarged, and the figure b shows the action of the polishing head of the invention in the grinding and polishing. 1 main component symbol description] ... part of the invention: 〇: frame 丄 丄 丄 case 1 1 1 : Inner ring tooth 1 2 Drive source 1 3 : Drive set 1 5 Drive shaft 1 Ί 5 ] L : Shaft hole 1 5 2 : Bolt 1 5 4 : Elastic part 1 5 5 : Guide pin 1 6 : : Transmission Axis 1 6 ] L · Long groove 1 6 2 : Long hole 1 6 4 : Nut 1 6 5 : Nut 1 7 Wire 1 8 : Carbon brush 20 Fixed ring 1 4 Electrode tool 2 2 : Upper link 2 r \ Planetary gear 2 5 : Polishing grinding head 3 0 : Workpiece 3 1 : Purification layer 1 η... 14: Gearbox 1 5 3 : Pressure plate 1 6 3 : Shaft tube 1 9 : Through tube 2 3 : Lower connecting piece 2 6 :矽 sand nylon brush 9