200825027 九、發明說明： 【發明所屬之技術領域】 過遽:力、飢學及物理 ，資源再回收利用收粉趙及水資源’進 【先前技術】 近年來油價高漲，替代能源的需求日 、中“貝失原晶棒約3 0 %〜4 0 %之石夕曰;bf·粗^ 有非材料係以顆粒形式存在於廢液中，：然:液中： 巧吊回，％日日難，但是轉體工廠近年來 的前述製程所排放之廢水，其主要二收標 在水貝源的回收’而並無針對廢液中之微粉體作有效的回 當貝資，回收技術，係需於廢液中分離出粉體及水資源， 劑如氯化鐵、氯細載、硫酸亞鐵、多元氯化 再搭配活性白土、聚丙胺等，進行化學混凝， 差離驗體；奸刚1轉对結合溶氣壓 士刀離料體，不過可分離出的粉體小於9 Q%; ϊ 的，分離粉體’目前含有石夕的廢水經過過遽 i獅目ΐΐί水辰縮液’純水回流至工廠繼續使用，而矽 的技術，因未達到再資源化的標準而難以回收再利 ^杆ΐϊί術發展有所謂結合化學混凝與過濾系統的複合分離 葬tr，先施以化學混後再流經過滤系統，由於化學混凝係 ΐίίί樂品讓濃職㈣魏殿，其雖可得更高純度的石夕，但 凝ΐΐϊΐ得石夕產生化學變化，也就無法再利用，因此以化學混 减法為基礎之粉體複合分離技術，是糊於後續的再棚 5 200825027 枯二刀離技發展至複合的粉體分離技術，觀察這歧 技，發展賴程，其目標軸都在於提高舰中粉體的回收率： 終，目_是在水_收，對於时後之粉體，不 達到再貧源化的鮮，就是產生化學變化無法倾續的再利用， 而必須以事業廢棄物的方式進行處理，如此的處理方式，對 源的再利用仍有加以改善的空間。 、、 因此若能將粉體增列為时再顧的標的，以發展出固 的新回收技術，使其不僅可將水資源__神提高，且 產生化_化’將可改善全球石夕晶材料短料之問題， =大量水資源亦可使產業對環境友善度提高，因此這種新回收 術是值得產業所期待的，以及符合世界環保的潮流。 一有鑑於此，本發明人遂以其多年從事相關行業的研發與製作 ^驗，針對目4所面臨之問題深入研究，經過長期努力之研究盥 试作，終究研創出一種利用磁力、電化學及物理過濾之多階段分 離技術，而可回彳$獲致不會產生化學變化之粉體及潔淨之水資ς ，進而充分達到資源再回收利用的效益，以大幅改善 ’此即為本發明之設計宗旨。 、_ 【發明内容】200825027 IX. Description of invention: [Technical field of invention] Over-the-counter: strength, hunger and physics, recycling of resources, recycling of water and water resources. [Previous technology] In recent years, oil prices have risen, and the demand for alternative energy sources has changed. The shell of the original crystal is about 30%~40% of the stone 曰 曰; bf·粗^ There are non-materials in the form of particles in the waste liquid, but: in the liquid: cleverly hoisted, % is difficult, However, in the recent process of the reversing factory, the wastewater discharged from the above-mentioned process is mainly collected in the recovery of Shuibeiyuan, and there is no effective returning of the micro-powder in the waste liquid. The recycling technology is required to be scrapped. The powder and water resources are separated from the liquid, such as ferric chloride, chlorine fine carrier, ferrous sulfate, polychlorinated and then mixed with activated clay, polypropylamine, etc., for chemical coagulation, and the difference is from the test body; For the separation of the gas barrier knife, but the separation of the powder is less than 9 Q%; ϊ, the separation of the powder 'currently contains Shi Xi's wastewater after the 遽 i lion eye ΐΐ 水 water condensed liquid 'pure water reflux Continued to use in the factory, and the technology of 矽 is not re-resourced It is difficult to recycle and it is difficult to recycle. The development of so-called chemical separation and filtration system is combined with the chemical separation and filtration system. The chemical mixing system is used to flow through the filtration system. Wei Dian, although it can get a higher purity of Shi Xi, but the chemical changes of the stagnation of Shi Xi, can not be reused, so the powder composite separation technology based on chemical mixing and subtraction method is a paste in the follow-up Shed 5 200825027 The development of dry two-knife technology to composite powder separation technology, observe this distraction, develop the Lai Cheng, its target axis is to improve the recovery rate of powder in the ship: Finally, the goal is in the water _, For the powder after the time, the lack of re-poorization is the re-use of chemical changes that cannot be continued. It must be treated as a business waste. Such a treatment method still has reuse of the source. The space to be improved. Therefore, if the powder can be added as a target for reconsideration, a new recycling technology will be developed to improve not only the water resources but also the __ Can improve the global stone The problem of short materials of Xijing material, = a large amount of water resources can also make the industry more environmentally friendly, so this new recycling is worthy of the industry's expectations, and in line with the trend of the world's environmental protection. In view of this, the inventor With many years of research and development and production in related industries, I have conducted in-depth research on the problems faced by M. 4, and after long-term efforts, I have tried to create a multi-stage separation technology using magnetic, electrochemical and physical filtration. , and can return to the powder and clean water, which will not produce chemical changes, and fully realize the benefits of resource recycling, so as to greatly improve 'this is the design purpose of the invention. _ 【Abstract 】
本發明之主要目的係提供一種廢液中粉體之回收系統及並方 ，，其係將廢液流經可控制磁場強度之流道，而磁力吸^固 =廢液中之金屬粉體，接著將廢液導入電泳沈積裝置，再施以 壓使電泳沈積裝置產生電場作用，而以電泳沈積法將帶電之粉體 粒子吸附沈積於電極板上，即可於電極板上蒐集粉體粒子，最後 再將廢液放流至下游端之過濾裝置；藉此，利用磁力、電化學及 物理過濾之多階段分離技術，即可於廢液中獲致金屬粉體及 ^生化學變化之材料粉體，以供回收或再精煉使用，而下游端潔 淨之水資源，則可供循環再利用，進而充分達到資源再回收/用 及付合世界環保的潮流的效益。 本發明之次一目的係提供一種廢液中粉體之回收系統及其方 6 200825027 置，以監測 :液置2游流道上裝設有_裝 六、/、/辰又§濃度高時的溶液，繼續回流至可押制 體及材料粉^ ΐ可僅可Ϊ廢液中充分i集到金屬粉 除率=匕上严過濾器的使用壽命，使濁度去 ? · ϊ-ΐί^ϊί；：；：；ΐΙ.^^ί^ 概使用，並可有效縣的能力，進而有ί '、羊，9 9以上’而下域即可獲致潔淨之水資源。 提南回收使用效果 【實施方式】 步之瞭解，茲舉一較佳 為使貴審查委員對本發明作更進一 實施例並配合圖式，說明如后·· 本發明係利用磁力、電化學以及物理過濾等多階段 術，而於廢液帽致金屬粉體及無化㈣化之材料粉體 = 收或再精煉使用，並於下游额贿淨之水資源；請參閱第j、、 2圖，以矽晶材料為例，其於半導體及太陽能光電製程中，由晶 棒鋸切成晶片、乃至於後續拋光製程等，這些製程中合： 棒約3 0%〜4 0%之石夕晶材料，因此廢液中存在有3 〇^〜4 〇%= 矽晶材料粉體及金屬粉體；為了有效回收該矽晶材料粉體及金°屬 粉體，本發明首先利用磁力吸附手段，而於流道上游裝設可控制 磁場強度之磁力吸附裝置1〇，將該廢液流經磁力吸附裝置 之流道，藉由磁力吸附裝置i 0之磁力，將廢液中導磁^金屬粉 體吸附固定；接著利用電泳沈積手段，而於中游端以電化學為g 理基礎，將廢液導入電泳沈積裝置2 0，該電泳沈積裝置2 ^係 利用電泳沈積法(electr〇ph〇retic deposition，EPD)，以電泳^ 積的方式使帶電粒子沈積在電極板21上，由於帶電之固體粒^ 200825027 場’粒子本身會在廢液中產生移動現象，苴 負電uli)之電===中受到外加電場的作用，而朝; 電、永二Λ)3,21方向運動，因此廢液流經外加電場之 即f ?t::將矽晶顆粒吸附固定於電極板2 u ^ iir、&備成本低、沈積速率快、電泳材質不受拘束且。曾搞 ίί=ί:且最ί要的還有經此技術分離所得之粉體°，並不 in田電泳沈積裝置20與過遽裝置3〇間之流道 产體濃度_手段而裝設光學反射式之粉體顆粒濃 監測廢液中的粉體顆粒濃度，當廢液中之粉 ‘Sri:使廢液繼續回流至磁力吸附裝置1Q之流道及 拉=積裝置2 Q巾，以反覆進行磁力吸附及電泳沈積等步驟， 可離廢液中之粉體，當粉體漠度降低至設定值時，便 至了游之過雜置3 Q，此即可大幅提高下游過濾 :番Q π、使用哥命，並使得濁度去除率達9 9%以上，而於過濾 tη詩之下游處便可獲致潔淨之水資源；此外，磁力吸附裝置 冰沈積裝置20之電極板21上，皆可利用刮除手段而 構5◦，以將附著固定之粉體刮除，除了可自動集中 已及附固疋之粉體外，且可有效保持吸附粉體的能力。 屬明彻磁力吸附手段及電泳_手段峨狀導磁性金 椹無化學變化之矽晶粉體，可便於供回收或再精煉使用， 可有效改善全球矽晶材料短料之問題，且下游端潔淨之水 並可供循環再利用，進而充分達到資源再回收利用及符合 保的潮流的效益，實為一深具實用性及進步性之設計，然 依法產品及刊物公開，從而允符發明專射請要件，爱 200825027 【圖式簡單說明】 第1圖：本發明之流程示意圖。 第2圖：本發明之架構示意圖。 【主要元件符號說明】 本發明部分： 10:磁力吸附裝置 21:電極板 2 0 :電泳沈積裝置 3 0 :過濾裝置 4 0 :偵測裝置 5 0 :刮除機構 9The main object of the present invention is to provide a recovery system for powder in waste liquid and a method thereof, which is to flow waste liquid through a flow path of a controllable magnetic field strength, and magnetically absorb and fix metal powder in the waste liquid. Then, the waste liquid is introduced into the electrophoretic deposition device, and then the pressure is applied to cause the electrophoretic deposition device to generate an electric field, and the charged powder particles are adsorbed and deposited on the electrode plate by electrophoretic deposition method, and the powder particles can be collected on the electrode plate. Finally, the waste liquid is discharged to the downstream filter device; thereby, the magnetic powder, the electrochemical and the physical filtration multi-stage separation technology can be used to obtain the metal powder and the chemically changed material powder in the waste liquid. For recycling or re-refining, the clean water at the downstream end can be recycled, so as to fully realize the benefits of resource recycling/use and the world environmental protection trend. The second object of the present invention is to provide a waste liquid recovery system and a method thereof for monitoring: liquid storage 2 is provided on the flow path, and is provided with a high concentration of -6, /, / □ and § The solution, continue to reflux to the pourable body and the material powder ^ ΐ can only be fully collected in the waste liquid to the metal powder removal rate = the service life of the filter, so that the turbidity goes? · ϊ-ΐί^ϊί ;:;:;ΐΙ.^^ί^ It is used, and it can effectively make the county's ability, and then there are ί ', sheep, 9 9 or more' and the lower domain can get clean water.提南回收回收利用效果 [Embodiment] It is preferred that the reviewer make a further embodiment of the present invention and cooperate with the diagram to illustrate the following: The present invention utilizes magnetic force, electrochemistry and physics. Filtration and other multi-stage techniques, and the metal powder in the waste liquid cap and the non-chemical (four) material powder = use or re-refining, and the bribe net water in the downstream; please refer to pictures j, 2, Taking a twin crystal material as an example, in a semiconductor and solar photovoltaic process, a wafer is sawed into a wafer, or even a subsequent polishing process, etc., in these processes: a rod of about 30% to 40% of the stone crystal material Therefore, there are 3 〇^~4 〇%= 矽 crystal material powder and metal powder in the waste liquid; in order to effectively recover the crystallization material powder and the gold genus powder, the present invention first utilizes magnetic adsorption means, and A magnetic adsorption device 1〇 for controlling the magnetic field strength is installed upstream of the flow channel, and the waste liquid flows through the flow path of the magnetic adsorption device, and the magnetic force of the magnetic liquid adsorption device i 0 is used to guide the magnetic powder in the waste liquid. Adsorption fixation; followed by electrophoretic deposition, At the midstream end, the waste liquid is introduced into the electrophoretic deposition apparatus 20 by electrochemical electrolysis, and the electrophoretic deposition apparatus 2 is electrophoretically deposited by means of electrophoretic deposition (EPD). The charged particles are deposited on the electrode plate 21, due to the charged solid particles ^ 200825027 field 'particle itself will move in the waste liquid, the electricity of the negative electricity uli) === is affected by the applied electric field, and Yong Erqi) 3,21 direction movement, so the waste liquid flows through the applied electric field, ie, f?t:: adsorption and fixation of the twin particles to the electrode plate 2 u ^ iir, & low cost, fast deposition rate, electrophoresis material Unconstrained. I have engaged ίί=ί: and the most important thing is the powder obtained by this technique, and the optical concentration of the channel is not included in the electrophoretic deposition device 20 and the sputum device. Reflective powder particle concentration monitors the concentration of powder particles in the waste liquid, when the powder in the waste liquid 'Sri: the waste liquid is continuously returned to the flow path of the magnetic adsorption device 1Q and the pull device 2 Q towel to repeat The steps of magnetic adsorption and electrophoretic deposition can be carried out, and the powder in the waste liquid can be separated from the powder when the powder indifference is reduced to a set value. This can greatly improve the downstream filtration: π, using the sacred life, and the turbidity removal rate is more than 9 9%, and the clean water is obtained at the downstream of the filtered tη poem; in addition, the electrode plate 21 of the magnetic adsorption device ice deposition device 20 is The scraping means can be used to form the crucible to scrape the adhered powder, in addition to automatically concentrating the powder which has been attached to the crucible, and can effectively maintain the ability to adsorb the powder. It is a magnetic adsorption method and electrophoresis method of Mingche. It is a kind of crystal powder with no chemical change. It can be easily used for recycling or re-refining. It can effectively improve the problem of short-term materials of global twinning materials, and the downstream end is clean. The water can be recycled and reused, so as to fully realize the benefits of resource recycling and compliance with the trend of protection. It is a practical and progressive design, and the products and publications are open to the public, thus allowing the invention of special radiation. Please, element 200825027 [Simple description of the diagram] Figure 1: Schematic diagram of the process of the present invention. Figure 2: Schematic diagram of the architecture of the present invention. [Description of main component symbols] Part of the invention: 10: Magnetic adsorption device 21: Electrode plate 2 0: Electrophoretic deposition device 3 0: Filter device 4 0: Detection device 5 0 : Scraping mechanism 9