200823899 九、發明說明·· 【發明所屬之技術領域】 本發明係為-種辅片表面瑕錄測，其舰朗於線上即時檢測系 ‘統’尤指-種可於待測物件之製造過財，進行線上即時檢測、品質分級， 並將檢測結果回饋給生產設備之方法。 【先前技術】 為因應光碟片龐大的需求量，各光碟生產廠皆以自動化的方式，快速 . 且大里的生產光碟片。先歧行辆片表面瑕紐測，係個機器視覺為 基礎的檢測方法，大多以設定單_閥值的方式，對整個檢測區域進行瑕庇 偵測，難以克服光線不均照成的負面影響，因此先前技術通常是讓線光源 均勻打在取像區域⑽）。請參照作者梁俊傑，「勵與vcd光碟表面瑕疲 檢測系統之開發」，碩士論文，國立屏東科技大學機械工程系，屏東，漏； 其主要是發展-套自動檢測系統來檢測出勵與VCD光碟表面上的瑕庇。 此自行设计檢測系統可分為兩部分，包括供料及分類系統和機器視覺系 .、统。檢測系統設備主要包括有個人電腦、可程式運動控制器、入料和分類 麵、照明結構。將制辅-開始由供料歧至制機_旋轉盤上， 使用真空產生器將光碟片固定，以兩個面形CCD連續取像來判讀各種不同 的瑕窥，此技術所探討的瑕疲種類包括孔洞、刮痕、油污及灰塵。利用影 像相減、Blobs分析和外形處理等影像處理方法將瑕疵檢測出，由實驗結果 顯示，假如所呈現的瑕疵面積大於〇·〇26刪2，將可被完全地檢測出。 上述之技術之取像系統係使用面掃瞄攝影機，以間歇的方式，分多次 5 200823899 =測物的局部_像。此種方式無法於待測物 耗費多餘的時間於等待待洌丁取像而 反 動至特定位置。此外，由於光碟片在濺鍍 取像時難叫服反光的,_。赫— T n 一 再者，也難以避免光碟片反射出攝影機本身 的影像。 < 傳先進仃蝴貞渐’ 設料—_的方式，對整個檢测區域 ^瑕疲侧克服树不触錢貞崎響。本發雜 影機的取像原理，發展” 線瑕關脱，，可避免取糾光線不均= 影響。__纖取_ ’細野是―錄，轉雄取—條線的方式， 取得待_彡像。理論上，較光繼在取___照明， 取得的谢♦彳州每—崎·_«目_。嫌此，本 發明發展之·線瑕_測法，為每—行設定不同的難，建構出間值線， 以此閥值線逐-對每—列進行瑕耗測，偵測出異常區域。 本心月提ά種以非均勻光線及亮場照明之環境下之光碟片表 面瑕疵檢财法及m贿決先前勘之缺失。 【發明内容】 本發明之主要目的在提供—種齡光碟片表面影像之取像方法，且係 採用線掃_影機進彳爾；如此箱行進時，線朗攝影機能進行操 取待測物影像’不需如先前技術般，等待待測物移動至特定位置，而浪費 多餘的時間。另外，線_攝影機搭配旋轉機構，於待測物旋轉同時 進行取像，可«㈣免辆片敝光縣，柄機本身也騎顯現於影 6 200823899 像中。 本發明之另一目的在提供一種針對高反射性光碟片表面打光之亮場照 =方:其係讓光源與光碟面成_角度並以非均勻的方式打光，如此取 于的”像巾在水平方向會林均勻的現象，再關值線瑕鋪測法進行 瑕疫偵測，柯將分_職所在。 /本發明之又-目的在提供—種校正光碟片表面瑕錄測純之方法及 其糸統，其係以自製之校正片及自行發展之軟體校正程式，可讓系統之校 正更為方便與迅速。 本發月之再目的在提供—種光碟片表面瑕疵檢測方法，其係根據線 掃猫攝影機的取像原理，發展”閥值線瑕麵測法”，可避免取像時光線 不均的影響。本發明翻之閥值線贼制法，為每—行設定獨的闕值， 建構出閥值線，以此閥值線逐—對每—列進行瑕鋪測，偵測出異常區域。 本發明係提供-種光表面瑕紐測方法，其係轉均自之光源， 對至少-铜光·提高統，同雜亮場㈣之觀下，對铜光碟片 表面’摘取複麟影像；賴取之影像進行灰階處理，並賴&之影像進 行瑕疵偵測’以便偵測待測光碟片的表面瑕疫。 本發明係採用線掃瞄攝影機進行取像。以線掃瞄攝影機進行取像時， 可於待測物行進間，同時擷取待測物影像，不需浪費多餘的時間，等待待 測物移動至特定位置。此外，触線觸攝影機搭配轉機構，於待測物 旋轉同時進行取像，可輕易地避免光碟片的反光現象，攝影機本身也不會 顯現於影像中。 底下藉由具體實施例配合所附的圖式詳加說明，當更容易瞭解本發明 7 200823899 之目的、技術内容、特點及其所達成之功效。 【實施方式】 本發明係提供-種光碟片表面瑕錄測方法及其系統，可應用於製造 業、光碟片、M0、碟片，本發明能應用於線上即時檢測系統，並於待測物 件之製造触巾’進行線上㈣制、品f分級，並將檢·果回饋給生 產設備’以符合各_生錢自動化、A量化的快速生產辆#，並同時 於自動化生產時，準確且快速地偵測出碟片上之瑕疲，以確保產品的品質。 百先同時請參照第1圖〜第3圖，第1圖係本發明之實施方塊圖；第2 圖係檢測系統之前視圖；第3圖係檢測系統之右側視圖。 首先說明，檢測系統之硬體架構如第2圖與第3圖所示。主要設備包 括線掃_影機卜線掃_影機7、光源3、光源4、以及旋轉機構5，其 中線掃瞒攝影機1、線掃_影機7以及光源3、光源4，在上下各設置一 組，可同時對待測物8(光碟片）之上下面進行取像。旋轉機構5則是負責於 擷取影像時，赠定方式旋轉制物8(辆#)。此外，本發明將攝影機2、 攝影機6架設於- χγζ微調平台上，讓使用者可對攝影機位置進行調整。 以光碟片之表面瑕疵檢測為例，使用本發明之檢測設備時，攝影機與待測 光碟之間需相距約110爾至12〇丽；攝影機2、攝影機6之光學軸需通過待 測物8任一徑線之中心點。照明方面，光源3、統4之照射角度（光線與 光碟面法線的炎角）約為25度至35度，·光碟表面所接收之光線強度約為 54〇〇 Lux至10000 Lux。如此可得到較佳的檢測結果。 再來說明本發明之實施方式；進行步驟Sl〇及步驟S12，開始檢測，設 8 200823899200823899 IX. INSTRUCTIONS······························································ For the purpose of online on-line inspection, quality grading, and feedback of test results to production equipment. [Prior Art] In response to the huge demand for optical discs, all optical disc manufacturers are automated and fast. And Dali produces optical discs. Firstly, the surface of the film is measured, and it is a machine vision-based detection method. Most of the detection methods are used to detect the entire detection area, and it is difficult to overcome the negative effects of uneven illumination. Therefore, the prior art usually makes the line source evenly hit the image capturing area (10). Please refer to the author Liang Junjie, "Development of the vulcanity detection system for VCD discs", master's thesis, Department of Mechanical Engineering, National Pingtung University of Science and Technology, Pingtung, Leak; its main development - automatic detection system to detect the excitation and A shelter on the surface of a VCD disc. This self-designed inspection system can be divided into two parts, including the feeding and sorting system and the machine vision system. The detection system equipment mainly includes a personal computer, a programmable motion controller, a feeding and sorting surface, and an illumination structure. The system will start from the feeding to the machine _ rotating disc, use the vacuum generator to fix the disc, and take two CCDs to take images continuously to interpret various peeks. The fatigue of this technology is discussed. Types include holes, scratches, oil and dust. The image processing method such as image subtraction, Blobs analysis, and shape processing is used to detect the flaw, and the experimental results show that if the area of the flaw is larger than 〇·〇26, 2 can be completely detected. The imaging system of the above-mentioned technology uses a surface scanning camera to divide the number of times in an intermittent manner. 5 200823899 = Partial image of the object. In this way, it is impossible to spend an extra time on the object to be tested and wait for the image to be taken to the specific position. In addition, it is difficult to retaliate when the disc is splashed and imaged. He-Tn Again, it is also difficult to prevent the disc from reflecting the image of the camera itself. < The advanced 仃 贞 贞 ’ 〗 〖 set the material - _ way, the entire detection area ^ 瑕 fatigue side to overcome the tree does not touch the money 贞 。. The image acquisition principle of the hair stylus machine is developed, and the line is off, and the unevenness of the light can be avoided. __Fixed _ 'The wilderness is the record, the way to take the line - get the line _ 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 Set different difficulty, construct the inter-value line, and use this threshold line to measure the abnormality of each column, and detect the abnormal area. This heart is raised in the environment of non-uniform light and bright field illumination. SUMMARY OF THE INVENTION The main object of the present invention is to provide an image capturing method for a surface image of an age-old optical disc, and a line sweeping machine is used. When such a box travels, the line camera can perform the image of the object to be tested. 'It is not necessary to wait for the object to be moved to a specific position as in the prior art, and wastes extra time. In addition, the line camera is equipped with a rotating mechanism. At the same time as the object to be tested is rotated, the image can be taken, («) free of the film, Shuguang County, the handle machine itself also rides Now in the image 6 200823899. Another object of the present invention is to provide a bright field illumination for the surface of a highly reflective optical disc. The light source is angled with the surface of the optical disc and is played in a non-uniform manner. Light, so taken from the "like towel in the horizontal direction will be evenly distributed, and then the value of the line to test the plague detection, Ke will be divided into positions. / The present invention is also directed to providing a method for correcting the surface of a compact disc and a system thereof, which is a self-developed calibration sheet and a self-developed software calibration program, which makes the calibration of the system more convenient. rapid. The purpose of this month is to provide a method for detecting the surface of a disc, which is based on the principle of taking the line camera to develop the "threshold line surface measurement method" to avoid the influence of uneven light when taking images. . The method for turning the threshold value thief of the present invention sets a unique threshold for each line, constructs a threshold line, and uses the threshold line to perform a flaw detection on each column to detect an abnormal region. The invention provides a method for measuring the surface of a light surface, which is rotated from the light source, and at least the view of the copper light disc surface is extracted from the surface of the copper optical disc. The image is taken for grayscale processing, and the image of the & image is detected to detect the surface plague of the optical disc to be tested. The present invention employs a line scan camera for image taking. When taking a picture with a line scan camera, you can capture the image of the object to be tested while the object to be tested is moving, without wasting extra time, waiting for the object to be moved to a specific position. In addition, the touch-screen touch camera is equipped with a rotating mechanism to take images while the object to be tested is rotated, and the reflection of the optical disc can be easily avoided, and the camera itself does not appear in the image. The purpose, technical content, features, and effects achieved by the present invention 7 200823899 are more readily understood by the detailed description of the specific embodiments and the accompanying drawings. [Embodiment] The present invention provides a method for recording and recording a surface of an optical disc, and a system thereof, which can be applied to a manufacturing industry, an optical disc, an M0, a disc, and the invention can be applied to an online real-time detection system and to an object to be tested. The manufacturing touch towel 'is carried out online (four) system, product f grading, and the inspection and fruit feedback to the production equipment 'to meet the various _ money automation, A quantitative rapid production vehicle #, and at the same time automated production, accurate and fast The ground is detected to be exhausted to ensure the quality of the product. Please refer to FIG. 1 to FIG. 3 at the same time. FIG. 1 is a block diagram of the implementation of the present invention; FIG. 2 is a front view of the detection system; and FIG. 3 is a right side view of the detection system. First, the hardware architecture of the detection system is shown in Figures 2 and 3. The main equipment includes a line sweeper _ shadow machine sweeper _ camera 7, light source 3, light source 4, and a rotating mechanism 5, wherein the line broom camera 1, the line sweeper 7 and the light source 3, the light source 4, in the upper and lower Set a group to simultaneously take the image above and below the object 8 (disc). The rotating mechanism 5 is responsible for rotating the workpiece 8 (car #) when the image is captured. In addition, the present invention mounts the camera 2 and the camera 6 on the - χ ζ ζ fine-tuning platform so that the user can adjust the position of the camera. Taking the surface flaw detection of the optical disc as an example, when using the detecting device of the present invention, the distance between the camera and the optical disc to be tested needs to be about 110 to 12 brilliant; the optical axis of the camera 2 and the camera 6 must pass through the object to be tested 8 The center point of a line. In terms of illumination, the illumination angle of the light source 3 and the system 4 (the angle of the light and the normal of the surface of the disc) is about 25 to 35 degrees, and the light intensity received by the surface of the disc is about 54 〇〇 Lux to 10000 lux. This results in better results. The embodiment of the present invention will be described again; step S1 and step S12 are performed to start detection, and 8 200823899
Us之从下’她鱗_影機卜__賴7及兩侧的光源 3、光源43、光源3、光源44，获士斤絲斗 測物狀碟片）影像。 待測物8(光碟片）的方式，搁取待 —再進行細4，使嘱_峨統參數設定，對檢職圍、贼 疋義…等檢測相關參數進行設定。 絲參數設定後，接續進行步驟S16，必須對攝影機2、攝影機6位置進行 k正’確保取得正確的影像。為了讓使用者可以容易地校正攝影機2、攝影 機6位置，本發明使用—自製校正片搭配校正程式，進行校正時實施步驟 ⑽、步謂替S24之校正流猶攝影機2、攝物位置㈣ 找使用校正程式嫩校正片，接著檢視影像中的實際尺規，是否與 校正程式麟製的虛擬尺規重合，絲則代表攝影雜置不正確（參考" .需調整攝影機2、攝影機6之位置，因此酬步驟⑽麵校正，直 到實際尺規與虛擬尺規重合，再進行步驟跳；反之若實際尺規與虛擬尺 規重合（參考第7 B )’職轉機位置正確，可結練正料，並進行步 驟S26。本發明所自製之校正片，為繪製有如第4圖所示圖樣之圓盤物體， 繪有數個不同尺寸的圓’這些圖樣於校正程序中，被視為實際尺規，將與 校正程式所繪製之虛擬尺規（第5圖）進行比較。 經過參數設定與攝影機2、攝影機6位置校正後，即可進行步驟娜， 開始進行取像。取像時，本發明_線掃瞒攝影機卜線触攝影機7搭配 旋轉機構5進行轉，晴齡錢照财式將瑕細現於影像中。所謂 9 200823899 的亮場照明’其原理是，若光線騎於無瑕顏域時，所有的人射光線均 會反射進人攝影機巾，使攝影機的感光元件有所感應；若光_射至瑕窥 處時，入射光線會受到瑕疵的影響，無法反射至攝影機，或者削弱反射光 線的強度，導致取得的影像中，瑕顏域之灰階錄其他區域。本發明中， 將光源3、光源4置於線觸攝影機卜線触攝韻7之掃描線的延伸線 上（參考第2圖與第3圖之攝影機2、攝影機6、待測物8(光碟片）與光源 3、光源4相關位置），以達到亮場照明的效果，有效地將瑕_現於影像 中。值知v主思的，一般先别技術均是讓光線均勻地打在取像區域上 (以此方式打光，無法將贼親像巾），而本發明规與光碟面 成一角度，以非均勻的方式進行打光。導致取得的影像中，在水平方向會 有不均勻的現象，使得_般以賴值為基礎的瑕賴耻無法翻於此， 須以本發明所發展之閥值線瑕疵偵測法進行瑕疵偵測，才可將瑕疵分割出 來。以第8圖為例，（a)為具有瑕疲之光碟片取像結果，框選區域為瑕龜； (b)(c)均為使用單-之喊_結果，射⑹為歐蘇法處理結果，⑹ 為以整個制區域之灰階鮮差為基礎，設定單―閥錢行瑕鋪測結 果；（d)為使用本發明之閥值線瑕疵偵測法之處理結果。從圖中可清楚地 發現，使用一般單閥值式的瑕疵偵測法，完全無法適用於此。 再來進行步驟S28 ,開始瑕鋪測，本發明使用.自行發展之閱值線瑕範 偵測法’進行瑕本發賴魏之瑕疵_法，是根據線掃瞒攝影 機卜線掃_織7的轉原麟發展的。雜哺織卜線掃猫攝影 機7是時次擷取-條線狀區域影像的方式，使用高於—般面掃_影機 200823899 的取像頻率，連續擷取待測物8(光碟片）不同區域的線狀影像，最後組成一 張疋叙崎像。理論上，經由鱗賴韻卜線伽攝影機7所擷取的影 像中，同一行上的每個像素，所受的光線強度皆相同；但同一列上的各個 點則可能受到不_光線強度。有鐾於此，本發騎發展之瑕疵偵測法， 不同於-般使料-閥值的瑕鋪測法，改為設定多侧值的方式，進行 %疵偵測，本發明稱之為閥值線瑕疵偵測法。 開始瑕_測的後，第一步便是進行步驟S3()依擷取之影像建立間值 線；閥值_建立方式，是藉由麟影像巾各行的灰階分布叙，計算各 行的灰P自平均值以及灰卩皆標準差，再進—步為每—行設定不同的閥值，組 成閥值線。接著進行步驟S32及步驟S34，以閥值線逐列地對待測影像進行 '偵貝j ~了偵測出灰階異常區域與待測影像中的瑕疯，^即瑕疲戶斤在。 令/代表待測影像，檢測時首先依⑴及⑵式分別計算各行的灰階平 均值及灰階鮮差，例如：^⑴及賴分別代表第/行的灰階值標準差 及平均灰階值；接著依⑶及⑷式雜上下闊麟；最後將/帶人⑸式即 可將影像分割。Us from the bottom of her scales _ shadow machine _ _ _ 7 and the light source on both sides 3, the light source 43, the light source 3, the light source 44, the image of the object of the screen. The method of the object to be tested 8 (disc) is to be taken out - and then fine 4 is made, so that the parameters of the 嘱_峨 system are set, and the relevant parameters of the inspection, the thief, and the thief are set. After the silk parameter is set, the process proceeds to step S16, and it is necessary to perform k positive on the position of the camera 2 and the camera 6 to ensure that a correct image is obtained. In order to allow the user to easily correct the position of the camera 2 and the camera 6, the present invention uses the self-made calibration sheet and the correction program, and performs the step (10) when performing the correction, and the step S4 is used to correct the flow. The camera 2, the position of the object (4) is used. Correct the program correction film, then check the actual ruler in the image, whether it coincides with the virtual ruler of the calibration program, and the silk represents the mismatch of the photography (refer to ". Need to adjust the position of camera 2, camera 6, Therefore, the compensation step (10) is corrected until the actual ruler coincides with the virtual ruler, and then the step jumps; otherwise, if the actual ruler coincides with the virtual ruler (refer to Chapter 7B), the position of the job machine is correct, and the training can be completed. And proceeding to step S26. The self-made calibration piece of the present invention is used to draw a disk object having a pattern as shown in Fig. 4, and a plurality of circles of different sizes are drawn. These patterns are regarded as actual rulers and will be regarded as actual rulers. Compare with the virtual ruler drawn by the calibration program (Fig. 5). After parameter setting and camera 2, camera 6 position correction, you can proceed to step Na, start When taking the image, the present invention _ line broom camera touches the camera 7 with the rotating mechanism 5 to turn, the Qingling money money will be finely displayed in the image. The so-called 9 200823899 bright field lighting 'its The principle is that if the light rides on the innocent face, all the people's rays will be reflected into the camera towel, so that the photosensitive element of the camera will be inductive; if the light is emitted to the spot, the incident light will be paralyzed. Influence, can not be reflected to the camera, or weaken the intensity of the reflected light, resulting in the gray image of the 瑕 域 field in the obtained image. In the present invention, the light source 3 and the light source 4 are placed on the line touch camera line. The extension line of the scan line of 7 (refer to the camera 2, the camera 6, the object to be tested 8 (the optical disc) and the light source 3, the light source 4 in the second and third figures) to achieve the effect of bright field illumination, effective The 瑕 _ is now in the image. The value of the v thinks, generally the first technique is to let the light hit the image area evenly The gauge is at an angle to the surface of the disc to be non-uniform In the way of the light, there will be unevenness in the horizontal direction, which makes the 瑕 以 以 无法 无法 无法 无法 无法 无法 无法 无法 无法 无法 无法 无法 无法 无法 无法 无法 无法 无法 无法 无法 无法 无法 无法 无法 无法 无法 无法 无法 无法 无法 无法 无法The detection method performs 瑕疵 detection before the 瑕疵 can be segmented. Taking Figure 8 as an example, (a) is the image of the disc with the fatigue, the frame selection area is the tortoise; (b) (c) In order to use the single-call _ result, shot (6) is the result of the Ou Su method, (6) is based on the gray level difference of the whole system area, set the single-valve money test results; (d) to use the present invention The processing result of the threshold detection method. It can be clearly seen from the figure that the general single-valve detection method can not be applied to this. Then step S28 is started, and the inspection is started. The use of the invention. The self-developed reading line 瑕 侦测 侦测 ' ' 瑕 发 发 发 发 魏 魏 魏 魏 魏 魏 魏 魏 魏 魏 魏 魏 魏 魏 魏 魏 魏 魏 魏 魏 魏 魏 魏 魏 魏 魏 魏 魏 魏The hybrid feeding and tweezer scanning cat camera 7 is a method of capturing the line-like area image at a time, and using the image capturing frequency higher than the general-purpose surface scanning machine 200823899, continuously extracts the object to be tested 8 (disc) The linear images of different areas finally form a picture of the 崎 崎. In theory, each pixel on the same line receives the same intensity of light in the image captured by the scale gamma camera 7, but each point on the same column may be subjected to no ray intensity. In view of this, the detection method of the development of the riding is different from the method of measuring the threshold of the material-threshold, and changing the method of setting the multi-side value to perform the %疵 detection. Threshold line detection method. After starting the 瑕 _ test, the first step is to perform step S3 () to establish the inter-value line according to the captured image; the threshold _ establishment mode is to calculate the gray of each line by the gray scale distribution of each line of the lining image towel P is the standard deviation from the average value and the ash, and then step-by-step sets different thresholds for each line to form a threshold line. Then, step S32 and step S34 are performed, and the image to be measured is performed column by column on the threshold line. The detection of the gray-scale anomaly area and the madness in the image to be tested is performed. Let/represent the image to be tested. Firstly, calculate the grayscale mean and grayscale difference of each row according to formulas (1) and (2). For example: ^(1) and Lai represent the grayscale value standard deviation and average grayscale of the row/row respectively. Value; then according to (3) and (4) mixed with broad and broad; finally / / (5) can be divided into images.
Avg(X)= 1 H ZHfJ{x^y) ; f〇r X = 1，Ψ (1) σ(χ)=飞 Σ〇 (/(Λ «V) - Zvg(jc))2 (2) Η Tup(x)= Avg(x)^a(x) + T^ (3) Tdw(x) = Avg(x) ~ σ(χ) ^ (4) 200823899 iR(x,y)=\ 〇; ifW>f^y)<Tup{x) [255; otherwise (5) 其中及為影像的高度’ 7；為一特定閥值（在此設為5)。經過上述處理 後得到之Λ影像為黑白影像；影像中黑色（以灰階值〇表示）區域為背景; 白色（以灰階值255表示）區域則為異常區域。 完成步驟S34後；進行步驟S36、步驟娜、步驟_，根據瑕疫特徵 φ 卩及使用者所設定之品質標準，將待測物之品質進行分級，最後將檢測結 果，以電子峨輸_給生產設備，或是進行後續製㈣設備，以便將產 品分裝或修正生產設_參數。然後進行步驟⑽，聊是否結束瑕制貞 測，如欲結束瑕疫_ ’則進行步驟S44，結束瑕疫偵測；如欲繼續瑕疲偵 測，則進行步驟S26及S28，重新取像並重新開始械偵測’直到步驟s4[ 結束瑕疫偵測為止。 唯以上所述者’僅為本發明之較佳實施例而已，並非用來限定本發明實施 • 之範圍。故即凡依本發明申請範圍所述之形狀、構造、特徵及精神所為之 均等變化或修飾，均應包括於本發明之申請專利範圍内。 【圖式簡單說明】 第1圖係本發明之表面瑕疵檢測流程圖。 第2圖係本發明之表面瑕疵檢測系統之前視圖。 第3圖係本發明之表面瑕疵檢測系統之前視圖。 第4圖係本發酬自製之校正片示意圖，繪製林同尺寸之圓，視為實際 尺規〇 12 200823899 第5圖係本發明之校正程式中繪製與校正片對應之虛擬尺規。 第6圖係本發明之攝影機位置錯誤時，校正程式之取像結果。 第7圖係本發明之攝影機位置正確時，校正程式之取像結果。 第8圖係本發明之具有瑕疵之光碟片取像與瑕疵偵測結果· (a) 為取像結果，框選區域為瑕窥所在； (b) 為使用歐蘇法之瑕疵偵測結果；Avg(X)= 1 H ZHfJ{x^y) ; f〇r X = 1,Ψ (1) σ(χ)=flying Σ〇(/(Λ «V) - Zvg(jc))2 (2) Η Tup(x)= Avg(x)^a(x) + T^ (3) Tdw(x) = Avg(x) ~ σ(χ) ^ (4) 200823899 iR(x,y)=\ 〇; ifW>f^y)<Tup{x) [255; otherwise (5) where is the height of the image '7; is a specific threshold (here set to 5). The image obtained after the above processing is a black and white image; the black (indicated by the grayscale value 〇) region in the image is the background; the white (indicated by the grayscale value 255) region is the abnormal region. After step S34 is completed; step S36, step Na, step _, according to the plague feature φ 卩 and the quality standard set by the user, the quality of the object to be tested is graded, and finally the test result is electronically lost _ Production equipment, or follow-up (4) equipment, in order to package or modify the production parameters. Then, step (10) is performed to talk about whether to end the sputum test, if the plague is to be ended, then step S44 is performed to end the plague detection; if the stagnation detection is to be continued, steps S26 and S28 are performed to retake the image and Restart the mechanical detection' until step s4 [ends the plague detection. The above description is only a preferred embodiment of the invention and is not intended to limit the scope of the invention. Therefore, any changes or modifications of the shapes, structures, features, and spirits described in the scope of the present invention should be included in the scope of the present invention. BRIEF DESCRIPTION OF THE DRAWINGS Fig. 1 is a flow chart of surface flaw detection of the present invention. Figure 2 is a front elevational view of the surface flaw detection system of the present invention. Figure 3 is a front elevational view of the surface flaw detection system of the present invention. Fig. 4 is a schematic diagram of the correction piece made by the present invention, and the circle of the same size is drawn as the actual ruler. 12 200823899 The fifth figure is a virtual ruler corresponding to the correction piece in the calibration program of the present invention. Fig. 6 is a view showing the result of the correction program when the position of the camera of the present invention is wrong. Fig. 7 is a photographing result of the correction program when the position of the camera of the present invention is correct. Figure 8 is the result of the image capture and detection of the optical disc of the present invention. (a) For the image capturing result, the frame selection area is a glimpse; (b) the detection result is used after the use of the Ou Sufa;
以此閥值進 (c) 為以整個檢測區域之灰階標準差為基礎，設定單一 閥值 行瑕/疵搞測之結果； (d) 為使用本發明之閥值線瑕疵偵測法之處理結果。 【主要元件符號說明】 1線掃瞄攝影機 2攝影機 3光源 4光源 5旋轉機構 6攝影機 7線掃晦攝影機 8待測物 13The threshold value (c) is set based on the gray standard deviation of the entire detection area, and the result of setting a single threshold is performed; (d) is to use the threshold line detection method of the present invention. process result. [Main component symbol description] 1-line scan camera 2 camera 3 light source 4 light source 5 rotation mechanism 6 camera 7-line broom camera 8 to be tested 13