200823136 九、發明說明： 【發明所屬之技術領域】 本發明係關於-種基板旋轉機制，尤指一種連動式的基 板旋轉機制。 【先前技術】 薄膜電晶體液晶顯示器（以下簡稱TFT丄CD)，主要是利 用成矩陣狀排列的薄膜電晶體，並配合適當的電容、轉接 塾等電子元件來驅動液晶像素，以產生豐富·亮麗的圖形。 由於TFT-LCD具有外型輕薄、耗電量少以及無輻射污染等 特性，因此被廣泛地應用在筆記型電腦（n〇teb〇〇k)、個人數 位助理（PDA)等攜帶式資訊產品上，甚至已有逐漸取代傳統 桌上型電腦之CRT監視器以及家用電視的趨勢。 一般而言，TFT-LCD包含有一薄膜電晶體基板，其上 具有許多排列成陣列的薄膜電晶體、像素電極（pixel electrode)、複數條互相垂直交錯（orth〇g〇nal)的掃目苗線（scan or gate line)以及訊號線（data or signal line)，一具有複數個 陣列排列之彩色濾光片（color filter)的彩色濾光基板，以及 填充於薄膜電晶體基板與彩色濾光基板之間的液晶材料。 其中，薄膜電晶體元件係利用複數道沉積、微影暨蝕刻（pEp) 200823136 製私製作於薄膜電晶體基板表面，而彩色濾、光片則是利用 微影製程或是直接印刷技術製作於彩色濾光基板表面，使 LCD的每-像素呈現豐富亮麗的顏色。目前對彩色遽光基 板的II作通Η系先利用—輸送帶（_veyQr)來輸送複數個 玻璃基板，然後於輸送個過程中對玻璃基板進行多次的光 阻塗佈、曝光以及顯影等製程。 明 > 第1圖’第丨圖為習知用來輸送複數個基板之一 輸送帶示意圓。如第1圖所示，輸送帶12上承載有複數個 基幸 各基板20可為一玻璃基板。其次，輸送帶12 上設置有複數個旋轉站14、16、18,且各旋轉站14、16、 有用來對基板20進行光阻塗佈或曝光顯影 等製程的機台(圖未示)。舉例來說，旋轉站Η _有一 光阻塗佈機（Ph〇t〇 _er)，旋轉站l6.㈣有一對位機 (allgner)，而夂轉站18旁則設有一顯影機（developer)。 值知庄〜的Τξ：習知在利用輸送帶來輸送基板以進行多 一人光阻塗佈與曝光顯影製程的過程中，通常會將各基板在 旋轉站上進行多次的轉向。—般而言，各基板在旋轉站進 行所而的旋轉例如旋轉+ 18G度後皆需要再次進行反向的 旋轉，亦即旋轉]80度以將基板回到原始的位置。 然而，工作人員在對基板進行此轉向作業時，通常是採 7 200823136 用手動執行的方式，例如先對一基板所需進行的旋轉動作 輸入一旋轉資訊，然後於製程結束後再輸入一旋轉資訊將 該基板旋轉回原來的位置。然而，在這些密集輸入旋轉資 訊的過程中，時常會因為操作人員的疏忽而造成旋轉方向 錯誤或是忘了把基板的位置轉回原先的設定，進而造成良 率下降以及成本增加等問題。因此，如何提供一種替代習 知利用手動方式來對基板進行旋轉的機制即為現今一重要 課題。 【發明内容】 本發明係揭露一種連動式基板旋轉機制。首先，提供一 輸送帶（conveyor)，係用以輸送複數個基板，且該輸送帶上 設置有複數個旋轉站。然後將各該基板所需進行之轉向資 訊建立一轉向參數表（recipe)，隨後利用該輸送帶輸送該等 基板，且當各該基板傳送至各該旋轉站時，係依據該轉向 參數表自動對各該基板進行相對應之旋轉。 本發明所揭露的連動式基板旋轉機制主要係利用轉向 參數表、基板資料以及輸送帶上的感測器等三種轉向定位 機制來改善習知利用人工操作方式容易造成基板旋轉錯誤 並導致良率下降的問題。如同先前所述，本發明在輸送帶 輸送複數個基板時係先將各基板所需進行的轉向資訊建立 200823136 一轉向參數表，然後在各基板傳送至基板上的各a 士 根據該轉向參數表來對各基板進行相對應的旋轉疋4 在各基板進行所需轉向的同時，連接轉向參數表、三 元會將各基板進行轉向前與轉向後的位置 、彳工制單 。匕邱至一*美；|：/5杳 料中。因此，在基板進行所需的旋轉後， 土极貝 丄 β <市早元即可藉 由此基板資料來自動判斷何時需再次進行 ^ , J的旋轉，而 不兩以手動操作的方式來針對各基板輸入轉向的指令， 而改善習知容易造成基板旋轉方向錯誤或是忘了把美板的 位置轉回原先設定的問題。此外，本發明又可在二 設置複數對感測ϋ，並藉由這些感測器來判斷基^:向 位置是否正確’以於基板進人製程機台前或完成 時調整基板的位置。 【實施方式】 ^參照第2 ®，第2圖為本發明連動式基㈣轉機制用 來輸送基板之-輸送帶32示意圖。如第2圖所示，輸送帶 %上承載有複數個基板40。其中，各基板4〇可為一玻璃 ^板’且各基极40内均包含一基板識別碼⑻挪 ^缝at_)。如圖t所述，輸送帶％上另設置有複數個 疋轉站34、36、38，且旋轉站34、36、％旁各設置有一 心來對基板4G進订光阻塗佈或曝光顯影製程的機台。舉例 讀站34旁可設有—光阻塗佈機(e論r)，旋轉站 万設有一對位機（aiigner)，而旋轉Μ %旁則設有一顯影 9 200823136 根 40 機(devd〇perWb外，輸送帶32上又另設有複數對感 (麵〇〇42’且感測器42係成對角設置於輪 、為 I::較佳實施例’感測器42可用來判斷各基板 請參照第3圖，第3圖為本發明之連 之方塊示意圖。如第3圖所示，本發。^轉機制 機制包含一用來輪送基板的輸送帶32、一連連動接式基^轉 的控制單元44、1來儲存各基板所需^接=:32 轉向參數表46以及一基板資料料。 轉向貝訊的 請同時參照第2圖與第3圖，根攄 例，本發明之連動式基板旋轉機制在運作二月::佳實施 驟。首先，提供-輸送帶32，然後利用^包^有以下步 複數個基板4G。接著將各基板4G所’2來輸送 立一轉向參數表46。其中，各基板4〇 :的轉向貧訊建 汛包含各基板40進行轉向前的位置以及 /于的轉向為 向後的位置。此外，轉向參數表46係 知反40進行轉 例如一電腦整合製造（CIM)系統，且控制單元控^彳早兀44， 制輸送帶32與各旋轉站的動作並用來儲存轉向來系用來控 接著於轉向參數表46建立後利用輸送* ·、， 個基板40,然後於各基板40傳送至各旋^ 2來輸运獲數 疋轉站34、36或38 200823136 時依據轉向參數表46來自動對各基板40進行相對應的旋 轉，使各基板40可以正確的方向、位置來進行所需的曝光 或顯影等製程。 根據本發明之較佳實施例，當各旋轉站34、36、38依 據轉向參數表46來自動對各基板40進行旋轉時，控制單 元44會將各基板40進行轉向前及轉向後的位置記錄在基 板資料48中。如先前所述，通常各基板40在旋轉站進行 所需的旋轉，例如旋轉+ 180度後皆需要再次進行反向的旋 轉，亦即旋轉-180度以回到原始的位置。由於本發明係先 利用轉向參數表來使各基板進行相對應旋轉，然後於各基 板進行轉向的同時將各基板的轉向資訊記錄至基板資料 内，因此可利用控制單元來判斷各基板進行轉向後何時需 再次進行反向的旋轉，而不需操作員以手動操作的方式來 針對各基板輸入轉向的指令，進而改善習知容易造成基板 旋轉方向錯誤或是忘了把基板的位置轉回原先設定的問 題。 此外，如先前所述，本發明的輸送帶32上另設置有複 數對感測器42，其係用來判斷放置於輸送帶32上的基板 40是否轉向正確。舉例來說，當一基板40需進行直向曝 光時，對角設置於旋轉站36上的感測器42會將關閉（OFF) 狀態設定為一正常狀態。因此，當基板40以直向通過設於 200823136 旋轉站34上的感測器42時，感測器42並不會感應到基板 40而呈現關閉的狀態，且此狀態會依據設定而判定為一正 常狀態。反之，當基板4〇需進行橫向曝光時，對角設置於 旋轉站36上的感測器42會將開啟（0N)狀態設定為一正常 狀態。因此，當基板40以水平的方向通過設於旋轉站36 上的感測器42時’感測器42會感應到基板40的兩端而呈 現開啟的狀態’且此狀態會依據設定而判定為一正常狀態。 綜上所述，相較於習知利用人工手動方式來個別對基板 進行轉向設定的方法，本發明所揭露的連動式基板旋轉機 制係利用轉向參數表、基板資料以及輸送帶上的感測器等 三種轉向定位機制來改善習知利用人工操作方式容易造成 基板旋轉錯誤並導致良率下降的問題。如同先前所述，本 發明在輸送帶輸送·複數個基板時係先將各基板所需進行的 轉向資訊建立一轉向參數表，然後在各基板傳送至基板上 的各敎:轉站時根據该轉向參數表來對各基板進行相對應的 旋轉。其次，在各基板進行所需轉向的同時，連接轉向參 數表的控制單會將各基板進行轉向前與轉向後的位置記 錄至一基板資料中。因此，在基板進行所需的旋轉後，控 制單元即可藉由此基板資料來自動判斷何時需再次進行反 向的旋轉，而不需以手動操作的方式來針對各基板輸入轉 向的指令，進而改善習知容易造成基板旋轉方向錯誤或是 - 忘了把基板的位置轉回原先設定的問題。此外，本發明又 12 200823136 可在輸送帶上設置複數對感測器，並藉由這些感測器來判 斷基板的轉向位置是否正確，以於基板進入製程機台前或 完成製程後適時調整基板的位置。 以上所述僅為本發明之較佳實施例，凡依本發明申請 專利範圍所做之均等變化與修飾，皆應屬本發明之涵蓋範 圍。 【圖式簡單說明】 第1圖為習知用來輸送複數個基板之一輸送帶示意圖。 第2圖為本發明連動式基板旋轉機制用來輸送基板之一輸 送帶示意圖。 第3圖為本發明之連動式基板旋轉機制之方塊示意圖。 【主要元件符號說明】 12 輸送帶 14 旋轉站 16 旋轉站 18 旋轉站 20 基板 32 輸送帶 34 旋轉站 36 旋轉站 38 旋轉站 40 基板 42 感測器 44 控制單元 46 轉向參數表 48 基板資料 13200823136 IX. DESCRIPTION OF THE INVENTION: TECHNICAL FIELD OF THE INVENTION The present invention relates to a substrate rotation mechanism, and more particularly to a linked substrate rotation mechanism. [Prior Art] A thin film transistor liquid crystal display (hereinafter referred to as TFT丄CD) mainly uses a thin film transistor arranged in a matrix, and is driven by an electronic component such as an appropriate capacitor or a transfer capacitor to generate a liquid crystal pixel. Bright graphics. TFT-LCD is widely used in portable information products such as notebook computers (PDAs) and personal digital assistants (PDAs) because of its thin appearance, low power consumption and no radiation pollution. There are even trends in CRT monitors and home TVs that have gradually replaced traditional desktop computers. In general, a TFT-LCD includes a thin film transistor substrate having a plurality of thin film transistors arranged in an array, a pixel electrode, and a plurality of diagonally interlaced lines (orth〇g〇nal). (scan or gate line) and a data line (data or signal line), a color filter substrate having a plurality of color filters arranged in an array, and filling the thin film transistor substrate and the color filter substrate Liquid crystal material. Among them, the thin film transistor component is fabricated on the surface of the thin film transistor substrate by using a plurality of deposition, lithography and etching (pEp) 200823136, and the color filter and the light film are produced in color by using a lithography process or a direct printing technique. The surface of the substrate is filtered so that each pixel of the LCD exhibits a rich and bright color. At present, the color illuminating substrate II is used for the first time by using a conveyor belt (_veyQr) to transport a plurality of glass substrates, and then performing multiple photoresist coating, exposure and development processes on the glass substrate during the transport process. . Ming > Fig. 1 is a schematic diagram of a conveyor belt used to convey one of a plurality of substrates. As shown in Fig. 1, the conveyor belt 12 carries a plurality of substrates. Each of the substrates 20 can be a glass substrate. Next, the conveyor belt 12 is provided with a plurality of rotating stations 14, 16, 18, and each of the rotating stations 14, 16 has a machine (not shown) for performing a photoresist coating or exposure development on the substrate 20. For example, the rotary station _ _ has a photoresist coater (Ph〇t〇_er), the rotary station l6. (4) has a pair of machines (allgner), and the transfer station 18 is provided with a developer (developer) .知 庄 〜 Τξ Τξ Τξ Τξ Τξ Τξ Τξ Τξ Τξ Τξ Τξ Τξ Τξ Τξ Τξ Τξ Τξ Τξ Τξ Τξ Τξ Τξ Τξ Τξ Τξ Τξ Τξ 习 习 习 习 习 利用 利用 利用 利用 利用 利用 利用 利用 利用 利用 利用 利用In general, each substrate needs to be reversely rotated again after the rotation of the rotating station, for example, + 18 G degrees, i.e., rotated by 80 degrees to return the substrate to its original position. However, when the worker performs this steering operation on the substrate, it is usually manually executed by 7 200823136. For example, a rotation information is input to the rotation operation required for a substrate, and then a rotation information is input after the process ends. Rotate the substrate back to its original position. However, in the process of intensive input of rotating information, it is often caused by an operator's negligence that the direction of rotation is wrong or that the position of the substrate is forgotten to return to the original setting, which causes problems such as a decrease in yield and an increase in cost. Therefore, how to provide an alternative mechanism for manually rotating a substrate is an important issue today. SUMMARY OF THE INVENTION The present invention discloses a linkage substrate rotation mechanism. First, a conveyor is provided for transporting a plurality of substrates, and the conveyor belt is provided with a plurality of rotating stations. And then turning the steering information required for each of the substrates to establish a steering parameter table, and then transporting the substrates by using the conveyor belt, and automatically transmitting the substrates to each of the rotating stations according to the steering parameter table. Each of the substrates is rotated correspondingly. The interlocking substrate rotation mechanism disclosed by the invention mainly utilizes three kinds of steering positioning mechanisms, such as a steering parameter table, a substrate material and a sensor on a conveyor belt, to improve the conventional use of the manual operation method, which easily causes the substrate rotation error and leads to a decrease in yield. The problem. As described above, when the conveyor belt transports a plurality of substrates, the steering information required for each substrate is first established to a steering parameter table of 200823136, and then transferred to each substrate on each substrate according to the steering parameter table. The corresponding rotation of each substrate is performed. 4 When the required steering is performed on each of the substrates, the steering parameter table and the ternary unit are connected to the positions before and after the steering, and the completion order.匕 Qiu Zhiyi*mei;|:/5杳 In the material. Therefore, after the substrate is subjected to the required rotation, the earth breeze β < City Early Element can automatically determine when it is necessary to perform the rotation of ^, J again by the substrate data, instead of manually operating In response to the input of the steering command for each of the substrates, it is easy to cause the substrate to rotate in the wrong direction or forget to switch the position of the board back to the original setting. In addition, the present invention can further provide a plurality of pairs of sensing electrodes, and use the sensors to determine whether the substrate is in the correct position to adjust the position of the substrate before or when the substrate enters the processing machine. [Embodiment] ^ Referring to the second ®, Fig. 2 is a schematic view of the conveyor belt 32 for transporting substrates by the interlocking type (four) transfer mechanism of the present invention. As shown in Fig. 2, a plurality of substrates 40 are carried on the conveyor belt %. Each of the substrates 4A can be a glass plate and each of the bases 40 includes a substrate identification code (8). As shown in FIG. t, a plurality of transfer stations 34, 36, 38 are additionally disposed on the conveyor belt %, and a rotating center 34, 36, and % are disposed adjacent to each other to form a photoresist coating or exposure development on the substrate 4G. Process machine. For example, the reading station 34 can be provided with a photoresist coater (e on r), the rotary station is equipped with a pair of aiigners, and the rotary Μ% is provided with a development 9 200823136 40 machines (devd〇perWb) In addition, the conveyor belt 32 is further provided with a plurality of pairs (the face 42' and the sensor 42 is diagonally disposed on the wheel, which is I:: the preferred embodiment' sensor 42 can be used to judge each substrate Please refer to FIG. 3, which is a block diagram of the present invention. As shown in FIG. 3, the mechanism of the present invention includes a conveyor belt 32 for transporting substrates, and a serial connection type. The rotating control unit 44, 1 stores the required connection of each substrate = 32 steering parameter table 46 and a substrate data material. Please refer to FIG. 2 and FIG. 3 for turning to Beixun. The interlocking substrate rotation mechanism is in operation in February: a good implementation step. First, a conveyor belt 32 is provided, and then a plurality of substrates 4G are used in the following steps. Then, each substrate 4G is supplied with a steering parameter. Table 46. The steering poorness of each substrate 4 includes the position of each substrate 40 before steering and / or steering In the backward position, in addition, the steering parameter table 46 is configured to perform a system such as a computer integrated manufacturing (CIM) system, and the control unit controls the operation of the conveyor belt 32 and each rotary station and stores the steering. The control system is used to control the transfer of the parameter table 46, and then the substrate 40 is transported, and then the substrate 40 is transferred to each of the substrates to transport the number of transfer stations 34, 36 or 38 200823136. Turning to the parameter table 46 to automatically rotate the respective substrates 40 so that each substrate 40 can perform the desired exposure or development process in the correct direction and position. According to a preferred embodiment of the present invention, each rotating station 34, 36, 38 automatically rotate each substrate 40 according to the steering parameter table 46, and the control unit 44 records the position of each substrate 40 before and after the steering in the substrate material 48. As described above, usually The substrate 40 performs the required rotation at the rotating station, for example, after rotating +180 degrees, it needs to perform reverse rotation again, that is, rotate -180 degrees to return to the original position. Since the present invention first uses the steering parameter table The substrates are rotated correspondingly, and then the steering information of each substrate is recorded into the substrate data while the substrates are being steered. Therefore, the control unit can be used to determine when the substrates need to be reversely rotated again after steering. The operator is required to manually input the steering command for each substrate, thereby improving the problem that it is easy to cause the substrate to rotate in the wrong direction or forget to return the position of the substrate back to the original setting. The inventive conveyor belt 32 is additionally provided with a plurality of pairs of sensors 42 for determining whether the substrate 40 placed on the conveyor belt 32 is properly turned. For example, when a substrate 40 is subjected to direct exposure, the sensor 42 disposed diagonally on the rotating station 36 sets the OFF state to a normal state. Therefore, when the substrate 40 passes the sensor 42 disposed on the rotating station 34 of the 200823136 in a straight direction, the sensor 42 does not sense the substrate 40 and assumes a closed state, and the state is determined to be one according to the setting. normal status. Conversely, when the substrate 4 is not required to be laterally exposed, the sensor 42 disposed diagonally on the rotating station 36 sets the on (0N) state to a normal state. Therefore, when the substrate 40 passes through the sensor 42 provided on the rotating station 36 in the horizontal direction, the sensor 42 will sense the two ends of the substrate 40 to be in an open state, and this state is determined according to the setting. A normal state. In summary, the interlocking substrate rotation mechanism disclosed in the present invention utilizes a steering parameter table, a substrate material, and a sensor on a conveyor belt, compared to the conventional method of manually setting the steering setting of the substrate by manual manual method. Three kinds of steering positioning mechanisms are used to improve the problem that the manual operation method is easy to cause substrate rotation error and lead to a decrease in yield. As described above, the present invention firstly establishes a steering parameter table for the steering information required for each substrate when transporting the plurality of substrates, and then transfers the substrates to the respective switches on the substrate: according to the Turn the parameter table to perform corresponding rotation on each substrate. Next, while each substrate performs the desired steering, the control sheet connected to the steering parameter table records the positions of the substrates before and after the steering into a substrate data. Therefore, after the substrate performs the required rotation, the control unit can automatically determine when the reverse rotation needs to be performed again by using the substrate data, without manually inputting the steering command for each substrate. Improvements are easy to cause the substrate to rotate in the wrong direction or - forget to switch the position of the substrate back to the original setting. In addition, the present invention further discloses that a plurality of pairs of sensors can be disposed on the conveyor belt, and the sensors are used to determine whether the steering position of the substrate is correct, so as to adjust the substrate in time before the substrate enters the processing machine or after the process is completed. s position. The above are only the preferred embodiments of the present invention, and all changes and modifications made to the scope of the invention are intended to be included in the scope of the present invention. BRIEF DESCRIPTION OF THE DRAWINGS Fig. 1 is a schematic view of a conventional conveyor belt for transporting a plurality of substrates. Fig. 2 is a schematic view showing a conveying belt of a substrate for conveying a substrate of the interlocking substrate according to the present invention. Figure 3 is a block diagram showing the rotation mechanism of the linked substrate of the present invention. [Main component symbol description] 12 Conveyor belt 14 Rotary station 16 Rotary station 18 Rotary station 20 Substrate 32 Conveyor belt 34 Rotary station 36 Rotary station 38 Rotary station 40 Substrate 42 Sensor 44 Control unit 46 Steering parameter table 48 Substrate data 13