200821553 九、發明說明： 【發明所屬之技術領域】 本發明係關於一種感測器，特別是一種傾斜及振動感測 器。 【先前技術】 傾斜及振動感測器的使用範圍相當廣泛，尤其是目前曰 益注重的生活安全性提昇，及無人自動化控制機械上，特 別是在廣大的汽車市場應用，透過在車輛上裝置些許感測 器，進行即時的型態偵測，當超過設計限度即時的自動型 態修正或者發出警報，這樣的機制不論是在家用汽車的安 全提升或者產業用機械操作安全甚至是汽車防盜上都有相 當的幫助。 目前習知之傾斜及振動感測器大致可以分成三大類，其 分別使用固體、液體及氣體作為感測的變化源，分述如 下。 第一、固體式：傳統上是以鐘擺結構結合電阻計、電位 計或編碼器（如文獻[Hisao kato, Masahiko kojima; "Photoelectric Inclination sensor and Its Application to the Measurement of shapes of 3-D objects”； IEEE transaction on instrumentation and measurement Vol. 40. NO.6 December 1991·]所揭示）來達成感測的目標，缺點是體積太大難以微 小化，由於較大的質量所以也使得達到穩定態時間拉長， 降低了偵測速度。 第二、液體式：在腔體裡封進適量的流體，配合上導線 115209.doc 200821553 或電極，偵測導電度變化、平板電極間的電容變化（如文 獻[D. Benz，T. Botzelmann，H. K"uck，D. Warkentin; ’On low cost inclination sensors made from selectivelymetallized polymer11; Sensors and Actuators A 123-124 (2005) 18-22] 所揭示）、或者是偵測熱力學上的變化量來達成目標，這 種方法相較於固體式擁有比較小的體積，但是流體會有黏 滯性以及對於封裝的腔體材料有不同的吸附能力，所以流 體要擁有一定的質量才能克服上述的影響，所以也使得這 種類型設計有體積難以再縮小的缺點。加上流體如果封裝 不良會有蒸發乾涸的情況，讓長期使用的穩定性受到考 驗，採取量測電容變化作為偵測方式也相對上易受到環境 因素影響電容之輸出。此外，此種型式設計其偵測範圍通 常界於正負90度間，無法進行大角度之連續量測。 第三、氣體式：絕大部分是藉由熱電阻與熱電偶之間熱 力學平衡關係來達成偵測，是目前已知比較可靠且擁有比 較小體積的設計，但微導線以及電熱器設計需使用到較昂 貴的矽為材料及較昂貴的微影製程，如文獻[S. Billat，H. Glosh，Μ· Kunze，F. Hedrich，J· Hedrich，J· Frech，J. Auber， H. Sandmaier，W. Wimmer，W. Lang; ’’Micromachined inclinometer with high sensitivity and very good stability"; Sensors and Actuators A 97-98 (2002)125-130]所揭示。 另夕卜，文獻[R. Olaru，D.D. Dragoi;’’ Inductive tilt sensor with magnets and magnetic fluid1*; Sensors and Actuators A 120 (2005) 424-428]所揭示之結合磁鐵及磁性流體所構成 115209.doc 200821553 之感測器也有感測傾斜度之功能，但有體積較龐大且感測 角度較小之缺點。文獻[Hisao kato，Masahiko kojima; ’’Photoelectric Inclination sensor and Its Application to the Measurement of shapes of 3-D objects”； IEEE transaction on instrumentation and measurement Vol. 40 .NO.6 December 1991.]揭示了結合流體及光電元件來組成感測器，但是有 著一樣受制於流體流動性的敏感度影響，其立體結構設計 雖可以達成二維的偵測但量測角度相對的較小，且使用昂 貴的光偵測器，讓成本大幅提高，難以達成大量量產廣泛 使用的目標。 因此，有必要提供一創新且富進步性的傾斜及振動感測 器，以解決上述問題。 【發明内容】 本發明之主要目的係提供一種傾斜及振動感測器，其包 括一本體、一第一電路、一第二電路及一訊號傳遞元件。 該本體具有一容置腔。該第一電路係延伸至該容置腔。該 第二電路係延伸至該容置腔，該第二電路與該第一電路係 不連接。該訊號傳遞元件係於該容置腔内移動，以導通該 第一電路及該第二電路。藉此，本發明僅需簡單之電路及 結構設計即可達到感測傾斜及振動之功能，因此可大幅地 縮小體積且易於量產。此外，本發明之感測器可量測之角 度範圍大，而且解析度高。 【貫施方式】 參考圖1及圖2，分別顯示本發明傾斜及振動感測器之第 115209.doc 200821553 一實施例之分解圖及組合後前視示意圖。該傾斜及振動感 測器1包括一本體11、一第一電路15、一第二電路16、一 訊號傳遞元件17及一液體18。 該本體11具有一容置腔m，用以容置該訊號傳遞元件 17及該液體18。在本實施例中，該本體u包括一第一板 12、一第二板13及一第三板14。該第一板12及該第三板14 係為平整之盍板’該第二板13具有一透孔13ι。該第一板 , 12、該第二板13及該第三板14依序疊置且接合而形成封閉 之該容置腔111。該第二板13之透孔131係為圓形，因此該 容置腔in亦為圓形。要注意的是，該第二板13及該第三 板14也可以是一體成型。 該第一板12、該第二板13及該第三板14之材質係為玻璃 或塑膠。在本實施例中，該第一板12及該第三板14之材質 係為玻璃，該第二板13之材質係為塑膠。該第一板12、該 第二板13及該第三板14係利用uv膠接合而成。然而可以 C 解的是’該第—板12、該第二板13及該第三板14也可以 利用其他化學接合劑接合而&，或者也可以利用熱壓法或 其他接合方法接合而成。 該第一電路15係延伸至該容置腔ln。該第二電路“亦 • $伸至該容置腔⑴，該k電路16與該第-電路⑽不 ‘ 連接。在本實施例中，該第一電路15及該第二電路16係位 於该第-板12上’其形成方式係為先以濺鍍沈積一金屬 層，再利用顯影ϋ刻成該第一電路15及該第二電路16之圖 案。 H5209.doc -9- 200821553 該第一電路15包括一筮 _ ^ .弟一電極15丨及一第二電極丨52。該 弟一板13及該第三板14 、十、々人〜 & ㈣卜felh因此上 述之接a完成後，該第_電 电路15之第一電極151不會宗令 被該第二板13覆蓋住，亦即哆笛千々 不曰凡王 之上媳合異兩s ,方即該弟一電路15之第一電極151 曰"路空軋中，而可以用以連接一外界裝置。該 電路15之第二電極152係位於該容置腔⑴内，且為一 環狀外形。該第一電路j 5 — " 之弟一電極152所形成之環略小 於該容置腔1U之外圍，且具有—缺口。 ―該第二電路16包括-第-電極⑹及一第二電極162。該 第二電路16之第—電極16丨之位置係相對於該第-電路15 之第-電極⑸，因此該第二電路16之第一電極161之上端 也會暴露至空氣中，而可以用以連接一外界裝置。該第二 電路16之第二電極162係位於該容置腔111内，且其係為一 圓形電極。該第二電路16之第二電極162之圓形電極係略 小於該第一電路15之第二電極152所形成之環，亦即該第 -電路15之第二電極152係環繞於該第二電路16之第二電 極1 62之外。 該訊號傳遞元件17係於該容置腔ln内移動，以於不同 位置處導通該第一電路15之第二電極152及該第二電路^ 之第一電極162。在本實施例中，該訊號傳遞元件I?係為 一水銀球，然而可以理解的是該訊號傳遞元件17之材質也 可以是其他例如Ga-In-Sn合金之液態金屬，或其他低熔點 之合金金屬，或是固態金屬，或是電導液，或是油類等。 該液體1 8係位於該本體丨丨之容置腔丨丨丨内。在本實施例 115209.doc -10- 200821553200821553 IX. Description of the Invention: TECHNICAL FIELD OF THE INVENTION The present invention relates to a sensor, and more particularly to a tilt and vibration sensor. [Prior Art] Tilt and vibration sensors are used in a wide range of applications, especially at the current level of life safety improvement, and on unmanned automated control machinery, especially in the automotive market, by installing a little on the vehicle. Sensors for instant type detection, automatic type corrections or alarms that exceed the design limits, such mechanisms are safe for home use, industrial safety, or even car burglary. Quite helpful. Conventional tilt and vibration sensors can be broadly classified into three broad categories, using solids, liquids, and gases as sources of sensing change, respectively, as described below. First, solid type: traditionally a pendulum structure combined with a resistance meter, potentiometer or encoder (such as the literature [Hisao kato, Masahiko kojima; " Photoelectric Inclination sensor and Its Application to the Measurement of shapes of 3-D objects" ; IEEE transaction on instrumentation and measurement Vol. 40. NO.6 December 1991·]) to achieve the goal of sensing, the disadvantage is that the volume is too large to be miniaturized, due to the larger quality, it also makes the steady state time pull Long, reduce the detection speed. Second, liquid type: seal the appropriate amount of fluid in the cavity, with the wire 115209.doc 200821553 or electrode, detect the change of conductivity, capacitance change between the plate electrodes (such as the literature [ D. Benz, T. Botzelmann, H. K"uck, D. Warkentin; 'On low cost inclination sensors made from selective metallized polymer11; Sensors and Actuators A 123-124 (2005) 18-22] Measuring the amount of change in thermodynamics to achieve the goal, this method has a smaller volume than the solid type, but the fluid will stick Sexuality and different adsorption capacity for the encapsulated cavity material, so the fluid must have a certain quality to overcome the above effects, so this type of design has the disadvantage that the volume is difficult to shrink again. The evaporative drying condition is used to test the stability of long-term use. The measurement of capacitance change as a detection method is also relatively easy to be affected by environmental factors. In addition, the detection range of this type design is usually between plus and minus 90. Between the degrees, continuous measurement at large angles is not possible. Third, gas type: most of them are detected by the thermodynamic equilibrium relationship between thermistor and the thermocouple, which is known to be relatively reliable and has a relatively small volume. The design, but the micro-wire and electric heater design requires the use of more expensive materials and more expensive lithography processes, such as the literature [S. Billat, H. Glosh, Μ · Kunze, F. Hedrich, J. Hedrich, J. Frech, J. Auber, H. Sandmaier, W. Wimmer, W. Lang; ''Micromachined inclinometer with high sensitivity and very good stabilit y"; Sensors and Actuators A 97-98 (2002) 125-130]. In addition, the literature [R. Olaru, DD Dragoi; ''Inductive tilt sensor with magnets and magnetic fluid 1*; Sensors and Actuators A 120 (2005) 424-428] disclosed in combination with magnets and magnetic fluids 115209.doc The sensor of 200821553 also has the function of sensing the inclination, but it has the disadvantages of large volume and small sensing angle. [Hisao kato, Masahiko kojima; ''Photoelectric Inclination sensor and Its Application to the Measurement of shapes of 3-D objects”; IEEE transaction on instrumentation and measurement Vol. 40 .NO.6 December 1991.] Photoelectric components are used to form the sensor, but the sensitivity is affected by the fluidity of the fluid. The three-dimensional structure design can achieve two-dimensional detection but the measurement angle is relatively small, and the expensive photodetector is used. In order to greatly increase the cost, it is difficult to achieve a large number of targets for mass production. Therefore, it is necessary to provide an innovative and progressive tilt and vibration sensor to solve the above problems. [Summary] The main object of the present invention is A tilt and vibration sensor includes a body, a first circuit, a second circuit, and a signal transmitting component. The body has a receiving cavity. The first circuit extends to the receiving cavity. The second circuit extends to the accommodating cavity, and the second circuit is not connected to the first circuit. The signal transmitting component Moving in the accommodating cavity to turn on the first circuit and the second circuit. Thereby, the invention only needs a simple circuit and structural design to achieve the function of sensing tilt and vibration, thereby greatly reducing the volume Moreover, the sensor of the present invention can measure a wide range of angles and has high resolution. [Common Application Mode] Referring to FIG. 1 and FIG. 2, respectively, the tilting and vibration sensor of the present invention is shown. 115209.doc 200821553 An exploded view of an embodiment and a front view of a combination. The tilt and vibration sensor 1 includes a body 11, a first circuit 15, a second circuit 16, a signal transmitting component 17, and a liquid The body 11 has a receiving cavity m for receiving the signal transmitting component 17 and the liquid 18. In the embodiment, the body u includes a first board 12, a second board 13 and a first The first plate 12 and the third plate 14 are flat rafts. The second plate 13 has a through hole 13 ι. The first plate 12 , the second plate 13 and the third plate 14 is sequentially stacked and joined to form a closed accommodating cavity 111. The second plate 13 is transparent The 131 series is circular, so the accommodating cavity in is also circular. It should be noted that the second plate 13 and the third plate 14 may also be integrally formed. The first plate 12 and the second plate 13 The material of the third plate 14 is made of glass or plastic. In the embodiment, the material of the first plate 12 and the third plate 14 is glass, and the material of the second plate 13 is plastic. A plate 12, the second plate 13 and the third plate 14 are joined by uv glue. However, it can be understood that the first plate 12, the second plate 13 and the third plate 14 may be joined by other chemical bonding agents, or may be joined by hot pressing or other bonding methods. . The first circuit 15 extends to the receiving cavity ln. The second circuit "also extends to the accommodating cavity (1), and the k circuit 16 is not connected to the first circuit (10). In the embodiment, the first circuit 15 and the second circuit 16 are located The first plate 12 is formed by depositing a metal layer by sputtering and then patterning the first circuit 15 and the second circuit 16 by development. H5209.doc -9- 200821553 The circuit 15 includes a 筮 ^ ^ . 一 an electrode 15 丨 and a second electrode 丨 52. The brother a board 13 and the third board 14 , 10 , 々 〜 〜 、 、 、 、 、 、 、 、 、 、 、 、 、 、 、 The first electrode 151 of the first electric circuit 15 is not covered by the second plate 13, that is, the whistle flute is not the same as the two kings, and the circuit is 15 The first electrode 151 is used in the road rolling, and can be used to connect an external device. The second electrode 152 of the circuit 15 is located in the accommodating cavity (1) and has an annular shape. The first circuit j 5 - " The ring formed by the electrode 152 is slightly smaller than the periphery of the accommodating cavity 1U, and has a gap. The second circuit 16 includes a -th electrode (6) a second electrode 162. The position of the first electrode 16 of the second circuit 16 is relative to the first electrode (5) of the first circuit 15, so that the upper end of the first electrode 161 of the second circuit 16 is also exposed to In the air, it can be used to connect an external device. The second electrode 162 of the second circuit 16 is located in the accommodating cavity 111, and is a circular electrode. The second electrode 162 of the second circuit 16 The circular electrode is slightly smaller than the ring formed by the second electrode 152 of the first circuit 15, that is, the second electrode 152 of the first circuit 15 is surrounded by the second electrode 1 62 of the second circuit 16. The signal transmitting component 17 is moved in the accommodating cavity ln to turn on the second electrode 152 of the first circuit 15 and the first electrode 162 of the second circuit φ at different positions. In this embodiment, The signal transmission component I is a mercury ball. However, it can be understood that the material of the signal transmission component 17 can also be other liquid metal such as Ga-In-Sn alloy, or other low melting alloy metal, or solid state. Metal, or electrical conductivity, or oil, etc. The body 容 is accommodated in the cavity 在. In this embodiment 115209.doc -10- 200821553
中’該第三板14更包括一注入孔141，用以注入該液體以 至"亥谷置腔111中。該液體1 8係為界面活性劑、有機 '容叫 或潤滑劑或其他低表面張力之液體，其中該界面活性劑可 以是聚合丙烯酿胺凝膠（SDS)或肥皂水，該有機溶劑可以 是酒精或丙酮，該潤滑劑可以是油類。本發明需要加進該 液體18之原因為，由於該訊號傳遞元件17會和該本體"與 該第一電路15之第二電極152及該第二電路16之第二電極 162之間有一定的吸附力及接觸磨擦’這種效應會嚴重影 響該訊號傳遞元件17在該容置腔丨丨丨_的移動能力，甚至 可能完全吸附。經由實驗發現當在該容置腔丨丨丨中置入少 量的低表面張力之流體，或者少量的油類可以產生潤滑= 效果，可以使該訊號傳遞元件17在該容置腔lu中的移動 性大幅知：升近而提昇該感測器1的敏感度。 本實施例之作動方式及原理如下。該第一電路15之第二 電'152可視為一線電阻’其理論電阻值大小為 A (R屯阻值大小；10 :該第二電極152所使用材料之 電阻係數；L:該第二電極152之總長度；A:該第二電極 152的厚度乘以其寬度)。該第二電路“之第二電極⑹連 接至接地端，其使用盡可能大的面積以降低電阻值，減少 對量測結果的影響。當該傾斜及振動感測以轉動或擺動 時，5亥錢傳遞元件17會受到重力影響而沿著該容置腔 ⑴之邊緣州二㈣之透細之邊緣)滾動或移：腔 —不同位置料通㈣—電㈣之第二電極152及該第 -電路16之第二電極162 '經由該第—電路μ之第—電極 115209.doc -11 - 200821553 15 1及該第二電路16之第一電極162即可量測到該訊號傳遞 元件17於不同位置處之電阻值，再經過適當的換算，可得 到該傾斜及振動感測器1轉動角度與電阻值之間的線性關 係0 fThe third plate 14 further includes an injection hole 141 for injecting the liquid into the chamber 111. The liquid 18 is a surfactant, an organic 'capacitance or lubricant or other low surface tension liquid, wherein the surfactant may be a polymerized acrylamide gel (SDS) or soapy water, and the organic solvent may be Alcohol or acetone, the lubricant may be an oil. The reason why the liquid 18 needs to be added to the present invention is that there is a certain relationship between the signal transmission element 17 and the second electrode 152 of the first circuit 15 and the second electrode 162 of the second circuit 16 The adsorption force and the contact friction 'this effect will seriously affect the ability of the signal transmission element 17 to move in the accommodating chamber ,, and may even be completely absorbed. It has been experimentally found that when a small amount of low surface tension fluid is placed in the accommodating chamber, or a small amount of oil can produce a lubrication=effect, the movement of the signal transmitting element 17 in the accommodating chamber lu can be made. Sexually known: the proximity is increased to increase the sensitivity of the sensor 1. The mode and principle of operation of this embodiment are as follows. The second electric '152 of the first circuit 15 can be regarded as a line resistance 'the theoretical resistance value is A (R屯 resistance value; 10: the resistivity of the material used for the second electrode 152; L: the second electrode) The total length of 152; A: the thickness of the second electrode 152 multiplied by its width). The second electrode (6) of the second circuit is connected to the ground terminal, which uses as large an area as possible to reduce the resistance value and reduce the influence on the measurement result. When the tilt and vibration sensing are rotated or oscillated, The money transfer element 17 is subjected to gravity and rolls or moves along the edge of the edge of the second (four) edge of the accommodating cavity (1): the cavity - the second electrode 152 of the different position feed (four) - electricity (four) and the first - The second electrode 162 ′ of the circuit 16 can measure the signal transmitting component 17 differently via the first electrode 115209.doc -11 - 200821553 15 1 of the first circuit μ and the first electrode 162 of the second circuit 16 The resistance value at the position, and then the appropriate conversion, can obtain the linear relationship between the rotation angle of the tilt and vibration sensor 1 and the resistance value.
參考圖3，顯示本發明傾斜及振動感測器之第二實施例 之組合後前視示意圖。該傾斜及振動感測器3包括一本體 31、一第一電路35、一第二電路36、一訊號傳遞元件37及 一液體38。本實施例之該本體31、該訊號傳遞元件37及該 液體38係分別相同於該第一實施例之該本體丨丨、該訊號傳 遞元件17及該液體18。 該第一電路35包括一第一電極351、一第二電極352及一 第二電極353。該第-電路35之第一電極351及第三電極 353之上端會暴露至空氣中，而可以用以連接一外界裝 置。該第一電路35之第二電極352係為一環狀外形，其二 端分別連接該第一電極35丨及該第三電極353。 u第電路36包括-第—電極361及—第二電極362。該 第二電路36之第-電極361之上端也會暴露至空氣中，而 可以用以連接—外界裝置。該第二電路36之第二電極362 係為一環狀外形。該第二電路36之第二電極如所形成之 %係略小於該路35之$二電極⑽所形成之環。 在本實施例中，該笫-φ Μ〜 乜 弟一電路36之第二電極362係為一環 狀外形，其可視為一線電 ^ ㈣ 這種設計可以使原本隨角度 支化的電阻值增加一倍，因為 > U為艾化s提鬲了所以可以使 測的解析度提高。 〜 115209.doc * 12 - 200821553 參考圖4 ’顯示本發明傾斜及振動感測器之第三實施例 之組合後削視示意圖。該傾斜及振動感測器4包括一本體 41 第一電路45、一第二電路46、一訊號傳遞元件47及 一液體48。本實施例之該本體41、該訊號傳遞元件47及該 /夜體48係分別相同於該第一實施例之該本體“、該訊號傳 遞元件17及該液體18。 Γ: 5亥第一電路45包括一第一電極451、一第二電極452及一 第一電極453。s亥第—電路45之第一電極451及第三電極 45 3之上端會暴露至空氣中而可以用以連接一外界裝 置該第电路45之第二電極452係為一環狀外形，其二 端分別連接該第一電極45丨及該第三電極453。 該第二電路46包括-第一電極461及一第二電極似。該 第二電路46之第一電極461之上端也會暴露至空氣中，而 可以用以連接一外界裳置。該第二電路46之第二電極462 係為一圓形電極。該第二電路46之第二電極偏之圓形電 極係略小於該第-電路45之第二電極452所形成之環。 當該訊號傳遞元件47連接該第—電路45第：電:452及 該第二電路46第二電極462時，由該第一電路^之第 極451或是第三電極453之任—電極與該第二電路㈣一電 極461進行㈣即可在角度變化時量得電阻變化量 然而，不同於上述該第一實施例及該第二實施里例單吨採 用電阻量測的方式，本實施例之感測器何 壓量測電壓值的變化。針對該第一 °”加電 ^ _ 〈弟一雷搞1 及弟三電極453施加一壓差使該第一 疋弟二電極452Referring to Figure 3, there is shown a combined front elevational view of a second embodiment of the tilt and vibration sensor of the present invention. The tilt and vibration sensor 3 includes a body 31, a first circuit 35, a second circuit 36, a signal transmitting component 37, and a liquid 38. The body 31, the signal transmitting component 37 and the liquid 38 of the embodiment are identical to the body stack, the signal transmitting component 17 and the liquid 18 of the first embodiment, respectively. The first circuit 35 includes a first electrode 351, a second electrode 352, and a second electrode 353. The upper ends of the first electrode 351 and the third electrode 353 of the first circuit 35 are exposed to the air, and can be used to connect an external device. The second electrode 352 of the first circuit 35 has an annular shape, and its two ends are respectively connected to the first electrode 35A and the third electrode 353. The first circuit 36 includes a -th electrode 361 and a second electrode 362. The upper end of the first electrode 361 of the second circuit 36 is also exposed to the air, and can be used to connect the external device. The second electrode 362 of the second circuit 36 has an annular shape. The second electrode of the second circuit 36 is formed to be slightly smaller than the ring formed by the two electrodes (10) of the path 35. In this embodiment, the second electrode 362 of the 笫-φ Μ 乜 一 电路 circuit 36 is an annular shape, which can be regarded as a line of electric power. (4) This design can increase the resistance value originally branched with the angle. Double, because > U is Aihua s, so you can improve the resolution of the test. ~ 115209.doc * 12 - 200821553 Referring to Figure 4', there is shown a combined rear view of the third embodiment of the tilt and vibration sensor of the present invention. The tilt and vibration sensor 4 includes a body 41, a first circuit 45, a second circuit 46, a signal transmitting component 47, and a liquid 48. The body 41, the signal transmitting component 47 and the/night body 48 of the embodiment are respectively identical to the body of the first embodiment, the signal transmitting component 17 and the liquid 18. Γ: 5 hai first circuit 45 includes a first electrode 451, a second electrode 452, and a first electrode 453. The upper end of the first electrode 451 and the third electrode 45 3 of the circuit 45 are exposed to the air and can be used to connect The second electrode 452 of the first circuit 45 is an annular outer shape, and the two ends are respectively connected to the first electrode 45A and the third electrode 453. The second circuit 46 includes a first electrode 461 and a first The upper end of the first electrode 461 of the second circuit 46 is also exposed to the air, and can be used to connect an external body. The second electrode 462 of the second circuit 46 is a circular electrode. The circular electrode of the second electrode 46 of the second circuit 46 is slightly smaller than the ring formed by the second electrode 452 of the first circuit 45. When the signal transmitting component 47 is connected to the first circuit 45: electricity: 452 and When the second electrode 46 of the second circuit 46 is the first electrode 451 or the third of the first circuit The electrode 453 is connected to the second circuit (four) and the electrode 461 (4), and the amount of change in resistance can be measured when the angle is changed. However, unlike the first embodiment and the second embodiment, the resistance is measured in a single ton. The method of measuring, the change of the voltage value of the sensor according to the embodiment, and the first 疋 加 加 弟 弟 弟 雷 雷 及 及 及 及 弟 弟 弟 弟 弟 弟 弟 弟 弟Brother two electrodes 452
Il5209.doc -13- 200821553 兩端有一電壓差，當該訊號傳遞元件47連接該第一電路45 ， 第_電極452及該第二電路46第二電極462時，由分壓定律 可知，當電阻值變化時，所量測到的電壓值也會跟隨變 化。藉此，由該訊號傳遞元件47在不同位置產生的分壓不 同也可達成量測目的。 苓考圖5，顯不本發明傾斜及振動感測器之第三實施例 a整週期轉動之角度·電壓圖。本圖係將該傾斜及振動感 ( 測器 4以 1/8RPS(Revoluti〇ns Per Second)之固定速度旋轉， 做超過360度旋轉所擷取得之角度與電壓變化之曲線，由 圖中角度與電壓之關係，可以估算出該傾斜及振動感測器 4可以擁有約320度之量測範圍，且在此範圍内其電壓與角 度呈現一高度線性關係。 參考圖6，顯示本發明傾斜及振動感測器之第三實施例 於正負140度區間之角度_電壓圖，其中□代表正轉方向之 曲線，▲代表逆轉方向之曲線。本圖係將該傾斜及振動感 G 測器4以1/8RPS之固定速度依正轉方向旋轉，待轉動14〇度 後再逆轉28G度至負14G度所擷取得之角度與錢變化之曲 線’由圖中角度與電壓之關係，可看出在長行程的角度變 化下，其角度與電壓值之關係呈相當線性之變化，且正轉 逆轉之曲線幾乎呈現重合，此即代表該傾斜及振動感測 器4具有相當好的再現性。 參考圖7，顯示本發明傾斜及振動感測器之第三實施例 以0.9度為-步階轉動量之時間_電壓變化量圖，其中實線 代表原始數值曲線，虛線代表訊號處理過後之平均數值曲 115209.doc -14- 200821553 r 線。本圖係為給予該傾斜及振動感測器4單一 〇·9度步階轉 ，動里所里得之時間-電壓變化量曲線，其中每一次轉動步 階停滯時間為2秒，而且在第3個步階後即進行逆轉。由圖 中可以看出每一步階之電壓變化量約為2〇mV左右，且每 步之變化量皆相當穩定，代表在此轉動解析度下該傾 斜及振動感測器4具有良好的敏感度可以量得低於此角度 k化置之變化。另外，由正逆轉中該傾斜及振動感測器4 r 在相同角度位置具有接近的電壓準位，代表該傾斜及振動 感測器4在此小角度移動量下表面摩擦力尚未明顯對該傾 斜及振動感測器4之性能產生影響，還具有良好敏感度以 及再現性。 參考圖8，顯示本發明傾斜及振動感測器之第三實施例 在不同之角速度轉動時之時間-電壓圖，其中x代表角速度 0=1/32RPS時之曲線，其斜率為0·0022 ;〇代表角速度ω = 1/16RPS時之曲線，其斜率為0·0045 ; ▲代表角速度ω I =1/8RPS時之曲線，其斜率為0.009 ; ◊代表角速度ω = 1/4RPS時之曲線，其斜率為〇·〇ΐ69 ; △代表角速度ω = 1/2RPS時之曲線，其斜率為0·0319 ;籲代表角速度ω = 1RPS時之曲線，其斜率為〇·〇547。以1/8RPS(▲所代表之 曲線）為例，理論上，該傾斜及振動感測器4在i/8rps之轉 速下轉動500毫秒（ms)其轉角應為22.5度，而由先前所計算 之每一度電壓變化約為20mV估算，在此轉角下之電壓變 化應當為450mV。與圖8中1/8RPS之曲線比較所實際量得 之電壓變化為445mV(即6V-5.555V)，兩者相當接近。由此 115209.doc -15- 200821553 推估在1/16RPS(〇所代表之曲線）轉速下，轉角減半則其電 壓變化也應當為1/8PRS的一半，斜率之發展也該為1/2, 此結果與圖8所示相吻合。比較圖8所示低於1/8RPS轉速之 曲線都與估計吻合。 此外在高於1/8RPS的速度下，電壓變化斜率開始低於估 a十值’代表该傾斜及振動感測器4在此速度下運作會有延 遲的情形產生，即該訊號傳遞元件47的移動速度會小於整 體該傾斜及振動感測器4之轉動速度，所以無法產生與理 論推估吻合之電壓變化量，推測其原因應為該訊號傳遞元 件47與該本體41的磨擦造成該訊號傳遞元件47運動速度產 生滞後。综合以上可以得知該傾斜及振動感測器4在低於 1/8RPS之角度變化率下可以擁有良好的運作性能，其電 壓-角度變化將呈線性輸出。 上述實施例僅為說明本發明之原理及其功效，並非限制 本發明，因此習於此技術之人士對上述實施例進行修改及 變化仍不脫本發明之精神。本發明之權利範圍應如後述之 申請專利範圍所列。 【圖式簡單說明】 圖1顯示本發明傾斜及振動感測器之第一實施例之分解 圖； 圖2顯示本發明傾斜及振動感測器之第一實施例之組合 後前視示意圖； 圖3顯示本發明傾斜及振動感測器之第二實施例之組合 後前視示意圖； 115209.doc 16 200821553 圖4顯示本發明傾斜及振動感測器之第三實施例之組合 後前視示意圖； 圖5顯示本發明傾斜及振動感測器之第三實施例完整週 期轉動之角度-電壓圖； 圖6顯示本發明傾斜及振動感測器之第三實施例於正負 140度區間之角度-電壓圖； 圖7顯示本發明傾斜及振動感測器之第三實施例以〇 .9度 為步階轉動量之時間·電壓圖；及 圖8顯示本發明傾斜及振動感測器之第三實施例在不同 之角速度轉動時之時間-電壓圖。 【主要元件符號說明】 1 本發明第 一實施例之傾斜及振動感測器 3 本發明第 二實施例之傾斜及振動感測器 4 本發明第 三實施例之傾斜及振動感測器 11 本體 12 第一板 13 弟二板 14 第三板 15 第一電路 16 第二電路 17 訊號傳遞 元件 18 液體 31 本體 35 第一電路 115209.doc -17- 200821553 36 第二電路 37 訊號傳遞元件 38 液體 41 本體 45 第一電路 46 第二電路 47 訊號傳遞元件 48 液體 111 容置腔 131 透孔 141 注入孔 151 第一電路之第一電極 152 第一電路之第二電極 161 第二電路之第一電極 162 第二電路之第二電極 351 第一電路之第一電極 352 第一電路之第二電極 353 第一電路之第三電極 361 第二電路之第一電極 362 第二電路之第二電極 451 第一電路之第一電極 452 第一電路之第二電極 453 第一電路之第三電極 461 第二電路之第一電極 462 第二電路之第二電極 115209.doc -18-Il5209.doc -13- 200821553 There is a voltage difference at both ends. When the signal transmitting component 47 is connected to the first circuit 45, the _ electrode 452 and the second electrode 462 of the second circuit 46, it is known from the voltage division law that when the resistor When the value changes, the measured voltage value will also follow the change. Thereby, the voltage division difference generated by the signal transmission element 47 at different positions can also achieve the measurement purpose. Referring to Fig. 5, a third embodiment of the tilting and vibration sensor of the present invention is shown. This figure is the curve of the inclination and vibration (the detector 4 is rotated at a fixed speed of 1/8 RPS (Revoluti〇ns Per Second), and the angle and voltage change obtained by the rotation of more than 360 degrees are obtained from the angle of the figure. The relationship between the voltages can be estimated that the tilt and vibration sensor 4 can have a measurement range of about 320 degrees, and the voltage and angle exhibit a highly linear relationship within this range. Referring to Figure 6, the tilt and vibration of the present invention are shown. The third embodiment of the sensor is in the angle-voltage diagram of the plus or minus 140 degree interval, wherein □ represents the curve of the forward direction, and ▲ represents the curve of the reverse direction. This figure is the tilt and vibration sense G detector 4 The fixed speed of /8RPS rotates in the forward direction. After the rotation of 14 degrees and then reverses the degree of 28G to minus 14G, the curve of the angle and the change of money is shown by the relationship between the angle and the voltage in the figure. Under the change of the angle of the stroke, the relationship between the angle and the voltage value changes fairly linearly, and the curve of the forward rotation reversal almost coincides, which means that the tilt and vibration sensor 4 has a fairly good reproducibility. The third embodiment of the tilting and vibration sensor of the present invention is shown as a time-voltage variation diagram with a degree of rotation of 0.9 degrees, wherein the solid line represents the original value curve, and the broken line represents the average value of the signal after the signal processing 115209. Doc -14- 200821553 r line. This figure is a time-voltage variation curve obtained by giving the tilt and vibration sensor 4 a single 9·9 degree step rotation, in which each rotation step The stagnation time is 2 seconds, and it is reversed after the third step. It can be seen from the figure that the voltage change of each step is about 2〇mV, and the variation of each step is quite stable, which means The tilting and vibration sensor 4 has good sensitivity under this rotation resolution and can be measured to be lower than the change of the angle k. In addition, the tilt and vibration sensor 4r are at the same angular position by the positive reversal. Having a close voltage level, representing that the surface friction of the tilt and vibration sensor 4 at this small angular movement has not significantly affected the performance of the tilt and vibration sensor 4, and also has good sensitivity and reproducibility. Participation Figure 8 is a timing-voltage diagram showing the third embodiment of the tilting and vibration sensor of the present invention rotated at different angular velocities, wherein x represents a curve at an angular velocity of 0 = 1/32 RPS, and the slope thereof is 0·0022; The curve representing the angular velocity ω = 1/16RPS has a slope of 0·0045; ▲ represents the angular velocity ω I =1/8RPS, the slope of the curve is 0.009; ◊ represents the angular velocity ω = 1/4RPS curve, the slope 〇·〇ΐ69 ; △ represents the curve of the angular velocity ω = 1/2RPS, the slope of which is 0·0319; the curve representing the angular velocity ω = 1RPS, the slope of which is 〇·〇547. Taking 1/8 RPS (the curve represented by ▲) as an example, in theory, the tilt and vibration sensor 4 rotates at a speed of i/8 rps for 500 milliseconds (ms), and its rotation angle should be 22.5 degrees, which is calculated by the previous one. The voltage change per degree is estimated to be about 20 mV, and the voltage change at this corner should be 450 mV. Compared with the curve of 1/8 RPS in Fig. 8, the actual voltage change is 445 mV (i.e., 6 V - 5.555 V), which are quite close. Therefore, 115209.doc -15- 200821553 estimates that at 1/16 RPS (the curve represented by 〇), the voltage change should be half of 1/8PRS when the corner is halved, and the slope development should be 1/2. , this result is consistent with that shown in Figure 8. A comparison of the curves below 1/8 RPS shown in Figure 8 is consistent with the estimate. In addition, at a speed higher than 1/8 RPS, the slope of the voltage change begins to be lower than the estimated value of ten, which represents a situation in which the tilting and vibration sensor 4 operates at this speed, that is, the signal transmitting element 47 The moving speed will be smaller than the overall tilting and the rotational speed of the vibration sensor 4, so the amount of voltage change that coincides with the theoretical estimation cannot be generated. The reason is that the signal transmission component 47 and the body 41 are frictionally caused by the signal transmission. The movement speed of the element 47 is delayed. In summary, it can be known that the tilt and vibration sensor 4 can have good operational performance at an angular rate of change lower than 1/8 RPS, and the voltage-angle change will be linear. The above embodiments are merely illustrative of the principles and effects of the present invention, and are not intended to limit the scope of the present invention. The scope of the invention should be as set forth in the appended claims. BRIEF DESCRIPTION OF THE DRAWINGS FIG. 1 is an exploded perspective view showing a first embodiment of a tilting and vibration sensor of the present invention; FIG. 2 is a front elevational view showing a combination of a first embodiment of the tilting and vibration sensor of the present invention; 3 is a schematic front view showing a combination of a second embodiment of the tilting and vibration sensor of the present invention; 115209.doc 16 200821553 FIG. 4 is a schematic front view showing a third embodiment of the tilting and vibration sensor of the present invention; Figure 5 is a view showing the angle-voltage diagram of the full cycle rotation of the third embodiment of the tilt and vibration sensor of the present invention; Figure 6 is a view showing the angle-voltage of the third embodiment of the tilt and vibration sensor of the present invention in the range of plus or minus 140 degrees. Figure 7 shows a time-voltage diagram of a third embodiment of the tilt and vibration sensor of the present invention with a step rotation of 〇9 degrees; and Figure 8 shows a third embodiment of the tilt and vibration sensor of the present invention. For example, the time-voltage diagram at different angular speeds. [Description of main component symbols] 1 tilting and vibration sensor 3 of the first embodiment of the present invention tilting and vibration sensor 4 of the second embodiment of the present invention 4 tilting and vibration sensor 11 of the third embodiment of the present invention 12 First board 13 Second board 14 Third board 15 First circuit 16 Second circuit 17 Signal transmission element 18 Liquid 31 Body 35 First circuit 115209.doc -17- 200821553 36 Second circuit 37 Signal transmission element 38 Liquid 41 Main body 45 first circuit 46 second circuit 47 signal transmitting element 48 liquid 111 accommodating cavity 131 through hole 141 injection hole 151 first electrode first electrode 152 first circuit second electrode 161 second circuit first electrode 162 The second electrode 351 of the second circuit The first electrode 352 of the first circuit The second electrode 353 of the first circuit The third electrode 361 of the first circuit The first electrode 362 of the second circuit The second electrode 451 of the second circuit First electrode of circuit 452 second electrode of first circuit 453 third electrode of first circuit 461 first electrode of second circuit 462 second circuit The second electrode 115209.doc -18-