TW200821034A - Dehumidification method and dehumidifier system - Google Patents

Abstract

To provide a simple dehumidification method which can reduce the dew point of dehumidified air without increasing the size or changing the operating conditions of the dehumidifier system, and a dehumidifier system to implement the method. A dehumidification method comprises dividing the opening side of a dehumidification rotor comprising a carrier formed with aeration caves in the direction of a revolving shaft and a dehumidification agent supported on the carrier into a dehumidification zone, a regeneration zone, and a cooling zone, supplying an air to be processed to the dehumidification zone while rotating the dehumidification rotor, supplying regeneration gas to the regeneration zone, and supplying coolant gas to the cooling zone, to continuously dehumidify the air to be processed and regenerate the dehumidification agent, a functional zone being provided between the regeneration zone and the cooling zone, between the cooling zone and the dehumidification zone, or between the dehumidification zone and the regeneration zone, and the aeration gas being supplied to the functional zone.

Description

200821034 IX. Description of the invention: [Technical field to which the invention pertains] mt: It is clear about the supply of air for the dry welding* gas used in the manufacture of raw materials for drying, and the 心' &> W heart target/本The work of rolling and removing 4 builds the dehumidification of the air conditioner, and manufactures the fat-guided limbs, liquid crystals, electronics, etc. ^ + * Air removal towers, material 4 The hole in the soldier's handling device, I, Luo, Temple, right The dehumidification device of the air to be treated, and more, f ^ ^ ... / /, the dehumidification of the dehumidification side, the presence of the dehumidifier with the carrier, "exhibition, sub-rotation of the dehumidification roller, the sub The air is treated, and at the same time, the "wet moisture contains water continuously removes the @ ^ + and the water/knife contains the dehumidifying agent, and the dehumidification method and the dehumidifying device for the method are dehumidified. y, only the dehumidification side is fine. [Prior Art] In the semi-ΐτ body, the film of the dream wafer, etc., is not finished, and the influence of the oxidation is extremely large. Therefore, in order to reduce the formation of the film, the water in the air such as the room is placed in the water. (& need to remove the manufacturing equipment to remove the air drying nitrogen in the manufacturing device; the water; 7 method, mainly using the dry forced method, because of the method of dehumidification. The amount of moisture can be made very low and the clothes are placed outside, so the cost of N2 pressure s - 疋轱 (the cost of dry nitrogen is ii#f 3Wlng AdsGrptiQn (PAS; nitrogen generator)) On the one hand, it is necessary to manage the equipment room. On the one hand, the dehumidification method does not require the history of 3 γ rolling/thinking. In addition, compared with the use, it is not necessary to manage the oxygen concentration and use the method of purifying the nitrogen. /Invention Manual Axis Grasping 10/96122874 6 200821034 Low 0% Therefore, in recent years, there has been research on a dehumidifying apparatus for the purpose of dehumidifying a semiconductor manufacturing apparatus room, etc. The dehumidifying apparatus is, for example, Patent Document No. 2004-000824 of Patent Document i. The dehumidifying apparatus disclosed in the publication includes a drum having a rotating means for carrying a tannic acid obtained by substituting one or a plurality of elements selected from La, Nd, Ce, and Pr in a part of the hydrophilic zeolite. The adsorbent is composed of the adsorbent; and the rotating region of the drum is divided into an adsorption zone and a regeneration zone, and is provided with a path for supplying the gas to be treated to the adsorption zone, and supplying the gas processed in the adsorption zone to the target The path of the space and the path for supplying the regeneration gas to the regeneration zone. For example, the method of obtaining the drying line for the de-service is as follows: (1) == wet rolling thickness, or increasing the diameter of the dehumidification drum 4 to remove the dehumidification roller 2 The method of increasing the processing area by increasing the number of squares; (1) reducing the surface velocity through which the air passes, reducing the amount of processing per unit time, and (ill) raising the regeneration temperature and increasing the regeneration efficiency. A dehumidification apparatus including two dehumidification rollers is disclosed in Japanese Laid-Open Patent Publication No. Hei. No. Hei. No. Hei. No. Hei. No. Hei. No. Hei. Specifically, it is said that the method of the invention (the invention is intended to solve the problem), but the above method (1) increases the processing area, and increases the dehumidification device 3 Χ 2 Χ / invention manual (supplement) 辄; ί 0 / 96; ι22874 200821034 method, because =:= 'the above (il) reduce the amount of processing per unit time of the amount of processing, so it is necessary to increase the temperature of the dehumidification device, so there is a need for more energy, increased operation The cost is to provide a dehumidification method that reduces the dew point of the dehumidified air, and a dehumidification device that is even more effective. The omnipotent party (means for solving the problem): The present invention is completed in order to solve the above-mentioned problems of the prior art 'the present invention' (1) and (2). (1) By providing a functional area between the re-product areas, and supplying the functional area with cooling, dry useless or cooling and drying functional areas for circulating gas; or cooling: setting a functional area between the dehumidifying area And supplying cooling to the functional area; , using or cooling and drying the functional area to distribute gas; or providing a functional area between the dehumidification zone and the regeneration zone, and supplying the heating functional zone to the functional zone for circulation; This can increase the adsorption capacity of the dehumidifying agent and reduce the dew point of the dehumidified air; (2) by supplying the functional area to the functional zone, the surface velocity is set to be faster than other regions, and the dehumidification air can be further improved. Dew point effect, etc. In the dehumidification method of the invention (1), the opening surface of the dehumidification drum formed by the carrier having the ventilation hole formed in the direction of the rotation axis and the dehumidifying agent carried on the carrier is divided into a dehumidification zone and a regeneration zone. And the cooling zone, in the 312XP / invention manual (supplement) / 96-1 〇 / 96122874 8 200821034, the dehumidification drum is rotated while supplying the treated air to the dehumidification zone, and supplying the regeneration gas to the "Hai regeneration zone, The cooling zone supplies cooling gas, and the dehumidification method of dehumidifying the treated air and regenerating the dehumidifying agent; providing an organic energy zone between the regeneration zone and the cooling zone; supplying the zone to the zone for cooling or drying the dehumidification The functional area of the drum is circulated; the surface velocity of the circulating gas supplied to the functional zone is set to 〇·5~i 〇 times the surface velocity of the cooling gas supplied to the cold heading zone; The ratio of the opening area of the dehumidifying drum is set to 〇·003 to 0·07.

Further, in the dehumidifying method of the present invention (2), the opening surface of the dehumidifying drum comprising the carrier having the t gas two holes formed in the direction of the rotation axis and the dehumidifying agent supported on the carrier is divided into a dehumidification zone, a regeneration zone and a cooling zone, wherein the dehumidification drum is rotated while supplying the treated air to the dehumidification zone, and the regeneration zone is supplied with regeneration gas, the cooling zone is supplied with cooling gas, and the treated air is continuously dehumidified and a dehumidification method for regenerating _; an organic energy region is disposed between the cooling zone and the dehumidification zone; the functional zone is supplied for cooling or drying the flow of gas, and the functional zone of the dehumidification drum supplies the function to the functional zone The speed of the surface of the body is set to 〇. 5~1〇 times the surface speed of the cooling gas supplied to the cooling zone; the area of the functional zone is opened to the dehumidification drum: 〇. 003~0. 07. The imaginary horse system will be formed by a devitrification method 3UXP/invention specification (supplement)/96-10/96122874 9 200821034 of the invention (3) in the direction of the rotation axis The opening surface of the dehumidification drum formed by the dehumidifier on the carrier is divided into a dehumidification zone, a regeneration zone and a cooling zone, and f is supplied to the dehumidification zone while the dehumidification zone is rotated. a dehumidification method for continuously dehumidifying the treated air and regenerating the dehumidifying agent by supplying a cooling gas to the cooling zone; providing an organic energy zone between the dehumidifying zone and the regeneration zone; and supplying the zone to the remote unit for heating The gas flow in the functional zone of the dehumidification drum; the surface velocity of the circulating gas supplied to the functional zone in the (4)% zone is set to 〇·5 to 1〇 times the surface velocity of the regeneration gas supplied to the regeneration zone; The ratio of the area of the area to the opening area of the dehumidifying drum is set to be the same. The dehumidifying apparatus of the invention (4) is provided with:

The dehumidification drum is a dehumidification drum formed by a carrier having a venting cavity formed in a direction of a rotating shaft and a dehumidifying agent supported on the carrier, and the opening surface thereof is divided into a sub-depositor by a knife sub-assembly. a dehumidification zone, a regeneration zone, a cooling zone, and a functional zone disposed between the regeneration zone and the cooling zone; the dividing member; a rotating means for rotating the dehumidifying drum; - a supply means for supplying the treated air to the dehumidifying zone; a means for supplying a regeneration gas to the regeneration zone; a third supply means for supplying a cooling gas to the cooling zone; a heating means disposed in front of the regeneration zone and heating the regeneration gas; and 312XP/Invention Manual ()) /96-10/96122874 10 200821034, the functional area of the gas supply means, which supplies the functional area to the circulation of gas in the functional area, where the ratio of the area of the functional area to the opening area of the dehumidification drum is 0·003~ 0·07. In addition, the dehumidifying apparatus of the present invention (5) includes: a dehumidifying drum which is dehumidified by a carrier in which a ventilating cavity is formed in a direction of a rotating shaft and a dehumidifying agent carried on a carrier a drum, the open surface of which is divided into: a dehumidification zone, a regeneration zone, a cooling zone, a functional zone between the cooling zone and the dehumidification zone; the dividing member; a rotating means for rotating the dehumidifying drum; a means for supplying a treated air to the dehumidification zone; a supply means 'which supplies a regeneration gas to the regeneration zone; a first supply means for supplying a cooling gas to the cooling zone; and a heating means 'which is disposed in front of the regeneration zone, And heating the regeneration gas; and the functional area circulation gas supply means, wherein the functional area is supplied with the gas flowing through the functional area; wherein the ratio of the area of the functional area to the opening area of the dehumidification roller is 0·003~0·07 〇 Further, the dehumidifying apparatus according to the invention (6) includes: a dehumidifying drum which is a carrier in which a ventilation hole is formed in a direction of a rotation axis, and a carrier that is carried on the carrier The dehumidification drum composed of the wet agent has an open surface divided into a divided member: a dehumidification zone, a regeneration zone, a cooling zone, and a 312XP/invention specification (supplement)/96-1 〇/96122874 11 200821034 placed in the dehumidification zone. a functional zone with the regeneration zone; the dividing member; a rotating means for rotating the dehumidification drum; a first supply means for supplying the treated air to the dehumidification zone; and a second supply means for supplying regeneration to the regeneration zone a second supply means for supplying a cooling gas to the cooling zone; a heating means disposed in a portion of the regeneration zone and heating the regeneration gas; and a circulation gas supply means in the casing region, wherein the functional zone is supplied to the functional zone And a second heating means for heating the gas in the functional area; wherein the ratio of the area of the functional area to the opening area of the dehumidifying drum is 〇·003~0. 〇7 〇 (effect of the invention) according to the present invention Providing a dehumidifying method capable of reducing the de-:: oxygen way point by a simple method without increasing the size of the dehumidifying device and not changing the operating condition of the dehumidifying device; Dehumidifying device for carrying out the dehumidifying method [Embodiment] A dehumidifying method according to a first aspect of the present invention will be described with reference to FIG. FIG. 2 is a view showing a form of a wet roll provided to carry out the dehumidification method according to the first aspect of the present invention, and FIG. 2 is a view showing a form of a dehumidification device for carrying out the second method of the present invention. "Arrangement diagram of the split member when viewed from the same side of the open side. Fig! 12 312»v invention manual (supplement) / 96.6122874 200821034 Order, the dehumidification roller is installed by the carrier and the center of the dehumidification roller. = The dehumidification of the grip is formed in the venting cavity, and the opening 3 of the venting cavity is formed in the dehumidifying roller. The faces 4a and 4b have a 仏 and another opening face 45 which serve as an inlet and outlet for the dehumidifying open face milk body, and the ventilating space becomes a clean path of air. ^ In the ventilation cavity, make the 诵 _ _ A, 、;, L hunted by the two rolls or gas in the poem, s # 斤 contact with the dehumidifier, the water or gas of the water gossip, and the desiccant The cutting edge surface 4a is divided into a dehumidifying zone and a wafer by the first dividing member 6 and the opening of the opening surface 4b by the second opening 7 and the regeneration zone. 9. Functional area 10. The dehumidification zone 7 dehumidifies the moisture in the air to be treated by removing moisture from the air to be treated, and dehumidifies the dehumidifier which dehumidifies the water to be treated, and regenerates the dehumidifier. The cold portion 9 cools the dehumidified dehumidification. Agent. The functional zone is ventilated by the flow of gas in the functional zone. In addition, the first dividing component = the second dividing member is 'fixed in the roll of the dehumidifying device 20 in FIG. 2': the box 21 +, and is close to the dehumidifying drum 1 to the extent that it does not hinder the rotation of the dehumidifying drum i . Then, the dehumidifying drum i is set in the rotatable state in the drum box 21 of the 5th dehumidifying device 2A via the rolling shaft 5. In FIG. 2, the dehumidifying apparatus 20 is: the dehumidifying drum 图 shown in FIG. 1, the drum box 21 rotatably provided in the dehumidifying drum i, the drum shaft 5, the first dividing member 6a, and the second dividing member 6b. First supply machine 2 first supply unit 23, third supply unit 24, heating device 25, and not shown 312XP/invention specification (supplement)/9640/96122874 13 200821034 j = regenerative motor of wet drum i Composition. Further, in Fig. 2, the position of the first division member 6a in the cylinder head 21 is indicated by a broken line. Further, the dehumidifying apparatus 2G is provided with a processed gas supply pipe 26 that connects the first supply machine 22 and the drum tank 21, and a dehumidified air exhaust pipe 27 that discharges dehumidified air from the dehumidifying zone 7. a second regeneration gas supply pipe 28 connecting the second supply machine 23 and the heating device 25, and a second regeneration gas supply pipe 29 connecting the heating device 25 and the drum tank 21 for discharging from the regeneration zone 8 a regeneration zone exhaust gas exhaust pipe of the regeneration zone exhaust gas, a cooling gas supply port connecting the third supply machine 24 and the drum tank 21, and a cooling zone exhaust gas discharging the cooling zone exhaust gas from the cooling zone 9 The exhaust pipe 32, the functional zone circulating gas supply pipe 33 for supplying the functional zone 10 with the gas flowing through the functional zone, and the functional zone exhaust gas exhaust pipe % for discharging the gas from the functional zone discharge. In Fig. 3, (3-1) is a view when the dehumidification roller} is viewed from the opening face 4a side, and (3-2) is a view when the dehumidification roller 1 is viewed from the opening face 4b side. The opening face 4a is sequentially divided by the first dividing member 6a in the rotation direction 38 of the dehumidifying drum i into the dehumidifying zone 7, the regeneration zone 8, the machine b zone 1 and the cooling zone 9. Further, the opening surface 4b is sequentially divided by the second dividing member 6b in the rotation direction 38 of the dehumidifying drum 1 into the dehumidification zone 7, the regeneration zone 8, the functional zone 1 and the cooling. District 9. The position of the first divided member 6a in (3_υ, and the position of the second divided member 6b in (3-2) is bilaterally symmetrical. The dehumidifying method according to the first aspect of the present invention is implemented using the dehumidifying apparatus 2 as follows. Internal treated air A such as a clean room containing moisture, 312XP / invention specification (supplement) / 96-10/96122874 14 200821034 supplied to the dehumidification drum j by the first supply machine 22, then processed The air A passes through the dehumidifying drum C: contacts the dehumidifying agent, so that the water in the treated air A is moved by the movement, so that the treated air A is dehumidified. The moisture B' is removed from the dehumidifying drum! The dehumidification zone 7 is discharged through the industrial exhaust pipe 27 and sent back to the clean room or the like. The gas is second: the dehumidifying agent that absorbs moisture in the dehumidification zone 7 will be wetted by the wetness With the rotation of the same, it is moved to the regeneration zone. Then, the regeneration gas E is supplied to the heating crucible 25 by the /two supply machine 23, and the heating device 25 is heated and supplied to the regeneration drum of the dehumidification drum! The regeneration gas E makes the dehumidification by contacting the dehumidifying agent Divided into the regeneration gas E. Thus, the desiccant is dehumidified. The regeneration zone discharge gas F is absorbed, and from the regeneration zone 8 of the dehumidification drum i, the exhaust gas exhaust pipe 3 is passed through the regeneration zone. The discharge is external. Further, the (4) which has been dehumidified in the regeneration zone 8 is moved to the functional zone i" by the rotation of the (4) drum 1. Then, the circulation is performed by the functional zone not shown. a gas supply device that supplies a flow of gas g to the functional zone 10' of the dehumidification drum 1 to cool the dehumidification drum, the flow of the gas G in the functional zone, and the desiccant by contacting the dehumidified dehumidifier The heat or moisture is transferred to the functional zone to circulate the gas G, and thus the desiccant is cooled or dried. The gas H is absorbed from the functional zone of the heat of the dehumidifier, from the functional zone 1 of the dehumidification drum 1. The exhaust gas exhaust pipe 34 is discharged to the outside through the functional zone. Further, the dehumidifying agent cooled in the functional zone 1 藉 by the 312XP/invention specification (supplement)/96- 10/96122874 % 200821034 The rotation of the wet roller i moves to the cooling zone 9 Then, the cooling gas is supplied to the cooling zone of the dehumidifying drum 1 by the third supply unit 24. The desiccant is further cooled by contacting the cooling gas C with the desiccant. The absorption is absorbed. The hot cooling zone discharge gas D of the dehumidifying agent, from the cooling zone 9 of the dehumidifying drum 1, through which the exhaust gas exhaust pipe 32 is discharged to the outside. The second γ is cooled in the cooling zone 9. The dehumidifying agent is moved to the dehumidifying zone 7 by the rotation of the dehumidifying drum 1, and is used again for dehumidification of the treated air/gas A. Therefore, by supplying the treated air A to the dehumidifying drum 、, The regeneration gas E, the circulation gas G and the cooling gas c in the functional region, and the «dehumidification roller 1 are continuously or intermittently rotated, and the treated air A can be continuously dehumidified, when the function is in the functional zone 10 When the circulation of the gas in the functional area is supplied, the surface velocity of the gas flowing through the functional zone to the functional zone is set to be twice the surface velocity of the cooling gas supplied to the cold zone. Preferably, the surface velocity of the gas flowing through the functional zone to the functional zone is set to be 7 times the surface velocity of the cooling gas supplied to the cooling zone, especially 2 to 5 ΐ ίί. By supplying the functional zone with the surface velocity of the gas flowing through the functional zone. • Within the above range, the moisture in the treated air enthalpy can be increased. 甬: The sub-decrease reduces the dew point of the 5 deg. In addition, if the surface velocity of the gas flowing through the functional area is too high, it is difficult to obtain a reduction in the dehumidified air Β, :::: The effect of the service is 1 and vice versa. If it is too fast, it may occur. Dehumidification, detachment, or damage to the drum due to vibration, or the use of circulated gas in the functional area of the 312 ΧΙ > / invention manual (supplement) / 9640/96122874 16 200821034 The function area 1 〇 supply the machine ^ The function H 10 area of the roll-off w door • face - except ' ^ «, D 1 ® ®;:; b county hong 々 & & 叫 叹 叹 叹疋为〇· 003~〇· 07 〇 can positive 10 area ratio of the opening area of the dehumidification roller'

Two: Γ.05' is especially good at ~0.03. By setting the area ratio of the machine to within the above range, the amount of moisture to be treated can be increased, and the dew point of the dehumidified air enthalpy can be lowered. If the area of the function & is too small, it is difficult to obtain the present invention which lowers the dew point of the dehumidified air. If it is too large, since the area of other areas becomes too small, the dehumidification efficiency is lowered. In the dehumidification method of the first aspect of the present invention, the opening surface of the dehumidification drum formed of the carrier having the ventilation hole formed in the direction of the rotation axis and the dehumidifying agent supported on the carrier is divided into a dehumidification zone, The regeneration zone and the cold zone supply the treated dehumidification zone with the treated air while rotating the dehumidification drum, supply the regeneration gas to the regeneration zone, supply the cooling gas to the cooling zone, and continuously dehumidify the treated air and the regenerative dehumidifying agent. a dehumidification method; an organic energy zone is disposed between the regeneration zone and the cooling zone; the functional zone is supplied with a flow of gas for cooling the functional zone of the dehumidification drum; and the surface velocity of the gas flowing through the functional zone is supplied to the functional zone , set to 〇·5~1〇 times the surface speed of the cooling gas supplied to the cooling zone; and set the ratio of the functional area to the opening area of the dehumidifying drum 312ΧΡ/invention specification (supplement)/96- 10/96122874 17 200821034

Referring to FIG. 4, the dehumidification zone, the _ or the morphological example shown in (4-1) of FIG. 4 are all provided with the functional zone, the j regeneration zone, the functional zone, and the shape of the cooling zone. A division member arrangement view as viewed on the opening surface and the 4a side. The dehumidification method of the first aspect of the present invention provides the functional zone between the regeneration zone and the cooling zone, and the so-called "the functional zone is provided between the regeneration zone and the cooling zone", including the opening of the dehumidification drum. The surface is as shown in (i) the morphological example shown in (34) of FIG. 3, 'in the regeneration zone 8 and the cooling zone g, and as shown in (ii) FIG. 4 (4-2). Between the zone 8 and the cooling zone 9, only a part of the functional zone is provided. As shown in the example of (4-2) in Fig. 4, between the regeneration zone 8 and the cooling zone 9, there is a portion where the functional region 10 is provided (a portion indicated by the symbol 41) and an unset portion. (The portion indicated by the symbol 42). Further, in the embodiment shown in (4-3) of Fig. 4, 10 is provided in a part of the regeneration zone 8 and the cooling zone 9 in the functional zone. In addition, in any of the embodiments of the embodiment shown in FIG. 4, the regeneration zone 8 is adjacent to the boundary of the cooling zone 9, or the functional zone 1 is disposed on the boundary between the regeneration zone 8 and the cooling zone 9. However, the functional area 10 may be provided away from the boundary of the regeneration zone 8 and the cooling zone 9 without damaging the effects of the present invention. That is, the functional region 10 can be provided in the vicinity of the boundary between the regeneration zone 8 and the cooling zone 9 without damaging the effects of the present invention. Therefore, in the present invention, "providing the functional region between the regeneration zone and the cooling zone" also includes "in the scope of not impairing the effects of the present invention, in the 312XP/invention specification (supplement)/96-10 /96122874 200821034 The regeneration zone and the functional zone of the cold zone are shaped like: the functional zone is set near the boundary. In the case of (4-2) in FIG. 4, the shape of the defect, the shape, and the like are formed in the vicinity of the central angle of the rectangular ridge 7 shown in (4) of FIG. The dehumidification method of the ladder form can be considered in consideration of the dehumidification efficiency, and the machine is remotely selected. Further, the first shape of the present invention is only protruded toward the side of the cooling zone 9: as shown in 4 (4_3), it is set only to The regeneration zone 8 side protrudes; = can be as wide as 6), and the number of regeneration zones 8 and the cooling zone can be set as shown in the figure " one:) has two functional zones 1G. 4-5) and (Η), there are 2, and the "opening surface area of the dehumidifying drum" in the present invention means: when the dehumidifying roller is viewed from the side of the opening surface, except for the drum shaft 5 The area of the knives: the area of the portion 39 indicated by the slash in the '5-1' (5-1). This "the area of the functional area" refers to the area of the dehumidification drum opening surface near the side where the gas flow to the functional area is supplied, and the area of the gas flowing through the functional area is supplied, as shown in Fig. 3 t (3-1) The morphological example refers to the area of the portion 40a indicated by the slanted line in (5-2) of Fig. 5, and the morphological example of (4-3) in Fig. 4 is indicated by the slanting line in (5-3) of Fig. 5 . Part of the area of 4〇b. In the dehumidifying apparatus 20 shown in Fig. 2, the flow of the gas G in the functional area is supplied from the side of the opening and the opening 4a, but the arrangement of the flow-through gas supply unit in the functional area can be changed, and it is supplied from the side of the opening surface 4b instead. However, in order to improve the cooling efficiency of the functional area, it is preferable to supply the flow of the functional area to the function 312XP/invention specification (supplement) from the opening side of the same side as the opening surface on which the regenerating gas is supplied. 96·1〇/96ΐ2 period 19 200821034 District. a · In the dehumidification method of the Mingdi type, the gas flowing through the functional zone may be a dehumidified air which is dehumidified by the dehumidification zone, and may be used in the dehumidified air B, clean gas, dry gas or inert gas. Etc., among these, it is cheaper to consider, preferably the dehumidified air B. In addition, the clean gas, the dry-rolled or the inert II body phase has a moisture content compared to the dehumidification space a β

Less = This reduces the dehumidified air obtained by dehumidification in the dehumidification zone. The flow of gas in the functional zone is preferably clean gas, dry gas or emotional. Especially in the semiconductor manufacturing jade factory, etc., because there are many cases of clean gas, dry gas or inert gas, etc., in this case, it is also possible to use a cheaper one, and the clean gas system refers to the clean gas system. Dedusted and dehumidified gases used in semiconductor manufacturing and the like. The functional zone is supplied with a flow of gas to move to the cooling zone, to cool or dry, or to cool and dry the desiccant moved from the regeneration zone. In other words, in addition to the cooling gas, the drying gas, or the cooling/drying gas 4 in the functional zone ventilation system, is the gas flowing in the functional zone wet? It can be compared with the air to be treated, and the dew point of the dehumidified air B obtained by Beijing is reduced. It is preferable that the dew point of the circulating gas in the functional area is lower than that of the treated air. In addition, the temperature of the gas flowing through the functional zone may be considered: (1) the temperature of the desiccant moving from the regeneration zone to the functional zone, and (ii) the main purpose of cooling, or the main purpose of drying, or cooling. After the main purpose of setting the functional area, such as the main purpose of drying, is appropriately selected. Usually, the temperature of the gas flowing through the functional zone can be set to 〇~6〇°c, preferably 5~3〇c>c. 312XP/Invention Manual (supplement)/96· 10/96122874 20 20〇821〇34 After the functional zone 10 is ventilated by the circulation gas in the functional zone, the function discharged from the functional zone 10 may also be discharged. The discharge gas H in the area is discharged into the outside air, but from the viewpoint of effective utilization of the gas, it is preferable to use the same as the regeneration gas in the 5 liter regeneration gas, and then use the regeneration gas as the regeneration gas. The crucible or the cooling gas C is not particularly limited and may generally be the treated air crucible.

The size of the dehumidification zone 7, the regeneration zone 8 and the cooling zone 9 is determined according to the moisture content of the process air A, the dehumidification performance of the dehumidifier, the regenerative energy, and the dew point required for the m gas b. Choose according to factors such as speed. In the dehumidification method of the first aspect of the present invention, the high-temperature dehumidifying agent 'moved from the regeneration zone' is cooled, dried, or cooled before being cooled in the cooling zone, because the cooling efficiency can be improved or The regeneration efficiency, or both, is improved. Therefore, the dehumidification method of the first aspect of the present invention further cools and purifies the dehumidifying agent as compared with the case where the functional region is not provided, so that the adsorption capacity of moisture can be increased, thereby lowering the dew point of the dehumidified air B. On the other hand, in the dehumidification method of 3, in order to improve the cooling efficiency or the regeneration efficiency, the cold light or the area of the regeneration zone must be increased. However, by increasing the area of the cooling zone or the regeneration (four), the (four) of the dehumidification zone is _ less' thus reducing the overall dehumidification efficiency. In the dehumidification method according to the first aspect of the present invention, the surface velocity of the gas flowing through the functional region i and the functional region is set to a surface velocity at which the cooling gas is supplied to the faster cooling zone, and the functional region is Supply surface ^ 312XP / invention manual (supplement) / 96 de 96922874 21 200821034 The higher the performance of the low circulation gas in this functional area. Further, it is possible to further improve the dew point of the dehumidified air. The dehumidifying apparatus for dehumidifying the first embodiment of the present invention, for example, the dehumidifying apparatus according to the first aspect of the present invention shown in Fig. 2, is an embodiment of the dehumidifying apparatus 20. In other words, the dehumidifying apparatus of the first aspect of the present invention is provided with:

The dehumidification drum is a dehumidification drum formed by a carrier having a venting cavity formed in a direction of a rotating shaft and a dehumidifying agent supported on the carrier, and the opening surface is divided into: a dehumidifying zone, a regeneration zone, and a cooling zone. And a functional zone disposed between the regeneration zone and the cooling zone; the dividing member; a rotating means for rotating the dehumidifying drum; a first supply means for supplying the treated depleted second supply means to the dehumidification zone Supplying a regeneration gas to the regeneration zone: a third supply means for supplying a cooling gas to the cooling zone; a heating means disposed in a portion of the regeneration zone and heating the regeneration gas; and a functional zone flow gas supply means, The functional area is supplied with a gas flowing through the functional area; wherein the ratio of the area of the functional area to the area of the dehumidification surface of the dehumidification roller is 0. 003 to 0. 07. The dehumidification drum of the dehumidification device of the first aspect of the present invention, the dehumidification zone, The regeneration zone, the functional zone, and the cooling zone are both the dehumidification drum, the dehumidification zone, the regeneration zone, the functional zone, and the cooling zone of the dehumidification method of the first aspect of the present invention. 312XP/Invention Manual (Repair)/96-10/96122874 22 200821034 The area of the functional area is the area of the opening surface of the dehumidification roller / 0.003~0.07 'best ο., ~〇〇5, especially 〇〇〇8~〇 The soil-based dividing member can be divided into: the wet area, the regeneration area, the functional area, and the cooling area as long as the dividing surface of the dehumidifying drum can be divided; = limitation, such as in FIG. The first dividing member "and the first eight-cutting member 6b" may be in the gap center of the dehumidifying roller in the gap between the π咕w 1, the Α μ, and the same box. Radial toward the circumference ^

And being fixed to the compartment plate on the drum box; or shaped into the shape of each zone as shown in FIG. 4 and being disposed in the gap between the opening surface of the dehumidification drum and the roller & The compartment board on the box. 3 The first supply means, the first supply means, and the third supply means are not particularly limited. - I can be used for supplying a gas, such as an intake fan, a blower, an air compressor, or the like. The set position 'is located behind the dehumidification drum 1. In this case, the first supply means, the second supply means or the third supply means suction the treated air A, the regeneration gas E or the cooling gas from the opposite side of the dehumidification drum 1 c, and supplying the same to the dehumidification drum, the first supply means, the second supply means or the third supply means (four) are disposed in the dehumidification means 2G, located in the dehumidification drum 1 In the dehumidifying device of the first aspect of the present invention, the rear portion of the dehumidifying drum 1 may be located. Fig. 6 shows an example of the form of the dehumidifying apparatus in which the first supply means, the first supply means, or the installation position of the S three supply means are located after the dehumidification drum 1. In the dehumidifying device 2 in FIG. 6, the first supply means 221, the second supply means 231 and the third supply means 241 312XP / invention manual (supplement) / 96-i / 96i22874 23 200821034 apparatus, such as a fan 箄.萁k , hand ^彳w material 'in Figure 6, because in addition to the first supply "different - supply means 231 and the third supply means 241: the rest of the same as the dehumidification device 20 shown in Figure 2, because The member having the same member of the dehumidification device 20 is given the same member. The heating means is not particularly limited, and examples thereof include a heat exchanger, etc., and it is preferable to pass the apricot and the rice. The field also uses a device that is generally used for heating gas. The flow-through gas supply means in the functional area is not particularly limited, and a device generally used when supplying gas, such as an intake fan, a blower air compressor, etc., may be used. Further, the dehumidifying apparatus according to the first aspect of the present invention adjusts the dehumidification zone, the area of the "Hai regeneration zone", the area of the b zone, and the area of the cooling zone, and adjusts the first responsive means, the first supply means The third supply means and the air volume of the flow-through gas supply means in the functional zone, the surface velocity of the gas flowing through the functional zone to the functional zone can be adjusted to G. 5 of the surface velocity of the cooling gas supplied to the cooling zone. ~10 #. Take this to make According to the dehumidifying apparatus of the first aspect of the present invention, the dehumidifying method according to the first aspect of the present invention can be carried out. Further, in the dehumidifying apparatus according to the first aspect of the present invention, the regenerative gas can be used in the cooling zone (the cooling gas can be used). The cooling zone discharge gas D is an example of the form of the regeneration gas E. For example, the dehumidification apparatus 5 shown in Fig. 7 is shown in Fig. 7. Another embodiment of the first dehumidification apparatus of the present invention is shown in Fig. 7. In Fig. 7, the #海除除湿装置50 is not provided with the second supply machine 23 of FIG. 2, and instead, the cooling zone exhaust gas exhaust pipe 32 and the first regeneration 312XP/invention specification (supplement)/96-10/96122874 24 200821034 are provided. - a connecting pipe 44 to which the supply pipe 28 is connected. In other words, in the dry recording 5G of Fig. 6, the connecting pipe 44 is a second supply means. ▲ In the dividing member of the dehumidifying device of the first aspect of the present invention, The functional area may be divided into 槿徕--p ^ °, and may have two openings, such as a gas inlet, a vent, and an opening on the gas outlet side of the functional area, and the opening area is circulated from the functional area. The gas inlet side is gradually toward the outlet side In the reduced state, the opening surface on the gas outlet side of the functional zone is placed in a state facing the opening surface of the dehumidification drum (hereinafter, this member is also referred to as a "deformation opening dividing member"). The double-shaped opening dividing member will be described with reference to Fig. 8 to Fig. 8 . Figure 8 is a schematic view of the deformed opening dividing member, and Figure 9 is a schematic view showing the position of the deformed opening member. . In Fig. 8, (8_υ shows a plan view of the π-divided member 45, (8_2) shows a cross-sectional view taken along the line x_x, and (8-3) shows a cross-sectional view taken along the line y_y of (8-1). As shown in Fig. 8, the δHai deformation opening dividing member 45 has an opening on the gas inlet side of the functional region (the opening of the gas inlet side of the functional region, and the opening of the gas outlet side of the functional region) (the gas outlet side opening Μ7 of the functional region) 'And from the inlet side toward the outlet side, the opening area is gradually reduced. 爹..., FIG. 9 and FIG. 10, the drum box 21, the dehumidifying drum 1, the deformation opening dividing member 45, and the functional area circulating gas supply pipe 4 are illustrated. Positional relationship of 3. As shown in Fig. 9, in the drum box 21, a slit 49 having the same shape as the inlet side opening 46 of the full-opening blade scraping member 45 is opened, in a part of the slit 49. From the inside of the drum box 21, 312 ΧΡ / invention manual (supplement) / 96-10 / 96122874 25 200821034 member 45 is provided. In addition, the drum box is connected... The body is surrounded by the function of the secret seam 49. : the door is on the outer side of the drum box 21. As shown in FIG. === The cutting member 45 is open to the dehumidification roller i, and the opening surface of the opening 47 is opposed to the detonation surface 4a. In addition, for the convenience of explanation, Except for the drum box 2, the dehumidifying drum, the deformed opening dividing member 45, and the functional area circulating gas supply pipe are omitted. ^ The field, the moon-shaped dehumidifying device has the deformed opening dividing member 45 because The gas outlet side opening 47 is flowed from the functional region of the deformed opening dividing member, and the functional area is supplied to the opening surface 4& of the dehumidifying drum. Thus, as shown in FIG. 10, the shape of the functional region 10 forms the functional region. The shape of the gas outlet side opening 47. In this case, the function area is divided from the opening surface of the dehumidifying drum by the under-opening/opening knife sub-member. The dehumidifying apparatus according to the first aspect of the present invention may be provided with other The supply pipe of the regional supply gas or the gas exhaust pipe exhausting the other regions is branched and connected to the branch of the gas supply pipe of the functional zone. In this case, by setting the resistance at the point and the point The device for adjusting the air volume, adjusting the air volume of the sucked gas, can adjust the surface velocity of the circulating gas in the functional area. In addition, when the branch pipe is provided, the branch official is the circulating gas supply of the functional area. In addition, the branch pipe is a dehumidifying device of the present invention, which will be described later, and a 312ΧΡ/invention specification (supplement)/96-10/96122874 26 200821034 dehumidifying device according to a third aspect of the present invention. The same is true. When the flow of the gas G in the functional zone is the same as the supply direction of the functional zone, the cooling gas C is supplied to the cooling zone, and when the exhaust gas D of the functional zone is mixed with the exhaust gas η of the functional zone Because the dividing surface of the functional zone is not disposed on the opening surface of the dehumidifying drum on the exhaust side of the exhaust gas in the functional area, the dutch member can be placed in the drum box immediately after passing through the dehumidifying drum The functional zone exhaust gas is mixed in the cooling zone exhaust gas D. For this case, refer to the figure 丨丨. The arrangement of the divided member or the deformed opening dividing member when viewed from the opening face side of the dehumidifying drum is not intended, and (11-丨) is shown from the side of the opening face of the dehumidifying roller, the cooling gas The drawing of C and the supply side of the flow-through gas G in the functional zone, as shown in (1, 2), is viewed from the flap side of the opening surface of the dehumidification drum, and the exhaust gas D of the cooling zone and the exhaust gas H of the functional zone are arranged. The pattern on the gas side. The head 11 is provided with the deformation opening: #cutting member 45' and the cooling surface and function of the opening surface 4" in the opening surface 4 of the dehumidifying drum which is supplied with the gas and the cold and gas. The zone is divided by the deformed opening dividing member 45, but the dividing member of the functional zone is not partitioned on the opening side of the dehumidifying drum on the opposite side. Therefore, immediately after passing the division, the functional zone exhaust gas is mixed into the cooling zone exhaust gas J). The second aspect of the dehumidification method is to divide the = π plane ' formed by the carrier of the rotating shaft cavity and the dehumidifying agent carried on the carrier into the dehumidification zone, the regeneration zone, and the dehumidification roller. The dehumidification zone supply is processed, and 312 ΧΡ / invention specification (supplement) / 96-10/96122874 1η 200821034 f regeneration zone supplies regeneration gas, supplies cooling gas to the cooling zone, and dehumidifies the treated air and regenerates the dehumidification a dehumidification method of the agent, an organic energy zone is disposed between the cooling zone and the dehumidification zone; a flow region of the functional zone for cooling or drying the dehumidification drum is supplied to the machine bay; the functional zone is supplied to the functional zone The surface velocity of the circulating gas is set to 〇·$~1 〇 times the surface velocity of the cooling gas supplied to the cold zone; :/ This machine knows the ratio of the opening face area of the dehumidifying roller 〇· 003~0 07. The dehumidification method according to the second aspect of the present invention is as shown in FIG. 12, in which the split member a" 51b is the opening face "" of the sub-dehumidification drum" and 4b, and the organic energy region 1 is disposed between the cooling zone 9 and the dehumidification zone 7. Hey. The dehumidification device for the dehumidification method of the second aspect of the present invention is as shown in FIG. 7F. FIG. 13 is a dehumidification device 6G for performing the present invention, and the dehumidification device for the dehumidification method, the dehumidification device (10) and the figure The wet mounting 20 differs in the arrangement of the functional zone 1 () (4) the arrangement of the dividing members 51a and 51b, and the functional zone flow = - Λ, Yingguan 53 and the functional zone exhaust gas exhaust pipe 54 are connected to the drum phase The rest is the same except for the location. Therefore, in Fig. 13, the same component symbols as the dehumidification device 20 are given the same component symbols. The (four) energy zone flow gas supply pipe (1) supplies the functional zone flow H to: is the history placed in the cooling zone 9 and the dehumidification zone? Between the ::, Aachen, the functional area exhaust gas exhaust pipe in this area is exhausted. 312ΧΡ/Invention Manual (Supplement)/964 〇/961228 74 28 200821034 The dehumidification method according to the second aspect of the present invention is carried out using the dehumidification apparatus 6〇 as follows. First, the treated air A inside, such as a clean room containing moisture, is supplied to the wet zone 7 of the dehumidifying drum 1 by the first supply machine 22. Then, when the treated air a passes through the dehumidifying drum, the moisture in the treated air A is moved toward the dehumidifying agent by contacting the dehumidifying agent, so that the treated air A is quenched . The dehumidified air B is exhausted from the dehumidifying zone 7 of the dehumidifying drum 通过 through the dehumidifying air exhaust pipe 27, and is returned to the clean room or the like. The dehumidifying agent that absorbs moisture in the dehumidifying zone 7 is moved to the regeneration zone 8 by the rotation of the dehumidifying drum 1. Then, the regeneration gas e is supplied to the heating device 25 by the second supply machine 23, and =: the heating device 25 is heated and supplied to the regeneration zone 8 of the dehumidifying drum cartridge. The regeneration gas E moves the moisture in the (4) to the regeneration gas E by contacting the dehumidifying agent, and thus the dehumidification is dehumidified. The regeneration zone discharge gas F, which has absorbed moisture, is discharged from the regeneration zone 8 of the dehumidification roller through the regeneration zone exhaust gas exhaust pipe 3〇 to the outside. The dehumidifying agent that has been dehumidified in the regeneration zone 8 is moved to the cooling zone 9 by the rotation of the thirst quenching roll. Then, the cooling gas C is supplied to the dehumidifying drum unit by the third supplier 24 as the cold heading zone 9, but the dehumidifying drum i. The heat of the desiccant is transferred to the cooling gas c by the cooling gas c contacting the dehumidified dehumidifying agent', whereby the desiccant is cooled. The cooling zone exhaust gas 乂 D ' of the heat absorbing the dehumidifying agent is discharged from the cooling zone 9 of the dehumidifying drum 1 to the outside via the exhaust pipe 32. _ hole body 312XP / invention specification (supplement) / 96·10/96122874 29 200821034 Furthermore, the rotation of the cooled cylinder 1 in the cooling zone 9 is moved to the functional zone 丨. in. Then, by the function area of the = roller 1 丨. . The circulating gas "gives the dehumidifying dehumidifying agent, and further enters the second step, and the contact zone is discharged from the functional zone of the dehumidifying drum 1 ', and the exhaust gas exhaust pipe 54 of the energy zone is discharged to the outside.

Next, the cooling/drying of the dehumidifying drum 1 in the functional zone 1Q is performed, and the subdivisions a, 3, and (4) are processed (10) (4) 7 and used again, and then the supply is supplied to the dehumidifying drum 1 Processing the air A, the resurgence gas E, the cooling gas c, and the circulation gas g in the functional area, and simultaneously rotating the dehumidification drum 1 in a continuous or intermittent manner, continuously dehumidifying the treated air A 〇 $, when the function is In the zone 1G, the φ of the flow of the gas in the functional zone is supplied, and the surface velocity of the flow of the gas in the functional zone is set to 0.5 to 1 (fold) times the surface velocity of the cooling gas supplied to the cooling zone. Preferably, the surface velocity of the gas flowing through the functional zone to the functional zone is set to be 7 times the speed of the surface of the cold zone to which the cooling gas is supplied, preferably 2 to 5 times. By setting the surface velocity of the gas flowing through the functional region to the functional region within the above range, the moisture in the treated air VIII can be increased, and the dew point of the dehumidified air enthalpy can be lowered. Further, if the surface velocity of the gas flowing in the functional region is too slow, it is difficult to obtain the effect of the present invention for reducing the dew point of the dehumidified air β. Conversely, if it is too fast, the roller 312ΧΡ/invention specification (supplement)/96-1 may occur. ο/% 122874 30 200821034 ::The dehumidifier of the temple is detached, or the drum is damaged due to vibration, or the machine: the gas in the area W is excessively increased, and the cost of the disproportionation is increased. When the functional area 10 supplies the flow of gas in the functional area, the ratio of the area of the f-energy zone 10 to the opening area of the dehumidification roller is set to two _ _ 〇. Preferably, the ratio of the area of the function area 1 () to the area of the dehumidification roller is set to 〇. 〇5~〇. 〇5 '尤尤〇. _~〇. 〇3 is set by setting the area ratio of the (10) energy zone within the above range, which can increase: the amount of moisture dehumidification in the point 'hole hole ,, and decrease If the area of the functional area of the dehumidified air enthalpy is too small, it is difficult to obtain the effect of reducing the dehumidification space of the present invention, and if it is too large, since the area thereof will become too small, the dehumidification efficiency is lowered. The functional area description of the second aspect dehumidification method is directed to the invention. In the m method of the present invention, 'two::' is disposed between the cooling zone and the dehumidification zone, and the so-called "the cooling zone and the dehumidification zone are provided with the function: but the opening surface of the dehumidification roller is as shown in FIG. Illustrated, including the functional zone between the dehumidification zone 7 and the dehumidification zone 7; and only a part of the function between the dehumidification zone 7 is provided; ΓΓ一ΓΓ兄. In this regard, as in the present invention - The dehumidification π Him of the form is within the cooling zone and the dehumidification zone, and the zone "" also includes "the functional zone is provided near the boundary between the m μ cold light and the dehumidification zone without damaging the effect of the present invention." . :: In terms of the dehumidification method of the first aspect of the invention. "The shape of the functional area 10" is the dehumidifying side 312 ΧΡ / invention specification (supplement) / 964 〇 / 96122874 200821034 of the first aspect of the present invention, forming a defect shape, length /, and near the central angle of the sector. A circular shape or the like is appropriately selected in consideration of the dehumidification efficiency. Further, in the dehumidification method of the second embodiment: the dehumidification method according to the first aspect of the present invention may be such that the first region 1G can be set to protrude only toward the dehumidification region 7 side. However, the state in which the area 9 is protruded may also be protruded toward both sides of the two dehumidification areas of the cooling zone. In addition, the number of the functional areas may be the same as the dehumidification method functional area of the first aspect of the present invention.罝Z above 忒

In the dehumidifying device 60 shown in Fig. 13, the flow of the gas G in the functional region is supplied from the side of the opening face 4a, but the arrangement of the flow of the gas in the functional region can be changed, and the supply from the side of the opening face 4b can be changed. However, it is to improve the cooling efficiency of the functional area, preferably from the same side as the opening surface of the supply of the regenerated gas, m π face side 'the functional zone flow gas is supplied to the functional zone 0 a dehumidification of the second aspect of the invention In the method, the gas flowing through the functional zone may be 10 疋 dehumidified by the δ Hai dehumidification zone and the gas containing less water may be used, and the dehumidified air enthalpy, clean gas, dry gas or inert gas may be used. # Supply the functional zone to circulate the gas to cool or dry, or to cool and dry the dehumidifying agent from the cooling zone before the dehumidifying agent moves to the dehumidifying zone. That is, the functional zone ventilating system cooling gas, drying gas, or cooling and drying gas. The lower the dew point of the circulating gas in the functional zone, the better, but as long as the gas contains less gas, the desiccant moved from the cooling zone can be further cooled or dried, so that it is lower than the dew point of the treated air. l 〇 °C or more, can be appropriately selected to use 312XP / invention manual (supplement) / 96-10/96122874 32 200821034. In addition, the temperature of the gas flowing through the functional zone may be considered: the temperature of the desiccant from the cooling zone to the functional zone, and (ii) the main purpose of the cold part, or the main purpose of drying, or After cooling and drying are the main purposes of the functional area setting, the appropriate purpose is selected. Generally, the temperature of the gas flowing through the functional area can be set to 〇~4 (rc, preferably 5 to 30 ° C. After the ventilation of the gas in the functional area is performed in the functional area 1 ,,

The gas can be discharged from the functional zone discharged from the functional zone, and discharged into the external gas, and then used from the effective utilization of the gas, preferably mixed in the regeneration gas E, and then used. It is the regeneration gas E. Further, the regeneration gas E or the cooling gas c is not particularly limited, and may be the treated air A. The size of the dehumidification zone 7, the regeneration zone 8 and the cooling zone 9 is determined according to the moisture content of the process air A, the dehumidification performance of the dehumidifier, the regenerative energy, and the dew point required for the dehumidified air B. The rotation speed of the dehumidification drum is appropriately selected. The dehumidification method of the second aspect of the invention moves from the cooling zone to the temperature dehumidifying agent, and before dehumidifying in the dehumidifying zone, the cooling zone is dried or dried in the functional zone, thereby allowing high moisture absorption. A volumetric thirst scrap is provided to the dehumidification zone. Therefore, the dehumidification method of the second aspect of the present invention does not provide the functional region, and the dehumidification efficiency in the dehumidification zone can be increased to reduce the dew point of the dehumidified air β obtained. In addition, the conventional dehumidification method of S Φ ' must increase the area of the dehumidification zone in order to increase the removal rate of the dehumidification zone. However, if the area of the dehumidification zone 312 ΧΡ / invention specification (supplement) / 96· 10/96122874 33 200821034 is increased, the area of the regeneration zone or the cooling zone will be less overall dehumidification efficiency. In the dehumidification method according to the second aspect of the present invention, by (4): supplying the surface velocity of the gas flowing through the functional region, setting the surface velocity of the cooling gas to be faster than:: supplying the surface velocity of the cooling gas to the functional region = The higher the degree of circulation of the gas in the functional area, the lower the effect. τ is more dew

A dehumidifying apparatus according to a second aspect of the present invention is a dehumidifying apparatus for carrying out the dehumidifying method according to the first aspect of the present invention. For example, the dehumidifying apparatus 60 of Fig. 13 is used. The dehumidification agricultural device of the present invention is provided with: a dehumidification roller which is a dehumidification roller formed by a carrier having a ventilation hole formed in a direction of a rotation axis, and a dehumidifying agent supported on the carrier; The face cutting member is divided into: a dehumidification zone, a regeneration zone, a cooling zone, and a functional zone formed between the cooling zone and the dehumidification zone; the dividing member; a rotating means for rotating the dehumidifying drum; a first supply means, Providing the treated air to the dehumidification zone; the second supply means for supplying the regeneration gas to the regeneration zone; the second supply means for supplying the cooling gas to the cooling zone; and the heating means disposed in front of the regeneration zone, And heating the regeneration gas; and the gas supply means of the machine in the lunar area, which supplies the functional area to the gas in the functional area; 312XP/invention specification (supplement)/96-10/96122874 34 200821034 wherein the functional area The ratio of the area of the opening surface of the dehumidifying drum is 〇·003~0· 〇7. The dehumidifying drum, the dehumidifying zone, the regeneration Z, the functional zone, and the cooling zone of the dehumidifying apparatus according to the second aspect of the present invention are all the dehumidifying drum, the dehumidifying zone, the regeneration zone, the functional zone, and the cooling zone of the second aspect of the present invention. The ratio of the area of the functional area to the opening area of the dehumidifying drum is 〇·003~〇·07, preferably 0·005~〇· 05, especially 〇·008~0·03. The dividing member is not particularly limited as long as the opening surface of the dehumidifying drum can be divided into the dividing zone, the regeneration zone, the functional zone and the cooling zone, and for example, the opening surface of the dehumidifying drum can be In the gap with the drum box, the partition plate is disposed radially from the center of rotation of the dehumidifying drum, and the partition plate is fixed to the drum box, or may be shaped as in the case of FIG. The shape of each zone is disposed in the gap between the opening surface of the dehumidification drum and the drum box, and is fixed to the compartment plate on the drum box. The first supply means, the second supply means, the second supply means, the functional area flow gas supply means, and the heating means of the dehumidification apparatus of the second aspect of the present invention are both the first supply means and the second means of the dehumidification apparatus of the first aspect of the present invention. Supply means, third supply means, means of circulation gas supply in the functional area, and heating means. Further, the dehumidifying apparatus according to the second aspect of the present invention adjusts the area of the dehumidifying zone, the regeneration zone, the functional zone, and the cooling zone, and adjusts the first supply means, the second supply means, and the third supply The means and the air volume of the gas supply means in the functional area may adjust the surface speed of the gas flowing through the functional area to the function area to be adjusted to supply the cooling gas to the cooling zone 312XP/invention specification (supplement)/96- 5〜l〇倍。 10/96122874 35 200821034 The surface speed of 0. 5~l〇 times. By means of the apparatus, the dehumidification method of the second embodiment of the present invention can be carried out. Further, the dehumidification method of the second aspect of the present invention. In the form of a dehumidification device, it is: in the middle of life, as in the first 23 of the present invention, it is replaced by the clock w ancient face bucket _, Wo 5 and the second two supply machine 兮 兮 cage M, there will be δ Hai cooling zone exhaust gas platoon The trachea is placed with the younger-regenerating gas supply pipe 32. In this embodiment, the dehumidification device of the far μη A, the second supply means of the present invention. The division/piece of the functional region, such as =/ divided by the component, may also be deformed. The opening (four) 槿# The dehumidification device of the opening 4 is divided into four parts, and the deformed opening dividing member of the dehumidifying device according to the second aspect of the present invention is a second embodiment of the present invention. The dehumidification garment of the smudges has the deformation opening division structure: = the dehumidification apparatus of the first aspect of the invention, because the dehumidification roller is opened from the gas outlet side opening of the = 2 = functional zone The functional area of the j member is open to the outlet of the gas outlet side: in this case, the functional region is divided from the opening surface of the dehumidification roll by the deformation opening dividing member. In the rich area, the flow direction of the functional area is the same as the direction of the supply of the cooling zone When the discharge D is in the body D, the discharge gas in the functional zone is blended, because the opening surface of the dehumidification drum on the exhaust side of the exhaust gas in the functional zone is not provided with the partition 312ΧΡ/invention specification (supplement) 〇/96122874 36 200821034 The dividing member of the functional zone, by which the exhaust gas of the casing can be mixed into the exhaust gas d of the cooling zone just after passing through the dehumidifying drum. For this case, the signing map In the explanation, since the deformation opening dividing member 45 is provided on the opening face 4a side of the dehumidifying drum through which the gas and the cooling gas are supplied, the cooling zone on the opening face 4a side is separated from the functional zone. However, there is no dividing member in the region of the opening of the dehumidifying drum on the opposite side. Therefore, immediately after passing through the dehumidifying drum, the exhaust gas in the functional zone can be mixed into the cooling. District emission gas D application. The dehumidification method of the second aspect is divided into a dehumidification zone, a regeneration zone, and a cooling zone by an opening surface of a dehumidification drum formed by a carrier in which a ventilation hole is formed in a direction of a rotation axis and a dehumidifier carried on the carrier. a dehumidification method of supplying the treated air to the dehumidification zone while supplying the process air, supplying the regeneration gas to the regeneration zone, supplying the cooling gas to the cooling zone, and continuously dehumidifying the process air and regenerating the dehumidifier; An organic energy zone is disposed between the zone and the regeneration zone; the functional zone is supplied with a flow of gas for heating the function zone of the dehumidification roller; and the surface velocity of the flow zone of the functional zone is supplied to the functional zone, and the regeneration is set to区·5~1〇 times the surface velocity of the regeneration gas supplied to the zone; • The ratio of the area of the functional zone to the opening face area of the dehumidification drum is set to 〇·003~0·07. The dehumidification method of the third aspect of the present invention As shown in FIG. 15, the opening faces 4 and 4b of the dehumidifying drum are divided by the dividing members 61a and 61b, and in the dehumidification 312XP/invention specification (supplement)/96·10/96122874 37 2008210 An organic energy zone 1 is provided between the 34 zone 7 and the regeneration zone 8. • A dehumidification apparatus for carrying out the dehumidification method of the third aspect of the present invention. For example, as shown in Fig. 16, in Fig. 16, the dehumidification device 65 is implemented. The dehumidifying device for the dehumidifying method of the present invention is different from the dehumidifying device 20 of FIG. 2 in the position of the functional area, and the configuration and function of the dividing members 61a and 61b are excluded. The same is true for the same components as the dehumidifying device 20, except that the flow rate of the capillary supply pipe 62 and the functional zone exhaust gas exhaust pipe 63 are different from those of the drum tank 21. The dehumidifier 65 flows from the functional area to the gas supply pipe 62, and distributes the functional zone, and the body G is supplied to the functional zone ίο disposed between the dehumidification positive 7 and the regeneration zone 8, and The functional area exhaust gas exhaust pipe 63 discharges the exhaust gas 该 in the functional area. The dehumidification method of the second embodiment of the present invention uses the dehumidification device 65 and applies only as follows. First, the inside of the clean room containing moisture or the like is treated, and the air enthalpy is supplied to the dehumidification zone -7 by the first supply machine 22. Then, the treated air A passes through the dehumidifying drum i, and the moisture in the treated air A is moved toward the dehumidifying agent by contact with the dehumidifying agent, so that the treated air A is dehumidified. The dehumidified air B from which the water is removed is exhausted from the dehumidifying zone 7 of the dehumidifying drum 1 through the dehumidifying air exhaust pipe 27, and returned to the clean room or the like. Next, the dehumidifying agent that absorbs moisture in the dehumidifying zone 7 is moved to the functional zone 1 by the rotation of the dehumidifying drum 1. Then, the functional zone flow gas G is supplied to the non-312XI>/invention specification (supplement)/96-10/96122874 38 200821034 by a flow-through gas supply unit (not shown).

u. The heating means is used to heat the functional zone 10 of the dehumidification drum 1 by means of the heating means. Thereafter, the functional zone: the melon gas G heats the desiccant by contacting the desiccant, and moves the moisture in the deionizer to the gas G in the functional zone, so that the dehumidifier is heated and dehumidified . The gas venting gas is discharged from the functional zone 1G of the dehumidifying drum 1 and discharged to the outside by the (4) functional zone discharge pipe 63. H Eight persons, a desiccant that is heated and dehumidified in the area of the famous machine, is moved to the regeneration zone 8 by the rotation of the dehumidification drum 1. Then, the regeneration gas E is supplied to the heating device 25 by the second supply machine 23: and heated by the heating device 25, and supplied to the regeneration zone 8 of the dehumidifying drum i. The regeneration gas E moves the moisture in the dehumidifying agent to the regeneration gas E by contacting the dehumidifying agent, and thus the dehumidifying agent is further dehumidified. The regeneration zone discharge gas F, which has absorbed moisture, is discharged from the regeneration zone 8 of the dehumidification drum i through the regeneration zone exhaust gas exhaust pipe 3〇 to the outside. Further, the desiccant that has been dehumidified in the regeneration zone 8 is moved into the cooling zone 9 by the rotation of the dehumidification drum 1. Then, the cooling gas c is supplied to the cooling zone 9 of the dehumidifying drum 1 by the third supply machine 24. The cooling gas C cools the desiccant by contacting the desiccant. The cooling zone discharge gas D which has absorbed the heat of the dehumidifying agent is discharged from the cooling zone 9 of the dehumidifying drum 1 to the outside via the cooling zone exhaust gas exhaust pipe 32. Next, the desiccant cooled in the cooling zone 9 is moved to the dehumidification zone 7 by the rotation of the dehumidification, the luxury 312XP/invention specification (supplement)/96-10/96122874 39 200821034, And used again for the dehumidification of the air A. Then, by supplying the treated air A, the regeneration, the body E, the cooling gas c, and the functional region circulating gas g to the dehumidifying drum 1, while continuously or intermittently rotating the dehumidifying drum i, the dehumidifying drum i can be continuously dehumidified. The treated air A. In this case, when the flow of the gas in the functional zone is supplied to the functional zone ,0, the surface velocity of the flow of the gas in the functional zone is supplied to the functional zone, and the surface velocity of the regeneration gas supplied to the regeneration zone is set to 0. · 5 ~ ι〇 times. Preferably, the surface velocity of the flow of the gas in the functional zone is set to 1 to 7 times the surface velocity of the regeneration gas supplied to the regeneration zone, particularly preferably 2 to 5 times. By setting the surface velocity of the gas flowing through the functional region to the functional region within the above range, the amount of moisture removal in the treated air enthalpy can be increased, and the dew point of the dehumidified air B can be lowered. In addition, if the surface velocity of the gas in the functional zone 2 is too slow, it is difficult to obtain the effect of the invention for reducing the dew point of the dehumidified air B. Conversely, if it is too fast, the dehumidifying agent carried by the drum may fall off or cause When the vibration is caused, the drum is broken, or the amount of the gas flowing through the casing is excessive, which causes an increase in the running cost. Further, when the functional area 10 is supplied with the gas in the functional area, the area ratio of the area of the functional area to the area of the opening of the dehumidifying drum is set to 0.003 to 0_〇7. Preferably, the ratio of the area of the functional area to the area of the opening surface of the dehumidifying drum is set to 0.005 to 0.05, in particular, 〇·〇〇8 to 〇·〇3. By setting the area ratio of the functional area within the above range, the amount of moisture dehumidification of the treated line A towel can be increased by 312 ΧΡ/invention specification (supplement)/96·ι〇/96ΐ2 class 40 200821034, and the dehumidification can be reduced. The dew point of air 6. If the face area of the functional area is #f, you know that the effect of the invention is reduced, so that it is difficult to obtain the effect of reducing the dew point of the dehumidified air B, g々-, ra, fruit, and vice versa, if it is too large, because the area of other areas It will become too small, thus reducing the dehumidification efficiency. » Description of the functional region of the third aspect dehumidification method of the present invention. In the dehumidification method of the present invention, the invention is provided between the dehumidification zone and the regeneration zone, and the U.S. (5) "the functional zone is disposed between the dehumidification zone and the regeneration zone" refers to the dehumidification roller. The open face, such as ® 15 kg*, includes the functional zone between the dehumidification zone 7 and the regeneration zone 8, and the mid-section between the dehumidification zone 7 and the regeneration zone 8 District Τ' - a situation. In this regard, the dehumidification method is the same as the first aspect of the present invention. Further, in the present invention, the phrase "the functional region is provided between the dehumidification zone and the regeneration zone" includes "in the range of not impairing the effect of the present invention" in the vicinity of the boundary between the dehumidification zone and the regeneration zone. In view of this, the functional zone factory is also similar to the dehumidification method of the first aspect of the present invention. The shape of the functional zone 10 'as in the dehumidification method of the first aspect of the present invention' may be a fan shape, forming a defect near the central angle of the sector. The shape, the rectangular trapezoid, the circular shape, and the like are appropriately selected in consideration of the dehumidification efficiency. Further, the dehumidification method according to the second aspect of the present invention is similar to the dehumidification method 2 of the first aspect of the present invention, and the functional region 10 can be set only to the regeneration zone. The state in which the 8 side protrudes is ', and the β may be in a state of protruding only toward the dehumidifying zone 7 side, or may be protruded toward the side of the 7 = the regeneration zone 8. Further, the functional zone/〇, In the same manner as in the first aspect of the present invention, the dividing functional area 10 can be used. The above-mentioned 3 stomach (supplement)/96•face 6122 coffee 41 200821034 In the dehumidifying device 65 shown in FIG. 16, the functional area is circulated gas. G is supplied from the :=4a side but The flow-through gas supply device of the functional area can be changed to be supplied from the side of the opening surface 4b. Thus, the functional area is supplied to the functional area by the opening surface opposite to the opening surface on which the gas is supplied. The dehumidifying agent which is not easily heated by the regeneration gas (that is, the dehumidifying agent in the vicinity of the opening surface facing the opening surface of the regenerating gas) can be heated with high efficiency, thereby improving the regeneration efficiency in the high functional region. In a dehumidification method according to a third aspect of the present invention, the flow-through gas in the functional region may be, for example, moisture contained in the dehumidified air B, clean gas, dry gas or inert gas dehumidified by the dehumidification zone. A small amount of gas, in addition to the above, the treated air A can be used. ^ One supply of the functional area to circulate the gas to move from the dehumidification zone before the dehumidifying agent moves to the regeneration zone The dehumidifying agent, that is, the functional zone venting system heating gas, in addition, the functional zone of the functional zone dehumidifies part of the moisture of the dehumidifying agent while passing through the functional zone. The humidity of the circulating gas in the functional area may be the same as the humidity of the air to be treated, and the dew point of the circulating gas in the functional area may be below the dew point of the treated gas, but the obtained Dehumidifying air, the point of consideration, preferably lower than the dew point of the treated air by more than 1 。. In addition, the temperature of the circulating gas in the functional area is as long as the dehumidifying agent that can be moved from the dehumidifying zone is preheated. The degree can be appropriately selected in consideration of the type of the desiccant, the temperature of the regeneration gas supplied to the regeneration zone, the operating conditions, etc. μ, 312ΧΡ/invention specification (supplement)/96-10/96122874 42 200821034 Further, the regeneration gas E or the cooling gas C is not particularly limited, and may be usually the treated air A. § Hai Dehumidification Zone 7, the regeneration zone 8 and the size of the cooling zone 9, according to the moisture content of the treated air A, the dehumidification performance of the dehumidifying agent, the regeneration energy 1, the dew point required for the dehumidified air B, The rotation speed of the dehumidification drum 1 is appropriately selected. The dehumidifying method according to the third aspect of the present invention preheats the dehumidifying agent moved from the dehumidifying zone before heating and dehumidifying in the regeneration zone, and dehumidifies part of the moisture of the dehumidifying agent, thereby improving the regeneration. The regeneration efficiency of the area. Therefore, the dehumidification method of the third aspect of the present invention can improve the regeneration efficiency in the regeneration zone as compared with the case where the functional zone is not provided, thereby lowering the dew point of the dehumidified air B obtained. On the other hand, in the conventional dehumidification method, in order to increase the regeneration f rate in the regeneration zone, it is necessary to increase the area of the regeneration zone. However, if the area of the regeneration zone is increased, the area of the dehumidification zone or the cooling zone will be reduced, thereby

Low overall dehumidification efficiency. Furthermore, in the dehumidification method of the third aspect of the present invention, the surface velocity of the gas flowing through the function region is set to be faster than The dehumidification device according to the third aspect of the present invention is a desiccant device for dehumidifying the dehumidification method of the third aspect of the present invention, and the dehumidification device for the dehumidification device of the third aspect of the present invention is further improved by the surface velocity of the regenerative gas and the flow of the gas to the functional region. An example of the form is, for example, δ == the dehumidifying device 65. 312 ΧΡ 发明 发明 发明 发明 96 96 96 96 96 96 96 96 96 96 96 96 96 96 96 96 96 96 96 96 96 96 96 96 96 96 96 ' ' ' ' ' ' ' ' ' ' ' ' ' ' ' ' ' ' ' ' ' ' ' ' ' ' ' And the dehumidification roller formed by the dehumidifying agent carried on the carrier, and the member is divided into: a dehumidification zone, a regeneration zone, a cooling zone, and a functional zone formed between the dehumidification zone and the regeneration zone; a dividing means; a rotating means for rotating the dehumidifying drum; a supply means for supplying the treated air to the dehumidifying zone; 2j supplying means for supplying the regeneration gas to the regeneration zone; and a third supply means for the cooling zone Supply cooling gas; heating means, set in front of the regeneration zone • 叮土L心奴, sub-heating the regenerative gas function area circulation gas for Kufeng fearful, Kong 菔扒 should be slave, its supply to the functional area a functional area circulating gas; and a second heating means for heating the functional area to circulate the gas; wherein 'the ratio of the area of the functional area to the opening area of the dehumidifying drum is 〇·003~0·07. The dehumidifying drum, the dehumidifying zone, the regeneration zone, the functional zone and the cooling zone of the dehumidifying apparatus according to the third aspect of the present invention are all like the dehumidifying roller®, the dehumidifying zone, the regeneration zone, the functional zone and the cooling zone of the third shape (four) dehumidifying method of the present invention. . The ratio of the area of the functional area to the opening area of the dehumidifying drum is 〇.3~0.〇7, preferably 0.005~0〇5, especially 〇〇〇8~〇〇3. The dividing member can divide the opening surface of the dehumidifying drum into the dehumidifying zone, the regeneration zone, the functional zone, and the cooling zone, and there is no special 312χΡ/invention specification (supplement)/96-10/ 96122874 44 200821034 The restriction ' may be, for example, a partition plate provided between the opening surface of the dehumidification drum and the drum box, the center of rotation of the dehumidification drum is lightly radiated toward the circumference, and is fixed to the drum box Alternatively, it may be formed into a partition plate which is formed in a shape of each of the various examples and is disposed in the gap between the opening surface of the dehumidifying drum and the drum box and fixed to the drum box. The first supply means of the third form dehumidification device, the second supply hand k first means, the functional area flow gas supply means and the twisting means are the same as the first form dehumidification apparatus of the present invention. - Supply means: first i, handcuffs, second supply means, means of circulation gas supply in the functional area and heating means. Further, the second twisting means of the dehumidifying apparatus of the third aspect of the present invention is a heating means of the dehumidifying apparatus of the third aspect of the present invention. Further, the dehumidification apparatus according to the third aspect of the present invention adjusts the area of the dehumidification zone, the regeneration zone, the functional zone, and the cooling zone, and adjusts the first supply means, the second supply means, and the third The supply means and the air volume of the functional zone/guapeng gas i and the means may be adjusted to adjust the surface speed of the gas supply to the functional zone to 0.5% of the surface velocity of the regeneration gas supplied to the regeneration zone. 1〇胄. Thus, the dehumidifying method of the third aspect of the present invention can be carried out by using the dehumidifying apparatus of the third aspect of the present invention. Further, in the dehumidifying apparatus according to the second aspect of the present invention, as the dehumidifying apparatus of the first aspect of the present invention, the regenerative gas can be used to discharge the gas D. Such a shape is, for example, in Fig. i6, the second supply unit 23 is not provided, and instead, a connecting pipe connecting the cooling zone exhaust gas exhaust pipe and the 5H first regeneration gas supply pipe 28 is provided. Dehumidification device. This form of the towel is the second supply means. 312XP/Invention Manual (Supplement)/96·1〇/96122874 200821034: 'The dehumidification device of the third aspect of the present invention: the divided member of the functional region' is dehumidified as in the first aspect of the present invention = or may be deformed The opening divides the member. The deformed opening dividing member of the third shape energy of the present invention is a deformed opening dividing member as in the present invention. Dehumidification device of μ: The dehumidification device of the third aspect has the deformation opening division door: the dehumidification device of the first form of the invention is the same as the dehumidification device of the first aspect of the invention, since the gas outlet side opening is made from the energy region of the deformation Supplying the gas in the functional zone to the dehumidification grooving surface, so that the shape of the functional zone and the opening of the functional zone of the split-dividing member flow through the outlet side of the gas outlet side, and the deformation member is used to divide the member from the dehumidification roll The open face divides the functional area. When the supply direction of the circulation gas G in the functional zone is the same as the supply direction of the regeneration gas E to the regeneration zone, and the discharge zone H of the regeneration zone is mixed with the discharge gas H of the functional zone, The function surface area of the dehumidification roller on the exhaust side of the rolling body is not provided with a blade 'J member' which is separated from the month b of the machine, thereby enabling the function area immediately after passing through the dehumidification roller The exhaust gas is mixed with the exhaust gas f _ in the regeneration zone. In view of this, 'the description will be described with reference to FIG. 17' because the deformation opening division member 45' is provided on the side of the opening surface of the dehumidification drum through which the gas and the regeneration gas are supplied in the functional area, and thus the regeneration area and function of the opening surface 4H are provided. The section is stipulated, but on the side of the opposite side of the dehumidifying drum opening face 4a, there is no dividing member that separates the functional zone. Therefore, immediately after passing through the dehumidifying drum, the functional zone exhaust gas enthalpy can be mixed into the regeneration zone exhaust gas F of the 312 ΧΡ / invention specification (supplement) / 96-10/96122874 200821034. A dehumidifying method according to a first aspect of the present invention, a dehumidifying apparatus according to a first aspect of the present invention, a dehumidifying method according to a second aspect of the present invention, a dehumidifying apparatus according to a second aspect of the present invention, a dehumidifying method according to a third aspect of the present invention, and a third aspect of the present invention In the dehumidifying apparatus of the form, the structure of the dehumidifying drum cartridge may be a structure in which a ventilating cavity is formed in the rotating shaft = the rest is not limited, and may be, for example, a watt-shaped honeycomb structure. The red sputum nest structure is a wavy fiber base paper obtained by applying a corrugated fiber base paper and a corrugated fiber base paper obtained by corrugating the flat fiber raw paper, using an inorganic binder or an organic binder at a ridge of the wavy fiber base paper. It is made by bonding 'by lamination. At this time, a void having a semi-cylindrical shape formed between the flat fiber base paper and the wavy fiber base paper can be a flow path of the air, so that the cavity faces the rotation axis direction of the dehumidifying drum 1 Laminated in a manner of formation. Further, the material of the carrier of the dehumidifying drum 1 is not particularly limited as long as it is a material generally used in a dehumidifying apparatus. In addition, the dehumidifying agent carried by the m-depressing cylinder i is not particularly limited as long as it is a dehumidifying agent used in the dehumidifying apparatus, and may be, for example, synthetic fossil, wherein the hygroscopicity is high. 'It is preferable to use a SiG2/Ah()3 ratio which is lower, especially X-type zeolite and Y-type zeolite. In the following, the present invention is described in more detail by way of example only, and is not intended to limit the invention. [Examples] (Example 1) 1. Dehumidifying apparatus 312XP / invention manual (supplement) / 96-10/96122874 47 200821034 (dehumidifying drum) ., paper will be made using Erxi Ming fiber (thickness 0.2 mm, void ratio 90) %) is a honeycomb structure carrier having a width of 3.0 mm and a height of 16 with a cell (manufactured by NIC NICHIAS Co., Ltd., trade name: H〇neycie), and cut into the outer diameter of the open surface (the components in Fig. 18) Reference numeral 67) 2 mm, the diameter of the rotating shaft mounting portion (e.g. symbol 66 in Fig. 18) is 27 mm, and the cylindrical shape of the thickness 2 is used as a carrier. Next, a synthetic zeolite (Y-type zeolite, Si〇2/Ah〇3 = 5.4 (mole ratio)) as a dehumidifying agent was carried on the carrier at a loading amount of 14 〇kg/m3. Become a dehumidification roller. (Device structure) A dehumidifying apparatus having the following detailed structure in the dehumidifying apparatus 5A shown in Fig. 7 was produced. (1) An organic energy region is provided in a part of the regeneration zone and the cooling zone on the opening face 4a side of the dehumidifying drum. _(ii) the opening surface on the side where the gas is supplied to the functional area, and the partitioning member width (the symbol 68 in Fig. 18) of the functional area is 35 mm long, and the length (component symbol 69 in Fig. 18) is 85 mm. The depth (i.e., the length of the front and back directions of the paper sheet in Fig. 18) is 3 〇 min. The arrangement of the (111) split members 6a, 6b is as shown in FIG. The area ratio of each zone is the functional zone: dehumidification zone: regeneration zone: cooling zone = 1: 14. 4 : 14· 4 : ‘ 85· 4. (iv) Cooling Zone The exhaust gas exhaust pipe 32 and the first regeneration gas supply pipe 28 are connected by a connecting pipe. 312XP/Invention Manual (supplement)/96-10/96122874 48 821034 Side = Wet: Centered, the flow of gas in the functional area is supplied by the side of the Wd door surface 4 'Because the dehumidification roller is on, and the same opening face 4a The separation from the cooling zone from the π-face 4b side does not separate the two zones of the functional zone roller: the function, the gas enthalpy is mixed through the D-D.彳In the 'cylinder box and the cooling zone exhaust gas 2 ·Dehumidification test using the above dehumidification device, under the spinning roller, according to #〗 cake _ μ *, 10 rotation eight〗, when the gas is removed At, the condition should be 'processed air Α, cold (4) 2 (4) H material for hiding the (four) drum, and == turn. The flow chart at this time is as shown in FIG. As a result, the dehumidification point B is -lot: and the temperature is 3 (rc. · = treatment air A: air in the clean room as the treatment target (temperature d C , dew point 14 ° C) crotch gas C· The air in the clean room (the temperature hungry point is 14 °C). The functional area is the gas G ··clean gas (2rc) • The regeneration gas at the inlet side of the regeneration zone · The gas D through the cooling zone of the cooling zone The mixed gas of the gas H is discharged to the functional zone passing through the functional zone, and is heated by the heating means. (Example 2) ^1. Dehumidifying device (dehumidifying drum) The same dehumidifying drum as in Example 1 was produced. Structure 312χΡ/Invention Manual (Supplement)/96-10/96122874 49 200821034 A dehumidifying device having the following detailed structure is produced in the dehumidifying device 5A shown in Fig. 7. * (1) In the cold zone and Between the dehumidification zones, an organic energy zone is disposed in a part of them (1)) an opening surface on the side of the gas flowing through the supply functional zone, and an opening surface on the side of the body exhaust, which is used to separate the functional zones. , with a rectangular shape of 35mm and a length of 850ram. Degree 3〇mm. The arrangement of the (lii) split members 6a, 6b is as shown in FIG. The area ratio of each zone is the functional zone··Dehumidification zone: regeneration zone: cooling zone=1 : 14 4 : 14· 4 ·· 85· 4. (1V) The cooling zone exhaust gas exhaust pipe 32 and the first regeneration gas supply pipe 28 are connected by a connecting pipe. (v) The functional area on the side of the opening face 4b of the dehumidifying drum (i.e., the drum box on the side of the opening face 4b of the dehumidifying drum) is connected to the dehumidifying air exhaust pipe 27 to supply the dehumidified air B to the functional area. • (V1) connects the functional area on the side of the opening face 4a of the dehumidification drum (i.e., the drum box on the side of the dehumidifying drum opening 4a) to the cooling gas supply pipe 31, so that the exhaust gas in the functional area can be mixed into the cooling gas c. in. In the dehumidifying apparatus, the circulation gas in the functional area is supplied from the opening face 4b side of the dehumidifying drum. 2 · Dehumidification test, the above-mentioned dehumidification device, under the rotation speed of 1 rpm rotation / hour under the rotary dehumidification cylinder, according to the supply conditions shown in the table, the treated air A, the cold part of the gas C and the functional area of the gas H is continuously supplied to the dehumidification drum, and the 312XP/invention manual (supplement) is shown in 612, 200821034. As a result, the dehumidification operation is performed by dehumidification. The flow chart at this time is shown in Fig. 21. The dew point of air β is -7 ° C and the temperature is 32 ° c. • Air to be treated A: 2 5 °C, dew point 14 °C) Air in the clean room to be treated (temperature • Cooling gas c: Air in the clean room to be treated (temperature 25 〇, dew point 14C) And the gas mixture that passes through the functional zone of the functional zone. • The gas flow in the functional zone G: the dehumidified air β after passing through the dehumidification zone (temperature. _ 32t: dew point -7 ° C) • The regeneration gas on the inlet side of the regeneration zone • The gas D is discharged through the cooling zone after the cooling zone, and is the heated gas after passing through the heating means. (Example 3) 1 • Dehumidifying device (dehumidifying drum) The same dehumidifying drum as in Example 1 was produced. Structure) A dehumidifying apparatus having the following detailed structure is produced in the dehumidifying apparatus 5 所示 shown in Fig. 7. (i) Between the dehumidifying zone and the regeneration zone, an organic energy zone (ii) is disposed in a part of the supply functional zone. The opening surface on the side of the circulating gas and the opening surface on the side where the gas is vented in the functional area are used to divide the partitioning member of the functional area, and have a rectangular shape of 35 mm and a length of 850 ,, and a depth of 3〇111111. The components 6a, 6b As shown in Figure 22, the 312XP/invention manual (supplement)/9b1〇/96122874 51 200821034 area ratio functional area: dehumidification area: regeneration area: cooling area = ι : Μ: 14· 4: 85. 4. (iv) The cooling zone exhaust gas exhaust gas f 32 and the first regeneration gas supply pipe 28 are connected by a connecting pipe. (v) A second heating means is provided in the middle of the circulation gas supply pipe in the functional zone (V i ) connecting the functional area on the side of the opening face 4 b of the dehumidifying drum (ie, the drum box on the side of the opening face 4b of the dehumidifying drum) to the discharge gas discharge pipe 32 of the cooling zone, thereby enabling the function The area discharge gas 11 is mixed with the regeneration gas. In the dehumidification apparatus, the circulation gas in the functional area is supplied from the opening face 4a side of the dehumidification drum. 2 • The dehumidification test uses the above-described dehumidifying apparatus to rotate at a rotation speed of 1 rpm/hour. Under the dehumidification drum, according to the supply conditions shown in Table 1, the treated air A, the cold part gas C and the functional area flow gas H are continuously supplied to the dehumidification drum, and the dehumidification operation is performed. The flow chart at this time is shown in Fig. 23. As shown, the result is dehumidification B has a dew point of -13 ° C and a temperature of 37 ° C. • Air to be treated A · · Air in a clean room to be treated (temperature 25 ° C, dew point 14 ° C) • Cold gas c: as a treatment Air in the clean room of the object (temperature 2yc, ^ dew point 14°C) • Flow in the functional area G: nitrogen (temperature i40°C) • Regeneration gas on the inlet side of the regeneration zone: exhaust gas D through the cooling zone of the cooling zone The gas η is discharged from the functional area, and is heated by the heating means 312 ΧΡ / invention manual (supplement) / 96_1 〇 / 96122874 52 200821034 (Comparative Example i) 1 · Dehumidification device (dehumidification roller) The same as in the first embodiment Dehumidification roller. (Device Structure) A dehumidification device having the following detailed structure in the dehumidifying device 50 shown in Fig. 7 was produced. (i) The functional area is not set. (11) The flow-through gas supply pipe in the functional area, the split member in the split function area, and the exhaust gas exhaust pipe in the functional area are not provided. The arrangement of the (ill) dividing members 6a, 6b is as shown in FIG. The area ratio of each zone is dehumidification zone·regeneration zone: cooling zone = 6: 1 ··1. (iv) Cooling zone The exhaust gas exhaust pipe 32 and the first regeneration gas supply pipe 28 are connected by a connecting pipe. 2. Dehumidification test Using the above-mentioned dehumidifying apparatus, under the rotating dehumidification drum at a rotation speed of 10 rotations/hour, the air to be treated A, the cold part C and the functional area flow H are continuously supplied according to the supply conditions shown in Table 丨. The dehumidification roller is fed, and the dehumidification operation is performed. The flow chart at this time is shown in Fig. 25. As a result, the dew point of the dehumidified air was -4 ° C and the temperature was 35 ° C. • Air to be treated A: Air in a clean room to be treated (temperature 25 ° C, dew point 14) & • Cooling gas C: Air in a clean room to be treated (temperature 25 Ό, 312XP / invention manual ( Replenishment) /96-10/96122874 ^ 200821034 Dew point 14 ° C) • Regeneration gas on the inlet side of the regeneration zone: The gas D is discharged through the cooling zone of the cooling zone and is the heating gas after passing through the heating means. [Table 1] Gas supply example embodiment Example Comparative example Dehumidification zone inlet side supply surface velocity Temperature dew point m3/mi η. m/s Cooling zone into supply surface velocity " Temperature temperature side m3/mi η. m /s side mmoc D into the class 1 area, the energy rate should be the body temperature, oxygen / m / s #Jm m · mouth into the 1 area, the rate should be _ re-supply surface temperature 3m 0C 0C B body gas and air volume Out of the wet out point to exclude the exhaust temperature

The body gas discharge zone produces a zone where the I 0 degree velocity surface is re-arranged. Degree 1) Speed 273 2 25 14 47 2 25 14 6. 5 25 Clean gas 53.5 2 140 279. 2 25 14 53. 5 2 25 14 6. 5

32 Dehumidified air B 53. 5 2 140 273 2 25 14 279. 2 25 14 47 2 25 14 6.5 140 Nitrogen 53. 5 2 140

53. ! 2 25 1 A 53. 5 2 140

BRIEF DESCRIPTION OF THE DRAWINGS Fig. 1 is a view showing an example of a form of a dehumidifying drum provided in a dehumidifying apparatus for carrying out a dehumidifying method according to a first aspect of the present invention. 312XP/Invention Manual (Supplement)/96-10/96122874 54 200821034 Fig. 2 is a view showing an example of a dehumidification method for carrying out the first aspect of the present invention. In Fig. 3, (3-Μ(3_2) is a layout view of the divided member when viewed from the side of the dehumidifying roller. In Fig. 4, (4-1) to (4_8) are at the opening face 4 Schematic diagram of the shape of the wet zone, the regeneration zone, the functional zone and the cooling zone: except for '(5-1) to (") in Fig. 5 is the area diagram of the functional area of the opening surface of the dehumidification roller. #久通图6: The first supply means, the second supply means or the installation position of the third supply means is an example of the thirst quenching. FIG. 7 is another form of the first dehumidification apparatus of the present invention. Fig. 8 is a schematic view of a deformed opening dividing member, wherein the view, (8-2) is a (8-1) χ-χ line U is a cross-sectional view of the line. (6) View, (Μ) is ((4) of Figure 9 Fig. 10 is a cross-sectional view of the roller box 21. Fig. 10 is a cross-sectional view of the drum box 21. The heart σ. The 'UH' and (11-2) in the figure 2 are the σ face side from the dehumidification roller k. Schematic diagram of the configuration of the π-divided member. In Fig. 12, (12 -1) and (12-2) are schematic diagrams of the arrangement of the split members from the dehumidification tempo p ^ day. Fig. 13 is a view showing a second embodiment of the present invention. In the dehumidification apparatus of the dehumidification method of U, the (14-1) and (η-2) are divided into: 31 (supplements)/96·丨狮〗 22874 Wen Chen wet roll with the open side view 55 200821034 inch knife. 】 Schematic diagram of the configuration of the member or the deformed opening dividing member. The return (15-U and (15-2) is a schematic view of the arrangement of the sun Guard' from the side of the opening surface of the dehumidification roller. Fig. 6 is a view showing a configuration of the third aspect of the present invention. (Section - Figure Y towel' (17-D and (17-2) are the arrangement of the dividing member or the split-opening member from the side of the opening surface of the dehumidifying drum, see Fig. 18 '(1)... and (1) ―. Schematic diagram of the arrangement of the divided members when viewed from the side of the thirst removal and the opening of the cylinder on the embodiment: Fig. 19 is a flow chart of the embodiment 1. Port 20 + '(2〇_1)a(2〇_ 2) is a schematic view of the arrangement of the divided members when viewed from the side of the ventral side. Fig. Z1 is a flow chart of the second embodiment. In the second part, '(22_1) and (22-2) are dehumidification from the third embodiment. FIG. 2 is a flow chart of Embodiment 3. FIG. 2 is a flow chart of Embodiment 3. In addition to the second and second, '(24_1) and (24-2) are dehumidifications from Comparative Example 1. Fig. 25 is a flow chart of the divisional member when viewed from the side of the open face. Fig. 25 is a flow chart of Comparative Example 1. [Explanation of main component symbols] 4a, 4b 5 Opening of the ventilation drum of the dehumidification roller The mouth is divided into the roller opening surface roller car by 312XP / invention manual (supplement) /%-10/96122874 56 200821034 6a, 6b, 51a, 51b, 61a, 61b division member 7 dehumidification zone 8 regeneration zone 9 cooling zone 10 functional zone 20, 50, 60, 65, 201 Dehumidifier 21 Roller box 22 First supply machine 23 Second supply machine 24 Third supply machine 25 Heating device 26 Processed air supply pipe 27 Dehumidified air exhaust pipe 28 First regeneration gas supply Tube 29 second regeneration gas supply pipe • 30 regeneration zone exhaust gas exhaust pipe 31 cooling gas supply pipe 32 cooling zone exhaust gas exhaust pipe 33, 43 , 53 , 62 functional zone flow gas supply pipe 34 , 54 , 63 functional zone Exhaust gas exhaust pipe - 38 Direction of rotation • 39 Desalination drum opening area 40a, 40b Functional area 41 This functional area 10 is set to 312XP / invention manual (supplement) /96-10/96122874 57 200821034

42 The place where the functional area 10 is provided 44 The connection pipe 45 The deformation opening division member 46 The deformation opening division member functional area circulation gas inlet side opening 47 The deformation opening division member functional area circulation gas outlet side opening 48 The supply of the circulation gas in the functional area Direction 49 Slit 66 Rotary shaft mounting portion diameter 67 Open surface outer diameter 68 Width of the divided member that divides the functional area 69 Length of the divided member that divides the functional area 221 First supply means 231 Second supply means 241 Third supply means A treated air B dehumidified air C cooling gas D cooling zone exhaust gas E regeneration gas F regeneration zone exhaust gas G functional zone flow gas 机 functional zone exhaust gas 312XP / invention manual (supplement) /9640/96122874 58

Claims (1)

200821034 X. Patent application scope: 1 · A dehumidification method, which divides the dehumidification roller opening surface composed of a carrier having a ventilation hole in the direction of the rotating shaft and a dehumidifying agent carried on the carrier into a dehumidification zone a regeneration zone and a cooling zone, the treated air is supplied to the dehumidification zone while rotating the quenching drum, and the gas is supplied to the cooling zone to continuously dehumidify the treated air and regenerate a dehumidifying agent dehumidifying method; characterized in that an organic energy region is disposed between the regeneration zone and the cooling zone; and the _S (four) energy zone supplies a machine flow gas for cooling or drying the dehumidification roller; and the functional zone is provided The surface velocity of the circulating gas in the functional area should be set to 〇·$~1 〇 times the surface velocity of the cooling gas supplied to the 々 々 area;” The ratio of the area of the functional area to the opening area of the dehumidifying drum is set 〇· 003 〇 〇 〇 〇 〇 · · 、 、 、 、 、 、 、 、 、 、 、 、 、 、 、 、 、 、 、 、 、 、 、 、 、 、 、 、 种 、 、 、 种 种 种 种 种 种 种 、 、 种 种 、 种The open surface is divided into a dehumidification zone, a regeneration zone and a cooling zone, and the dehumidification zone is supplied with the treated air while rotating the dehumidification zone, and the regeneration zone is supplied with the regenerative disorder, and the cooling zone is supplied with the cooling gas. a dehumidifying method for continuously dehumidifying the air to be treated and regenerating the dehumidifying agent; characterized in that: 'the organic energy region is disposed between the cooling zone and the dehumidifying zone; and the functional zone for cooling or drying the dehumidifying roller is supplied to the zone Circulating gas; the surface velocity of the gas flowing through the functional area of the area will be set to 3 invention instructions (supplement)/96-10/96122874 59 200821034 The surface velocity of the cooling gas is supplied to the cooling zone 51〇倍; The ratio of the area of the functional area to the opening area of the dehumidifying drum is set to 0·003~〇·〇7 〇3. A dehumidifying method is to form a carrier and a carrier with a ventilation hole in the direction of the rotating shaft. The open surface knife of the dehumidification drum formed on the carrier is a dehumidification zone, a regeneration zone and a cooling zone, and the dehumidification zone is supplied while rotating the dehumidification zone a dehumidifying method of treating air 'and supplying 2 gases to the regeneration zone, supplying cooling gas to the cooling zone, and continuously dehumidifying the treated air and regenerating the dehumidifying agent; characterized in that between the dehumidifying zone and the regeneration zone is disposed a function area; a machine area is supplied with a gas for heating the function area of the dehumidification drum; and a surface speed of the gas supplied to the function area is set to a surface speed of the regenerative gas supplied to the mouth regeneration area The ratio of the area of the functional area to the opening surface of the dehumidifying drum is set to 〇·003~〇·〇7. 4. A dehumidifying apparatus characterized in that it has a dehumidifying drum which is rotated a dehumidification drum comprising a ventilating cavity and a dehumidifying agent supported on the carrier, wherein the opening surface is divided into a dehumidification zone, a regeneration zone, a cooling zone, and a regeneration zone. a functional zone between the cooling zones; the dividing member; a rotating means for rotating the dehumidifying drum; a first supply means for supplying the treated air to the dehumidifying zone; 312XP/Invention Manual (Supplement)/96-10/96122874 rn 200821034 The second supply means supplies the regeneration gas to the regeneration zone; the third supply means supplies the cooling gas to the cooling zone, and the heating means' Before the regeneration zone; and the slave of the king of the king, the sub-heating gas distribution means of the regenerative gas function zone, which supplies the gas to the functional zone to the /, the machine zone, wherein the functional zone area The dehumidification roller opening is 0.003 ~ 0.07. 5. A dehumidifying apparatus, comprising: a dehumidifying drum comprising: a carrier having a ventilation hole formed in a direction of a rotating shaft; and a dehumidifying roller comprising a dehumidifying agent for carrying the carrier, wherein The opening surface is divided into: a dehumidification zone, a regeneration zone, a cooling zone, a functional zone between the cooling zone and the dehumidification zone; the dividing member; a rotating means for rotating the dehumidifying drum; a first supply means, Providing the treated air to the dehumidification zone; the supply means for supplying the regeneration gas to the regeneration zone; the third supply means for supplying the cooling gas to the cooling zone; and the heating means disposed in the front of the regeneration zone, And heating the regeneration gas; and the functional area circulation gas supply means, wherein the functional area is supplied with the gas flowing through the functional area; wherein the ratio of the area of the functional area to the opening area of the dehumidification roller is 0·003~0·07 〇 312XP/Invention Manual (Supplement)/96-10/96122874 61 200821034 H heavy dehumidification device, characterized in that it has a dehumidification roller which is driven by a rotating shaft M. U ^ The glaze direction is formed by a carrier having a ventilating cavity, and the smear surface of the sizing agent carried on the carrier is divided into two parts into a dehumidification roller by a dividing member, and the regeneration zone and the cooling zone are opened by the f ^ ^ ^ region. And a functional zone disposed between the wet area and the regeneration zone; the dividing member; a rotating means for rotating the dehumidifying drum; a supply means 'which supplies the treated air to the dehumidifying zone; Supplying a regeneration gas to the regeneration zone; a second supply means for supplying a cooling gas to the cooling zone; a heating means 'which is disposed in front of the regeneration zone, and heating the regenerative gas function zone to distribute the gas supply means, the function of which is The area is supplied with a flow of gas in the functional area, and a first heating means for heating the flow of the gas in the functional area; wherein the ratio of the area of the functional area to the open area of the dehumidifying drum is 0·003~0·07. 312XP/Invention Manual (supplement)/96-i〇/96122874 62