TW200818222A - Method of actuating solenoid valves - Google Patents

Abstract

A method of actuating a plurality of solenoid valves is described, in which an actuating signal having a voltage of varying duty cycle is supplied to each valve. The duty cycle has an initial value sufficient to cause an armature of the valve to move to an actuated position, and a subsequent lower value sufficient to hold the armature in the actuated position. The actuating signals are supplied sequentially to the valves so that at any given time not all of the valves have a voltage of the initial duty cycle being supplied thereto.

Description

200818222 IX. Description of invention: [Technical field to which the invention belongs]

The present invention relates to a method of actuating a solenoid valve. [Prior Art J solenoid valve is intended to be used in situations where it is necessary to open and _-fluid lines. Solenoid valves typically include an electric motor that can be moved by the force in the 'coil' that resists the force of the eyeball yellow. Fluid line by one

The pad on the base of the electric core is opened and closed, and the pad is sealed against a valve seat of the valve. The operation of the solenoid valve is controlled by the power supply to the coil of μ. The interval can be normally closed. The armature will move to the position where the power supply is turned on. Alternatively - the valve can be normally open and the armature will move to the -activated closed position when the power supply is turned on. Initially a relatively large amount of energy is required to move the electrode from the unactuated position to the actuated position, but less energy is required to maintain the armature in the activated position. Figures 1 and 2 illustrate two different actuation signals that may be supplied to one of the solenoid valves to move the frame to an activated position and then hold the battery in that position.

The voltage time changes. A Referring first to Figure 1, the voltage of the first actuation signal "has a relative value Va at a time during which the armature is moved to the activated position. The duration time # is between 0.1 and 5 seconds. Once the armature has reached the activated position (which can be detected by a reed switch), the voltage is reduced to a value Vh that is typically less than _half, reducing the current flowing through the coil to a level sufficient to hold the armature At the position of the activated position, the voltage Vh is maintained at a time h until the power supply is turned off, so that the armature can be returned to the unactuated position. During va during this time the electrode is moved to the activated position time h has a value once the armature has arrived

Actuation position The duty cycle of the second actuation signal is reduced to - the selected generation - the value of the average current through the coil sufficient to maintain the armature in the actuated position. In this example, the 'actuation signal' has a -鄕 load cycle during the time (four). This reduced duty cycle is maintained until the power supply is shut off to allow the armature to return to the inactive position. In other words, the second actuation signal has a 100% duty cycle during time and a 5〇% duty cycle during time t2. One of the advantages of both the first and second actuation signals is that the power consumption of the coil when the armature is maintained in the activated position is much less than the power consumption of the coil when the armature is moved to the activated position. This reduces the spontaneous heat of the valve and allows the valve to operate at higher ambient temperatures.复杂 Complex machinery such as a vacuum pumping arrangement may include a plurality of solenoid valves, such as at least five solenoid valves, which may be required to open or close the corresponding fluid line at the same time. Applying either of the first and second actuation signals simultaneously to the solenoid valve creates a high power requirement during time ^, requiring a relatively high capacity power supply. SUMMARY OF THE INVENTION The present invention provides a method of actuating a plurality of solenoid valves arranged in a vacuum pumping process. The method includes supplying each valve with an actuation signal having a voltage of a varying duty cycle, the duty cycle having a sufficient One of the valve's electrical regions is moved to an initial value of an activated position and a post-sister low value sufficient to maintain the armature at the activated position of the 119885.doc 200818222, wherein the actuation signals are sequentially sent The valves cause the valves to not all have one of the initial load cycles for the valves at any given time.

By alternately supplying the actuation signals to the valves in such a manner that, on any given day (4), the valves are not all, preferably only no more than the ones, and the valves are only not exceeding the valves. A valve has a voltage to supply the initial negative % of the valves. The maximum total power consumption of the valves at any given time will be less than the total power consumption of the valves being fully actuated simultaneously. +Example, in the case where a plurality of valve systems including n valves (where η is - greater than the positive number of the work) H right (four) actuation signal is simultaneously supplied to the room, then "the maximum power consumption of the valve will be It is Pt〇t=nPa, where 匕 is the power consumption during the movement of the valve armature to the actuated position. By preventing all valves from being actuated at the same time, for example, hunting is possible to be supplied to the initial load cycle for a given time. The number of voltage valves is limited to m (where m is a positive integer less than η), then the maximum power consumption of the valves is reduced to 100% of the initial duty cycle and the load cycle is reduced by 5〇% The provision of such actuation signals to the interleaving such that m is as small as possible will greatly reduce the capacity of the power supply for the = valve, thereby providing advantages in size, weight and cost reduction. The supply of money is staggered at least by the voltage supply duration (t丨) of the initial load cycle of the first valve in the field (4). This ensures that the age of the load cycle is reduced before the other valve is actuated ^ H9885.doc 200818222 Give these valves a command at least - valve. In the example, in the embodiment, the supply of the actuation signal to the valve is tl staggered/inter-actuated, and the third 阙 is at time ―, according to which the valve is actuated at time (11-1) 11. 致 Actuation signal The supply may be (iv) a power-reducing cycle a, preferably 180, of reducing the duty cycle of one of the reduced load cycles of the (four) to the other valve (such as the previously actuated valve) The phase is controlled by the supply of the actuation signal so that the voltage of the reduced duty cycle supplied to the valve from the second valve to be actuated is out of phase with the electric power M supplied to the previous reduced duty cycle of the actuated valve, The fluctuations in the power supply can be mitigated by the amplitude. Accordingly, the present invention also provides a method of operating a plurality of solenoid valves, the method comprising supplying each valve with an actuation signal having a voltage of a varying duty cycle 'the duty cycle Having an initial value sufficient to cause an armature of the valve to move to an actuated position and a subsequent lower value sufficient to maintain the armature in the actuated position and wherein the actuation signals are sequentially sent These valves provide a marginal reduction in the supply of such valves One of the voltages of the load cycle is out of phase with '(iv) 18 〇. The voltage is reduced in the load cycle of the other 供 。. The supply of the actuation signals in such a way as to operate the valves can be achieved in a variety of ways. For example, the actuation signal for each valve in the valves may be the same, and the supply of the actuations (4) may be offset by one of the distances WX/2.T) where T is the reduction During the period of the duty cycle and X is an odd integer 乂k equal to i. 3 Alternatively, the duration of the supply of the initial load cycle voltage to the valves can be sequentially increased and decreased or decreased and increased. 200818222 χ/2. In an embodiment, the plurality of valves constitute a subset of a set of valves including at least two subsets, and each of the other subsets in J^ precedes the plural The valve is actuated. The plurality of turns preferably constitute a final subset of the set of valves comprising at least two subsets of valves to be actuated. These valve money are actuated in sequence, that is, the first subset is first actuated, then the second subset is acted upon: and so on until the final subset is actuated. Within each of the other (four) episodes (ie, without the final subset), depending on the capacity of the power supply used to generate the actuation signals, the inter-sets can be actuated simultaneously . This reduces the time required to operate a relatively large number of valves. u Accordingly, the present invention also provides a method of actuating a plurality of solenoid valves, the method comprising supplying each valve with an actuation signal having a voltage of a varying duty cycle, the duty cycle having an armature sufficient to cause the valve Move to an activated (set) value and - sufficient to maintain the armature at a subsequent lower value of the activated position 'and wherein the actuation signals are simultaneously sent to a subset of valves and sequentially sent to another - A subset of valves, and such that at any given time these valves are not kings having one of the initial load cycles for the valves. The invention further provides a method of actuating a plurality of solenoid valves, the method comprising supplying each valve with an actuation signal having a voltage of a variable load cycle, the load cycle having a sufficient amount to cause the valve to be electromigrated to a An initial value of the actuated position and a U乂 low value sufficient to maintain the armature in the activated position and wherein the actuation signals are simultaneously sent to a subset of valves and 2: to another subset of valves 'In such a further subset, one of the reduced duty cycles of the valves supplied to the valve fields is out of phase with the voltage supplied to the valves. 119885.doc -9- 200818222 Another valve reduces the voltage of the duty cycle . The present invention also proposes a vacuum pumping arrangement comprising a plurality of solenoid valves and a control device for supplying each valve with a constant motion signal having a voltage of a varying duty cycle, the duty cycle having - sufficient to cause the valve - the armature is moved to the initial value of the actuated position £ and _{ to maintain the armature at a subsequent lower value of the activated position, and wherein the control device is configured to actuate the valve to the # valve in sequence. The numbers are such that, at any given time, not all of the valves have a voltage for the initial duty cycle of the valves. The present invention further provides a vacuum pumping arrangement comprising a plurality of solenoid valves and a control device for supplying each valve with a constant motion signal having a voltage of a variable duty cycle, the duty cycle having one of the valves sufficient to cause An initial value of the armature moved to an actuated position and a subsequent lower value sufficient to maintain the armature in the actuated position, and wherein the control device is configured to simultaneously supply an actuation signal to a subset of valves and sequentially An actuation signal is supplied to another subset of valves, and such that not all of the valves have voltages at one of the initial load cycles for the valves at any given time. The features mentioned above in relation to the inventive aspects of the invention are equally applicable to the device aspect, and the features mentioned above in relation to the device aspect of the invention are equally applicable to the method aspect. [Embodiment] Hereinafter, preferred features of the present invention will be described by way of example with reference to the accompanying drawings. Referring first to Figure 3, a valve control device 10 for controlling the operation of a plurality of solenoid valves receives power from a power supply 12. Power supply i 2 119885.doc -10- 200818222 may be a local DC power supply for machines having multiple fluid lines, each of which contains a corresponding solenoid valve to regulate fluid flow along the fluid line . For example, a vacuum pumping arrangement can include a plurality of solenoid valves for performing various functions, wherein non-limiting includes: • pump isolation valves; • pump vent valves; • purge gas supply valves; and • solvent supply valves.

Figure 3 illustrates four solenoid valves 14, 16, 18, 2, but any number of n valves greater than 丄 can be provided. Each __ valve is connected to the valve control device 10 by a respective signal line 22, 24, %, 延伸 extending from the valve control device 10 to one of the coils of the valve. The valve-armature can be moved by a magnetic field generated in the coil by a current flowing through the coil. The fluid line is opened and closed by a pad on the base of the armature that abuts against one of the valve seat seals. The operation of each valve is controlled by the actuation of the valve control device 1 (). Each 1 can be normally closed, and the armature will move to the -activated open position when the actuation signal is supplied to the coil. Alternatively, the valve can be normally open. The armature will move to an actuated closed position when the coil of the actuating signal is supplied to the valve. In this example, the valves are normally closed. As illustrated in Fig. 3, the valve control device 1 can receive a signal from a pump controller 30 along the signal line, instructing the valve control device 1 to open or close as needed; among the valves - or a plurality of valves. In the event that one or more of the valves are to be closed, the valve control device service ceases to supply an actuation number to the valves, and the armatures of the crucibles are moved to the closed position. If it is necessary to open one or more of the valves, valve control 1! 1 () generates the ## for the supply of these turns as needed. However, as will be described in more detail below, instead of supplying these signals to the valves simultaneously along the respective signal lines, the valve control device 1 sequentially supplies these signals to the valves. An example of a sequence of coincident motion signals that may be supplied to the solenoid valve coil by the control system is illustrated in FIG. In this first example, valves 14, 16, 18, 2〇 are each to be opened, so that the valve control device 产生 produces an actuation signal 34, 36, 38, 40 for each respective valve. Each signal has a voltage Va that varies the duty cycle. The duty cycle initially has a value sufficient to cause one of the valve armatures to move to an actuated position. In this example, the initial value of the duty cycle is 100%. The duration of the initial load cycle ti is sufficient to cause the armature to be moved to the activated position, and depending on the design of the valve, may be between 〇·丨 seconds and 5 seconds. The duty cycle of the signal voltage is then reduced to a value sufficient to maintain the armature in the activated position. In this example, the reduction in the duty cycle is 50%. The voltage of the actuation signal is maintained to reduce the duty cycle until the valve is closed, at which point the actuation signal stops the supply valve. In this example, the actuation signals 34, 36, 38, 40 are the same. The sequential supply of the actuation signals 34, 36, 38, 40 of the supply valves 14, 16, 18, 20 will now be described with reference to FIG. Valve control device 10 selects the sequence in which valves 14, 16, 18, 20 are to be opened. In this example, valve 14 is first opened, then valve 16 is opened, then valve 18 is opened, and finally valve 2 is opened. Therefore, the actuation signal 34 is first supplied to the valve 14. At time q, the duty cycle of the voltage at the actuation signal 34 is from 119885.doc -12-200818222 100°/. The reduction is 50% and the actuation signal 36 is supplied to the valve 16. At time 2ti, the duty cycle for actuating the voltage of the yoke 36 is reduced from 100% to 5〇% and the actuation signal 38 is supplied to the valve 18. At time, the duty cycle of the voltage of the actuation signal 3 § is reduced from 100% to 50%, and the actuation signal 4 〇 is supplied to the valve 2 〇. The power consumption of a valve when it is supplied with a voltage of 100% duty cycle is 匕, and therefore the power consumption of a valve when it is supplied with a voltage of 5 〇〇 / () load cycle is , Pa. By staggering the actuation signals 34 36, 38, 40 of the supply valves ι 4, 16, 8 and (10) in this manner, the voltage of the initial load cycle is at any given time (no more than one valve is supplied to the valves). Therefore, the daunting power consumption of the valves 14, 16, 18, 20 is limited to (Pa+3/4Pa) between the periods of 3ti and 4ti, at which time one of the 100% duty cycles is supplied to the valve 20 and The voltage of the 5 〇 % load cycle is supplied to the other three valves 14, 16, 18. In contrast, if the actuation signals 34, 36, 38, 40 have been simultaneously supplied to the valves 14, 16, 18, 2, Then, the maximum power consumption of the valves will be 4 Pa during the time t1, at which time the voltage of the load cycle of 1% is supplied to all of the valves. C/j allows the capacity of the power supply 12 to be reduced. This advantage I1 is now more apparent with the increase in the number of solenoid valves, because for the sequence illustrated in Figure 4, the maximum power consumption of the n solenoid valves is limited to: Ρ Ρ + Γ («-1 ) ΡΛ ° Equation (1) At this point the initial duty cycle is 100% and the duty cycle is reduced by 5〇%. Another sequence of consistent motion signals that may be supplied by the control system to the solenoid valve coil An example is illustrated in Figure 5. In this first example, the valves 14, 16, I 2 〇 are to be opened, so that the valve control device 1 () is consistent with each of the corresponding readings 119885.doc -13 - 200818222 Motion signals 44, 46, 48, 50. As with other examples, each signal has a voltage that varies the duty cycle.

Va' and the duty cycle has a value at the beginning that is sufficient to cause the armature of one of the valves to move to an actuated position. Name, Bu μ A 丨 + value In this example, the initial value of the duty cycle is 100%, and the initial load cycle is sufficient for the armature to be moved to the activated position. Then, the signal voltage is cut to a value sufficient to maintain the armature in the activated position. In this example, the load cycle is reduced by W50%. The voltage of the actuation signal is maintained at this reduced duty cycle until valve ί is closed, at which point the actuation signal stops the supply valve. In this example, the actuation signals 44, 46, 48, 50 are not identical. As with the first example, the supply of voltages for the initial duty cycle of actuation signals 44 and 48 continues for b, while the supply duration of the voltages for the initial duty cycle of actuation signals 44 and 48 is (t1 + V2T), where T is the time period during which the duty cycle is reduced. Therefore, the supply duration of the voltage supplied to the initial duty cycle of the second to fourth valves 14, 16, 18 is ±V2T from the supply duration of the voltage supplied to the initial duty cycle of the previously actuated valve.

(I Actuating 5 Tigers 4 4, 4 6 , 4 8 , 50 The sequential supply of valves 14, 16 , 18, 20 is similar to the actuation signals 34, 36, 38, 40 described above. As with the first example, the valve control device 10 selects the sequence in which the valves 14, 16, 18, 20 are to be opened. In this example, the valve 14 is first opened, then the valve 16 is opened, then the valve 18 is opened, and finally It is the valve 20 that is opened. Thus, the actuation signal 44 is first supplied to the valve 14. At time t!, the duty cycle of the voltage of the actuation signal 44 is reduced from 100% to 50% and the actuation signal 46 is supplied to the valve 16. At time 2, the actuation signal 48 is supplied to the valve 18, and at time, the actuation signal 50 is supplied to the valve 119885.doc .14 - 200818222 20 〇 because the second and fourth valves 16, 2 〇 β ^ m The length of the M / 0 shellfish cycle voltage should be 'supplied to the valve 16 of the 5 〇% negative shell warfare voltage 180. Heterogeneous in the early valve 14 50% load cycle " the pressure of the Emperor] 8ft 〇s + and (, the 50% duty cycle of the pre-valve 18 is out of phase with the voltage of the 5〇% load cycle of the supply valve 20. Therefore, when all the valves have been actuated, the mouth, ^^j,,, Time, among these valves Half of the valve to obtain the effect of fluctuations in the power supply of the vessel. ,, large dagger, salty light field power supply

U ^ In addition 'because the actuators 14, 16, 18, 2 are actuated in this way, the L number 44 46, 48, 5 〇 'the initial load cycle voltage is supplied to the valves at any given time. More than two valves, and therefore the most power of valves i4, MU, the power consumption is limited to the period between 2ti and (2) Μ) (2Pa + V4Pa), at this time (10)% of the load cycle - the voltage is supplied to the valve And 50% load cycle - voltage supply valve 14. In contrast, if the actuation signals 44, 46, 48, 5〇 have been simultaneously supplied to the valves 14, 16, 18, 2, then the maximum power consumption of the valves will be < At this time, the voltage of the surface load cycle is supplied to all of the valves. As with the first embodiment, this allows the capacity of the power supply 12 to be reduced. Another way of looking at the advantages provided by the sequential supply of the actuation signal to the valve is not to allow the capacity of the power supply to be reduced but to increase the number of solenoid valves that can be actuated by the power supply. For example, consider an example provider with a value of Pa of 5 W. The actuation signal is simultaneously supplied to the valve where the power supply is a 20 W power supply. If permitted above, as described with reference to Figure 4, the power supply can only support up to 119885.doc -15- 200818222 = wide. However, if the actuation signal is sequentially supplied to the valve so that the voltage of 1 GG% of the load is not exceeded in any of the valves at any time, the power supply can support up to thirteen by the above equation (1). The electromagnetic valve. The relative actuation of the relatively large solenoid valve may take a relatively long time depending on the value of h. For example, if ti = 〇 5 seconds, and if the pump controller sends a signal to the valve control device - the signal is to act on the thirteen currently unactuated solenoid valves, then use the sequence shown in Figures 4 and 5 to The three coils supply the actuation signal 咅σ本芏Γ. It takes 6.5 seconds for all the valves to be actuated. In order to reduce the time taken for all valves to be actuated, the valve control device can be constructed to operate the power supply by calculating the remaining power available at any given time and simultaneously operating the maximum number of valves allowed by the remaining power. The full capacity of the supplier. An example of such a valve control device will be described below with reference to Figs. Referring first to Fig. 6' - valve control device 1 〇〇 control the operation of a collection of thirteen solenoid valves, and the power supply is supplied by a _2 gw power supply unit 〇4. Each of these valves is a normally closed valve, that is, the Pa value of each valve is 5 W. Each valve control device is connected to the valve control device H)0 by a corresponding signal line 1〇6a, (10), ..., i〇6m extending from the valve control device (10) to the -valve coil. As previously mentioned, the valve-armature can be moved by a magnetic field generated in the coil due to a current flowing through the coil. The operation of each valve is controlled by an actuation signal supplied to the valve by valve control device 10. Each valve is normally closed. The armature will move to the -activated open position when the actuation signal is supplied to the coil. Valve control device 100 receives a signal from a pump controller 110 along signal line 119885.doc -16 - 200818222 112, instructing the valve control device to open or close one or more of the valves as needed. As previously mentioned, in the event that one or more of the valves are to be closed, the valve control device 1 〇〇 only needs to stop supplying actuation signals to the valves such that the armatures of the valves are moved to the closed position. If one or more of the valves are to be opened, the valve control device 100 generates an actuation signal for supplying the valves as needed. In this example, the actuation signal is similar to that shown in FIG. Each signal has a voltage va of one of the varying duty cycles. The load cycle initially has a value of 1 〇 0% at a time t1 (0.5 sec in this example) during which the armature moves to the activated position. After the time ti has elapsed, the duty cycle is reduced to 50% to keep the armature in the activated position. The voltage of the actuation signal is maintained to reduce the duty cycle until the valve is closed, at which point the actuation signal supply to the valve is stopped. If the pump controller 11 〇 commands the valve control device 1 移 to move all valves from the closed position to the open position, it is apparent that the power supply 1 〇 4 has insufficient capacity to allow all valves to be actuated simultaneously. The valve control device 1 therefore calculates the remaining power available at any given time and activates the maximum number of valves allowed by the current remaining power. In this example, the remaining power was 20 W at the beginning because all valves were closed. In view of this, and with reference to Figure 7, the valve control device 100 initially supplies the actuation signals 120a, 120b, 120c, and 120d to the four valves 102a, ..., 102d of the first subset, resulting in four of the subsets. The valve is closed. After the time t! is over, the load cycle of the four actuation signals is reduced to 5 〇%, so the power required to maintain this first subset of valves in the closed position is 5 W. Therefore, the remaining power is reduced to 15 W at this time, so the valve control device 1〇() supplies the actuation signals, 120f to the three valves l〇2e, ..., 102g of the second sub-119885.doc • 17-200818222. And i2〇g causes the three valves in this second subset to close. After the time 2^ has elapsed, the load cycle of the three actuation signals is reduced to 5〇%, so the power required to maintain both the first and second valve subsets in the closed position is 8.75 w. Therefore, the remaining power is reduced to U.25w at this time, so the valve control device ι supplies the actuation signals 12〇}1 and 12〇i to the two valves l〇2h, l〇2i of the third subset simultaneously. The two valves in this third subset are closed. After the time has been called, these two

The U-actuated “load cycle of the number is reduced to 5, so the power required to maintain the first, second and third valve subsets in the closed position is η·25 w. Therefore, the remaining power is reduced to 8 at this time. · 75 w, this is not enough to simultaneously activate any combination of the remaining four valves l〇6j,..., l〇6m. Therefore, the four valves in the fourth valve subset are operated in sequence, so at time 3ti The actuation signal 12〇 is supplied to the valve 102j. At the time, the actuation signal 120k is supplied to the valve 1〇2k, and the actuation signal 1201 is supplied to the valve 1021 outside the time, and the actuation signal is called at the time. Supply valve 102m. At a time of 7tl (in this case, all valves l〇2a is 3.5 seconds) is MP#, compared to 13^ or 6.5 seconds if all valves are closed in sequence. In addition, 75% of these valves are closed in one time or within 1.5 seconds. In the above example, there are four valves 1〇2],··,,1〇2 melons and one figure A similar manner of operation is shown in Figure 4, such that a voltage of 5 〇 % of the load supplied to one of the valves is in phase with the electric C control system of 5 〇 % of the load cycle supplied to each of the other valves The sequence of actuation signals that can be supplied to the coils of these valves is likely to be similar to that shown in Figure 5, such that, for example, the 5〇% load of the supply valve 1〇2] is 117885.doc -18- 200818222, the voltage is out of phase, Good 180. It is out of phase with the voltage of 5〇% of the supply valve 1〇, so when all the valves 102j,...,1〇2m of this subset have been activated ¥ 'At any given time these valves only Half of the power is supplied. This also has the effect of mitigating fluctuations in the power supply. [Schematic Description] Fig. 1 is a diagram showing a first known actuation of a coil supplied to a solenoid valve. FIG. 2 is a graph showing a time variation of a second known actuation signal for supplying a coil of a solenoid valve; FIG. 3 is a diagram for controlling actuation of a plurality of first solenoid valves. Figure 4 is a series of graphs illustrating a first sequence of actuation signals that can be supplied to the solenoid valve coil by the control system of Figure 3; Figure 5 is a series of illustrations that can be supplied to the solenoid valve coil by the control system of Figure 3. a second sequence of the actuation signal Figure 6 - A schematic diagram of a control system for controlling the actuation of a plurality of second solenoid valves, and Figure 7 is a series of graphs illustrating a sequence of actuation signals that can be supplied to the solenoid valve coils by the control system of Figure 6. [Main component symbol description] 10 Valve control device 12 Power supply 14 Solenoid valve 16 Solenoid valve 119885.doc • 19- 200818222 18 Solenoid valve 20 Solenoid valve 22 Signal line 24 Signal line 26 Signal line 28 Signal line 30 Pump controller 32 Signal line 34 actuation signal 36 actuation signal 38 actuation signal 40 actuation signal 44 actuation signal 46 actuation signal 48 actuation signal 50 actuation signal 100 valve control device 102a, 102b, ..., 102m solenoid valve 104 power supply 106a, 106b, ... 5 106m signal line 110 pump controller 112 signal line 120a, 120b, ... 3 120m actuation signal 119885.doc -20-

Claims (1)

200818222 X. Patent application scope: 1 . A method for actuating a plurality of solenoid valves arranged by vacuum pumping, the method comprising supplying each valve with an actuation nickname having a voltage of a variable load cycle, the load cycle having a An initial value sufficient to cause an armature of the valve to move to an actuated position and a subsequent lower value sufficient to maintain the armature in the actuated position, wherein the actuation signals are sequentially sent to the valves Such valves do not all have a voltage for the initial duty cycle of the valves at any given time. 2. The method of claim 1 wherein the supply of the actuation signals is controlled such that no more than two of the valves have voltages at an initial duty cycle for the valves at any given time. 3. The method of claim 1 wherein the supply of the actuation signals is controlled such that no more than one valve at any given time has a voltage to supply one of the initial duty cycles of the valves. The method of claim 1, wherein the supply of the actuation signals to the valves is staggered by at least a supply duration of a voltage of an initial duty cycle of the first valve among the valves to be actuated. 5. The method of claim 1, wherein the actuation signals have the same initial and reduced duty cycle. 6. The method of claim 1, wherein the supply of the actuation signals is controlled such that a voltage of one of the reduced load cycles supplied to one of the valves is out of phase with respect to another valve supplied to the valves The voltage of the small load cycle. 7. A method of actuating a plurality of solenoid valves, the method comprising supplying each valve with an actuation signal having a voltage of a varying duty cycle, the load being plurable to cause one of the valves to be armature shifted At the beginning of an active position. And - a subsequent lower value sufficient to maintain the armature in the activated position = wherein the actuation signals are sequentially sent to the valves such that the valves are supplied to the field - the reduced duty cycle of the valve - The electric rafts are out of phase with the voltage supplied to the other valves in the valve field to reduce the duty cycle. 8. 9. 10. 11. 12. 13. 14. If the method of item 7 is 'in which the actuation signals are sent to the valves in sequence, no more than two of the valves at any given time The valve has a voltage for supplying one of the initial duty cycles of the special valve. The method of claim 7 wherein the actuation signals are supplied to the valves to the second valve of the valves to be actuated The method of claim 7, wherein the actuating signals have the same initial and reduced duty cycle. The supply of the actuation signals is controlled such that the supply valve has a voltage of 18° for the towel mi and the negative ring. The phase is different from the voltage supplied to the valves to reduce the duty cycle of the valve. The supply of the actuation signal is controlled such that the valve reduces the voltage of one of the load cycles 180. The voltage of the different valve reduces the voltage of the load cycle. As in the method of claim 11, one of the valves is supplied to the previous one. Act as follows: the method of the mountain member 12, wherein the valve in the valve The initial load cycle %, the supply duration of the voltage is different from the supply duration of the voltage of the initial load cycle of the previously actuated valve. The method of claim 13 wherein the initial negative of the valve among the valves 119885.doc 200818222 The supply duration of the voltage of the quarantine ring and the supply duration of the voltage of the initial duty cycle of the previously actuated valve are reduced by ± χ/2 of the time period of the duty cycle, where X is an odd integer 15. The method of claim 7 or 7, wherein the plurality of valves form a subset of a set of valves comprising at least two subsets, and wherein each of the other subsets of the valves precedes the plurality 16. The method of claim 1, wherein the other subset of valves are actuated sequentially. 17. The method of claim 16, wherein the valves in each respective other subset are simultaneously actuated 18. The method of claim 15, wherein the number of the subset of valves depends on the capacity of the power supply used to generate the one of the actuation signals. 19. A method of actuating a plurality of solenoid valves, the method package Supplying, to each valve, an actuation signal having a voltage of a varying duty cycle, the load having an initial value sufficient to cause an armature of the valve to move to an actuated position and a sufficient to maintain the armature in the Subsequent lower values of the activated position, and wherein the actuation signals are simultaneously sent to a subset of valves and sequentially to another subset of valves, and such that not all of the valves are provided at any given time The method of claim 19, wherein the supply of the actuation signal to the other subset of valves is controlled such that no more than two of the valves are present at any given time The valve has a voltage for supplying an initial duty cycle of the valves. The method of claim 19, wherein the supply of the actuation signals to the other subset of valves is controlled such that it does not exceed at any given time A valve has a voltage that is supplied to one of the initial duty cycles of the valves. The method of claim 18, wherein the actuation signal is applied to the subset of the other valve; the voltage of the initial duty cycle of the first valve in the subset of valves to be activated The duration of supply is staggered. 23. As in the method of claim 19, the 苴中呤八甲远专用 actuation signal has the same initial and reduced duty cycle. 24. The method of any one of claims 19 to 23, wherein the supply of the actuation signal to the other subset of the control is controlled to be provided to one of the valves. The voltage-reducing voltage is out of phase with respect to the voltage of the reduced duty cycle supplied to the other of the valves. The method of any one of claims 19 to 23, wherein the supply of the actuation signal to the other subset of valves is controlled such that a decrease in a valve is provided to the valves One of the load cycles is voltage 180. Heterogeneous to the voltage of the reduced duty cycle supplied to the other of the valves. 26. The method of claim 25, wherein the supply of the ampoules to the other subset of valves is controlled such that a reduced duty cycle is provided to one of the valves One of the voltages is 180. Heterogeneous to the voltage supplied to the previously actuated valve to reduce the load =. And the method of claim 26, wherein the supply of the voltage of the duty cycle of the valve in the valves is different from the previous one. The initial load of the Inlay valve is the duration of supply of the voltage. 28. The method of claim 27, wherein the supply duration of the voltage of the initial check cycle of the one of the valves is reduced from the supply duration of the voltage of the previously actuated valve and the beta load cycle. The time period of 仞 is ±x/2, where X is an odd integer. 119885.doc 200818222 29·If the request item ι, 7戎19 夕古, soil ^, 〇〇%. The initial load cycle in / / /, is 30. As in the method of claim i, 7 or 19, the time is between seconds and 5 seconds. The negative cut continues with a method of actuating a plurality of solenoid valves, the method comprising: supplying an actuation signal to each of the voltages having a varying load cycle, the load being routed to cause the armature of the valve to be shifted The initial value of the -actuated position and - is sufficient to maintain the armature at a subsequent lower value of the activated position and wherein the actuation signals are simultaneously sent to the valve subset and sequentially sent to the second valve The subset 'in such a range that the voltage of one of the reduced duty cycles supplied to one of the valves is out of phase with the voltage of the reduced duty cycle supplied to the other of the valves. Ο 32. A vacuum pumping arrangement comprising a plurality of solenoid valves and a control member for supplying a voltage-actuating signal having a varying load cycle to each, the load cycle having - sufficient to cause the valve The electrical value is moved to an initial value of an activated position and a subsequent lower value sufficient to maintain the armature in the actuated position, and wherein the control device is configured to sequentially supply actuation signals to the valves such that Not all of the valves at any given time have a voltage to supply one of the initial duty cycles of the valves. 33. The vacuum loading arrangement of claim 32, wherein the control device is configured to actuate the "number" such that no more than two of the valves have an initial duty cycle for the valves at any given time. A voltage 34. The vacuum suction arrangement of claim 32, wherein the control device is configured to supply an actuation k number such that no more than one valve at any given time has a supply of 119885.doc 200818222 initial load of the valves One of the cycles of voltage. 35. The vacuum pumping arrangement of claim 32, wherein the control device is constructed to Y 1 ', and the supply duration of the voltage of the initial duty cycle of the first valve among the valves to be actuated is staggered. The actuating signal is supplied to the valves. The vacuum pumping arrangement of the monthly requester 32, wherein the actuating signals have the same initial and reduced duty cycle. 37. As claimed in any of claims 32 to 36. The vacuum fruit is arranged in a vacuum, wherein the control element is configured to control the supply of the actuation signals such that one of the reduced load cycles of the valves supplied to the valves is out of phase with respect to another valve supplied to the valves. Small negative 38. A vacuum pumping arrangement according to any one of claims 32 to 36, wherein the control is configured to control the supply of the actuation signals such that a reduced duty cycle is provided to one of the valves One of the voltages is 18 〇. Heterogeneous to the voltage of the reduced duty cycle supplied to the previously actuated valve. 39. The vacuum pumping arrangement of claim 38, wherein the control device is configured to control the supply of the actuation signals such that The supply duration of the voltage of the initial duty cycle of the valve in the equal valve is different from the supply duration of the voltage of the initial duty cycle of the previously actuated valve. 40. The vacuum pumping arrangement of claim 39, wherein the control device Controlling the supply of the actuation signals such that the supply duration of the initial load cycle of the one of the valves is less than the supply duration of the voltage of the initial duty cycle of the previously actuated valve. ±x/2 of the time period of the cycle, where X is an odd integer. 119885.doc 200818222 41. The vacuum fruit arrangement of claim 32, wherein the plurality of valves Include a subset of the inter-set of at least two subsets, and wherein = construction causes each subset of the other subsets to precede the plurality of spaces 42. For example: vacuum pumping arrangement of claim 40, wherein the control The device is constructed such that the other subsets of valves are actuated sequentially. 43· ^ The vacuum pumping arrangement of the item 41, wherein the control device is constructed such that the valves in the other subset of the parent are simultaneously actuated. A vacuum pumping arrangement of 41, comprising a power supply ' for generating the actuation signals' and wherein the number of such valve subsets is dependent on the capacity of the power supply. ϋ 45· - a vacuum pumping arrangement, Including a plurality of solenoid valves and a control for supplying an actuation signal having a voltage of a varying load cycle to each, the duty cycle having - sufficient to cause the valve to be electrically towed to an actuated position An initial value and a subsequent lower value sufficient to maintain the armature in the actuated position, and wherein the control device is configured to simultaneously supply an actuation signal to a subset of valves and sequentially supply the other subset of valves Moving signal, At any given time so that the valves do not all have to supply an initial duty cycle of the other one of the valve voltage. 46. The vacuum pumping arrangement of claim 45, wherein the control device is configured to supply an actuation signal to the other valve subset such that no more than two valves in the valve fields have an initial supply to the valves at any given time One of the voltages of the duty cycle. 47. The vacuum pumping arrangement of claim 45, wherein the control device is configured to supply an actuation signal to the 119885.doc 200818222 «the other sub-subset so that no more than one valve at any given time has an initial supply to the valve One of the voltages of the duty cycle. ° 48. The vacuum pumping arrangement of claim 45, wherein the control device is constructed to at least stagger the supply of the voltage of the initial duty cycle of the first valve in the subset of valves to be activated The set of actuation signals is supplied by two. ^ 49. The vacuum pumping arrangement of claim 45 wherein the actuation signals have the same initial and reduced duty cycle. The vacuum fruit absorbing arrangement of any one of claims 45 to 49, wherein the control device is configured to supply an actuation signal to the other subset of valves such that a reduced duty cycle is supplied to the = middle-valve The voltage is out of phase with respect to the voltage that is supplied to the other valve to reduce the load cycle. The vacuum pumping arrangement of any one of clauses 45 to 49, wherein the controller is configured to supply an actuation signal to the another subset of valves such that a reduced duty cycle is provided to a valve in the valve field. One of the voltages i 8〇. Heterogeneous to a voltage that reduces the duty cycle of another valve in the M valve. u 52. The vacuum pumping arrangement of claim 51, wherein the control device is configured to supply an actuation signal to the other subset of valves such that one of the valves is supplied with a voltage 180 that reduces one of the duty cycles. Heterogeneous to the voltage that is supplied to the previously actuated valve to reduce the duty cycle. 53. The vacuum pumping arrangement of claim 52, wherein the control device is configured to supply an actuation signal to the sub-valve subset such that the supply of the initial load cycle of the valve is of a different duration The supply duration of the voltage of the initial duty cycle of the previously actuated valve. 119885.doc 200818222 54. The vacuum pumping arrangement of claim 53, wherein the control device is configured to supply an actuation signal to the other subset of valves such that the voltage of the initial duty cycle of the valve among the valves is supplied The supply duration difference between the duration and the voltage of the initial duty cycle of the previously actuated valve is reduced by ±x/2 of the time period of the duty cycle, where X is an odd integer. 55. The vacuum pumping arrangement of claim 32 or 45, wherein the initial load cycle is 100% 〇 56. The vacuum pumping arrangement of claim 32 or 45, wherein the duration of the initial load cycle is between 0.1. Between seconds and 5 seconds. 119885.doc