TW200815253A - Storage and transport container for materials susceptible to physical state change under variable ambient temperature conditions - Google Patents

Abstract

A storage and transport container for chemical reagent that is susceptible to physical state change under variable ambient temperature conditions. In one implementation, the container includes a monitor for determining phase state of the chemical reagent contained in the container, and a heater arranged to heat the chemical reagent in response to phase state monitored by the phase state monitor, so as to maintain the chemical reagent in a liquid state. The container is particularly suited for chemical reagents having high freezing point, such as octamethylcyclotetrasiloxane (OMCTS).

Description

200815253 IX. INSTRUCTIONS OF THE INVENTION: TECHNICAL FIELD OF THE INVENTION The present invention relates to packaging, systems and methods for storage and transportation of materials that are susceptible to changing physical conditions at variable ambient temperatures, Lili and down = • [Prior Art] • Chemicals supplied in the process of abundance conductors and many other industries can be stored in a variety of different containers. For example, the container may be pressurized to contain the chemical in liquid form; or the container may be constructed to maintain the gaseous or adsorbed state of the chemical at atmospheric pressure or sub-atmospheric pressure (physical adsorption medium is broad or otherwise) The chemical is supplied in a predetermined state with the additional container for supply. - In many applications, the chemical must be supplied in a specific state, and this specific state is severely regulated by the purity, form and characteristics of the material. It is the microelectronics manufacturing industry that continues to look for novelties. • Innovative packaging methods (for chemical agents), and deviations from specifications • (〇Ut-〇f-sPecifkati〇n) chemicals can cause wafers and/or micro Defects in electronic components or even loss of their intended function. SUMMARY OF THE INVENTION The present invention relates to the packaging and storage of materials (e.g., octamethylcyclotetrahydrogen "OMCTS" which is easily solidified under certain environmental conditions). , system and method. In one aspect, the invention relates to the storage and transportation of a chemical agent 5

200815253 A container comprising a container defining a closed internal volume, the content being integrated to contain a chemical agent that is liable to solidify under variable environmental conditions; a heater adapted to heat the chemical in the container The upper chemical is kept in a liquid state even if the temperature of the environment surrounding the container is lower than the freezing point of the material. Another aspect of the invention is directed to a semiconductor process system comprising a semiconductor process device and a container as described in the preceding paragraph, wherein the container is disposed in a chemical relationship (between a semiconductor process device). A further aspect of the present invention relates to a chemical storage and delivery container comprising a container defining a closed internal volume suitable for containing a chemical agent; and a physical state sensor configured for use An output indication of the physical state of the chemical within the container. Still another aspect of the invention is directed to a semiconductor process system comprising a semiconductor process apparatus and a container of the preceding paragraph, the container being disposed in a chemical supply relationship (between semiconductor processing equipment). A still further aspect of the invention relates to a method of supplying a liquid form of a chemical agent, even if the chemical agent is susceptible to solidification under a variable environmental strip. The method includes providing the chemical in a storage and shipping volume and inputting the heat required to maintain the chemical in a liquid state to the chemical within the volume. Another aspect of the invention is directed to a method of supplying a chemical in liquid form, even if the chemical is readily stable under variable environmental conditions. The method comprises providing the chemical in a storage and transport container suitable for containing a packaged agent.

200815253 monitors the chemical in the container with a physical state sensor; and produces an output indication of the physical state of the chemical within the container. Still a further aspect of the present invention relates to a chemical delivery storage container comprising a container defining a closed internal volume suitable for containing a chemical agent that is susceptible to changing conditions under variable environmental conditions; a thermal energy transfer device adapted to heat or cool the chemical within the volume to maintain the chemical in a predetermined physical state, even if the environmental conditions in the environment of the container cause the physical state of the chemical A further aspect of the present invention is directed to a method of supplying a predetermined physical state, a chemical agent, which is susceptible to changing its state under a variable environmental condition, The above method comprises providing the above-mentioned chemical in a storage and transport container, and transferring thermal energy to or from the chemical in the container to maintain the chemical in a predetermined physical state even if the container The variable environmental conditions in the environment cause the physical state of the agent to be different from the predetermined physical state described above. Changes versa. Still a further aspect of the invention relates to a storage container for a chemical agent comprising a container defining a closed internal volume suitable for containing a chemical that is susceptible to deleterious changes under variable environmental conditions. And a thermal energy transfer device adapted to heat or administer the chemical agent in the container to maintain the chemical agent in the absence of the agent and the medicinal agent 7 200815253 Sexual state, even if the environmental conditions in the environment of the container cause a harmful change in the chemical.

Another aspect of the invention is directed to a method of supplying a chemical agent that is susceptible to hazardous changes under variable environmental conditions, and wherein the method comprises providing the chemical agent described above in a storage and shipping container And transferring thermal energy to or from the chemical in the container to maintain the chemical in a harmless state, even if the environmental conditions in the environment of the container cause a harmful change in the chemical It is also true. Additional aspects, features, and embodiments of the present invention will be more fully understood from the following disclosure and appended claims. [Embodiment] The present invention provides a package, system and method for storing and transporting materials (e.g., materials having a freezing point in the range of 10 ° C - 3 5 ° C) that are susceptible to changing physical conditions in a variable ambient temperature environment. . One problem with many chemicals is that the materials described above tend to change their physical state or phase under varying ambient temperature, pressure and environmental conditions. The physical state changes described above can cause problems in many respects, such as containers for transporting and delivering the above agents. For example, if a chemical is to be dispensed in liquid form and the chemical has a freezing point close to ambient temperature or pressure, especially in colder climates, winter environments and/or air transportation, a decrease in temperature can result in a decrease in temperature. 8 200815253 The above material % @ 疑口' thus prevents the distribution of this material. Further, in response to the degree of expansion of the 兮# μ ^ body after solidification, the above-described physical state change may cause undesired pressure or even damage to the & anger device that stores the material. Octamethylcyclotetrasiloxane (OMC) is an example of a material that solidifies under ambient temperature conditions. This chemical solidifies at approximately 63 〇F_66 〇F, which is not uncommon in a variety of warehouses, shipments, and semiconductor clean room environments. • Octamethyl sulfonium tetraoxide is a widely used precursor for the deposition of low dielectric constant (k) films. Since the solidification of these agents can lead to unstable flow, obstruction of transport lines and equipment, low system performance, and handling The interruption of the equipment and the interference of the positive ten treatment cycle, so the phase stability of the medicament during the dispensing process is a significant concern. The present invention allows chemicals which are easy to solidify (e.g., octamethylcyclotetrasiloxane) to be maintained in a liquid form during storage and transportation, so that they are transported in liquid form in a dispensing state. • In one embodiment, the present invention provides a storage and shipping container of a material (e.g., octamethylcyclotetrazepine) that is readily solidified under variable environmental conditions, wherein the container is adapted to serve the contained material Keep in liquid form for dispensing. The interior of the container is preferably very clean to ensure the purity and characteristics of the contained chemical agent. Therefore, the inner surface of the container is sterilized by steam or chemically using hydrazine, or the surface is treated by passivate or other chemical treatment to avoid chemical reaction between the surface and the contents of the container. It is otherwise protected against the environment surrounding the container so that no atmospheric gases, such as oxygen or water vapor, can penetrate the container. In one embodiment, the inner surface of the container is passivated with a decane material (e.g., hexamethyldisilazane) to reduce the chemical activity of the inner surface of the container. The inner surface of the container in certain embodiments of the invention may be coated with a material such as a glass liner or other inert material.

A variety of specifications for ensuring proper cleaning of the container equipment, preferably suitable for a particular embodiment, the specifications of the semiconductor pharmaceutical container widely used in the present invention include (not limited to): ASTM F13 97, ASTM F1398, ASTM F1 374, SEMI F57, ASTM A4 79, ASTM A4 84, ASTM A2 76, ASTM

A262, ASTM A751, ASTM E214, ASTM E45, ASTM D3294, ASTM D4894, ASME Β 46.1, SEMI F19, SEMI F37, SEMI F57, ASTM E1558 and ASTM A380, and the application of these various specifications depends on the construction material of the container. ASTM stands for American Society of Testing Materials; SEMI stands for Semiconductor Equipment and Materials Institute; and ASME stands for American Society of Mechanical Engineers for clear specifications Source organization. In a particular implementation, the invention relates to a storage and transport container for a material comprising a container coupled to a heater (including an embedded resistive heating element). For example, such a resistive element can be powered by a low voltage battery or the resistive element can be coupled to the circuitry of the vehicle to provide

200815253 For the container and its inclusion circuit board (〇n-board) type heating. In a more specific example, for safety reasons, the voltage applied to the resistance heating is below the limit, thus minimizing any flammability problems. A heater (to keep the chemical in a liquid state) can be embedded (eg, in the side wall and/or bottom and/or top of the container); or it can be mounted as an inlay that is mounted to the container's fitting or structure Medium and suitable for heating materials in containers. It can be effectively configured to maintain the material in the container at a temperature above the freezing point, even if the surrounding member is below the freezing point of the material, or if there is other need, such as when the device is not being used for storage and is ready for dispensing. In one embodiment, the storage and shipping containers of the retrofit material are housed in a shipping cabinet of the shipping system and built and disposed for provision in the cabinet. In another embodiment, the storage and shipping containers utilize a staple that is placed into a sleeve or cover for all or part of it. Another form of insulating construction is integrally formed in the container. The rim media can be of any suitable type, and in one embodiment is constructed of a foam having durable exterior coating wear and physical damage. In another embodiment, a storage container of the material of the present invention is provided that utilizes a phase condition monitor. The phase state described above may be of any suitable type suitable for monitoring the state of the contained phase, such as a solid or liquid state. In one embodiment, a good 28 volt vessel wall heater is used to house the heater in the vessel of the heater. The polymer is resistant to transporting the monitor material. A supersonic 11 200815253 wave monitor. The ultrasonic monitor can be placed externally or internally to the container and configured to sense whether the contained material is in a solid or liquid state or a transition state as described above. Ultrasonic monitoring is a material that is easily solidified by the speed of sound in a liquid medium that is different from the speed of sound in a solid state corresponding to the above materials.

Therefore, a known liquid with a unique sound velocity is used to select the appropriate ultrasonic intensity for ultrasonic monitoring. A monitor is therefore provided to detect the speed of sound produced by the ultrasonic energy striking the contained chemical. For the above purpose, an ultrasonic energy source is embedded in the monitor, and the ultrasonic energy source and detection component can be disposed outside or inside the container. In practice, the rapid decrease in the time between the sudden generation of the ultrasonic energy source and the reception of the ultrasonic energy monitor implies that the contained material begins to solidify. The ultrasonic energy monitor () for the above purpose can be made into a transducer that converts ultrasonic energy into electrons or other output signals. Establishing a unique relationship using the rate of sound transfer and the physical state of the material in the container (eg, liquid, solid, or a mixture of liquid and solid near the freezing point), and the sound transfer rate will be the amount of material described above (eg, by inventory monitor) As measured by the content monitor or other quantity monitors. In another embodiment, a thermocouple or other suitable temperature sensor is applied to determine the temperature of the material contained in the container as a hint of the phase state of the material being contained. The temperature sensor can be installed in the 12 200815253 thermal insulation structure (for example), thus stabilizing (by the surrounding insulating medium) temperature sensing, and 1 'preserving the short-term fluctuation of the ambient temperature in the environment of the container. In another embodiment, a strain gauge can be applied to the trough to provide a strain sensing relationship for the container, thereby detecting the expansion of the contained material and the strain applied to the wall of the container. For example, since the above state change causes a change in the strain characteristics of the container wall, the above-described strain gauge detection can be applied to determine when the octamethylcyclotetrazepine in the container solidifies. In a particular implementation, the strain gauge described above is placed on the outer surface of the container. In another embodiment, an inductor is used to determine the ability of the conjugate phase condition monitor to provide inventory monitoring of the liquid within the container. The container system of the above embodiments may optionally further comprise a heater with feedback regulation such that it provides energy to the heater to maintain the chemical in a liquid state if solidification or solidification is detected. Accordingly, the present invention utilizes acoustic monitoring in one implementation to determine the phase state of the containment material that is susceptible to changing physical conditions under varying ambient temperature conditions, selectively providing heating capability to combat thermal coagulation with thermal energy input. Keep liquid for distribution. Although the description herein begins with a discussion of packaging techniques and methodologies that allow a readily settable chemical to remain liquid in a container under conditions of environmental conditions that otherwise cause the liquid to begin to solidify, it will be appreciated that the present invention is more broadly applicable to any It is easy to change the physical state under variable environmental conditions (changing the physical state of the chemical from the desired physical state to the undesired physical state)

The storage, storage and transportation of chemicals in 200815253. Accordingly, the present invention contemplates that under variable environmental conditions (otherwise inducing a change in the physical state of the material to a desired or less desirable physical state), heat energy is transferred to or recovered from the material. The liquid, solid, and gas multiphase materials are maintained in a desired physical state. Accordingly, still a further aspect of the present invention relates to a chemical storage and transport container comprising a chemical substance defining a closed internal volume suitable for containing a chemical agent that is susceptible to change under variable environmental conditions; And a thermal energy transfer device adapted to heat or the medicament in the container to maintain the chemical in a predetermined state of matter, even if the variable environmental conditions in the environment of the container cause the chemical pharmacological state to be different from the above A change in the predetermined physical state. Still another aspect of the present invention is directed to a method of chemically treating a chemical agent in a predetermined physical state, wherein the chemical agent is susceptible to changing its state under a variable ring member, and the method includes providing the chemical to a storage and Transporting the container and transferring thermal energy to or from the chemical in the container to maintain the chemical agent in a pre-conditioning state, even if the environmental conditions in the environment of the container cause a chemical physical state It is different from the change of the predetermined physical state described above. Referring now to the drawings, Fig. 1 is a sectional elevation view of an embodiment 10 in accordance with the present invention. In one system, material from a container is dispensed to a chemical processing device. The container 10 includes a container 11 having a bottom surface 12, a device surrounding the appropriate state or agent, and a state of cooling the physical supply of the pharmacy drug formulation agent. 14 24 200815253 20 Valve The valve is pumped and the valve is transported by the mist. The inertia wall 14 and the top surface 16 are combined to define a closed internal volume 20 containing a liquid chemical. The liquid chemical 24 in the inner volume is covered by a headspace 22.

The top surface 16 of the container has a delivery tube 26 extending therethrough and a flow control valve 28 is disposed in the delivery tube 26. Until the flow control 28 is opened, the direction of flow is indicated by arrow A, and a gas is introduced into the headspace 22 in the content 20 for providing a suitable distribution of the pressure of the liquid to supply the gas, as will be described in detail later. The top surface 16 also has a dispensing tube 30 extending through itself, and the dispensing tube extends downwardly into the lower portion (near the bottom surface 12) in the inner volume. The distribution pipe 30 has a flow control 32 therein, and graphically indicates that the above-mentioned pipe is connected to the flow circuitry by a reticle 34, and the flow circuit system has a pump 36 therein for The liquid from the container is sent to a chemical device 38. In a particular embodiment, the chemical utilization device 38 includes a spray for volatilizing the chemical; and a deposition chamber coupled to the spray in a vapor relationship. The vapor deposition chamber is placed in the form of a wafer or other substrate object that is in contact with vapor-derived chemical vapor to form a deposited film thereon. In the case of octamethylcycloxanthene as a chemical agent, a film having a low dielectric constant is formed under chemical vapor deposition conditions. During the dispensing action, the pressurized tube 15 (valve 28 is opened) is introduced into the pressurized 15 200815253 gas to cause the pressure medium to dispense the liquid out of the container. This process causes a large volume of liquid in the container to flow to the dispensing tube. 3 0 (wide 3 2 open), and then flow to the downstream chemical processing equipment. The delivery tube 26 can be applied as a fill tube in the first example whereby the chemical is introduced into the container from a main supply tank or other source of large volume medicament.

As described, the container includes a heating element 18 disposed in a corresponding annular space within the surrounding wall 14 of the container. As described, the heating element 18 is coupled to an electrical power supply 21 by wires 19, whereby electrical energy is conducted to the heating element, and the container is resistively heated by the elements described above. In the above configuration, the heating element is placed in a cylindrical sleeve and simply embedded in the corresponding cavity of the side wall. In another embodiment, component 18 is constructed of a material that self-detects temperature. For example, the material has a temperature-changeable detectable property that can be detected to determine when to input the energy required to maintain the chemical in a liquid state to heat the chemical in the container. Further, component 18 has one or more thermocouples, other temperature sensors or monitoring devices embedded therein to thereby determine the thermal state of the contents of the container and the corresponding thermal energy input to the contents of the container. Figure 2 is a cross-sectional elevation view of a container in accordance with another embodiment of the present invention. The container 50 shown in Fig. 2 includes a container 52 having a bottom surface 54, a circumferential side wall 56 and a top surface 58, which together define the inner volume 61 of the container. The inner volume 61 contains a liquid chemical 62 and a headspace 64 overlying the 16 200815253 chemical. In this embodiment, the container 52 is enclosed within an insulating sleeve 60, thereby buffering the effect of ambient temperature changes on the liquid chemical 62, thereby making it easier to maintain the chemical in liquid form.

As previously described, the jacket 60 is equipped with a thermocouple or other temperature sensor embedded therein to couple the thermocouple or other temperature sensor to a monitor and regulation component in a signal transmission relationship. Drives the heater to respond to input heat (as detailed later). The container 52 has a delivery tube 70 extending therethrough that includes a flow control port 72 therein, with the lower end of the delivery tube terminating in the head space 64 of the internal volume 61 of the container. In a first example, valve 72 is opened to regulate the flow of chemicals through the container to fill the container, or through the pressurized gas used herein to aid in dispensing, and in each example, the flow of liquid is indicated by arrow A. Direction, the internal volume of the container is entered by an external source (not shown in Figure 2). A dispensing tube 74 including a flow control valve 76 extends through the top surface 5 of the container and extends upwardly to a higher end of the exterior of the container, extending downwardly into the inner volume of the container to a near bottom of the container The lower end of 5 4 . The dispensing tube 74 is coupled at its upper end to a suitable flow circuitry, indicated by a line 78 on the map, such that the container is thus connected for dispensing, and the dispensed chemical flows through the flow circuitry 718 A downstream application location (not shown in Figure 2). The container 52 in Figure 2 has a collar 66 in the top surface 58. The 17 200815253

The collar surrounds a resistive heating element 68 that extends downwardly within the container inner volume 61 such that the resistive heating element contacts the chemical agent within the container. The collar 66 for the above uses may be constructed of a suitable electrically insulating material such as ceramic, glass or a non-conductive polymer. The resistive heating element 68 is coupled to an electrical power source 8 2 by a wire 80. An electric power source 82 is provided in an appropriate manner to provide electrical energy to the resistive heating element 68 to thereby effectively heat the chemical 62 within the container. The electric power source 82 is coupled to an ambient temperature sensor that is turned on when the ambient temperature is below the freezing point of the chemical 62. Alternatively (or in addition), the container may be provided with an embedded thermocouple in the wall surface of the container or in an insulating medium (as previously described) and coupled to the electrical power source 82 in a feedback relationship. In the above arrangement, when the temperature indicated by the sensor is lower than the set value (e.g., below the freezing point of the chemical agent and the temperature in the vicinity thereof), the electric power source is turned on and then the resistive heating of the chemical is provided. In a preferred embodiment of the container system shown in the second figure, the chemical is octamethylcyclotetrasiloxane, and the downstream application site includes semiconductor processing equipment. Figure 3 is a cross-sectional elevation view of a container in accordance with another embodiment of the present invention. The container 100 includes a container 102 having a bottom surface 104, a surrounding side wall 106 and a top surface 108, which together enclose an inner volume 110 that accommodates the liquid type of chemistry covered by the head space 114. Pharmacy 11 2. The container includes a fill tube 120 having a flow control valve 122 therein for introducing a chemical and/or pressurized gas into the interior of the container 1 〇 2 18 18 15 15 15 15 18 18 18 18 18 18 18 18 18 18 18 18 18 18 18 18 18 18 18 18 18 18 18 18 18 18 18 The container 102 also includes a dispensing tube 126 that contains a flow control width 128 therein for dispensing chemical 1 1 2 from the container.

In the embodiment shown in Fig. 3, the pressurized gas is introduced into the head space 11 of the inner volume 110 via the transfer pipe 120 (the valve 122 is opened) in the direction indicated by the arrow A, whereby the chemical agent 1 1 is dispensed. 2 flows upward through the dispensing tube 126 (valve 128 is opened) to flow into associated conduits, conduits, manifolds, etc., which are used to transport chemicals to downstream locations of use. The container 100 shown in Fig. 3 features a phase monitoring accessory that includes an ultrasonic monitor 130 that is attached to the outer surface of the side wall 106 of the container. The ultrasonic monitor includes an ultrasonic energy generating component and a detecting component, wherein the ultrasonic monitor includes an ultrasonic transducer as a power generator, and the power is supplied to the power source 134 of the ultrasonic device by a connection (by the wire 132). Electrical energy. With this arrangement, the ultrasonic device generates sonic energy that is transmitted to the chemical 11 2 in the container. The converter produces a sound burst that passes through the liquid and then receives a sonic response to produce a response signal. The reaction signal is transmitted to the computer component 138 by the signal transmission line 136, and the reaction pattern produces an output indication of the phase state of the chemical agent. In the event that the ultrasonic device 130 generates a signal indicating that the chemical begins to solidify, the computer component 138 then generates a control signal that is transmitted to the appropriate heating element or configuration (eg, first and second) The type shown is to reheat the chemical in a reactive manner and to maintain the above-described chemical in a liquid state. 19 200815253 In some embodiments of the invention, a plurality of physical state change sensors are applied to detect the contained material, and the individual sensors are placed on or in different locations of the material storage container, for example, in different containers. Height position to detect different container fills. Alternatively, the physical state sensor can be equipped with a mobile accessory (e.g., a floating accessory or a displacement sensor) to accommodate changes in the chemical volume of the inventor in a particular application or container dispensing operation.

Figure 4 is a cross-sectional elevation view of a container in accordance with another embodiment of the present invention. As shown in Fig. 4, the container 150 includes a container 152 having a bottom surface 154, an inner volume of a side wall 156 and a top surface 158 surrounded by a volume of 16 〇, which contains the chemical in liquid form. Medicament 1 62. The chemical agent 116 is covered with a headspace 1 64. The vessel 1 52 is provided with a delivery pipe 16 6 (containing the flow control valve 168 therein) and a distribution pipe 170 (including the flow control valve 172 therein), the configuration of which is similar to that described above (with the first 3 related to the embodiment). The transfer tube 166 thus receives the pressurized gas flowing into the container (in the direction indicated by arrow A) by flowing the chemical through the dispensing tube 170 and into the associated flow circuitry (shown by line 1 84). Downstream chemical processing equipment (eg, semiconductor processing equipment) to aid in the dispensing of chemical agents. In Fig. 4, the ultrasonic transducer 174 is placed in the container 152 in the page space 164. The ultrasonic transducer 174 5 is again placed in the collar 1 72, while the resistive heating 20

200815253 Element 176 is coupled (via transmission 178) to regulation assembly 180 via converter 174 and collar 172. Transmission cable 178 may be a multi-wire cable that includes a transmission wire that is lightly coupled to a resistive heating element for delivering energy from control assembly 108 to resistive element 176; The transmission of the ultrasonic device 174 is to provide power to the two components. The transmission cable 1 78 can also include a signal transmission line that transmits the output signal of the sonic component 1 74 to the regulation component 180, thereby regulating the receipt of a signal indicating the physical state of the chemical 126, and thus the reactive energy supply to the resistive The heating element 1 76 is sufficient to maintain the chemical. As a further variation, the container shown in FIG. 4 has a thermocouple or other temperature sensing element with a damascene ring 172 that is configured to produce a signal that is transmitted to the regulatory component via an individual signal in the transmission cable 1 78. 1 8 0. It will thus be appreciated that the present invention contemplates a variety of specific forms in which a material container for accommodating a change in physical state under variable environmental conditions, in conjunction with a monitoring and regulating element, is provided for maintaining the liquid chemical of the container in a liquid state, Such a design can be used to dispense (for example) <The various container embodiments described herein are quite suitable for use as a container for methylcyclotetrazepine and other agents that are prone to solidification under variable environmental conditions. In contrast, the present invention contemplates a methodology in which the monitoring of a capacitor cable 176 heating the power transmission from the super assembly to extract the liquid from the shaft transmission line of the content of the material > for the eight chemical instrument 21 200815253 is easy to be variable The surrounding temperature bar reverses the condition to change the physical state of the chemical agent to determine the physical state of the chemical agent, and in response to the physical state induction, the required thermal energy is input into the chemical, and the #τ is eroded to keep the chemical in a liquid state. . As can be appreciated, the physical state monitoring of the chemical can be performed in any suitable manner, including, for example, sonic induction, temperature sensing, strain sensing (of the container), and the like. The thermal state energy can be input into the liquid in any suitable manner and in response to physical state sensing by any suitable thermal energy input device or component to maintain a liquid state, "can be wheeled into a device or component including a resistive heating element; conditioned heating"; Conductive thermal energy is wheeled in, for example, via a heating plug; indirect heat exchange, such as an inlaid heat exchange coil. 'Convector heating of the vessel (eg, a closed oven illusion, etc. - Example [ The chemical reaction generates thermal energy and transfers the thermal energy from the reaction to the container, which is required to maintain the contents of the container in the desired physical state. For this purpose, a chemical reaction is carried out in a separate container, and the released thermal energy is not directly That is, the material that is delivered to the storage and transport container through the centered thermal energy transfer medium. Accordingly, the present invention provides a chemical storage and transport container that includes a container defining a closed internal volume that is suitable for housing high a freezing point-chemical agent; and a heater adapted to heat the chemical in the container Keeping the above chemical in a liquid state, even if the temperature of the surrounding environment of the barn is lower than the freezing point mentioned above. The heater may include one or more resistive heating elements and suitably lightly connected to a power source (such as a battery), or modify the heating The circuit is called the light-feeding device and the circuit system of 22 200815253 provides the on-board type heating of the chemical in the container. The power supply is expected to supply a voltage lower than 28 volts. The heater can be embedded in the container wall, for example, The insert of the container or the structural part. When the ambient temperature condition falls below the freezing point of the chemical, the heater can be effectively set to maintain the chemical in the container at a temperature above the freezing point. The container may include an insulating medium, It is configured to insulate the container from temperature changes in the environment of the container.

A preferred construction of the chemical storage and transport container further includes a physical condition monitor, such as an ultrasonic monitor. The ultrasonic monitor described above is advantageously arranged to deliver ultrasonic energy to the chemical and to receive a corresponding response by the chemical, which is converted by the ultrasonic monitor into an output signal indicative of the physical state of the chemical. The chemical storage and transport container can further include a temperature sensor (e.g., a thermocouple) that indicates the physical state of the chemical. The temperature sensor can be protectively placed in a thermally insulated construction to prevent short fluctuations in the ambient temperature in the environment surrounding the container. The container of the present invention can be advantageously utilized for storing or transporting octamethylcyclotetrazepine. The container may comprise a strain gauge on the container adapted to produce an output indication of the strain force in the wall of the container; and/or a content sensor adapted to determine the amount of chemical agent in the container. In one embodiment, the container includes a monitoring and conditioning accessory adapted to condition the solidification of the chemical within the media container to activate the heater. The above accessories include objects 23

200815253 Condition monitor. The container has a top surface, the top mask has a liquid delivery tube extending through the top surface into the closed inner volume; and a dispensing tube extending through the surface and into the closed inner volume to reach below the liquid delivery tube The flow tube is deeply modified to be coupled to a flow circuit of a chemical utilization device (eg, a semiconductor device). The flow control can be widened in each liquid delivery pipe and distribution pipe. The container includes an inner wall having a chamber therein and a heater (including a heating element such as a resistive heating element) mountable within the chamber. The container may comprise a material having temperature-variation characteristics; and a monitor adapted to monitor the temperature-variation characteristics described above and to activate the heater. For example, the materials described above may constitute a container wall. The present invention further contemplates a chemical storage and transport container comprising a container defining a closed internal volume suitable for containing a chemical agent; and a physical condition monitor configured to produce a chemical within the container The output indication of the physical state. The present invention accordingly provides a method of supplying a chemical agent in a liquid form, the chemical agent having a high freezing point and being liable to change its physical state under variable peripheral temperature conditions, and the above method includes providing a chemical agent thereon Store and transport the container and enter a chemical sufficient to keep the chemical in a liquid state. The method of the above method comprises monitoring the chemical in the container to determine the state of the chemical, and in response to the detected physical state, transferring the thermal energy to the chemical capping process to install the element. Take 24 200815253 to keep the chemical in a liquid state. The present invention further provides an apparatus for supplying a liquid in the form of a liquid in the form of a liquid, and the chemical composition of the above-mentioned chemical agent is easy to change the reconditioning state at a variable ambient temperature. . The method includes providing a chemical in a storage container, detecting a chemical in the container by a physical condition monitor, and producing an output indication of a physical state of the chemical in the container.

The detection in the above method includes transmitting an ultrasonic input to the chemical 'receiving a response from the ultrasonic input (indicating the physical state of the chemical), and generating a turn-off signal indicating the physical state of the chemical, although The invention has been specifically mentioned herein with reference to liquid chemical agents, but it will be understood that the invention is not so limited, but rather includes the inclusion of other materials that are susceptible to any deleterious changes in variable ambient temperature conditions, including The above-mentioned deleterious changes of solids, liquids, gases and multiphase materials include, without limitation, deterioration (deteri〇rati〇n), group action, aggregation, precipitation, and the like. As a specific example, decane is easily decomposed for changes in ambient temperature. Although many of the features and embodiments of the present invention have been shown and described herein, it is understood that the invention is not limited thereto, but rather includes modifications that may be associated with those skilled in the art based on the disclosure herein. Improved or other embodiments not described herein. The invention is therefore intended to be construed as being limited to the scope of the scope of the invention. 25

28 v 32 ^ 72 , Ί 6 , 30 - 74 ^ 126 , 170 36 Pump 60 0 Insulation sleeve 200815253 [Schematic description] Fig. 1 is a storage and transportation according to an embodiment of the invention (in a manufacturing facility) A cross-sectional view of the container. Figure 2 is a cross-sectional elevational view of a storage and shipping container in accordance with another embodiment of the present invention. Figure 3 is a schematic elevational cross-sectional view of a storage and shipping container in accordance with a further embodiment of the present invention. Figure 4 is an elevational cross-sectional view of still another embodiment of the present invention. [Description of main component symbols] 10, 11, 50, 52, 100, 102, 150, 152 Containers 12, 54 , 104 , 154 Bottom surfaces 14 , 56 , 106 , 156 Side walls 1 6 , 5 8 , 1 0 8 , 1 5 8 Top surface 18, 68, 176 Heating elements 19, 80, 132 Wires 20, 61, 110, 160 Internal volume 21, 82, 134 Power supply 22, 64, 1 14, 164 Headspace 24, 62, 112, 162 Chemicals 26, 70, 120, 166 Conveying pipe 1 2 2, 1 2 8 , 1 6 8 , 1 7 2 Flow control valve distribution pipe 34, 78, 184 Marking line 38 Chemical application equipment 66, 173 collar 26 200815253 Signal Transmission line transmission cable 130, 174 Ultrasonic device 136 138 Computer component 178 180 Control component

27

Claims (1)

200815253 X. Patent application scope: 1. A chemical storage and transport container, which comprises at least a container defining a closed internal volume, which is suitable for accommodating one of the chemistry which is easy to solidify under variable environmental conditions. a medicament; and a heater adapted to heat the chemical in the container to maintain the chemical in a liquid state even if the temperature in the environment surrounding one of the containers is lower than the freezing point of the chemical . 2. The storage and transport container for a chemical according to claim 1, wherein the heater comprises at least one resistive heating element. 3. The storage and transport container for a chemical according to claim 2, wherein the heater further comprises a power source coupled to the at least one resistive heating element. Φ 4· The storage and delivery of a chemical agent according to item 3 of the patent application scope, wherein the power source comprises a battery. 5. The storage and transport container for a chemical agent according to claim 1, wherein the heater is adapted to be coupled to a circuit system of a transport tool to provide a chemical circuit board type in the container. Nb〇ard) heating 0 28 200815253 6· The storage and delivery container of the chemical agent according to claim 1 further comprises a power source for the heater. 7 • A storage and transport container for a chemical agent as claimed in claim 6 wherein the voltage of the power source is less than 28 volts. 8. The storage and transport container for a chemical according to claim 1, wherein the heater is embedded in a wall of the container. 9. The storage and delivery container for a chemical agent according to claim 1, wherein the heater is mounted as an inlay, which is installed in an attachment or structural part of the container, and is suitable for use Heating the chemicals in the container. 1 0. The storage and delivery container of the chemical agent according to claim 1 in which the heater is effectively placed so that the chemical in the container is maintained at a temperature higher than one of the freezing point, even if the ambient temperature is lowered It is also lower than the freezing point of the above chemical agent. 11. A storage and transport container for a chemical according to claim 1 wherein the container is adapted to be placed in a shipping cabinet of a chemical delivery system. 1 2 • The storage and delivery of a chemical according to the scope of claim 1 2008, the apparatus further comprising a heat insulating medium arranged to isolate the container from the temperature of the container. 1 3 . The storage and delivery container of the chemical agent according to claim 12, wherein the heat insulating medium is installed as a sleeve or a cover of the container. 1 4. A storage and shipping container for a chemical agent according to claim 12, wherein the heat insulating medium comprises a polymeric foam. 1 5 . The storage and delivery container of a chemical according to claim 14 wherein the polymeric foam has a rough: external coating that resists abrasion and physical damage. 1 6. The storage and transport container of the chemical agent of claim 1 further includes a physical condition monitor. 1 7 . The storage and delivery container of a chemical agent according to claim 16 wherein the physical condition monitor comprises an ultrasonic monitor. 1 8 . The storage and shipping container for a chemical agent according to claim 17 wherein the ultrasonic monitor transmits ultrasonic energy to the chemical agent and receives a corresponding response from the chemical agent, by the Ultrasonic 30 200815253 The monitor converts the response into an output indication of the physical state of the chemical. 1 9. The storage and transport container for a chemical according to claim 1 further comprising a temperature sensor indicating the physical state of the chemical. A storage and delivery container for a chemical agent according to claim 19, wherein the temperature sensor comprises a thermocouple. 2 1. The storage and shipping container for a chemical according to claim 19, wherein the temperature sensor is protectively disposed in a heat insulating structure to prevent the container from fluctuating with a short temperature of the surrounding environment. Variety. 2 2. A storage and transport container for a chemical agent according to claim 1 wherein the container comprises octamethylcyclotetrasiloxane. 23. The storage and transport container for a chemical agent according to claim 1, further comprising a strain gauge on the container, wherein the strain gauge is adapted to generate a strain force in a wall of the container. Output indication. 24. The storage and transport container for a chemical agent according to claim 1, further comprising a content sensor adapted to determine the content of the internal chemical of the container. 2. The storage and transport container for a chemical according to claim 1 further comprising a monitoring and regulating accessory adapted to activate the heater in response to conditions of mediation of the chemical in the container. 26. The storage and shipping container for a chemical agent according to claim 25, wherein the monitoring and regulating accessory comprises a physical condition monitor. 27. The storage and shipping container for a chemical according to claim 1, wherein the container comprises a top surface, the top mask having a liquid delivery tube extending through the top surface to enter the enclosed internal volume; A sub-feed tube extending through the top surface into the closed inner volume to a depth below the liquid delivery tube. 28. A storage and shipping container for a chemical according to claim 27, wherein the dispensing tube is adapted to be coupled to a flow circuit of a chemical processing device. 29. The storage and transport container for a chemical agent according to claim 28, wherein the flow circuit system is coupled to a semiconductor process device 0, 32 200815253 3 0. The chemical agent according to claim 27 The storage and transport container further includes a respective flow control tube and a flow control valve in the dispensing tube. 3. The storage and transport container for a chemical according to claim 1, wherein the container comprises an inner wall having a chamber therein, and wherein the heater comprises a heating element disposed in the chamber. 3. The storage and transport container for a chemical according to claim 31, wherein the heating element comprises a resistive heating element. 3. The storage and transport container for a chemical according to claim 1, further comprising a material having a temperature-variation characteristic; and a monitor adapted to monitor the temperature-variation characteristic described above and The above heater is reactively turned on. 3. The storage and transport container for a chemical according to claim 33, wherein the material constitutes a wall of the container. 3. A semiconductor process system comprising at least a semiconductor process device and a container as claimed in claim 1 in which the container is disposed in a chemical supply relationship (between said semiconductor process equipment). 33 200815253 36. A semiconductor process system as claimed in claim 35. The semiconductor process equipment includes a chemical vapor deposition apparatus. 3 7. The semiconductor process system of claim 36, the semiconductor process equipment further comprising a sprayer coupled to the chemical vapor deposition apparatus described above by steam. 3 8. A storage and transport container for a chemical agent, which comprises at least a container for a closed internal volume, the internal volume being suitable for containing a medicament; and a physical condition monitor arranged to generate the medicinal medicament An output indication of the physical state. 3 9. The storage and shipping container of claim 38, the physical condition monitor comprising an ultrasonic monitor that generates an input to the chemical and receives a response from the ultrasonic input indicating the chemical a physical state in which the above-described monitoring is used to generate an output signal indicating the physical state of the chemical agent. 40. The storage and transport container of claim 38, wherein the physical condition monitor includes a temperature sensor, and the setting is measured. The temperature of the chemical within the container and produces a physical indication of the chemical. Among them, the relationship should be related to the internalization of a chemical, in which the ultrasonic response, the device is suitable for the 〇, which is used to detect the state of the 34 200815253 41 · as claimed in the scope of the 38th of the storage and shipping containers, of which The physical condition monitor includes a strain gauge adapted to sense the strain of the container and generate an output indication associated with the physical state of the chemical. 42. The storage and shipping container of claim 41, wherein the strain is The gauge is disposed on an outer surface of one of the containers. 43. The storage and shipping container of claim 38, which comprises octamethylcyclotetrazepine. 44. The storage and shipping container of claim 38, further comprising a heater adapted to input thermal energy to the chemical agent in the container. 4. The storage and shipping container of claim 44, wherein the heater comprises a resistive heater. 4. The storage and transport container of claim 45, wherein the resistive heater comprises a cylindrical sleeve and the container comprises a cylindrical wall having a cylindrical resistive heating suitable for receiving the cylindrical type A ring-shaped chamber in which it is located. 35 200815253 4 7. As in the storage and shipping container of claim 3, the chemical flow relationship (between a semiconductor process device) is effectively placed in a semiconductor process equipment. 48. The storage and shipping container of claim 47, wherein the semiconductor processing apparatus comprises a nebulizer and a chemical vapor deposition chamber. 49. The storage and shipping container of claim 48, wherein the chemical is octamethylcyclotetrazepine. The storage and shipping container of claim 38, further comprising a resistive heating element disposed in the inner volume of the container to heat the chemical agent located in the inner volume. 5 1. The storage and shipping container of claim 3, further comprising a heater operatively coupling the heater to the physical condition monitor, the heater being adapted for inputting the chemistry The medicament is held in a liquid heat to the chemical. 5 2. The storage and shipping container of claim 51, wherein the chemical comprises octamethylcyclotetrazepine. 5 3. A semiconductor process system comprising at least one semiconductor process 36 200815253 and as in the container of claim 3, the container is disposed in a chemical relationship (between the above semiconductor processing equipment). 54. The semiconductor process system of claim 53, wherein the semiconductor process equipment comprises a chemical vapor deposition apparatus. 5. The semiconductor process system of claim 54, wherein the semiconductor process equipment further comprises a sprayer coupled to the chemical vapor deposition apparatus by the vapor supply. 56. A method of supplying a liquid form of a chemical agent, the chemical agent being susceptible to changing its physical state under variable ambient temperature conditions, 'the method comprising providing the chemical agent described above in a storage and transport volume, And inputting a chemical sufficient to maintain the chemical in a liquid state to the chemical in the device. 57. The method of claim 56, further comprising: monitoring a chemical in the container to determine a physical state of the chemical, and detecting a physical state to input thermal energy to the chemical to cause the chemical The chemical is retained in the liquid state. The method of claim 56, wherein the input heat comprises providing energy to the at least one resistive heating element. The method of claim </ RTI> </ RTI> <RTIgt; </ RTI> <RTIgt; </ RTI> <RTIgt; </ RTI> <RTIgt; </ RTI> <RTIgt; 6. The method of claim 56, wherein the inputting thermal energy comprises providing energy to a heater 'providing a chemical circuit board in the container by coupling the heater to a circuit of a transport tool on 61. The method of claim 56, wherein the inputting thermal energy comprises providing energy to a heater with a power source. 62. The method of claim 61, wherein the voltage of the power source is less than 28 volts. 63. The method of claim 61, wherein the heater is embedded in a wall of the container. 64. The method of claim 61, wherein the heater is mounted as an inlay, mounted in an attachment or structural portion of the container, and adapted to heat the chemical in the container Pharmacy. 65. The method of claim 61, wherein the method of setting the heater to maintain the chemical in the container at a temperature above the freezing point, even if the ambient temperature condition falls below the above chemistry The same applies to the freezing point of the medicament. 66. The method of claim 56, wherein the container is disposed in a shipping cabinet of a chemical delivery system. 67. The method of claim 56, further comprising isolating the container from temperature changes in an environment of one of the containers. 6 8 . The method of claim 57, wherein the physical state is monitored by an ultrasonic monitor. 69. The method of claim 68, wherein the ultrasonic monitor transmits ultrasonic energy to the chemical and receives a corresponding response from the chemical, the ultrasonic transducer converting the reaction into An output indication of the physical state of the chemical. 70. The method of claim 56, further comprising sensing a temperature of the chemical indicating the physical state of the chemical. 7 1 . The method of claim 56, wherein the chemical comprises octadecyloxime. 39. The method of claim 56, further comprising the step of monitoring the strain force of at least a portion of the container and generating an output indication of the strain force described above. 73. The method of claim 56, wherein Including sensing the amount of the chemical in the container. 74. The method of claim 56, further comprising inputting thermal energy in response to conditions that mediate the solidification of the chemical in the container. 75. The method of claim 56, further comprising dispensing said chemical agent from said storage and shipping container. 7. The method of claim 75, wherein the chemical agent is dispensed to a semiconductor process equipment. 77. A method of supplying a chemical to a semiconductor process apparatus, the method comprising at least dispensing the chemical agent as described in claim 1 of the scope of the patent application. 78. The method of claim 77, wherein the semiconductor processing apparatus comprises a chemical vapor deposition apparatus. The method of claim 78, wherein the semiconductor processing apparatus further comprises a sprayer coupled to the chemical vapor deposition apparatus as described above by a vapor supply. 80. A method of supplying a liquid form of a chemical agent, the chemical agent being susceptible to changing its physical state under variable ambient temperature conditions, the method comprising providing the above-described chemical agent in a storage and shipping container, A physical condition monitor monitors the chemical in the container and produces an indication of the physical state of the chemical within the container. 81. The method of claim 80, wherein the monitoring comprises transmitting an ultrasonic input to the chemical, receiving a response from the ultrasonic input and indicating a physical state of the chemical, and generating the chemical One of the physical states of the medicament outputs an indication. 82. The method of claim 80, further comprising detecting a temperature of the chemical in the container and generating an indication of the physical state of the chemical. 8 3 . The method of claim 80, further comprising sensing the strain of the container and generating an output indicative of the physical state of the chemical. The method of claim 80, wherein the chemical comprises octamethylcyclotetrazepine. 85. The storage and container of a chemical agent according to claim 16 wherein the physical state detection comprises a plurality of physical state sensors. 8 6 . The storage and shipping container of the chemical substance of claim 85, wherein each of the plurality of physical state sensors is disposed at a different position on or in the container. 87. The storage and transport container for a chemical agent according to claim 86, wherein each of the plurality of physical state sensors is disposed at a different height, and is configured to detect the different filling volume of the container. The physical state of the material inside. 88. A storage and transport container for a chemical agent, comprising at least a container having a closed internal volume, the internal volume being adapted to contain a chemical agent that is solidified under an easily variable environmental condition; and a thermal energy transfer, It is suitable for heating or cooling the chemical in the container to maintain the chemical agent in a predetermined physical state, even if the environmental conditions in the environment of the container cause the physical state of the chemical to be different from the predetermined physical state. The same is true when the status changes. The agent delivers the bit to send the lower bound in the device can be described 42 200815253 89. A method of supplying a chemical agent in a predetermined physical state, the chemical agent being susceptible to changing its state under variable environmental conditions, the method comprising providing the chemical agent in a storage and shipping container, and Transferring thermal energy to or from the chemical in the container to maintain the chemical in a predetermined physical state, even if the environmental conditions in the environment of the container cause the physical state of the chemical to be different The same applies to the change of the predetermined physical state. 9. The storage and transport container for a chemical according to claim 1, wherein the container defining the sealed content is formed by a material closure and according to at least one selected from the group consisting of Specifications in the group: ASTM F 1 397, ASTM F1 398, ASTM F 1 374, SEMI F57, ASTM A4 79, ASTM A4 84, ASTM A276, ASTM A2 62, ASTM A751, ASTM E214, ASTM E45, ASTM D3 294 , ASTM D4894, ASME B46.1, SEMI F19, SEMI F37, SEMI F57, ASTM E1 558 and ASTM A380 〇 91. A chemical storage and transport container comprising at least one container defining a closed internal volume, The inner volume is adapted to contain a chemical agent that is susceptible to deleterious changes under variable environmental conditions; and a thermal energy transfer device adapted to heat or cool the chemical in the container to maintain the chemical agent described above Non-harmful state, even if the container is 43 200815253 The changing environmental conditions in the environment can cause a harmful change in the chemical. 92. A method of supplying a chemical agent, wherein the chemical agent is susceptible to a deleterious change under variable environmental conditions, the method comprising providing the chemical agent in a storage and transport container and transferring heat to The chemical in the container carries or removes thermal energy therefrom to maintain the non-harmful character of the above-described chemical agent, even if the environmental conditions in the environment of the container cause a deleterious change in the chemical. Changed to include 44