TW200811438A - Real-time hardened red blood cell detecting chip by using dielectrophoresis force - Google Patents

Abstract

A real-time hardened red blood cell detecting chip and the method of operating principle are provided. The real-time hardened red blood cell detecting chip comprises the first substrate and at least a parallel electrode array. The first substrate comprises at least a micro-channel. Electrodes are parallel arranged, and the parallel electrode array is disposed in the channel on the first substrate and is composed with a plurality of electrodes. Another real-time hardened red blood cell detecting chip comprising the first substrate, at least one of parallel electrode array and the second substrate having at least one of a micro-channel, is provided. The parallel electrode is disposed on the first substrate and is composed with a plurality of electrodes. The electrodes are also parallel arranged. The second substrate, comprising at least one of a micro-channel, is disposed on the first substrate. And the micro-channel passes through the parallel electrode array. By using the present real-time hardened red blood cell detecting chip, the red blood cells can be manipulated to adhere or move off the area of the parallel electrode array.

Description

200811438 IX. Description of the invention: [Technical field of invention] Application of electrical technology and application of dielectrophoretic force The present invention relates to an instant detection method for brittle red blood cells by using brittle red blood cells using a dielectrophoretic force of a microcomputer. [Prior Art]

Blood is the most important component of the body's new generation of radiation, and its composition is composed of blood and blood cells (45%). Because of the slight changes in blood, it reflects the physiological condition of the human body. Therefore, in the field of biomedical testing, gold Liquid analysis is an indispensable step. Many diseases can be diagnosed by sputum _ _ disease, in the detection of clinical experiments ' blood test is almost the most indicative detection method. In the blood circulation of the human body, the blood is sent out by the heart and then gradually branches to the microvessels through the artery, and finally, the veins are _heart and dirty, so as to achieve the function of feeding nutrients and removing the substances. The flow of blood in the blood vessels has a certain resistance, which is determined by the blood vessels and the blood age. The blood volume ratio (hematGerit) of the red blood cells in the social fluid greatly affects the viscosity of the blood. When the blood volume ratio, the larger the blood, the more difficult it is to flow. The normal person's blood volume ratio is about 4 〇 to 45%. In such a high concentration state, the most important reason for the blood to maintain a smooth flow is that the red scale has a strong force, so that it can be bloody. The diameter of the tube is adjusted appropriately so that it passes through the microvessels. The red blood cell is a flat double concave with a diameter of about 8 哗, a volume of about 9G, and a surface area of about 14 ;. The same volume of the spherical shape, the surface area is only 97 6 200811438 μιη 'Because the red blood cells have a considerable surface area, it provides The red blood cell is free to stretch this force. Fine, it still has a certain limit. The minimum microvascular diameter that the red ball can pass is about μ7 μπι, and the smallest microvessel in the human body is about 3~4μιη. When the elasticity of the red blood cells is reduced, that is, the red blood cell membrane is stiff and brittle, the blood cell bb tube will be more _, and even the red blood cells will be broken. For example, in the sacral endothelium, such as the liver, etc., due to the special structure of these tissues, the internal blood sinus pores are very small, making the fragile red blood cells difficult to pass and being destroyed. In addition, for some hemolytic anemia, such as Hereditary Elliptocytosis, anthocytosis, etc., will lead to excessive 1 ± red A ball, so the detection of brittle red blood cells can help us speculate Is it possible to have the disease? The traditional red blood cell fragility test uses different concentrations of low-tension solution to measure the tolerance (brittleness) of the erythrocyte outer membrane to aid in the diagnosis of lesions such as Hereditary spherocytic erythrocyte. In particular, hereditary erythrocytosis, the red blood cells obviously reduce the tolerance to low-tension solution, so that the concentration values of "start hemolysis" and "complete hemolysis" of the test of brittleness test are higher than normal values, thereby judging whether it is possible to have brittle blood cells. Hemolytic disease. Usually the brittleness test requires more blood (about 4 ml), the process is quite troublesome, and it takes a lot of wasted medical equipment. At least 56 tubes are needed for a complete test, and 4 tubes contain EDTA blood collection tubes. The micropipette for blood collection cannot be repeated 7 200811438

The cost of medical waste is quite considerable. In addition, spectrophotometry is required, and after normal blood comparison, the required inspection time can be completed after 2 days of inspection report. Because this bloody disease causes the production of brittle red blood cells due to defects in the blood membrane protein, the sputum red blood cells are easily deformed due to the reduced deformability, and thus hemolysis is caused by the blood vessels, so if the amount of fragile blood cells in the blood is large - It is possible to have a red blood cell disease because of the long time required for traditional detection technology, so it is often impossible to quickly gamble and delay the treatment. The invention is made by a microcomputer-process technology - instant detection of the wafer, the fine dielectrophoretic force makes the brittleness and the normal red blood cells in parallel (four) ageing effect, and the strong blood cell (four) brittle provides a reference way. J The reasons for using the microelectromechanical process and dielectrophoretic force are as follows. The micro-electromechanical process originated in the 1920s, and the process technology developed by it has been evaded. In the aspect of the biomedical testing industry, its main feature is that it can produce a tiny shock. To replace the military officers, petri dishes, and equipment used in the past. Since traditional biomedical testing is achieved by random collision and diffusion, it takes hours or days to test. In the past, biological cell testing was dominated by populations, but the size of the cells was just in the microscale range, and the microelectromechanical process technology could just design a microscopic structure that fits the cell size, which not only increases the information collected for individual cells. Accuracy can also accelerate the chemical reaction between drugs and cells. Therefore, the biomedical wafers produced by the micro-2008 11438 electromechanical process can greatly improve the detection efficiency. When the medical test wafer is opened, it is necessary to consider the characteristics of the cell to be tested to ensure the accuracy of the test result. Among them, digelectr〇phresis has a low voltage, and Sb successfully manipulates the characteristics of the cell as long as it is on the wafer. By placing the electrodes on the display and giving the signal source, the cells can be manipulated at will without damaging the original biological properties and structure of the cells. Therefore, the use of dielectrophoretic force to manipulate the movement of particles of different properties to detect different particles is one of the methods for resolving particles at a microscopic scale. The principle of dielectrophoresis is as follows. When an electrically neutral particle is placed in an electric field, the electrically neutral particle will be polarized (electrical P〇larizati〇n) due to the action of the electric field. The polarization phenomenon produces an inducing secret, and these electric strips can be published as dielectric particles by the f-field polarized wire. At this time, the induced coupling moment is in the electric field, and interacts with the electric field to generate a dielectrophoretic force, so that the particles move toward a region where the electric field strength is strong or weak. In addition, when the particles are polarized to a greater extent than the surrounding fluid, the particles move to a place where the intensity of the electric field is large, and a positive dielectrophoresis is formed. Conversely, when the particles are polarized to a lesser extent than the surrounding fluid, the particles move away from the electrode or toward a region where the electric field strength is small, forming a negative dielectrophoresis. Generally, dielectrophoresis wafers use the characteristics of positive dielectrophoresis and negative dielectrophoresis to move particles to specific regions. In addition, examples of the above-described dielectrophoresis application are as follows. 2 years, 1 year,

Huang et aL is directed to five biomolecular cells ([11,; £ (; 〇111^(^1^, 9 200811438 RBC, T-lymphocytes), which distinguish between positive and negative DEPs at different frequencies, By the same input frequency range, the electrode is designed as a 5x5 circular array, and different cells have different effects of DEP. The cells with positive DOP are adsorbed on the electrode array for collection, while the negative ones are repelled to the circular electrode. In the periphery, to separate different types of cells, the frequency range can be locked for different types of collected cells, and more than two types of cells can be collected.

This month, the sputum is used to separate fragile red blood cells and positive red blood cells by using dielectrophoretic force (also 1 Shen Shizhengru (7) for short). Using micro-electromechanical process technology to make gas; I electric permanent brittle blood cells to instantly detect the wafer, with appropriate flow channels, can reach (four) from the money towel split · red m: ...

Blood anemia and other diseases. [Summary of the Invention]

It includes 1-substrate and brittle red blood cells for immediate inspection - a reference method. The brittle red gold ball of the swimming force is immediately detected. L is a parallel electrode array. This 200811438 substrate has at least one microchannel. The parallel electrode array is disposed on the first substrate in the flow channel, and the parallel electrodes are composed of two or more electrodes, and the electrodes are arranged in parallel in the direction of the vertical microchannel. According to the embodiment of the present invention, the brittle red blood cell is used to detect the wafer, and the second substrate is disposed on the first substrate to cover the micro flow channel, and the material of the second substrate includes glass and stone wafer. , acrylic, plastic, poly(meth) methacrylate (PMMA) or polydimethyl decyl oxane (PDMS). According to an embodiment of the invention, a brittle red blood cell applying a dielectrophoretic force, that is, a time detecting wafer, further includes at least one injecting member disposed in the second substrate to allow liquid to enter and exit the microchannel. Wherein, the injection member comprises two injection pipes and a transmission pipe. The injection tube is connected to the microchannel, and the transfer tube is connected to the injection tube. A fragile red blood cell instant detecting wafer using dielectrophoretic force according to an embodiment of the present invention, wherein the electrodes are arranged in parallel, and each electrode may not have the same width. According to an embodiment of the present invention, a brittle red blood cell, which is a dice-positive detection wafer, for example, further includes a plurality of electrode lines, one end of each electrode line is connected to a corresponding electrode, and the other end of each electrode line is connected to one Electrode external connection area. According to an embodiment of the invention, a brittle red blood cell is applied to detect a wafer by using a dielectrophoretic force, wherein the material of the first substrate comprises glass, germanium wafer, acrylic, plastic, polymethyl methacrylate (PMMA) or polydimethyl fluorene Oxytomane (PDMS). 11 200811438 A brittle red ball, i.e., a w-detecting wafer, in response to an electrophoretic force in accordance with an embodiment of the present invention, wherein the material of the electrode comprises gold, platinum, or chrome. The present invention further proposes a brittle red blood cell instant measurement wafer using dielectrophoretic force, which comprises a -first substrate, at least - parallel_electrode and a substrate, and a first substrate. The parallel array electrode system is disposed on the first substrate, and the parallel array electrode is composed of two or more electrodes, and the straight micro flow path direction is parallel. Less note-micro flow channel

One of the second substrates is placed on the substrate, and the microchannels pass through the parallel array electrodes. According to an embodiment of the present invention, a brittle red blood cell instant detecting wafer using a dielectrophoretic force, for example, further comprising at least one injecting member disposed on the second substrate t to allow liquid to enter and exit the microchannel. The injection member includes an injection unit and a transfer tube. The injection tube is connected to the microchannel, and the delivery tube is connected to the injection tube. According to the embodiment of the present invention, the brittle red blood cell using the dielectrophoretic force is a day-care wafer, wherein the electrodes are arranged in parallel, and the electrodes may not have the same width. According to the embodiment of the present invention, a brittle red blood cell, which is a dice-killing detection wafer, which includes a plurality of electrode lines, each of which is connected to a corresponding electrode, and the other end of each electrode line is connected. To the external connection area of an electrode. According to the embodiment of the present invention, a brittle red blood cell using a dielectrophoretic force is used to detect a wafer. The material of the first substrate or the second substrate includes glass, stone wafer, acrylic, plastic, polymethyl methacrylate (PMMA). ) or 12 200811438 Polydimethyloxane (PDMS). According to an embodiment of the present invention, a brittle red blood cell using a dielectrophoretic force is known to detect a wafer, wherein the material of the electrode is, for example, gold, platinum, or chrome. The invention provides a method for immediately detecting a brittle red blood cell by using a dielectrophoretic force. The first method is to provide a brittle red blood cell instant detection wafer with a top-loading force, and the number of electrodes of the wafer is m*n, wherein = , η represents the number of electrodes per group, and 4 • ― “Next, a liquid is injected into the microchannel. After that, the electrode is applied, the source is 5, and the power signal is between the adjacent two electrodes of each group. The phase difference is 2π/η, so that a plurality of dielectric particles in the liquid move in a region of the parallel array electrode. ± A method for applying brittle red blood cells using a dielectrophoretic force according to an embodiment of the present invention, wherein The electric particles include dielectric particles which are electrically neutral and can be polarized by the electric field. The method for applying the dielectrophoretic force of the brittle red blood cell, ie, the method of shaving, according to the embodiment of the present invention, the dielectric particles are, for example, The polymer particle has a cell membrane biological particle, a cell, a yeast, a blood cell or a DNA. The instant detection method of the dielectrophoretic brittle red blood cell according to the embodiment of the present invention is, for example, 6 to 4 Vpp alternating current. The present invention provides a brittle red blood cell instant detection smear using dielectrophoretic force, which has a parallel array electrode and a micro flow channel design, and is matched with a phase between adjacent two electrodes. Poor power signal, so that the dielectric particles can move in the parallel array electrode area. This application of dielectric ice force brittle red blood cells in real time (four) wafer application in biomedical applications 13 200811438 using dielectrophoresis principle to control electrical neutrality The tiny particles, at the micro-scale, cause the micro-particles to produce various trajectory movements, and in the case of low voltage, the signals of equal phase difference produce a non-uniform electric field, and the electric neutral particles change with the way the electric field is supplied. And produce a variety of particle manipulation methods. And for the size of the cells to be tested in the biomedical detection wafer, design the micro-flow channel and the flat-turn electric transfer, and the faces are matched with each other, so that the (four) wafer has the effect of manipulating the particles, and Simultaneous detection of red blood cells by electrophoretic force. * To make the above and other objects, features and advantages of the present invention clearer The following is a detailed description of the preferred embodiments, and the following is a detailed description of the following: [Embodiment] FIG. 1 illustrates the brittleness of the dielectrophoretic force applied to the first substrate by the flow channel. Schematic diagram of the red blood cell detecting the wafer immediately, FIG. 1A is a schematic cross-sectional view of the brittle red blood cell using the dielectrophoretic force in FIG. 1 along the line AA, and the cross-sectional line is taken. Referring to FIG. 1 and FIG. 1A together, the first embodiment The microparticle mixing cymbal 100 includes a first substrate 110 and at least one parallel array electrode 120. The first substrate 110 has at least one microchannel 112, and the parallel array electrode 120 is located in the first substrate of the microchannel 112. The upper array electrode 120 is composed of a plurality of electrodes 122, and the electrodes 122 are arranged in parallel in the direction of the vertical microchannels 112. 14 200811438 Eyes Referring to FIG. 1A', in a preferred embodiment, the dielectrophoretic brittle red blood cell instant detection wafer, for example, further includes a second substrate 130 disposed on the first substrate 11A to cover the micro flow channel (1), The material of the second substrate 130 is, for example, glass, stone wafer, acrylic, plastic, polymethacrylic acid = (ΡΜΜΑ) or polydimethyl Wei (pDMS).

For example, the second substrate 130 further includes at least one injecting member i4 〇 2 on the first substrate 13G so that liquid can enter the green flow path 112. Γ中: The injection member 140 includes an injection tube 142 and a transfer tube 144. ^Into the official 142 is connected to the microchannel 112, and the transmission f I44 is connected to the injection ^42. In the preferred embodiment, for example, two injection members (10) are disposed, and the second substrate 13G is a path for the fluid passage. With continued reference to the preferred embodiment, each of the electrodes 122 of the parallel array electrode U0 has a width. In particular, when the wafer is activated, the red blood cell meets through the parallel ___, which is affected by the single-dielectrophoretic force due to its own technique as a brittle red blood cell, and acts to move away from the electrode or adsorb to the electrode, that is, to use the microparticle. When the crystal# is manipulated, the red blood miscellaneous particles flowing through the parallel array electrode 120 may be immediately detected due to whether the sputum is brittle, the blood cell* is & or is adsorbed to the electrode. Effect. In addition, as shown in FIG. 1 , the brittle red blood cell using the dielectrophoretic force, that is, the test wafer 100 further includes a plurality of electrode lines 150 , and each electrode line 15 is connected to the corresponding electrode 122 , and each electrode line is Another 15 200811438 ^—Terminal technology 5 main electrode external connection area 160, this electrode external connection area 2 is 70 Wang solder joint design, and can be easily externally connected to a bus, ': to achieve wafer insertion Ready-to-use features. Referring to FIG. 1A, in a preferred embodiment, the first substrate 110 t is, for example, a broken soil, a stone wafer, an acrylic, a plastic, a polymethyl methacrylate (PMMA) or a polydimethyl stone. Oxygen burn (PDMS), and the electrode 122 ^ is, for example, sheet gold, platinum, aluminum or chromium. The materials of the first substrate 110 and the second earth plate 130 may be the same or different. SECOND EMBODIMENT Fig. 1B is a schematic cross-sectional view showing the brittleness of the application dielectrophoretic force of the flow path on the second substrate = the blood cell immediate detection wafer. Referring to FIG. 1 and FIG. 1B together, the brittle red blood cell instant detection wafer 1 2 using the dielectrophoretic force of the second embodiment includes, for example, a first substrate no, at least one parallel array electrode 12 and at least one micro flow channel. A second substrate 130. The parallel array electrode 12 is disposed on the first substrate 11A, and the parallel array electrode 120 is composed of a plurality of electrodes 122, and the electrodes 122 are arranged in parallel in the direction of the vertical/microchannel 132. The first substrate 130 having at least one microchannel 132 is disposed on the first substrate 11A, and the 32 is passed through the parallel array electrode 12A. The same or similar reference numerals are used in the second embodiment to designate the same reference numerals, and will not be described again. However, it is worthwhile to think that in the second embodiment, the position of the flow path 132 is disposed in the second substrate 130 of 16 200811438. That is to say, in the brittle red blood cell immediate detecting wafer 100 to which dielectrophoretic force is applied, the flow path can be disposed on the same substrate or a different substrate as the parallel array electrode. Moreover, in a preferred embodiment, the parallel array electrode 120 of the first embodiment or the second embodiment may also use an array design, specifically, in the flow paths 112, 132. The array type is provided with a plurality of parallel electrodes 120, so that the brittle red blood cells can be increased away or adsorbed in the range of the electrodes, and the detection of the brittle red gold balls can be made easier to enhance the brittle red blood cells applying the dielectrophoretic force. Instantly detect the function and efficiency of the chip.

Please refer to the figure for the fabrication of the electrode wafer 200 ^ ^

The metal layer 220 is on the substrate 210 and the material of the metal layer 220 is, for example, 17 200811438. As shown in FIG. 2C to FIG. 2F, for the metal layer 22, the process of the patterning process is taken, for example, Step 10: the step of coating the photoresist 23〇 as shown in FIG. 2C; performing the step of exposing with the photomask 240 as shown in FIG. 2D; performing the page step to obtain the patterned photoresist layer 230a; 2, the photoresist layer 2 is the mask side metal layer 22 = G: / the step of removing the patterned photoresist layer 23 ° 3 = the electrode W. The above steps are the general technical week I know, I will not repeat them here. ~ For the material, please refer to the methyl ^ oxygen _ hall for the production of particles in the layer. Clear τ;: Precise the removal of contaminants on the substrate 31G or cleaning method, fine gas On the dry side of the high temperature vacuum of the money 4, ^1 = 2. On the substrate, the exposure is performed finely. Using a squeegee 330, there is a patterned photoresist for the photoresist layer: the process is formed as shown in Fig. 3D. It has a semiconductor process, because of the f-mode 340. The above steps are the general practitioner's 砰 = (4) details _ familiar with the technology - poly bismuth stone eve 3E 'coating method and conditions on the patterned photoresist layer 320a, for example, sub-heating for baking It cures. The heated horse is placed on a hot plate and heated at 10 (rc for 3 〇 minutes. 200811438 白孙ίΐή Please refer to Figure 3F, the cured polydimethyl Wei burnt layer 300 mother = upper stripped, and finished with micro flow channel Production of a polyoxyalkylene layer 3 (10). τ ι y

The completed electrode wafer 200 and the polydimethyl oxynitride layer 300 having the microchannels 302 will continue to be subjected to a package bonding process, with reference to Figs. 4A to 4F. First, a polydioxin-based compound 300 having a microchannel 3〇2 as shown in Fig. 4A is provided. Next, referring to Fig. 4B, a fluid injection hole 304 is drilled in the polydimethylalkaline layer 300. Referring again to Figure 4C, electrode wafer 200 and polydimethyloxane layer 300 having microchannels 3 and body inlets 304 are placed in an environment 4GG of an oxygen cell. Thereafter, in the environment 400 of the oxygen plasma meter, the electrode wafer and the polydithiocarbeene layer having the microchannel and fluid injection holes 304 are taken out and joined. Next, referring to Fig. 4E, the two injection members 51 are inserted into the fluid injection hole 3 () 4 of the polysulfide oxide layer 3GG. Each of the injection members 51_ further includes an injection tube 512 and a transfer tube 514, and the transfer tube 5 is on the injection tube 512. After that, referring to FIG. 4F, the joint between the injection tube 512 and the fluid injection hole 3〇4 is heated and waited for by a dimethyl squid or other adhesive such as AB glue, and then completed. Preparation of a brittle red blood cell for the detection of dielectrophoretic force. Fourth Embodiment FIG. 5 is a graph showing the phase change of a brittle red blood cell instant 200811438 power signal using the dielectrophoretic force of the present invention to detect a brittle red blood cell 4, and FIG. 6 is a dielectrophoretic force manipulation result, a positive dielectric image Negative dielectrophoresis is a phenomenon of rejection. Referring to FIG. 1 and FIG. 5, the first application provides a dielectric core for detecting the voltage of the device. In the preferred embodiment, the design of the parallel array electrode 120 is a set of parallel lightning. For example, and Pingming t a 'reproduce the original electrode μηΜ, where the second group of electrodes, then repeat this step to complete the parallel array arrangement.乂 丨 丨 凡 雷 ^ ^ ^ ^ ^ ^ ^ ^ ^ ^ ^ ^ ^ ^ ^ ^ ^ ^ ^ ^ ^ ^ ^ ^ ^ ^ ^ ^ ^ ^ ^ ^ ^ ^ ^ ^ ^ ^ ^ ^ ^ ^ ^ ^ ^ ^ ^ ^ ^ ^ ^ ^ ^ ^ ^ ^ ^ ^ ^ ^ ^ ^ ^ ^ ^ ^ ^ ^ ^ ^ ^ ^ ^ ^ ^ ^ ^ ^ ^ ^ ^ ^ ^ ^ Integer. In the embodiment, as shown in Fig. 1, eight electrodes are divided into four groups (122a to mb) each having two electrodes. ^, the injection of liquid into the human channel, the liquid has a plurality of dielectric particles, and the so-called dielectric particles here refers to particles that are themselves electrically neutral and can be polarized in three fields. In this real customs, the mediators are red blood cells, encapsulated red blood cells and normal red blood cells. In another embodiment, the dielectric particles are, for example, biological particles, cells, yeast, DNA or polymer polymer particles having a cell membrane. - (IV) Dielectric Reduced Red Blood Cell Detection of the Invention The wafer can be used in a biomedical detection system. Thereafter, a power signal is applied to the electrode 122, and the phase difference of the power signal between each of the electrodes 122 is 2π/η, so that the plurality of dielectric particles in the liquid are generated or adsorbed. The behavior of the electrodes. The power source is, for example, an AC of 6 to 2 GVpp to provide the above-described parallel array 20 200811438 column electrode 120 for manipulation of dielectric particles. According to the test results of Figure 5, when the input frequency is 2MHz, the fresh red blood cells are positive dielectrophoresis, and the brittle red blood cells are negative; |Electric, Yong' so when starting the crystal #, the red ▲ ball will flow through the parallel electrode array The area % 'because it is a brittle red * ball, and the shirt is excited by different dielectrophoretic forces' produces a mi ball away from the electrode and the fresh red i ball is adsorbed on the electrode, that is, when the shame is detected immediately, the crystal w(9) flows through The red blood cell particles of the liquid towel of the parallel array electrode 120 may be brittle red due to itself.

t ball and secret or adsorption to the electrode, and then achieve the effect of detection 0 In order to prove that the present invention is indeed feasible, Figure 7 is the application of dielectric = brittle red blood cells (four) detection wafer riding test, and shooting in the micro-channel The situation in which the red blood cells of the liquid move. 2 The invention of the electrophoresis force of the secret red blood cell for immediate detection of the crystal required voltage is only about 2G volts, and the time is only a few t clock = the required energy can be provided by the general portable battery, with appropriate distance 曰And the second can convert the DC signal of the battery into an AC signal, and witness the instant detection method of the brittle red blood cell of the instant electrophoresis force of the dielectrophoretic force of the present invention, to detect the sputum (the application of the dielectrophoretic brittle red blood cell) The instant zone II II electric ice particle manipulation method can make the flow of the blood cell particles in the electrode 'is away from or adsorb on the electrode surface, thereby achieving the purpose of the instant detection of the brittle red blood cell of 21 200811438. (2) The invention The application of dielectrophoretic brittle red i-ball instant detection chip is completely zero solder joint and plug-and-play design, which can improve the operational stability and ease of use of the brittle red jk ball for the application of dielectrophoretic force. With the general portable battery and appropriate conversion circuit, the DC signal of the battery is converted into an AC signal, and the electrodes in the wafer are connected to become Portable application of dielectrophoretic brittle red blood cells for immediate detection of wafers. (3) The application of the dielectrophoretic brittle red ball instant detection wafer of the present invention can utilize the lithography etching process to design and fabricate parallel arrays of good quality and stable operation. In addition, the microchannels can be produced in a large number by means of a mold-making method of a polydimethylsiloxane layer, which has the advantages of low cost and mass production. Although the invention has been disclosed above in the preferred embodiment, It is not intended to limit the invention, and those skilled in the art can make some modifications and refinements without departing from the spirit and scope of the invention, and the scope of the invention is defined by the scope of the appended claims. BRIEF DESCRIPTION OF THE DRAWINGS [Simplified Schematic] FIG. 1 is a schematic diagram of a brittle red blood cell instant detection wafer using a dielectrophoretic force on a first substrate. 囷A, , and 曰 are shown in FIG. Brittle red blood cells

Fig. 1B is a schematic cross-sectional view showing the application of dielectrophoretic force on the second substrate of the first brittle red blood cell detecting wafer in the flow path. 22 200811438 FIGS. 2A to 2G illustrate a flow chart of electrode wafer fabrication. 3A to 3F are flow charts for making a micro flow path. 4A to 4F are flowcharts. The production of the electrode wafer and the microchannel package is shown in Fig. 5. The test results of the brittle red blood cells are detected by using the brittle red ball of the dielectrophoretic force of the present invention to detect the phase change of the wafer with the power signal.

Figure 6 shows the phenomenon that dielectric particles flow through a parallel electrode. Positive dielectric electrophoresis is adsorbed on the electrode, and negative dielectrophoresis is a repulsive phenomenon away from the electrode. Fig. 7 shows the test results of the actual detection of fragile red blood cells by the use of the dielectrophoretic brittle red blood cells of the present invention. [Main component symbol description] 100, 102: Brittle red blood cell instant detection wafer 110 using dielectrophoretic force: First substrate 112 '132 · Micro flow channel 120: Parallel array electrode 122 · Electrode 122a, 122b, 122c, 122d: Electrode group 130: second substrate 140, 510: injection member 142, 512: injection tube 144 ' 514 = transfer tube 150: electrode line 160: electrode external connection region 23 200811438 200: electrode wafer 210, 310: substrate 220: metal layer 220a: Patterned metal layer 230: photoresist 230a: patterned photoresist layer 240, 330: photomask 300, 520: polydioxanoxane layer 302: microchannel 304 · fluid injection hole 320: photoresist layer 340 : Mother mold 400 · · Oxygen plasma environment

twenty four

Claims (1)

200811438 X. Application for Patent Park·· L A brittle red blood cell instant detection wafer using dielectrophoretic force, comprising: a first substrate having at least one microchannel; and at least one parallel array electrode disposed at The first substrate in the microchannel) and the parallel array electrode are composed of a plurality of electrodes, and the electrodes are arranged in parallel in a vertical microchannel direction. The application of the dielectrophoretic brittle red blood cell detection chip according to the first aspect of the invention, further comprising a second substrate disposed on the first substrate to cover the micro flow channel. 1 The method for detecting a brittle red blood cell using a dielectrophoretic force as described in claim 2, wherein the material of the second substrate comprises glass, germanium wafer, acrylic, plastic, polymethyl methacrylate (PMMA) Or polydidecyloxyne (PDMS). 4. The fragile red blood cell instant detection wafer using dielectrophoretic force as described in claim 2, further comprising at least one injection member disposed in the second substrate to allow liquid to enter and exit the microchannel. 5. The fragile red blood cell instant detection wafer using dielectrophoretic force as described in claim 4, wherein the injection member comprises: a second injection tube connected to the micro flow channel; and a transfer tube connected to the injection tube. 6. The fragile red blood cell instant detection wafer using dielectrophoretic force as described in claim 1, wherein each of the electrodes has a width, and adjacent regions are arranged in parallel with each other. 25 200811438 7. If the red blood of the Langsei electrophoresis force described in the first paragraph of the application is applied, the wafer is further detected, and further includes a plurality of electrode lines, and the ends of the electrode lines are connected to the corresponding electrodes, and Each of the electrode lines is connected to an electrode external connection region. 8. The instant detection chip for brittle red blood cells using dielectrophoretic force as described in claim 1, wherein the material of the first substrate comprises glass, germanium wafer, acrylic, plastic, polymethyl methacrylate (PMMA) Or polydimethyl siloxane (PDMS). A 9: A brittle red blood cell instant detection wafer using dielectrophoretic force as described in claim 1 of the patent application, wherein the material of each electrode comprises gold, platinum, inscription or chromium. The invention relates to a method for detecting a wafer of a brittle red blood cell by using a dielectrophoretic force, comprising: a first substrate; at least one parallel array electrode disposed on the first substrate, wherein the parallel array electrode is composed of a plurality of electrodes, and The electrodes are arranged in parallel in the direction of the vertical microchannel; and the substrate having at least one microchannel is disposed on the first substrate and the microchannel passes through the parallel array electrode. 11. The fragile red blood cell instant detection wafer using dielectrophoretic force according to claim 10, further comprising at least two injection members disposed in the second substrate to allow liquid to enter and exit the flow channel. 12. The method of claim 1, wherein the injection member comprises: 26 200811438 two injection tubes connecting the microchannels; and a transfer tube connecting the injection tubes . 13) The method for detecting a wafer of a red blood cell using a dielectrophoretic force as described in the scope of the patent application, further comprising a plurality of electrode lines, one end of each of the electrode lines being connected to the corresponding one of the electrodes, and each of the electrodes The other end of the electrode line is connected to an electrode external connection region. 14. The application of a dielectrophoretic red blood cell instant detection wafer according to the first aspect of the patent application, wherein the first substrate or the second material comprises a glass, a stone wafer, an acrylic, a plastic, a polyacid. Vinegar (job A) or polydimethyl Wei (pDMS).丙纯甲15·Applicable to the application of dielectric ^ red blood cell instant detection wafer as described in the first paragraph of the patent application, wherein the electrode material comprises gold, platinum, Ming or network. 16·—A method for the immediate detection of brittle red blood cells by dielectrophoresis, including · providing (4) applying for the finite item φ, a m η, where m represents the number of groups, and 11 represents the number of electrodes of each: (mother, and inject a liquid into the microchannel; and apply a power signal to the electrodes to the r pole, the phase difference is 2 2 = the detection of the sub-input (four) or the domain _ movement to reach Shen π patent (4) Item 16 of the dielectrophoresis force brittle red blood 27 200811438 ball instant detection method, complex electric field polarized dielectric particles u some dielectric particles including electrical neutral and can be patented The range is complex... The real-time detection of the sexual red i-ball, the biological particles of the brittle membrane using the dielectrophoretic force, and the fine f', wherein the dielectric particles include cell particles. Mother bacteria, blood cells, DNA Or polymer polymerization 19·such as applying for a patent garden The immediate detection of the red blood cells, the six applications of the dielectrophoretic force of the brittle Vpp AC. The power signal includes 6~20 28