200810874 九、發明說明： 【發明所屬之技術領域】 本發明涉及一種工作機械用之加工用頭，更詳細地， 涉及使用於5軸加工機（同時可控制5軸的加工機）或多面 加工機等的複合加工機（工作機械）的具備轉位機構的加工 用頭。 【先前技術】 圖6,作為上述複合加工機的一例，表示龍門銑床（加 工甲心）卜這種龍Η銑床i，包括：在床4上附設的左右 圓柱2、2;在圓柱2、2上朝上下方向（z軸方向）移動的橫 軌6,在橫軌6上朝左右方向 明也石万句U軸方向）水平移動的床鞍7; 在床鞍7上朝z軸方向移動的衝柱8;在床4上朝前後方 向（X軸方向）移動的工作臺5。而且，在衝柱8安裝有，包 含具備安h具的主軸的主軸單元2()的加卫用頭 上述龍門銑床！，在加工工件時，通過根據提前設定 的程式的數值控制，使上述工作45、橫執6、床鞍7及衝 =^動的同時’加工用頭1G進行^單元⑽角度位 么置的^位。由&，在上述工作機械，對於工件的各加工面 月匕以取佳角度加工工具，從而， 的切削加工等。 了以進仃複雜形狀的工件 為此’上述加工用頭具備’用於將主軸單元的角度位 置轉位的轉位機構。並且，作為此 f寻仅錢構的驅動手與， 么知的有，其馬達定子及馬達 寻于配置在加工用頭10的殼 5 7109-9067-PF；Tungming 200810874 體内，採用轉子與支撐主 m ^ , 早兀的支撐軸連接的直接驅動 支的媒動馬達（以下， 專利文獻D。 D 用頭⑽如’ 在此專利文獻1所述的加工 古犄士虹口口 只由主軸早兀（頭）及 支沒主轴早π的支撐 -..^ 、貝支撐邛）而構成，作為驅動手 型的m>馬達。 相對於疋子的内周面的内轉子 主軸f而’在此專利文獻1所述的加工用頭，用於將支撐 的支撐轴（驅動轴）可旋轉地支撐的轴承配置於在 支擇軸的軸線方向的上述 $仙馬達的存在範圍的外側。其結 果’關於加工用頭的支撐軸 叼釉綠方向的尺寸增大，而加 工用頭成辱大型化。 若加工用頭大型化’例如，上述龍門銳床的情況，為 了確保其移動領域，工作機械本身不得不大型化或在工作 機械上的工作空間受限制。並且，伴隨大型化的重量的辦 加’成為不能順利地進行加卫用頭的移動，而對卫作 的影響，或由加工用頭的重量橫樑彎曲，使加工精 度下降的原因。 另外，在於由DD馬達而驅動旋轉軸的工作機械用的轉 U置，在旋轉軸的軸線方向的⑽馬達的存在範圍内配置 支撐旋轉軸的軸承的構成記載於專利文獻2。 在此專利文獻2所述的轉位農置’採用轉子相對於定 子的外周面的外轉子型的DD馬達。並且，此轉位妒置，通 過外嵌固定於轉子❹承，成為對於本體旋轉自J地支= 7109-9067-PF；Tungming 6 200810874 旋轉軸（傳達軸）的構成。 然而’在此專利文獻2所述的轉位裝置的情況，由於 軸承圍繞DD馬達的構成，因此必須採用大徑的軸承。這 時，通過軸承的大徑化而振動精度下降，轉位精度、再加 上加工精度下降。而且，由於軸承的直徑越大價袼也越高， 因此支撐頭的製造成本會上升。 回 【專利文獻1】日本專利公開平2—1 1 6437號公報 【專利文獻2】曰本專利公開平4 —2443號公報 【發明内容】 [發明所欲解決之問題] 2作機械用加^頭，不必大型化其加Μ頭本身，也冓 月匕侍到鬲加工精度的構成。 [解決問題之技術手段] 根據上述課題，本發 作機械用之加工用頭作為 月丨J &，该工作機械用之加工 。 軸的主軸單Η ·达、、備·包s安裝工具的主 少盥上it主4 17，支撐該主軸單元的支撐頭，包含以至 v /、上返主轴的旋鐘 一 轉輛線直交的軸線為中心旋轉主軸輩 凡，而轉位其角度位詈的赭 疋褥主軸早 、、 置的轉位機構的支撐頭。 固二在單於™ 置的支撐軸和；由在#支撐頭的殼體内旋轉自如地設 周圍的馬達轉子及A 的殼體内被同軸配置在支樓軸 ·、，、了相對於該馬達轉子的外周圍繞馬達 7109>9067^PF；Tungming 7 200810874 轉子而設置的馬歧子而成的驅動馬達；在支撐軸的旋轉 轴線方向的驅動馬達的存在範圍内，用於旋轉自如地支撐 支撐軸的軸承配置於上述馬達轉子的半徑方向内側。 、而且’在本發明，上述支撐轴具有上述馬達轉子外欲 固定的大徑部和通過上述軸承而旋轉自如地支撐的軸部， 並且’上述殼體具有在上述大徑部和軸部之間配設的圓筒 部，上述軸承介設在上述圓筒部和支撐軸之間也可以。 [發明的效果] 的加工用頭，作為轉 根據由上述本發明的工作機械用 位機構的驅動手段採用内轉子型的DD馬達，且由於用於旋 轉自如地支撐上述支撐轴的軸承配置在，為在上述支撑轴 的軸線方向的上述DD馬達存在的R ^ 什任的靶圍内的上述⑽馬達的 半徑方向内側，因此，能鈞 的軸線方向的尺寸增大而加 時’可以採用更小徑的軸承， 的大型化或加工精度的下降。 此夠避免在加工用頭的上述支撐軸 工用頭本身成為大型化的同 且能夠有效地防止工作機械 【實施方式】 以下’根據附圖詳細說明本發明的實施方式。 圖1〜3所示的是本發明的_實施方式，圖示的加工用 頭10包含，具有安裝工具的主軸21的主軸單元2〇、支撑 主轴單元20的第1支樓頭3〇(相當於本發明的「支撐頭」）、 支撐第1支撐頭30的第2支撐頭5〇(圖3)。 轴單元20 A驅動馬達内裝型的主轴頭，是由内裝 7109-9067-PF;Tungming 8 200810874 的驅動馬達高速旋轉驅動主軸21。 籑 在此主軸單元20的殼體23内，插通配置有主軸21， 使得圍繞此主軸21而内裝驅動馬達25。驅動馬達25由外 肷固定於主軸21的轉子25a和、與轉子25a的外周面相對 而設置的定子25b而成。主轴21，通過在驅動馬達25的 别後（圖的上下）排列配置的多個軸承（例如，角接觸軸 承）27，而旋轉自如地支撐。並且，若給定子25b供給激磁 電流’則在與轉子25a的之間發生激磁力，由其激磁力旋 轉轉子25a，而旋轉驅動主軸21。 第1支撐頭30是用於，支撐上述主軸單元2〇的同時， 以與上述主軸21的旋轉軸線直交的軸線（以下，稱為「a 軸」）為中心旋轉主軸單元2 0而轉位其角度位置。 第1支撐頭30構成為，在支撐部3〇c組裝一對腳部 3〇a、30b的叉子形狀，在其腳部3〇a、3〇b之間支撐上述 主軸單元20。主軸單元20，通過分別在腳部3〇a、3〇b的 内部旋轉自如地組裝的支撐軸而支撐。另外，圖示的支撐 頭成為，用於將主軸單元20旋轉驅動的DD馬達（相當於本 發明的「驅動馬達」）僅設置在一對腳部3〇a、3〇b中的腳 部30 a的構成。因此，在以下，對於兩腳部3〇a、3〇b的各 支撐軸，將腳部30a側的支撐軸稱為驅動支撐軸（相當於本 發明的「支撐軸」），將腳部3〇b側的支撐軸稱為從動支撐 車由。 以下，詳細說明腳部3〇a的構成。 腳部30a，以殼體31a為主體，在其内部組裝有，構 7109-9067-PF ；Tungming 9 200810874 成DD馬達33的轉子（馬達轉子）33a及定子（馬達定 子）33b、支撐主軸單元2〇的驅動支撐軸、用於旋轉自如地 支撐此驅動支撐軸的軸承（例如，交叉滾子軸承）35、及用 於將加工用的流體（以下，簡稱「流體」）供給到主軸單元 20的旋轉接頭37等。 设體31a，為了插入DD馬達33及後述的旋轉軸，腳 部30b侧為大開口。而且，在殼體31&，形成有從腳部_ 相反側的側面朝A軸方向延伸的圓筒部31a卜並且，在圓 同部31al，形成有向a軸方向插入旋轉接頭37的貫通孔 31a2而且，在设體31a的腳部30b相反侧的端面，形成 有後述H體供給用的管或用於供給電流的電纟覽通過的凹 部：la3。還有，在腳部3〇a的腳部31b相反側，安裝有側 面盍子18a，凹面31a3由該側面蓋子18a覆蓋。另外，圖 2表示拆除此側面蓋子18a的狀態。 山旋轉接頭37由固定於殼體…的分配器…和可旋轉 地後裝在分配H 37a的圓筒部37al的外側的軸奶而構 成0 刀配益d/a，以插入於殼體31a的貫通孔“Μ的狀態 下，在於其凸緣部37a2，通過配設在圓周方向的多個螺: 部件37c而安裝在殼體31a。而且，在分g&|f37a的中心 形成有，歸容許電料朝向主軸單& 2()通過 37a4 。 札 、而且，在分配器37a,用於將流體供給或排出的多個 流體流路37a3向圓周方向偏移位置而形 力乂 另一方面，在 7109-9067-PF;Tungming 10 200810874 軸37b，形成有對應於分配器37a的各流體流路37a3的多 個流體流路37M。另外，在圖卜代表性地表示多個流體 流路37a3及流體流路37bl中的只有一個。 並且’各机體流路37a3和與此對應的各流體流路 被構成為，通過形成在分配$ 37a和車由37b的嵌合周面的 環狀溝而連通，即使旋轉軸37b時也能保持其連通狀態。 而且’流體流路37M，連通於主軸單元2〇的流體供給用 或排出用料24。還有，在分配器37a和軸m之間，在 各壞狀溝之間介設有密封用的密封部件。 還有，在分配器37a，向圓周方向偏移位置，而形成 有多個流體供給用或排出用的埠37d ’在各埠㈣連接有 流體供給用或排出用的管12。並且，從供給用管Μ供给 的流體通料24從旋轉接帛37供給到主抽單元別。而且， 在使流體循環時，在主軸單元2G内循環的流體通過旋轉接 頭37而排出到排出用管12。順便，作為供給到此主轴單 凡2〇的流體，例如有，用於冷卻高速旋轉的DD馬達25或 t轴21的冷卻用油、用於防止向主軸單元20(主軸21的 ::部分:的切粉的侵入的密封用空氣、在加工時用於冷卻 疋轉工具等的冷卻用水等。 ^ +達33由，對於殼體31a固定配設的定子33b和、 使侍與疋子33的内周面相對而配設的轉？ 33a而構成。 即’圖示的⑽馬達33,作為内轉子型的馬達而被構成。 而且，在此定子套筒33c的外周面，形成有環 11 7109 一 9067-心 un卿ing 200810874 / cl另一方面，在殼體31a，形成有連通於此環狀 溝33cl的流體供給路31^及流體排出路“Μ。並且，對 於此環壯、、善Q 9 1 , 彳 c ，《流體供給路31 a4供給用於冷卻dd馬 達33的冷部用流體（例如，油），控制伴隨轉子3%的旋轉 =⑽馬達33的發熱。另外，環狀溝33ci形成為，使得從 一 /、口路31a4供給的流體循環環狀溝33cl而從流體排 出路31a5排出的螺旋狀（省略圖示）。 轉子33a外嵌固定於，可旋轉地設置在殼體31&内的 旋轉軸32的外周面。此旋轉軸32，對於上述旋轉接頭37 的軸37b以同心配置在其旋轉軸線上，通過向圓周方向配 汉的多個螺絲部件而固定在軸37b。並且，轉子“a，其外 周面與定+ 33b的内周面相對配置，外喪固定在形成於旋 轉轴32的圓筒部32a的外周面，對於旋轉軸32被設置成 不能相對旋轉。 而且’在旋轉轴32，對於其腳部3〇b側的端面32b， 由向圓周方向配設的多個螺絲部件14而固定主軸單元 20。即，主軸單元2〇，通過對於旋轉軸犯的端面3礼而 口疋被碇轉軸3 2支撐。因此，在腳部3 0 β側，旋轉軸 32及與此一體旋轉的旋轉接頭37的軸3几構成用於主軸 單元20的驅動支撐軸。 旋轉軸32的圓筒部32a，被形成為以在旋轉接頭37 的軸37b組裝旋轉軸32的狀態，通過微小的間隙而圍繞上 述殼體31a的圓筒部31al。換而言之，以在軸37b組裝旋 轉軸32的狀態，在圓筒部32a的内周面的内側，即，外嵌 7109-9067-PF;Tungming 12 200810874 固疋於圓靖部32a的轉子33a的半徑方向内側，存在殼體 31a的圓筒部31al。 另一方面’在殼體31a的圓筒部31al和位於圓筒部 3lal的貫通孔31a2内的旋轉接頭37的軸37b之間，介設 有軸承35。並且，藉由軸承35，軸37b成為對於殼體31a 旋轉自如地支撐的狀態。 如此，在圖示例，驅動支撐軸（在旋轉接頭37的軸37b + 軸37b組裝的旋轉軸32)具有，DD馬達33的轉子33a外嵌 固定的大徑部（旋轉軸32的圓筒部32a)和在此大徑部的半 徑方向内側由軸承35而旋轉自如地支撐的軸部（旋轉接頭 37的軸37b)並且，在此大徑部和軸部之間配設在殼體 31a形成的圓筒部31al，成為在此圓筒部3U1和支撑轴之 間介設軸承35的構成。由此，切軸成為對於殼體仏旋 轉自如地支撐的構成。更且’如圖示，關於軸承犯的“由 方向的配置，成為在A軸方向的卯馬達33的存在範圍内。 接者’以下對於在與腳部3〇a相對位置支撐主轴單元 20的腳部30b的構成，進行詳細說明。 腳部30b，以殼體31b為 产甘& * 馬主體，在其内部組裝有，保 持主轴單元20的角度位罟 沒位置的夾緊機構34、支撐主軸單元 2 0的從動支樓轴、用於蔣卜 、將此k動支撐軸旋轉自如地支撐的 軸承36、及旋轉接頭38等。 殼體31b’形成有向 其貫通孔31bl内組裝有 軸承3 6、及旋轉接頭3 8 A轴方向貫通的貫通孔31bl，在 上述夾緊機構34、從動支撐軸、 而且’在殼體31b的腳部30a相 7109-9067-PF;Tungming 200810874 反側的端面，與腳部30a同樣地形成有凹部（省略圖示）， 由側面蓋子18b而被覆蓋。 旋轉接頭38,為與腳部30a側的旋轉接頭”同樣者， 由固定於殼體31b的分配器38a和、在分配器心的圓筒 部38al的外侧旋轉自如地嵌裝的軸38b而構成。 分配器38a，由上述圓筒部38al和、使得在圓筒部淑 的腳部30a相反側的端部向半徑方向擴大而形成的凸緣部 38a2而構成。並且’分配器38a，在於此凸緣部38心，通 過向圓周方向配設的多個螺絲部件38c而組裝在殼體 3ib。而且’在分配器38a的中心，形成有向a軸方向貫通 的貫通孔38a4。 在此分配器38a，向圓周方向偏移位置而形成多個流 體流路38a3。而且，在軸鳥，形成有對應於分配器-的各流體流路38a3的多個流體流路38M。並且，各流體 流路漏和與此對應的各流體流路38bl被構成為，通過 在分配器 38a和雇由aau·!人 b的肷δ周面形成的環狀溝進行連 通，在軸38b旋轉時也能保持其連通狀態。 在於腳部30b，對應於腳部_的旋轉軸^的旋轉轴 39 ’由於收容軸承36’因此，由軸部件39a和凸緣部件39b 的2個部件而構成。此旋轉轴39(軸部件39a及凸緣部件 39b)’配設成使得其旋轉軸線與腳部30a的旋轉軸32的旋 轉軸線（=A軸）一致。 旋轉軸39的轴部件39a，配置在分配器-的貫通孔 a4内對於刀配盗心，通過轴承％而旋轉自如地支撐。 7109-9067-PF/Tungming 14 200810874 因此’軸部件39a和分配器38a 力乂馮’關於A軸同心配設 的狀態。 而且，凸緣部件39b，在腳部30a側具有與腳部心 的旋轉軸32的端s 32b平行的端面39μ，對於此端面 39bl通過向圓周方向配設的多個螺絲部件上5而固定主轴 單元20。因此，此旋轉車由39,作為腳部咖的主轴單元 的從動支撐軸而起作用。另外，旋轉軸39，在於凸緣部 件39b，固定於旋轉接頭38的轴咖，與轴挪一體旋轉。 因此，旋轉接頭38的軸38b也相當於從動支撐轴的一部分。 用於保持主軸單元2〇的旋轉位置（角度位置）的夹緊 機構34,主要由夾緊套筒34a而構成。夾緊套筒“a，由 形成有為壓力室的環狀溝34al的圓筒部34心和、在此圓 筒部34a2的腳部30a側的端部使得向半徑方向冑大而形成 的凸緣部34a3而構成。而且，圓筒部3“2，在容許立旋 轉的狀態下’圍繞與旋轉軸39 一體旋轉的旋轉接頭38、的 轴 3 8 b。 在夹緊套筒34a的圓筒部34a2和殼體⑽之間，介設 有環狀的受壓部件34b。更詳細地，在殼體31b的貫通孔 3叫内嵌固定有受麼部件灿，而且，在此受㈣件⑽ 的内周面内嵌固定有夾緊套筒34的圓筒部以以。並且， :過在凸緣部34a3螺合插入的螺絲部件，夾緊套筒％固 疋在殼體31b，並且，對於凸緣部34a3固定受壓部件 ^而且，在夾緊套筒34a，對於圓筒部34a2，形成有在 Μ部件34b側開口的環狀溝_，由該環狀溝如和 71〇9^9〇67-PF;Tungming 15 200810874 受麼部件34b的内周面而形成廢力室。還有，在此麼力室， 連通有在受Μ部件34b所形成的流體流路綱。此流體流 路34bl ’通過在夾緊套筒34a的凸緣部gw所形成的流 體抓路34a4，連通於在殼體31b所形成的流體流路3ib2。 並且在此夾緊機構34，通過這些流體流路向壓力室 供給壓力流體（例如，壓油），對應於夹緊套筒^的圓筒 部34a2的環狀溝34al的薄肉部變形到縮徑方向。其結果， 對於軸38b作用向縮徑方向締緊力，轴及組裝於此的 旋轉軸39的旋轉成為被阻止的狀態（夾緊狀態）。而且，通 過停止向麼力室供給的壓力流體，而消除圓筒部34a2的薄 肉部的變形狀態，對於軸38a的締緊力消失而解除夹緊狀 還有，在圖示例，在腳部3〇b内設置有，用於檢測旋 =軸39的旋轉角度（=主軸單心的角度位置）的旋轉檢測 益41及用於限制主軸單元2〇的旋轉範圍的角度檢測器仏 紅轉檢測器41 ’在旋轉接頭38的分配器38&的貫通 =38a4内，由安裝於從貫通孔心4的内周面向半徑方向 突出的圓盤狀的支撐部的規定位置的一對檢測頭“a、… 和；以與檢測器頭41a、41a内側相對的配置 軸39的軸部件_的檢測環41b而構成 ^疑轉 41:主軸早元20的角度位置的檢測信號，發送到裝載有 么明的加工用頭1〇的工作機械的控制裝置（未圖示）， 使用於主軸單元2〇的旋轉控制（數值控制）。 而且，角度檢測器、42,例如為限位開_，安裝於在分 7109-9067-PF;Tungming 16 200810874 配器38a的貫通孔38a4内設置的 39的端部所安裝的圓盤狀的部# 4牙’使得在旋轉軸 置。在此部件43的周 °面相對而被設 轉具，在相對於此晕轉且的：:下應於容許角度範圍的牽 動的狀能门聿轉八的狀恕下，限位開關42處於不作 心。因此，通過控制的異常等，主 許角度以上時，其通過限位„ Μ疋轉谷 例如，作^ ^ ^ ^ 檢測，其檢測信號， :號而發送到工作機械的控制裝置。 進行I:說:™的力—第2支撐頭5。， =述’在於本實施例的加工用頭1〇,除上述說明的 支標頭30外，具備支撐此第 頭50。並且，第！…qn，、支撐頭30的第2支撐 在工作機械的主轴頭等。為 ^ =頭=支撐 的軸線(與工作機械的z軸平行的轴 為中^疋轉驅動而設置此第2支撐頭5G(圖3)。 的二支二頭5°，以具有向c軸方向貫通的貫通孔51a 的，又體51為主體’具備在貫通孔5ia内配 轉軸52。並且，通過 又二a的旋 1支撐頭3。。一，通過在殼體51 :安 饭女展的％狀的支撐體 5U，而在工作機械的主軸頭等安裝第2支撐頭5〇。 第2支撐頭50具備：在殼體51的貫通孔…内，用 於旋轉驅動旋轉轴52@DD馬達53、用於保持旋轉轴Μ 的鉍轉位置的夾緊套筒54及用於將流體供給 30的旋轉接頭55。 7109-9067~PF;Tungming 17 200810874 DD馬達53由：通過定子套筒53c而固定在殼體η的 定子53a和；與定子53a的内周面相對配置，固定在旋轉 軸52的轉子53b而構成。而且，用於驅動DD馬達53的激 磁電流的供給，由通過連接器17a而連接在dd馬達Μ的 電纜17而進行。 旋轉軸52包含：可旋轉地設置於殼體51的貫通孔“a 内的軸部件52a和；安裝於軸部件52a的第i支樓頭扣側 的端部而向半徑方向（與C軸直交的方向）擴大的凸緣部件 52b而且，在旋轉軸52 ’形成有旋轉接頭55被插通 通孔52c。 另外，在圖示例，在旋轉軸52的軸部件52a和凸緣部 件⑽之間形成有軸承殼體52d。並且，在此軸承殼體挪 和忒體51之間介設軸承56，由該軸承56,旋轉軸η對殼 體51成為旋轉自如地支撐的狀態。順便，在圖示例的軸承 56、’為複合滾子的擺動軸承的—個的3列圓筒滾子軸承（3 列滚子軸承/軸向·徑向滾筒軸承），可能會受到軸向方向 及徑向方向的大荷重。 在軸部件52a的外周面，外嵌固定有⑽馬達53的轉 件52a。而且，凸緣部件52b，由向圓周方向配設的多個螺 絲部件52e而組裝在軸部件.，與軸部件52& 一體旋轉： 、 在凸緣σ卩件52b，向圓周方向螺合插入多個螺絲部 件19,由該螺絲部件19，帛i支擇頭3〇的支撑部•組 破；凸緣^件52b。因此，通過旋轉轴52由DD馬達53而 7109-.9067^PF；Tungming 18 200810874 . 旋轉驅動’從而’第1支撐頭30與旋轉軸52 -起旋轉。 -旋轉接頭55’為與第1支樓頭3〇的旋轉接頭μ、 同樣的，由固定於殼體51的分配器55a和；在分配器 所形成的貫通孔55al内可旋轉地嵌裝，對c軸與分配器 55a同心配設的軸55b而構成。 ° 分配器55a由在旋轉軸52的貫通孔52c内配置的圓筒 邛55a2和、在圓筒部55a2的第j支撐頭3〇相反側的端部 向半位方向擴大的方式形成的凸緣部Η"而成，在於其凸 緣。卩55a3由向圓周方向配設的多個螺絲部件而組裝在殼 體5卜 " 而且，在軸55b，在第j支撐頭3〇側的端部，組裝圓 盤狀的凸緣部件57,軸55b，通過此凸緣部件57組裝在旋 轉軸52的凸緣部件52b。因此，伴隨旋轉軸52的旋轉， 軸55b也一起旋轉。另外，凸緣部件57，成為嵌入於在第 1支撐頭3G的支撐部⑽所形成的圓形的凹部3()ci的形 狀，通過此凸緣部件57和支撐部3〇c的凹部3〇ci，決定 組裝第1支撐頭30和第2支撐頭5〇時的位置。 在分配li 55a，向圓周方向偏移位置形成用於從外部 引進流體的多個流體流路55a4。另一方面，在軸娜，也 向圓周方向偏移位置形成對應於分配器…的各流體流路 55a4的多個流體流路55bl。 並且各⑽體*路55a4和與此對應的各流體流路“Μ 被構成為，通過在分配器55a和轴55b的喪合周面所形成 的環狀溝而連通，在轴55b旋轉時，也保持其連通狀態。 7109-9067-PF;Tungining 19 200810874 而且’在軸55b所形成的多個流體流路55bl，分別連通於 在第1支撐頭30的旋轉接頭37或38的分配器37a、38a 所形成的對應的流體流路37a3或38a3。因此，從外部供 給到旋轉接頭55的分配器55a的流體，通過軸55b供給到 第1支撐頭30的旋轉接頭37、38。 在固定於殼體51的分配器55&和旋轉軸52的軸部件 5 2a之間，没置有用於保持旋轉軸52的旋轉位置的夾緊套 筒54此夾緊套筒54，在其凸緣部54a，由多個螺絲部件 而組裝在分配器55a的同時，設置成容許與旋轉軸52的相 對疑轉。而且，在夾緊套筒54的圓筒部54b，形成有在分 配器55a的圓筒部5以2側開口的環狀溝5铨，由該環狀溝 54c和分配器55a的圓筒部55a2的外周面而形成壓力室。 "且’對於此壓力室，通過在分配器55a所形成的流 U路54d而供給壓力流體’對應於圓筒部54b的環狀溝 W的薄肉部向擴徑方向變形。其結果，對於旋轉轴52施 加擴徑方向的締緊力，旋轉軸52的旋轉成 (夾緊狀態）。 的狀悲 而且，在圖示例，在旋轉接頭55的上端部，設置有用 於檢測叙轉軸52的旋轉量，即，第丨支撐頭 的旋轉檢測器44。此斿絲认、丨。 幻万疋轉里 上的規定… 由，配置於分配器… 上的規疋位置的-對檢測器頭^、恤和 44a、44a相對配置，戽駐认t ”此檢測頭 …，丨〜κ ”旋轉軸52 -起旋轉的軸55b 的檢測核桃而構成。此旋轉檢測器44 ^ 第1支擇頭3。的旋轉檢測器4 广遽，與在 m發运到工作機械的 7109-9Q67-PF;Tungminc 20 200810874 控制裝置，使用於第1支撐頭3〇的旋轉控制。 的3^由以上構成而成的加工用帛10，支撐主軸單元20 、支撐碩（第1支撐頭30)，在一 + 在對腳部30a、30b的各支 > I夹入主軸單元2 〇的狀能，相 雨*掩击 #對不月匕旋轉地固定支撐在 側的牙由。並且，通過由卯馬達33而旋轉驅動腳部3〇a Π:: 一以支撐轴的旋轉轴線(=與主軸2二 =軸線直父的軸線/A軸)為中心朝向所 轉驅動主軸單元2〇。 * ^ 馬達33的驅動，按昭根摅担‘ &别设定的程式的數值 才工制而進仃，由轉子33a ^ ^ „ 制通過驅動支撐軸而 扰制主軸早元20的角度位 ^ _ 口此在圖不例，設在腳部 3〇a内的DD馬達33及連 絲土 隹υ馬達33的驅動支撐軸（旋 轉軸32 +軸37b)作為用於 釉早兀20的轉位機構起作用。 另外’用於驅動DD馬達33的激絲e、六 文 逹判的激磁電流，通過由連接器l6a 妾在DD馬達3 3的電纜1 6而供給。 並且，在根據本發明的上述第！支撐頭3〇，如上述， 作為支撐主軸單元2G的支撐軸1於由⑽馬達Μ而旋轉 驅動的支撐軸（驅動支撐軸）的軸承35，配設在於A轴方向 的DD馬達33的存在範圍内的内轉子型⑽馬達μ的轉子 33a的半徑方向内侧的構成，軸承35成為收容於⑽馬達 33的半徑方向内側的空間的狀態，不會增大” _的a 軸方向的尺寸。 而且，對於腳部30b，其A軸方向的尺寸是根據支 撐軸（從動支撐軸）的長度（A軸方向的尺寸）而決定的，其 7109-9067-PF;Tungming 21 200810874 °。的長度，鑒於加工時施加負荷的平衡，與腳部30a 撐轴長度更接近為理想。因此，腳部30…軸方向 的尺寸’決定於腳部30a，通過將腳部⑽…軸方向的 :寸更縮:】、，而腳部退的A軸方向的尺寸也能夠更縮小。 2 Λ第1支撐頭30的整體地Α軸方向的尺寸縮小，而 能夠謀求加工用頭10的緊湊化。 更且，根據本發明，軸承35可以採用更小徑者。軸承， 直徑越大振動精度越降低，而成為加卫精度降低的要因， 但是’根據此本實施例的構成，不發生伴隨這種軸承的大 徑化的加工精度的降低的問題。 置，作為在旋轉接頭37的軸37b和殼體…的圓筒部_ 之間設置軸承35的構成’但是代替於此，也可以在旋轉軸 32的圓筒部32a和殼體31a的圓筒部3ui之間設置轴承 35(圖 4(a))。 另外’在以上說明的第1支撐頭30,對於在腳部30a 的支撐軸和殼冑31a的圓筒部31al之間的軸承Μ的配 而且 在上述帛1支撐頭30,構成為在最A軸側配置 旋轉接頭37，在旋轉接頭37(軸37b)的 承35，但是代替於此，也可以作為在軸承 设置旋轉接頭37的構成（圖4(b))。 外周面外嵌固定軸 35的外周面側 即，在上述帛1支撐頭30，支擇轴（旋轉接頭的袖 37b+旋轉軸39)具有，DD馬達33的轉+咖被外嵌固定的 大徑部和，·在此大徑部的半徑方向内侧由軸承％而旋轉自 如地支撐的軸部，上述大徑部由旋轉軸32的圓筒部而 7109 - 9067-PFVTungming 22 200810874 形成，軸部以旋轉接頭37的軸37b所形成，但是代替於此， 將上述大徑部以旋轉接頭37的軸37b形成，在其外周面外 肷固疋DD馬達33的轉子33a也可以。 他實施方式。 加工用頭的支擇 一對腳部中的只 20的轉位機構 對於在兩腳部具 接著，根據圖5進行說明本發明的其 在上述的實施例，對在適用本發明的 頭（第1支撐頭30)，支撐主軸單元2〇的 有一方的腳部具備用於旋轉驅動主軸單元 (DD馬達），但是代替於此，如圖5所示， 備轉位機構(DD馬達)的支撐頭的兩轉位機構也可以適用本 發明。 在圖5所示的支樓頭60,分別對於支樓主轴單元2〇 的一對腳部60a、60b，設置有包含DD馬達63的轉位機構。 另外，在圖示例’腳部6〇3和咖的内部結構幾乎相同。 因此，在以下，只對腳部60a進行說明，對於腳部6〇b， 省略其說明及附圖的符號。 腳部60a *，以形成有向A軸方向貫通的貫通孔… 的殼體61為主體而成，在其貫通孔6U内組裝有卯馬 達63、支撐絲單元2G的支料1錢轉自如地支撐 支撐軸的軸承65、及旋轉接頭67等。而且，在腳部6〇a， 設置有與上述實施例同樣的旋轉檢須|J|§ 68(旋轉檢測器Μ 只設在腳部60a側）。 在圖示例，旋轉接頭67的分配器，由2個部件67a(第 1分配器）及67b(第2分配器）而構成。並且，第2分配器 67b在其凸緣部67b2組裝於第i分配器67&，第i分配器 7109-9067-PF;Tungming 23 200810874 67a通過在其凸緣部67a2組裝於殼體6i，而第1、2分配 器67a、6 7b成為對殼體61固定的狀態。 而且，旋轉接頭67的軸67c，由在第1分配器67a的 圓筒部67al和第2分配器67b的圓筒部67bl之間可旋轉 地欣裝的大徑部6 7 c 1和、軸承6 5被外後固定的軸部6 7 c 2 而構成。 並且’在此旋轉接頭67，在第1、第2分配器67a、 67b的各自形成的多個流體流路67a3、67b3和；對應於各 流體流路67a3、67b3形成在軸67c的多個流體流路67c3， 通過在第卜第2分配器67a、67b的各圓筒部67al及67bl 和轴67c的大徑部67cl的嵌合周面形成的環狀溝而連通。 在軸67c的軸部67c2，組裝有在腳部6〇b側，對於殼 體61可旋轉地設置的旋轉軸62。此旋轉軸62，具有圍繞 旋轉接頭67的第1分配器67a的圓筒部67al的圓筒^ 62a。而且’在旋轉軸62形成有，分別與形成在旋轉接頭 67的轴67c的各流體流路67c3連通的多個流體流路Μ。 各流體流路67c3，通過此流體流路62 c興主軸早元20的 埠2 4連通。 如圓不，隹因疋於殼體的旋轉接頭67的第i分配 器67a的圓筒部67al和軸67c的轴部9 刀 。之間，介設軸 承65。並且，由該軸承65,67c對於殼體心 自如地支撐的狀態。而且，旋轉軸+ 、 由该輛承65組裝 在旋轉自如地被支撐的軸6 7 c的同時，—甘 端 在其腳部60b側的 面62b安裝有主軸單元20。因此，旌鐘 方疋轉接碩67的軸67c 7109-9〇67-ΡΓ/Τιαη9Γη:Ιη9 24 200810874 及旋轉軸62相當於對殼體61旋轉自如地被設置的支撐主 軸單元20的支撐軸。 DD馬達63由通過定子套筒63c而固定在殼體61的定 子63a和；與定子63a的内周面相對配置，在旋轉軸62的 圓筒部62a的外周面被外嵌固定的轉子63b而構成，是内 轉子型的DD馬達。 如此，在圖示的支撐頭60，内轉子型的DD馬達63的 轉子63b，外礙固定在圍繞第1分配器67a的圓筒部67al 的旋轉軸62的圓筒部62a，另一方面，用於旋轉自如地支 撐上述支撐軸的軸承65，介設在第i分配器67a的圓筒部 6 7al和比此圓筒部67al更位於半徑方向内側的軸67c的 轴部6 7 c 2之間。 即，在於本實施例，支撐軸（旋轉軸62+旋轉接頭67 的軸67c)具有，DD馬達63的轉子63b被外嵌固定的大徑 部（旋轉軸62的圓筒部62a)和在此大徑部的半徑方向内側 由軸承65旋轉自如地被支撐的軸部（旋轉接頭67的軸 67c)。並且，在此大徑部和軸部之間配設，在殼體61固設 的圓筒部件（第1分配器67a的圓筒部67al/相當於本發明 的「圓筒部」）的同時，在該圓筒部件和支撐軸之間介^軸 承65,成為支撐軸對於殼體61旋轉自如地支撐的構成。 因此’用於旋轉自如地支撐支撐軸的軸承65成為，配 設在用於旋轉驅動支撐軸的DD馬達63的轉子63b的半徑 方向内側的構成。而且’其軸承65的A軸方向的配置，： 圖示，成為在A軸方向的DD馬達63的存在範圍内。因此， 7109-9067-PF;Tungming 25 200810874 由本實施例，也能得到盥 ^七甘, 、 圖1等的實施例相同的效 果。尤，、，如本實施例的支撐 v , 頌60，在一對腳部60a、6Oh 分別設置包含DD馬達3 3的絲a p b 運33的轉位機構時，比由圖1等的實 施例的支撑頭，A軸方向的寺的貫 』爻马更大，從而，本發明， 在這種支撐頭時更加有效。 另外，本發明不限定於上 奋 4丨丈 貝施方式，在不脫· 本^明的權利要求的範圍内， ^ j以進行各種變更。 圖式簡單說明 圖1表不本發明的加工 的 用頭的支撐頭的一實施方式 正面部分截面圖。 圖2表示本發明的加 側面圖。 圖3表示本發明的加 截面圖。 圖4(a)及圖4(b)表 例的部分截面圖。 圖5表示本發明的加 的正面部分截面圖。 工用頭的支撐頭的一實施方式 的 工用頭的一實施方式的正面部分 不上述實施方式的支撐頭的變形 工用頭的支撐頭的其他實施方式 圖6表示適用本發明& 的加工用頭的工作機械的一例的 斜視圖。 【主要元件符號說明】 1〜龍門銑床； 2〜圓柱； 7109-9067-PF/Tungming p 200810874 4〜床； 6〜橫軌； 8〜衝柱； 12〜管； 16〜電纜； 17〜電纜； 19〜螺絲部件； 21〜主軸； 24〜庳； 2 5 a〜轉子； 2 7〜轴承； 30a、30b、60a、60b〜腳 3 0 c 1〜凹部； 31al〜圓筒部； 31a3〜凹部； 31a5〜排出路； 31 b 1〜貫通孔； 3 2、6 2〜旋轉軸； 32b〜端面； 33a〜轉子； 33c〜定子套筒； 34〜夾緊機構； 34aW冓； 34a3〜凸緣部； 5〜工作臺； 7〜床鞍； 1 0〜加工用頭； 14、15〜螺絲部件 16a、17a〜連接器 18a、18b〜蓋子； 20〜主軸單元； 23〜殼體； 2 5〜驅動馬達； 25b〜定子； 30〜第1支撐頭； 部； 30c〜支撐部； 31a〜殼體； 31 a 2〜貫通孔； 31a4〜供給路； 31b〜殼體； 31b2〜流路； 32a、62a〜圓筒部； 33、63〜DD馬達； 33b〜定子； 33c；l〜溝； 34a〜夾緊套筒； 34a2〜圓筒部； 34a4〜流路； 7109—9067—PF/Tungming 27 200810874 34b〜受壓部件； 34bl〜流路； 3 5、3 6、6 5〜軸承； 3 7、3 8、6 7〜旋轉接頭 37a、38a〜分配器； 37al、38al〜圓筒部 37a3、38a3、54d、62c〜流路；37a2、38a2〜凸緣部 37a4、38a4〜貫通孔； 37bl、38bl 〜流路； 3 7 d〜埠、3 9〜旋轉軸； 39b〜凸緣部件； 41〜旋轉檢測器； 41 b〜檢測環； 43〜部件； 44a〜檢測器頭； 50〜第2支撐頭； 51 a〜貫通孔； 5 2 a〜軸部件； 52c〜貫通孔； 5 2 e〜螺絲部件； 53a、63b〜定子； 53c、63c〜定子套筒； 54a〜凸緣部； 54c〜溝； 5 5 a〜分配器； 55a2、62a〜圓筒部； 55a4〜流路； 37b、38b〜軸； 37c、38c〜螺絲部件； 39a〜軸部件； 39bl〜端面； 41 a〜檢測器頭； 42〜角度檢測器； 4 4〜旋轉檢測器； 44b〜檢測環； 51〜殼體； 5 2、6 2〜旋轉軸； 52b〜凸緣部件； 52d〜軸承殼體； 53〜DD馬達； 53b、63a〜轉子； 54〜夾緊套筒； 54b〜圓筒部； 5 5〜旋轉接頭； 55al〜貫通孔； 55a3〜凸緣部； 5 5b〜軸； 7109-9067-PF;Tungming 28 200810874 5 5 b 1〜流路； 57〜凸緣部件 61〜殼體； 67a、67b〜部 67a3 、 67b3 、 67c〜軸； 6 7 c 2〜軸部； 5 6〜軸承； 60〜支撐頭； 6la〜貫通孔； 卜； 67a卜67M〜圓筒部； 6 7c3〜流路； 6 7a2、6 7b2〜凸緣部； 67c：l〜大徑部； 6 8〜旋轉檢測器。 7109-9067-PF;Tungming 29200810874 IX. Description of the Invention: [Technical Field] The present invention relates to a processing head for a working machine, and more particularly to a 5-axis processing machine (which can simultaneously control a 5-axis processing machine) or a multi-face processing machine A processing head equipped with an indexing mechanism of a composite processing machine (working machine). [Prior Art] Fig. 6 shows, as an example of the above-described multi-tasking machine, a gantry milling machine i of a portal milling machine (processed nail core), including: left and right cylinders 2, 2 attached to the bed 4; in the cylinders 2, 2 a horizontal saddle 6 that moves upward in the up-and-down direction (z-axis direction) on the cross rail 6 in the left-right direction in the left-right direction, and moves horizontally in the z-axis direction on the saddle 7 A punching table 8; a table 5 that moves on the bed 4 in the front-rear direction (X-axis direction). Further, a mounting head for the spindle unit 2 () including the spindle having the mounting arm is attached to the punching column 8 The above-described portal milling machine! When the workpiece is being machined, the above-mentioned work 45, the horizontal armor 6, the saddle 7 and the rushing movement are simultaneously performed by the numerical value control of the program set in advance, and the machining head 1G is used to perform the unit (10) angle position. Bit. By &, in the above-mentioned working machine, for each working surface of the workpiece, the tool is processed at a good angle, and thus the cutting process is performed. In order to advance the workpiece of a complicated shape, the above-mentioned machining head has an indexing mechanism for indexing the angular position of the spindle unit. Moreover, as a driver of the f-only structure, the motor stator and the motor are found in the casing 5 7109-9067-PF of the processing head 10; Tungming 200810874, using the rotor and the support The master m ^ , the media drive motor of the direct drive branch of the support shaft of the early cymbal (hereinafter, Patent Document D. D uses the head (10) as in the processing of the ancient gentleman's mouth as described in Patent Document 1 only by the spindle (head) and support without the spindle π early -. . ^, and the shell support 邛), which is the m> motor that drives the hand. The machining head described in Patent Document 1 with respect to the inner rotor main shaft f of the inner peripheral surface of the die, the bearing for rotatably supporting the support shaft (drive shaft) is disposed on the support shaft The direction of the axis of the above-mentioned $仙 motor exists outside the range. As a result, the size of the support shaft of the processing head is increased in the direction of the glaze green, and the processing head is humiliated. If the processing head is enlarged, for example, in the case of the above-described gantry sharp bed, in order to secure the moving field, the working machine itself has to be enlarged or the working space on the working machine is limited. In addition, the increase in weight with the increase in size is caused by the fact that the movement of the urging head cannot be smoothly performed, and the influence on the Guardian is caused, or the weight of the processing head is bent, and the processing accuracy is lowered. In addition, the configuration of the bearing for supporting the rotating shaft in the range of the motor of the (10) motor in the axial direction of the rotating shaft is described in Patent Document 2. The indexing agricultural device described in Patent Document 2 employs an outer rotor type DD motor in which the rotor is opposed to the outer peripheral surface of the stator. Further, the indexing device is fixed to the rotor bearing by external fitting, and is configured to rotate the body from the J branch = 7109-9067-PF and the Tungming 6 200810874 rotating shaft (transmission axis). However, in the case of the indexing device described in Patent Document 2, since the bearing surrounds the configuration of the DD motor, it is necessary to use a bearing having a large diameter. At this time, the vibration accuracy is lowered by the large diameter of the bearing, and the indexing accuracy and the machining accuracy are lowered. Moreover, since the larger the diameter of the bearing, the higher the price, the manufacturing cost of the support head increases. [Patent Document 1] Japanese Patent Laid-Open Publication No. Hei No. Hei. No. Hei. No. Hei. No. Hei. No. Hei. No. Hei. Head, it is not necessary to enlarge the twisting head itself, and it is also the composition of the processing precision. [Technical means for solving the problem] According to the above-mentioned problem, the processing head for mechanical use is used as a processing machine for the working machine. The main shaft of the shaft is Η············································································ The axis is the central rotation of the main shaft, and the support head of the indexing mechanism of the 赭疋褥 spindle with the angle of the 詈 spindle is set. The support shaft is fixed to the support shaft and is placed in the housing of the # support head, and the motor rotor and the housing of the A are coaxially disposed on the support shaft, and a drive motor formed by a horse-shaped rotor provided around the outer circumference of the motor rotor around the motor 7109>9067^PF; Tungming 7 200810874; for supporting the support shaft in a rotatable range in the presence of the drive motor in the direction of the rotation axis of the support shaft The bearing is disposed on the inner side in the radial direction of the motor rotor. Further, in the present invention, the support shaft has a large diameter portion to be fixed outside the motor rotor and a shaft portion rotatably supported by the bearing, and the housing has a diameter between the large diameter portion and the shaft portion In the cylindrical portion to be disposed, the bearing may be interposed between the cylindrical portion and the support shaft. [The effect of the invention] The processing head is configured such that the inner rotor type DD motor is used as the driving means of the working machine position mechanism according to the present invention, and the bearing for supporting the support shaft is rotatably supported. In the radial direction of the above-mentioned (10) motor in the target range of R ^ in the axial direction of the support shaft, the size of the 钧 can be increased in the axial direction and the time can be smaller. The size of the bearing is increased, or the machining accuracy is reduced. This makes it possible to prevent the above-mentioned support shaft head itself of the processing head from being enlarged, and to effectively prevent the working machine. [Embodiment] Hereinafter, embodiments of the present invention will be described in detail with reference to the drawings. 1 to 3 show an embodiment of the present invention, and the illustrated machining head 10 includes a spindle unit 2A having a spindle 21 on which a tool is mounted, and a first branch head 3 supporting the spindle unit 20 (equivalent to In the "support head" of the present invention, the second support head 5' (Fig. 3) supporting the first support head 30. The shaft unit 20 A drives the spindle head of the motor built-in type, and is driven by a drive motor 7109-9067-PF; Tungming 8 200810874 to rotate the spindle 21 at a high speed.主轴 In the housing 23 of the spindle unit 20, a spindle 21 is inserted and inserted so that the drive motor 25 is built around the spindle 21. The drive motor 25 is formed by a rotor 25a that is externally fixed to the main shaft 21 and a stator 25b that is provided to face the outer peripheral surface of the rotor 25a. The main shaft 21 is rotatably supported by a plurality of bearings (e.g., angular contact bearings) 27 arranged in the rear (the upper and lower sides of the drawing) of the drive motor 25. When the exciting current is supplied to the stator 25b, an exciting force is generated between the rotor 25a and the rotor 25a, and the rotor 25a is rotated by the exciting force to rotationally drive the spindle 21. The first support head 30 is configured to support the spindle unit 2〇 and to rotate the spindle unit 20 around an axis orthogonal to the rotation axis of the spindle 21 (hereinafter referred to as "a-axis"). Angle position. The first support head 30 is configured such that a pair of leg portions 3〇a and 30b are assembled in a fork shape at the support portion 3〇c, and the spindle unit 20 is supported between the leg portions 3〇a and 3〇b. The spindle unit 20 is supported by a support shaft that is rotatably assembled inside the leg portions 3a, 3b, respectively. Further, the support head shown in the figure is a DD motor (corresponding to the "drive motor" of the present invention) for rotationally driving the spindle unit 20, and only the leg portion 30 provided in the pair of leg portions 3a, 3b The composition of a. Therefore, in the following, the support shaft on the side of the leg portion 30a is referred to as a drive support shaft (corresponding to the "support shaft" of the present invention) for each of the support shafts of the leg portions 3a, 3b, and the leg portion 3 is used. The support shaft on the side of the 〇b is called the driven support vehicle. Hereinafter, the configuration of the leg portion 3A will be described in detail. The leg portion 30a is mainly composed of a housing 31a, and is internally assembled with a structure 7109-9067-PF; Tungming 9 200810874 is a rotor (motor rotor) 33a and a stator (motor stator) 33b of the DD motor 33, and supports the spindle unit 2 A drive support shaft of the crucible, a bearing (for example, a cross roller bearing) 35 for rotatably supporting the drive support shaft, and a fluid for processing (hereinafter, simply referred to as "fluid") are supplied to the spindle unit 20 Rotating joint 37 and the like. In the installation body 31a, in order to insert the DD motor 33 and a rotating shaft to be described later, the side of the leg portion 30b is a large opening. Further, in the casing 31 & a cylindrical portion 31a extending in the A-axis direction from the side surface on the opposite side of the leg portion is formed, and a through hole in which the rotary joint 37 is inserted in the a-axis direction is formed in the circular portion 31a. Further, in the end surface on the opposite side of the leg portion 30b of the installation body 31a, a tube for supplying a H body to be described later or a recess for supplying electric current for supplying a current is formed: la3. Further, on the side opposite to the leg portion 31b of the leg portion 3a, a side tweezers 18a are attached, and the concave surface 31a3 is covered by the side cover 18a. In addition, Fig. 2 shows a state in which the side cover 18a is removed. The mountain swivel joint 37 is constituted by a dispenser fixed to the casing ... and shaft milk rotatably attached to the outside of the cylindrical portion 37al of the distribution H 37a to constitute a 0-knife balance d/a for insertion into the casing 31a. In the state of the through hole, the flange portion 37a2 is attached to the casing 31a by a plurality of screw-shaped members 37c disposed in the circumferential direction. Further, it is formed at the center of the sub-g&|f37a. The electric material is allowed to pass through the main shaft single & 2 () through 37a4. Moreover, in the distributor 37a, the plurality of fluid flow paths 37a3 for supplying or discharging the fluid are displaced in the circumferential direction to form a force. At 7109-9067-PF; Tungming 10 200810874, the shaft 37b is formed with a plurality of fluid flow paths 37M corresponding to the respective fluid flow paths 37a3 of the distributor 37a. In addition, a plurality of fluid flow paths 37a3 are representatively shown in FIG. Only one of the fluid flow paths 37b1 and the respective fluid flow paths 37a3 and the respective fluid flow paths corresponding thereto are configured to pass through the annular groove formed on the fitting peripheral surface of the distribution $37a and the vehicle 37b. And connected, even when the shaft 37b is rotated, it can maintain its communication state. The flow path 37M communicates with the fluid supply or discharge material 24 of the spindle unit 2A. Further, between the distributor 37a and the shaft m, a sealing member for sealing is interposed between the bad grooves. In the distributor 37a, a plurality of fluid supply or discharge ports 37d are formed in the distributor 37a, and a tube 12 for fluid supply or discharge is connected to each of the crucibles (4). The fluid feed 24 supplied from the pipe is supplied from the rotary joint 37 to the main pumping unit. Further, when the fluid is circulated, the fluid circulated in the spindle unit 2G is discharged to the discharge pipe 12 through the rotary joint 37. By the way, For the fluid to be supplied to the main shaft of the main shaft, for example, the cooling oil for cooling the DD motor 25 or the t-axis 21 that rotates at a high speed is used to prevent the cutting of the main shaft unit 20 (the portion of the main shaft 21: The air for sealing intrusion of the powder, the cooling water for cooling the turbulent tool during processing, etc. ^ + 33, the stator 33b fixedly disposed to the casing 31a, and the inner circumference of the scorpion 33 The surface is oppositely arranged and arranged to be 33a. That is, the (10) horse shown in the figure Up to 33, it is configured as an inner rotor type motor. Further, on the outer circumferential surface of the stator sleeve 33c, a ring 11 7109 - 9067 - a core uncleing 200810874 / cl is formed on the other hand, in the casing 31a, There is a fluid supply path 31 and a fluid discharge path "Μ" which are connected to the annular groove 33cl. Further, for this ring, the Q 9 1 , 彳c, the fluid supply path 31 a4 is supplied for cooling the dd motor 33. The cold portion is controlled by a fluid (for example, oil) to control the rotation of the motor 33 with the rotation of the rotor 3%. Further, the annular groove 33ci is formed in a spiral shape (not shown) in which the fluid supplied from the/or port 31a4 circulates through the annular groove 33cl and is discharged from the fluid discharge path 31a5. The rotor 33a is externally fitted and fixed to the outer peripheral surface of the rotary shaft 32 rotatably provided in the casing 31 & The rotary shaft 32 is concentrically arranged on the rotation axis of the shaft 37b of the rotary joint 37, and is fixed to the shaft 37b by a plurality of screw members that are fitted in the circumferential direction. Further, the rotor "a" has its outer peripheral surface disposed opposite to the inner peripheral surface of the constant +33b, and is externally fixed to the outer peripheral surface of the cylindrical portion 32a formed on the rotary shaft 32, and is provided so as not to be rotatable relative to the rotary shaft 32. On the rotary shaft 32, the spindle unit 20 is fixed to the end surface 32b on the side of the leg portion 3b by a plurality of screw members 14 arranged in the circumferential direction. That is, the spindle unit 2 is passed through the end face for the rotary shaft. 3, the mouth is supported by the pivot shaft 32. Therefore, on the side of the leg portion 3 0 β, the rotary shaft 32 and the shaft 3 of the rotary joint 37 that rotates integrally therewith constitute a drive support shaft for the spindle unit 20. The cylindrical portion 32a of the shaft 32 is formed so as to surround the cylindrical portion 31a1 of the casing 31a with a slight gap in a state in which the rotating shaft 32 is assembled on the shaft 37b of the rotary joint 37. In other words, in the shaft 37b, the state in which the rotating shaft 32 is assembled is inside the inner peripheral surface of the cylindrical portion 32a, that is, the outer surface 7109-9067-PF; Tungming 12 200810874 is fixed to the inner side in the radial direction of the rotor 33a of the round portion 32a, and there is a shell. The cylindrical portion 31al of the body 31a. On the other hand, the circle in the housing 31a The bearing portion 35 is interposed between the tubular portion 31a1 and the shaft 37b of the rotary joint 37 in the through hole 31a2 of the cylindrical portion 31a. The shaft 37b is rotatably supported by the housing 31a by the bearing 35. Thus, in the illustrated example, the drive support shaft (the rotary shaft 32 assembled at the shaft 37b + the shaft 37b of the rotary joint 37) has a large diameter portion (the cylinder of the rotary shaft 32) that is externally fixed to the rotor 33a of the DD motor 33. The shaft portion 32a) is a shaft portion (the shaft 37b of the rotary joint 37) rotatably supported by the bearing 35 on the inner side in the radial direction of the large diameter portion, and is disposed between the large diameter portion and the shaft portion in the casing 31a. The formed cylindrical portion 31a1 has a configuration in which a bearing 35 is interposed between the cylindrical portion 3U1 and the support shaft. Thereby, the cutting axis is configured to be rotatably supported by the casing 。. The arrangement by the direction of the bearing is within the range of the 卯 motor 33 in the A-axis direction. The following describes the configuration of the leg portion 30b that supports the spindle unit 20 at a position opposite to the leg portion 3A. The leg portion 30b is a housing main body 31b, and a horse body is assembled therein, and a clamping mechanism 34 for holding the angular position of the spindle unit 20 and a driven branch shaft for supporting the spindle unit 20 are assembled therein. It is used for Jiang Bu, a bearing 36 that rotatably supports the k-moving support shaft, and a rotary joint 38. The casing 31b' is formed with a through hole 31b1 in which the bearing 36 is fitted into the through hole 31b1 and the rotary joint 38 penetrates in the A-axis direction, and the clamp mechanism 34, the driven support shaft, and the 'in the casing 31b The end portion of the leg portion 30a is 7109-9067-PF; the end surface on the opposite side of the Tungming 200810874 is formed with a recess (not shown) similarly to the leg portion 30a, and is covered by the side cover 18b. The rotary joint 38 is formed by a distributor 38a fixed to the casing 31b and a shaft 38b rotatably fitted to the outside of the cylindrical portion 38al of the dispenser core, in the same manner as the rotary joint on the side of the leg portion 30a. The distributor 38a is constituted by the above-described cylindrical portion 38a1 and a flange portion 38a2 formed by expanding an end portion on the opposite side of the leg portion 30a of the cylindrical portion in the radial direction. The distributor 38a is here. The core of the flange portion 38 is assembled to the casing 3ib by a plurality of screw members 38c disposed in the circumferential direction. Further, a through hole 38a4 penetrating in the a-axis direction is formed at the center of the distributor 38a. 38a, a plurality of fluid flow paths 38a3 are formed by shifting positions in the circumferential direction. Further, a plurality of fluid flow paths 38M corresponding to the respective fluid flow paths 38a3 of the dispenser are formed in the shaft bird. The leakage and the respective fluid flow paths 38b1 corresponding thereto are configured to communicate with the distributor 38a and the annular groove formed by the 肷δ circumferential surface of the aau·man b, and can maintain the shaft 38b while rotating. Connected state. lies in the foot 30b, corresponding to the rotation of the foot _ The rotation shaft 39' of the shaft ^ is constituted by two members of the shaft member 39a and the flange member 39b by the accommodation bearing 36'. The rotation shaft 39 (the shaft member 39a and the flange member 39b)' is disposed such that The rotation axis coincides with the rotation axis (=A axis) of the rotation shaft 32 of the leg portion 30a. The shaft member 39a of the rotation shaft 39 is disposed in the through hole a4 of the distributor--for the knife-to-tool, and is freely rotatable by the bearing % 7109-9067-PF/Tungming 14 200810874 Therefore, the 'shaft member 39a and the distributor 38a are in a state of concentric arrangement with respect to the A-axis. Moreover, the flange member 39b has a foot portion on the side of the leg portion 30a. The end surface 39μ of the end s 32b of the rotating shaft 32 of the core is parallel, and the spindle unit 20 is fixed to the end surface 39b1 by a plurality of screw members 5 disposed in the circumferential direction. Therefore, the rotating vehicle is 39, as a foot coffee. The driven shaft of the spindle unit functions. The rotating shaft 39 is a flange member 39b, and the shaft fixed to the rotary joint 38 rotates integrally with the shaft. Therefore, the shaft 38b of the rotary joint 38 is equivalent to the slave shaft 38b. a part of the moving support shaft. The clamp mechanism 34 of the rotational position (angular position) of the spindle unit 2 is mainly constituted by a clamp sleeve 34a. The clamp sleeve "a" is formed by a cylindrical portion 34 in which an annular groove 34al which is a pressure chamber is formed. The end portion of the core portion 34a2 on the side of the leg portion 30a is formed by a flange portion 34a3 which is formed to be enlarged in the radial direction. Further, the cylindrical portion 3 "2" surrounds the rotary joint 38 integrally rotating with the rotary shaft 39 in a state of allowing vertical rotation. The cylindrical portion 34a2 and the casing (10) of the clamp sleeve 34a are provided. In the meantime, an annular pressure receiving member 34b is interposed. In more detail, the through hole 3 of the casing 31b is embedded and fixed with a member, and is embedded therein by the inner peripheral surface of the (4) member (10). The cylindrical portion of the clamp sleeve 34 is fixed to. And: the screw member inserted through the flange portion 34a3 is screwed, the clamp sleeve is fixed to the housing 31b, and is fixed to the flange portion 34a3. The pressure receiving member is further provided with an annular groove _ which is open on the side of the dam member 34b in the cylindrical portion 34a2 in the clamping sleeve 34a, and the annular groove is, for example, 71 〇 9 〇 9 〇 67-PF; Tungming 15 200810874 The waste chamber is formed by the inner peripheral surface of the member 34b. Also, the force chamber is connected to the fluid flow path formed by the receiving member 34b. The fluid flow path 34bl' passes through the clamp. The fluid grip 34a4 formed by the flange portion gw of the tightening sleeve 34a communicates with the fluid flow path 3ib2 formed in the housing 31b. Here, the clamping mechanism 3 4. The pressure fluid (for example, pressure oil) is supplied to the pressure chamber through the fluid flow paths, and the thin meat portion corresponding to the annular groove 34a1 of the cylindrical portion 34a2 of the clamp sleeve is deformed to the diameter reduction direction. As a result, for the shaft 38b acts to tighten the force in the direction of the diameter reduction, and the rotation of the shaft and the rotating shaft 39 assembled therein is prevented (clamped state). Further, the cylindrical portion is eliminated by stopping the pressure fluid supplied to the force chamber. In the deformed state of the thin flesh portion of 34a2, the tightening force of the shaft 38a is lost and the gripping state is released. In the example of the figure, the rotation angle of the rotation shaft 39 is detected in the leg portion 3b ( The rotation detecting benefit 41 of the angular position of the main shaft of the main shaft and the angle detector for limiting the range of rotation of the main shaft unit 2〇 are detected in the penetration 38a4 of the distributor 38 & A pair of detecting heads "a, ... and a pair of detecting shafts 39 that are attached to the inside of the detector heads 41a, 41a by a predetermined position of a disk-shaped supporting portion that protrudes in a radial direction from the inner circumferential surface of the through hole 4 The shaft member_ is detected by the detection ring 41b. Turn 41: The detection signal of the angular position of the spindle early element 20 is sent to the control device (not shown) of the machine tool with the machining head 1装载 loaded, and is used for the rotation control of the spindle unit 2〇 (numerical control) ). Further, the angle detector 42, for example, is limited to open, and is attached to a disk-shaped portion that is attached to the end of 39 provided in the through hole 38a4 of the adapter 38a of the branch 7109-9067-PF; Tungming 16 200810874. 4 teeth 'make the axis of rotation. In the case where the circumferential surface of the member 43 is opposed to each other, the converter is disposed, and the position switch 42 is placed under the condition that the allowable angle range is swayed by the allowable angle range: Do not care. Therefore, when the main control angle or the like is exceeded by the control abnormality or the like, it is sent to the control device of the working machine by the limit „ Μ疋 谷 , for example, ^ ^ ^ ^ detection, the detection signal, the : sign. It is said that the force of TM - the second support head 5, = is described in the processing head 1 of the present embodiment, and the head 50 is supported in addition to the above-described branch head 30. Also, the first ....qn The second support of the support head 30 is at the spindle head of the working machine, etc. The axis of the support = ^ = support (the axis parallel to the z-axis of the machine tool is the middle drive) and the second support head 5G is provided ( 3) The two ends of the two sides have a through hole 51a penetrating in the c-axis direction, and the body 51 is provided with a rotating shaft 52 in the through hole 5ia. The support head 3: First, the second support head 5〇 is attached to the spindle head of the working machine in the case 51: the %-shaped support body 5U of the house. The second support head 50 is provided in the case. Inside the through hole of the body 51, a clamping sleeve 5 for rotationally driving the rotating shaft 52@DD motor 53 for maintaining the turning position of the rotating shaft 内4 and a rotary joint 55 for supplying a fluid to 30. 7109-9067~PF; Tungming 17 200810874 The DD motor 53 is fixed to the stator 53a of the casing n and the inner circumferential surface of the stator 53a by the stator sleeve 53c. The opposing arrangement is configured to be fixed to the rotor 53b of the rotating shaft 52. Further, the supply of the exciting current for driving the DD motor 53 is performed by the cable 17 connected to the dd motor via the connector 17a. The rotating shaft 52 includes: The shaft member 52a rotatably provided in the through hole "a" of the casing 51 and the end portion of the first member of the shaft member 52a on the headrest side of the shaft member 52a are enlarged in the radial direction (the direction orthogonal to the C axis) Further, the flange member 52b is formed with a rotary joint 55 inserted through the through hole 52c in the rotating shaft 52'. Further, in the illustrated example, a bearing housing 52d is formed between the shaft member 52a of the rotating shaft 52 and the flange member (10). Further, a bearing 56 is interposed between the bearing housing and the body 51, and the bearing 56 has a state in which the rotating shaft η is rotatably supported by the housing 51. By the way, the bearing 56 in the illustrated example 'The three-row cylinder of the oscillating bearing of the composite roller The bearing (3 row roller bearing/axial/radial roller bearing) may be subjected to a large load in the axial direction and the radial direction. On the outer peripheral surface of the shaft member 52a, the rotating member 52a of the motor 10 is externally fitted and fixed. Moreover, the flange member 52b is assembled to the shaft member by a plurality of screw members 52e disposed in the circumferential direction. Rotating integrally with the shaft member 52&: a plurality of screw members 19 are screwed into the circumferential direction of the flange σ卩52b, and the support member/group of the head 3〇 is broken by the screw member 19; Flange member 52b. Therefore, by the rotating shaft 52 by the DD motor 53 and 7109-. 9067^PF;Tungming 18 200810874 . The first support head 30 is rotated by the rotation of the first support head 30. - the rotary joint 55' is similar to the rotary joint μ of the first branch 3, and is rotatably fitted in the through-hole 55a formed in the distributor by the distributor 55a fixed to the casing 51. The c-axis is configured to be coaxial with the distributor 55a. The distributor 55a is formed by a cylindrical bore 55a2 disposed in the through hole 52c of the rotary shaft 52 and a flange formed to extend in the half direction at the end portion of the cylindrical portion 55a2 opposite to the jth support head 3'. The department is made up of its flange. The crucible 55a3 is assembled to the casing 5 by a plurality of screw members arranged in the circumferential direction, and the disc-shaped flange member 57 is assembled at the end of the shaft 55b on the side of the j-th support head 3, The shaft 55b is assembled to the flange member 52b of the rotating shaft 52 by the flange member 57. Therefore, the shaft 55b also rotates together with the rotation of the rotary shaft 52. Further, the flange member 57 has a circular recessed portion 3 () ci formed in the support portion (10) of the first support head 3G, and the flange member 57 and the recess portion 3 of the support portion 3〇c are passed. Ci, the position at which the first support head 30 and the second support head 5 are assembled. In the distribution li 55a, a plurality of fluid flow paths 55a4 for introducing a fluid from the outside are formed at positions shifted in the circumferential direction. On the other hand, a plurality of fluid flow paths 55b1 corresponding to the respective fluid flow paths 55a4 of the distributor are formed in the circumferential direction offset position. Further, each of the (10) body* paths 55a4 and the respective fluid flow paths "Μ" are configured to communicate with each other by an annular groove formed on the circumferential surface of the distributor 55a and the shaft 55b, and when the shaft 55b is rotated, 7109-9067-PF; Tungining 19 200810874 and the plurality of fluid flow paths 55b1 formed in the shaft 55b are respectively connected to the distributor 37a of the rotary joint 37 or 38 of the first support head 30, The corresponding fluid flow path 37a3 or 38a3 formed by 38a. Therefore, the fluid supplied from the outside to the distributor 55a of the rotary joint 55 is supplied to the rotary joints 37, 38 of the first support head 30 through the shaft 55b. Between the distributor 55& of the body 51 and the shaft member 52a of the rotary shaft 52, there is no clamping sleeve 54 for holding the rotational position of the rotary shaft 52, and the clamp sleeve 54 is at the flange portion 54a thereof. While being assembled to the dispenser 55a by a plurality of screw members, it is provided to permit relative rotation with the rotating shaft 52. Further, in the cylindrical portion 54b of the clamping sleeve 54, a cylindrical portion of the distributor 55a is formed. 5 an annular groove 5 开口 open on the 2 side, a circle from the annular groove 54c and the distributor 55a A pressure chamber is formed on the outer peripheral surface of the portion 55a2. " and 'the pressure chamber' is supplied with a pressure fluid 'corresponding to the thin groove portion of the annular groove W of the cylindrical portion 54b by the flow U path 54d formed in the distributor 55a. As a result, the tightening force in the diameter-expanding direction is applied to the rotating shaft 52, and the rotation of the rotating shaft 52 is (clamped). In the example, the upper end of the rotary joint 55 is shown. The portion is provided with a rotation detector 44 for detecting the rotation amount of the revolving shaft 52, that is, the rotation support detector of the second support head. This 斿 认 丨 丨 规定 幻 幻 幻 幻 幻 幻 幻 幻 幻 ... ... ... ... ... ... ... ... ... ... ... ... ... ... The position of the detector is opposite to that of the detector head, the shirt and the 44a, 44a, and the detection head...the detection head..., the 丨~κ" rotation axis 52 - the rotation of the shaft 55b is detected by the walnut. This rotation Detector 44 ^ The first rotation of the head 3. The rotation detector 4 is widely distributed with the 7109-9Q67-PF that is shipped to the working machine at m; the Tungminc 20 200810874 control device is used for the rotation of the first support head 3〇 Control 3 of the processing 帛 10 composed of the above, supporting the spindle unit 2 0, support master (1st support head 30), in a pair of feet 30a, 30b each branch > I sandwich the spindle unit 2 〇 shape energy, phase rain * cover # 对 不 匕 对Fixedly supporting the teeth on the side. And, by rotating the foot 3〇a from the motor 33: 一: one to support the axis of rotation of the shaft (= with the spindle 2 = the axis of the axis straight parent / A axis) The center of the spindle unit 2 is driven toward the center. * ^ The drive of the motor 33 is carried out according to the value of the program set by the root and the program is set by the rotor 33a ^ ^ „ by the drive support shaft to disturb the angular position of the spindle early 20 In the figure, the DD motor 33 provided in the leg portion 3〇a and the drive support shaft (the rotating shaft 32 + the shaft 37b) of the connected wire mesh motor 33 are used as the rotation for the glaze early 20 The position mechanism functions. Further, the excitation current for driving the DD motor 33 and the excitation current of the hex motor are supplied through the cable 16 of the DD motor 33 by the connector 16a. Further, according to the present invention As described above, the support head 3 is supported as a support shaft 1 for supporting the spindle unit 2G, and a bearing 35 for driving the support shaft (driving support shaft) that is rotationally driven by the motor (10) is disposed in the A-axis direction. In the radial direction of the inner rotor type (10) motor μ of the rotor 33a in the range of 33, the bearing 35 is housed in the space inside the radial direction of the motor 33, and does not increase in the a-axis direction of the _ size. Further, with respect to the leg portion 30b, the dimension in the A-axis direction is determined according to the length of the support shaft (driven support shaft) (the dimension in the A-axis direction), which is 7109-9067-PF; Tungming 21 200810874 °. The length is preferably closer to the length of the leg 30a by the balance of the applied load during processing. Therefore, the size of the leg portion 30 in the axial direction is determined by the leg portion 30a, and the size of the leg portion (10) in the axial direction is further reduced: the size of the leg portion in the A-axis direction can be further reduced. 2 Λ The size of the first support head 30 as a whole is reduced in the x-axis direction, and the processing head 10 can be made compact. Moreover, according to the present invention, the bearing 35 can be made smaller. In the case where the diameter of the bearing is larger, the vibration accuracy is lowered, and the accuracy is lowered. However, according to the configuration of the present embodiment, there is no problem that the machining accuracy is reduced with the increase in the diameter of the bearing. The configuration of the bearing 35 is provided between the shaft 37b of the rotary joint 37 and the cylindrical portion _ of the casing. However, instead of this, the cylindrical portion 32a of the rotary shaft 32 and the cylinder of the casing 31a may be provided. A bearing 35 is provided between the portions 3ui (Fig. 4(a)). Further, in the first support head 30 described above, the bearing Μ between the support shaft of the leg portion 30a and the cylindrical portion 31a1 of the case 胄 31a is arranged, and the 帛1 support head 30 is configured at the most A. The rotary joint 37 is disposed on the shaft side, and the bearing 35 of the rotary joint 37 (shaft 37b) is provided. Alternatively, the rotary joint 37 may be provided as a bearing (Fig. 4(b)). The outer peripheral surface of the outer peripheral surface of the outer fixed surface of the fixed shaft 35, that is, the outer diameter of the support head 30 (the sleeve 37b + the rotary shaft 39 of the rotary joint) has a large diameter in which the turn of the DD motor 33 is externally fixed. And a shaft portion that is rotatably supported by a bearing % inside the radial direction of the large diameter portion, and the large diameter portion is formed by a cylindrical portion of the rotating shaft 32, 7109 - 9067 - PFVTungming 22 200810874, and the shaft portion is formed by a shaft portion The shaft 37b of the rotary joint 37 is formed. However, the large diameter portion may be formed by the shaft 37b of the rotary joint 37, and the rotor 33a of the 疋 DD motor 33 may be fixed to the outer peripheral surface thereof. His implementation. The indexing mechanism of the processing head for selecting only 20 of the pair of legs is provided for the two legs, and the above-described embodiment of the present invention is described with reference to FIG. 1 support head 30), one of the leg portions supporting the spindle unit 2A is provided for rotationally driving the spindle unit (DD motor), but instead of this, as shown in FIG. 5, the support of the indexing mechanism (DD motor) The present invention can also be applied to the two indexing mechanisms of the head. In the branch head 60 shown in Fig. 5, an indexing mechanism including a DD motor 63 is provided for each of the pair of leg portions 60a, 60b of the branch spindle unit 2''. Further, in the figure example, the foot portion 6〇3 and the internal structure of the coffee are almost the same. Therefore, only the leg portion 60a will be described below, and the description of the leg portion 6b and the symbols of the drawings will be omitted. The leg portion 60a* is formed mainly by a case 61 in which a through hole that penetrates in the A-axis direction is formed, and a support for the cymbal motor 63 and the support wire unit 2G is assembled in the through hole 6U. A bearing 65 that supports the support shaft, a rotary joint 67, and the like. Further, in the leg portion 6A, a rotation checker|J|§ 68 (the rotation detector Μ is provided only on the side of the leg portion 60a) similar to that of the above-described embodiment is provided. In the illustrated example, the distributor of the rotary joint 67 is composed of two members 67a (first distributor) and 67b (second distributor). Further, the second distributor 67b is assembled to the i-th distributor 67&, the i-th distributor 7109-9067-PF at its flange portion 67b2, and the Tungming 23 200810874 67a is assembled to the casing 6i at the flange portion 67a2 thereof. The first and second distributors 67a and 67b are in a state in which the casing 61 is fixed. Further, the shaft 67c of the rotary joint 67 is rotatably fitted with a large diameter portion 6 7 c 1 and a bearing between the cylindrical portion 67a1 of the first distributor 67a and the cylindrical portion 67b1 of the second distributor 67b. 6 5 is constituted by a shaft portion 6 7 c 2 which is fixed to the outside. Further, 'the rotary joint 67, the plurality of fluid flow paths 67a3, 67b3 formed in the first and second distributors 67a, 67b, and the plurality of fluids formed on the shaft 67c corresponding to the respective fluid flow paths 67a3, 67b3 The flow path 67c3 communicates with the annular groove formed by the respective cylindrical portions 67a1 and 67b1 of the second and second distributors 67a and 67b and the large-diameter portion 67cl of the shaft 67c. A shaft 62c2 of the shaft 67c is fitted with a rotating shaft 62 that is rotatably provided to the casing 61 on the side of the leg portion 6b. This rotating shaft 62 has a cylinder 62a surrounding the cylindrical portion 67al of the first distributor 67a of the rotary joint 67. Further, a plurality of fluid flow paths that communicate with the respective fluid flow paths 67c3 formed in the shaft 67c of the rotary joint 67 are formed in the rotary shaft 62. Each of the fluid flow paths 67c3 communicates with the 流24 through the fluid flow path 62c. If it is not round, it is caused by the cylindrical portion 67al of the i-th distributor 67a of the rotary joint 67 of the casing and the shaft portion 9 of the shaft 67c. Between the bearings 65 is interposed. Further, the bearings 65, 67c are freely supported by the housing. Further, the rotating shaft + is assembled by the carrier 65 to the shaft 6 7 c which is rotatably supported, and the spindle unit 20 is attached to the surface 62b of the leg portion 60b side. Therefore, the shaft 67c 7109-9〇67-ΡΓ/Τιαη9Γη:Ιη9 24 200810874 and the rotating shaft 62 of the 旌 疋 疋 相当于 相当于 67 correspond to the support shaft of the supporting main shaft unit 20 which is rotatably provided to the casing 61. The DD motor 63 is fixed to the stator 63a of the casing 61 by the stator sleeve 63c, and the rotor 63b which is disposed to face the inner circumferential surface of the stator 63a and is externally fitted to the outer circumferential surface of the cylindrical portion 62a of the rotary shaft 62. The configuration is an inner rotor type DD motor. As described above, in the support head 60 shown in the figure, the rotor 63b of the inner rotor type DD motor 63 is externally fixed to the cylindrical portion 62a surrounding the rotation shaft 62 of the cylindrical portion 67al of the first distributor 67a. The bearing 65 for rotatably supporting the support shaft is interposed between the cylindrical portion 67a of the i-th distributor 67a and the shaft portion 6 7 c 2 of the shaft 67c located radially inward of the cylindrical portion 67al. between. In other words, in the present embodiment, the support shaft (the shaft 67c of the rotary shaft 62 + the rotary joint 67) has a large diameter portion (the cylindrical portion 62a of the rotary shaft 62) to which the rotor 63b of the DD motor 63 is externally fitted and fixed, and The inner side in the radial direction of the large diameter portion is rotatably supported by the bearing 65 (the shaft 67c of the rotary joint 67). In addition, the cylindrical member (the cylindrical portion 67al of the first distributor 67a/corresponding to the "cylindrical portion" of the present invention) of the first distributor 67a is disposed between the large-diameter portion and the shaft portion. The bearing 65 is interposed between the cylindrical member and the support shaft, and the support shaft is rotatably supported by the casing 61. Therefore, the bearing 65 for rotatably supporting the support shaft is disposed on the inner side in the radial direction of the rotor 63b of the DD motor 63 for rotationally driving the support shaft. Further, the arrangement of the bearing 65 in the A-axis direction is shown in the range of the DD motor 63 in the A-axis direction. Therefore, 7109-9067-PF; Tungming 25 200810874 From the present embodiment, the same effects as those of the embodiment of Fig. 7 can be obtained. In particular, as in the support v and the cymbal 60 of the present embodiment, when the indexing mechanism including the wire apb 33 of the DD motor 3 3 is provided in each of the pair of leg portions 60a and 60h, the embodiment is the same as that of the embodiment of FIG. 1 and the like. The support head, the temple of the A-axis direction, is larger, and thus, the present invention is more effective in such a support head. Further, the present invention is not limited to the above-described method, and various modifications are possible within the scope of the claims of the present invention. BRIEF DESCRIPTION OF THE DRAWINGS Fig. 1 is a cross-sectional view showing a front side of an embodiment of a head for processing a head of the present invention. Fig. 2 shows a side view of the present invention. Fig. 3 is a cross-sectional view showing the present invention. A partial cross-sectional view of the table of Fig. 4(a) and Fig. 4(b). Fig. 5 is a cross-sectional view showing the front portion of the present invention. Other Embodiments of a Support Head of a Deformation Head of a Support Head of the Embodiment of the Head of a Head of a Work Head of a Head of a Work Head FIG. 6 shows a process to which the present invention is applied. An oblique view of an example of a working machine with a head. [Main component symbol description] 1~Longmen milling machine; 2~column; 7109-9067-PF/Tungming p 200810874 4~bed; 6~cross rail; 8~punch; 12~tube; 16~cable; 17~cable; 19~screw parts; 21~spindle; 24~庳; 2 5 a~rotor; 2 7~ bearing; 30a, 30b, 60a, 60b~foot 3 0 c 1~recess; 31al~cylinder; 31a3~recess; 31a5~discharge path; 31 b 1~through hole; 3 2,6 2~rotating shaft; 32b~end face; 33a~rotor; 33c~stator sleeve; 34~clamping mechanism; 34aW冓; 34a3~ flange portion; 5~Workbench; 7~bed saddle; 1 0~machining head; 14,15~screw parts 16a, 17a~connector 18a, 18b~ cover; 20~ spindle unit; 23~ housing; 2 5~ drive motor 25b~stator; 30~1st support head; part; 30c~support part; 31a~ casing; 31 a 2~through hole; 31a4~ supply path; 31b~ casing; 31b2~flow path; 32a, 62a~ Cylinder part; 33, 63-DD motor; 33b~ stator; 33c; l~ groove; 34a~ clamping sleeve; 34a2~ cylinder part; 34a4~ flow path; 7109-9 067—PF/Tungming 27 200810874 34b~pressured component; 34bl~flow path; 3 5,3 6,6 5~ bearing; 3 7,3 8,6 7~rotary joint 37a,38a~distributor; 37al,38al - cylindrical portions 37a3, 38a3, 54d, 62c - flow paths; 37a2, 38a2 - flange portions 37a4, 38a4 - through holes; 37b1, 38b1 - flow path; 3 7 d ~ 埠, 3 9 - rotation axis; 39b~ Flange member; 41~rotation detector; 41 b~ detection ring; 43~ part; 44a~ detector head; 50~2nd support head; 51 a~through hole; 5 2 a~shaft part; 52c~through hole ; 5 2 e ~ screw parts; 53a, 63b ~ stator; 53c, 63c ~ stator sleeve; 54a ~ flange part; 54c ~ groove; 5 5 a ~ distributor; 55a2, 62a ~ cylindrical part; 55a4 ~ flow 37b, 38b~axis; 37c, 38c~screw parts; 39a~shaft part; 39bl~end face; 41 a~detector head; 42~angle detector; 4 4~rotation detector; 44b~ detection ring; ~ housing; 5 2, 6 2 ~ rotating shaft; 52b ~ flange member; 52d ~ bearing housing; 53 ~ DD motor; 53b, 63a ~ rotor; 54 ~ clamping sleeve; 54b Cylindrical portion; 5 5~ rotary joint; 55al~through hole; 55a3~ flange portion; 5 5b~ shaft; 7109-9067-PF; Tungming 28 200810874 5 5 b 1~ flow path; 57~ flange member 61~ Housing; 67a, 67b to 67a3, 67b3, 67c~ shaft; 6 7 c 2 to shaft portion; 5 6 to bearing; 60 to support head; 6la to through hole; Bu; 67a to 67M to cylindrical portion; 7c3~flow path; 6 7a2, 6 7b2~ flange portion; 67c: l~ large diameter portion; 6 8~ rotation detector. 7109-9067-PF; Tungming 29