TW200806426A - Polishing pad and fabrication method thereof - Google Patents

Polishing pad and fabrication method thereof

Info

Publication number
TW200806426A
TW200806426A TW95127687A TW95127687A TW200806426A TW 200806426 A TW200806426 A TW 200806426A TW 95127687 A TW95127687 A TW 95127687A TW 95127687 A TW95127687 A TW 95127687A TW 200806426 A TW200806426 A TW 200806426A
Authority
TW
Taiwan
Prior art keywords
polishing pad
fabrication method
mold
viewing window
chemically bonded
Prior art date
Application number
TW95127687A
Other languages
Chinese (zh)
Other versions
TWI301438B (en
Inventor
Cheng-Wei Chiu
Chien-Ying Chuang
Original Assignee
Powerchip Semiconductor Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Powerchip Semiconductor Corp filed Critical Powerchip Semiconductor Corp
Priority to TW95127687A priority Critical patent/TWI301438B/en
Publication of TW200806426A publication Critical patent/TW200806426A/en
Application granted granted Critical
Publication of TWI301438B publication Critical patent/TWI301438B/en

Links

Abstract

Disclosed is a polishing pad and fabrication method thereof. The polishing pad comprises a viewing window embedded in the polishing pad body, wherein the viewing window is chemically bonded with the polishing pad body. The fabrication method comprises placing an uncured polymer gel in a mold and then injecting a polishing pad material in the mold. During molding of the polishing pad, the polymer gel is cured and chemically bonded with the polishing pad.
TW95127687A 2006-07-28 2006-07-28 Polishing pad and fabrication method thereof TWI301438B (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
TW95127687A TWI301438B (en) 2006-07-28 2006-07-28 Polishing pad and fabrication method thereof

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
TW95127687A TWI301438B (en) 2006-07-28 2006-07-28 Polishing pad and fabrication method thereof

Publications (2)

Publication Number Publication Date
TW200806426A true TW200806426A (en) 2008-02-01
TWI301438B TWI301438B (en) 2008-10-01

Family

ID=44766347

Family Applications (1)

Application Number Title Priority Date Filing Date
TW95127687A TWI301438B (en) 2006-07-28 2006-07-28 Polishing pad and fabrication method thereof

Country Status (1)

Country Link
TW (1) TWI301438B (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN114670118A (en) * 2017-08-04 2022-06-28 应用材料公司 Polishing pad with window and method of manufacturing the same

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN114670118A (en) * 2017-08-04 2022-06-28 应用材料公司 Polishing pad with window and method of manufacturing the same

Also Published As

Publication number Publication date
TWI301438B (en) 2008-10-01

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