200806073 九、發明說明： 【發明所屬之技術領域】 本發明是有關於一種基板（substrate )，特別是指一種 有機電激發光顯示裝置（〇LED ， 〇rganic electroluminescence display)的基板及其製造方法。 【先前技術】 有機電激發光顯示裝置是利用有機聚合物，例如 Alq3m BeBq3 ' DCM、DPVBi等為發光材料，並利用光電 效應所成的自發光性光電元件，因其具有直流低電慶驅動 (Operating Vohage <10V)、高能量效率、高亮度（大於 105cd/m2 )、響應時間（Resp〇nse Time )短、高對比值（ Effective contrast rati〇 )’以及發光色澤自由度高等特性， 且所成的面板尺寸可由4mm之微顯示器到大於ι〇〇吋以上 的高彈性運用，被視為是下一世代的新型平面顯示器的發 展重點之一。 參閱圖1，有機電激發顯示裝置1包含-基板n、_形 成在該基板u上的第—導電膜12、—形成在該第—導電膜 12上的發光單& 13，及-形成在該發光單元13上的第二 導電膜14。 — 製成 並因 該基板u是以例如玻璃、塑料可透光的材料所 之單-層體的玻璃薄板、塑膠薄板’可供光線穿透， 材料本身的特性而略可彎曲。 例如銦錫 作為電極 .該第-導電膜12是以透明且可導電的材料， 氧化物（IT〇)以預定圖像形成在該基板n上， 200806073 之用。 該第二導電膜I4.是以且 的金屬/合金，例、」㈡數（work function) 為另-電極之用，呂形成在發光單元13上，作 單元13提供電能。4弟—導電膜12相配合對該發光 該發光單元13主 二導電臈12、14 機聚合物形成，可在該第-、 14相配合提件雷么匕士 曰 本例盥FI - + ，、包此化以I子效應產生光，在 不例興圖不中，是以分 /、4弟一、二導電膜12、14相歐 姆接觸的電洞傳輪層131、 洞傳輪層131、電子&w i 層132，及夫設在該電 ^ 32之間的發光層133的基礎結 (::兄月二當該第一、二導電膜12、14提供一順向偏塵 對&二導電臈14而言，該第—導電膜12的電 極偏壓為正值）時，哆癸 一 ^及务先早凡13之電子提供層132與電 洞傳輪層131的電子、電洞在該發光層133中結合、及/或 再結合而產生光子，㈣發光；•此特光單元Η的發 光作動過程已屬基本知識，同時，發光單元Η之其他變形 結構態樣眾多，並為業界、學界所周知，兼且此部份並非 與本發明重點相關，因此不對此多加舉例贅述。 θ上述的有機電激發顯示裝置1確實可經由提供順向偏 [而使I光單元13以量子效應產生經過該第一導電膜12 、基板11向外發射的光。 但疋，由於目前有機電激發顯示裝置1的基板11，是 以玻璃、塑膠為材料所製得的單一層體製品：玻璃基板雖 然基於其他光電元件，如LCD的製程經驗而有完整的製作 200806073 ㈣’但是卻具有價格昂貴、運送時容易《的缺點；塑 膠基板則因為玻璃轉換溫度極低且熱膨脹係數較大，因此 在製程上需克服的問題較多，此外，塑膠基板也因為必須 多二鑛覆防止水氣、污染渗入的阻水層、阻氣層，及保護 “寻寻1¾具有材料、製程成本偏高的缺點。 此外’無論是玻璃基板或是塑膠基板，因受限於材料 :::特性，而僅略具有f曲性，因此，以此等基板為建 構基礎的有機電激發顯示裝置丨，並無法直接應用 以捲々曲收折的「電子紙張」，或是可以捲繞收納的「平面電 視」專概念性的電子產由 壯晉… 子產°口中’因此，目前有機電激發顯示 【發明内容】 =土反11的改4突破’是目前學界研究的重點之一。 因此，本發明之一目的，即在提供一種可以 的有機電激發光顯示裝置的軟f基板。 70 ) 此外本發明之另一目的，即在提供一錄^p技 的有播帝：岭八业Η - ’、 種可繞捲收步 、电访^光頭不裝置的軟質基板的製造方法。 於是，本發明一種有機電激發光顯示皇 ，包含-可撓捲的承載層，及一導電膜。 ’“基相 遠承载層具有一具有離型性而可被撕離地| # 載板相連接㈣❹u 地與承載用之 勺離t膜’及一形成在該離型 田 元，且該層疊膜單元^良 卜 、❼層$膜單 無機材料形成—無機膜與 有機材料形成—有機膜的順.序， 一無機膜所構心 I胰上形成至少 該導電膜以透明且可導雷 V电的材貝以預定圖像形成在該 200806073 =單元相反於該離型膜的一頂面上，而可與製造出的 ^機书a發光顯不裝置之一電極相配合提供電能，而使 該有機電激發光顯示裝置以量子效應發光。 、Α此外，本發明有機電激發光顯示裝置的軟質基板的製 .造:法，是先清潔—載板，接著在該載板上以有機材料形 成/、有離型性而可直接自該载板剝離的離型膜，然後在 该離型膜上依序以.無機材料形成—無機膜與有機材料形成 :有機膜的順序，形成至少-無機膜，最後以透明且可導 電的材料形成-具有預定圖像的導電膜，即完成該美 板的製作。 、土 本發明之功效在於提供一種可以撓捲收折的有機電激 發，顯示裝置的軟質基板及其製造方法，藉由基板之層疊 膜單元交錯堆疊的構造使得基板具有較佳的耐化性、熱^ 定性、阻氣性與阻水性，及更高的光穿透率，並藉著離 膜而在製備完有機電激發光顯示裝置後可直接自載板上撕 離，進而製備獲得可以撓捲收折的有機電激發光顯示裝置 以供後續組裝應用。 【實施方式】 有關本發明之前述及其他技術内容、特點與功效，在 以下配合麥考圖式之一較佳實施例的詳細說明中，將可清 楚的呈現。 在本發明被詳細描述之前，要注意的是，在以下的說 明内容中，類似的元件是以相同的編號來表示。 麥閱圖2,本發明一種有機電激發光顯示裝置的軟質基 200806073 板2的—較佳實施 在該承裁層3上的C一可撓捲的承载層3，及-形成 曰」上的導電膜4。 乂 該承裁層3具有一離型膜 一 的層疊膜單 、 /成在該離型膜31上 32，及一對應形成 抑 壁單元33,咳Μ刑風在襄層定馭早元32 t的障 介於㈣心的相有H型等有機材料形成之厚度 玻璃载板（圖未亍出”錢而可直接與—承载用之 對二W苯ct(P在本例中該離型膜31是以聚 。 ㈣為材料形成之4.5_的薄膜 該層疊膜單元32是依序以無機 化石夕、氮氧化石夕、氧化銘、氮化銘…H風化夕、氧 鈕、金、#、加 一虱化鈦、五氧化二 、鋁，及鉑）形成一厚度不大 a 膜如與有機材料（例如聚對二甲基苯c、都广之-機 苯N型、聚對二f基 成 ♦對一甲基 有機膜似的順序，在，：成一异度不大於1… 的順序，在该離型膜31上形成至少一贫 321㈣成；在本例與圖示中是以氮切及以聚對甲^ 型（Parylene)為材料交錯形成四無機 322說明。 "一有钺膜 /早單7C 33包括至少一對應環圍該 之無機膜32丨，及/或有機膜322 犋早兀32 隆辟川〜 機膜322周緣用以隔離水氣滲入的 …在本例與圖示中’是以聚對二甲基苯C型（200806073 IX. Description of the Invention: [Technical Field] The present invention relates to a substrate, and more particularly to a substrate of an organic electroluminescence display device (及其), and a method of manufacturing the same. [Prior Art] The organic electroluminescence display device is a self-luminous photoelectric element which uses an organic polymer such as Alq3m BeBq3 'DCM, DPVBi or the like as a light-emitting material and utilizes a photoelectric effect because it has a DC low-voltage driving drive ( Operating Vohage <10V), high energy efficiency, high brightness (greater than 105cd/m2), short response time (Resp〇nse Time), high contrast value (Efficient contrast rati〇), and high luminosity and color freedom, etc. The panel size can be used from 4mm microdisplays to high flexibility above ι〇〇吋, which is considered as one of the development priorities of the next generation of new flat panel displays. Referring to FIG. 1, an organic electro-excitation display device 1 includes a substrate n, a first conductive film 12 formed on the substrate u, and a light-emitting sheet & 13, formed on the first conductive film 12, The second conductive film 14 on the light emitting unit 13. — Manufactured and because the substrate u is a single-layered glass sheet of a material such as glass or plastic permeable to light, the plastic sheet is permeable to light, and the material itself is slightly bendable. For example, indium tin is used as an electrode. The first conductive film 12 is a transparent and electrically conductive material, and an oxide (IT〇) is formed on the substrate n as a predetermined image, 200806073. The second conductive film I4. is a metal/alloy, for example, and the work function is used for the other electrode. Lu is formed on the light-emitting unit 13, and the unit 13 supplies electric energy. 4 - the conductive film 12 is matched to form the polymer of the main two-conducting crucible 12, 14 of the light-emitting unit 13 , and the first and the 14-phase matching pieces can be used in this case 盥 FI - + , In this case, the light is generated by the I sub-effect. In the case of the unsatisfactory picture, the hole transmission layer 131 and the hole transmission layer 131 which are in ohmic contact with the first and second conductive films 12 and 14 are separated. , an electron & wi layer 132, and a base layer of the light-emitting layer 133 disposed between the electrodes 32: (: brothers and two when the first and second conductive films 12, 14 provide a forward dust-off pair & In the case of the second conductive crucible 14, when the electrode bias voltage of the first conductive film 12 is a positive value, the electronic and electrical layers of the electron supply layer 132 and the hole transport layer 131 are provided The holes are combined and/or recombined in the luminescent layer 133 to generate photons, and (4) illuminating; • the illuminating process of the illuminating unit 已 is basic knowledge, and at the same time, other deformation structures of the illuminating unit 众多 are numerous, and It is well known to the industry and the academic community, and this part is not related to the focus of the present invention, so no more details will be given. θ The above-described organic electro-excitation display device 1 can surely generate light that is emitted outward through the first conductive film 12 and the substrate 11 by the quantum effect by providing the forward bias. However, since the substrate 11 of the organic electroluminescence excitation display device 1 is a single layer product made of glass or plastic material: the glass substrate is completely fabricated based on the experience of other photovoltaic elements, such as LCD, 200806073 (4) 'But it has the disadvantages of high price and easy transportation. The plastic substrate has many problems in the process because the glass transition temperature is extremely low and the coefficient of thermal expansion is large. In addition, the plastic substrate must be more than two. The mineral cover prevents moisture, pollution, water barrier, gas barrier, and protection. "Finding the disadvantages of materials and process costs. In addition, whether it is a glass substrate or a plastic substrate, it is limited by the material: ::Characteristics, but only slightly f-flexible, therefore, the organic electro-excited display device based on such a substrate is not directly applicable to the "electronic paper" that is folded and twisted, or can be wound up The "flat-screen TV" is conceived in the concept of electronic production by the Zhuangjin... The product is in the mouth. Therefore, the current organic electric excitation display [invention content] = soil anti-11 4 breakthrough 'is one of the focus of academic research. Accordingly, it is an object of the present invention to provide a soft f substrate of a versatile organic electroluminescent display device. 70) In addition, another object of the present invention is to provide a method for manufacturing a flexible substrate which is provided with a recording technique, such as a singularity: 岭八业Η - ', a kind of retractable winding, and an electric visitor. Thus, an organic electroluminescent light of the present invention exhibits an embrittlement, a carrier layer comprising a flexible roll, and a conductive film. 'The base phase far bearing layer has a release property and can be torn off|# The carrier plate is connected (4) ❹u ground and the carrying spoon is separated from the t film' and one is formed in the release type field, and the laminated film Unit ^ 良 卜, ❼ layer $ film single inorganic material formation - inorganic film and organic material formation - the order of the organic film, an inorganic film formed on the pancreas I at least the conductive film is transparent and can lead to lightning The material is formed in a predetermined image on the top surface of the 200806073 = unit opposite to the release film, and can be combined with one of the electrodes of the manufactured device to provide electrical energy. The organic electroluminescence display device emits light by a quantum effect. Further, the soft substrate of the organic electroluminescence display device of the present invention is manufactured by first cleaning a carrier, and then forming an organic material on the carrier. / Release film which is releaseable and can be directly peeled off from the carrier, and then formed on the release film by an inorganic material in sequence - an inorganic film and an organic material are formed: the order of the organic film forms at least - inorganic The film is finally formed from a transparent and electrically conductive material - The conductive film having a predetermined image, that is, the production of the beautiful plate is completed. The invention has the effect of providing an organic electric excitation capable of flexing and folding, a flexible substrate for a display device, and a manufacturing method thereof, by laminating the substrate The structure of the film unit staggered stacking makes the substrate have better chemical resistance, heat resistance, gas barrier and water resistance, and higher light transmittance, and the organic electroluminescence display is prepared by the film separation. After the device is directly detached from the carrier, the organic electroluminescent display device capable of being folded and folded can be prepared for subsequent assembly applications. [Embodiment] The foregoing and other technical contents, features and effects of the present invention are In the following detailed description of a preferred embodiment of the McCaw chart, it will be clearly apparent. Before the present invention is described in detail, it is noted that in the following description, similar elements are identical. Figure 2 is a soft base of an organic electroluminescent display device of the present invention. The 200806073 plate 2 is preferably a C-flexible roll on the receiving layer 3. The carrier layer 3, and - is formed on the conductive film 4 on the crucible.承 The receiving layer 3 has a laminated film of a release film one, / is formed on the release film 31 32, and a corresponding formation of the wall suppression unit 33, coughing the wind in the 襄 layer fixed early 32 t The barrier is between (4) the phase of the heart with the thickness of the H-type organic material formed by the thickness of the glass carrier (the figure is not shown) and can be directly used with the carrier of the two W ct (P in this case the release film 31 is a poly. (4) A film formed of 4.5_ as a material. The laminated film unit 32 is sequentially sintered with inorganic feldspar, nitrous oxide oxide, oxidized inscription, nitriding... H weathering eve, oxygen button, gold, #, Adding a layer of titanium, pentoxide, aluminum, and platinum to form a film with a small thickness, such as with organic materials (such as poly-p-dimethylbenzene c, Duguangzhi - machine benzene N type, poly-p-f group) ♦ For the monomethyl organic film-like sequence, at least one 321 (four) is formed on the release film 31 in the order of an odd degree of not more than 1... in this example and the illustration is a nitrogen cut and The description of four inorganic 322 is formed by interlacing Parylene as a material. "A crepe film/early single 7C 33 includes at least one correspondingly surrounding the inorganic film 32丨, And / or organic film 322 犋 early 兀 32 Long Chuanchuan ~ machine film 322 circumference to isolate water gas infiltration ... in this example and the illustration 'is a poly-p-dimethylbenzene C type (
Pa：ylene) ^ 例說明。 门 200806073 該導電膜4是以透明且可 ih ( ττπ\ as ^ ' '材'料’例如銦錫氧化 物（™)以預定圖像形成在該層疊膜單元3 =化 頂面，而可鱼後續彭供山 A 、y的 ”设、只衣備出的有機電激發光 構（如圖中假想線所示）之-電極相配合提二其他結 有機電激發光顯示裝置以量子效應發光。…’而使 本Is明軟質基板2與目前有機電激發光顯示裝置 知用的玻璃基板、塑膠基板相類似，可币 其上以例如真空蒸鐘、_、化學氣相 4網版印刷、喷㈣著、塗佈等方式形成發光 繼之再以菽著、導兩真泠 早兀’ 午 員塗佈、鋁落接著等方式形成另—導 電膜作為對應電極，而製得有機電激發光=另二 別的是’由於本發明軟質基板2之承载層3是以： 型性的離型膜31，及自m谁.1疋以—具有離 膜322組成的層疊膜單元、32 =隹^無機膜321、有機 播成，因此，除了可在完成有 31 Γ離V’貝不裝置整體製備後，可以直接利用該離型膜 收折的有^1 自承载用的玻璃载板上撕離’而製得可以繞捲 _ “激發光顯示裝置成品之外，更因為層疊膜單 Γ_32無機膜321與有機膜322交錯層疊的結構，以及障壁 Γ^3—夕數^壁331的阻絕，使得本發明軟質基板2較目 别轉-層體結構的基板η具有更佳的耐化性、熱穩定性 阻氣丨生舆阻水性，及更高的光穿透率。 多 '圖3上述軟質基板2再配合製造方法說明後，卷 可更清楚的明白。 田 百先進仃步驟61 ’以電漿清潔破璃载板；在本步驟中 10 200806073 並不侷限於使用玻璃载板，其他 上 例如矽、石英、藍寳石、 聚醯亞胺等材料所製成的載板亦可以應用。 接著進行步驟62，在該载板上以聚對二甲基苯C型（ Parylenec)為材料，並配合氣相沉射切成該離型膜31 Ο 然後進行步驟6 3，先以新|访去上 > 无以虱化矽為材料，並配合氣相沉 =式’先ί該離型膜31上形成該-無機膜32H接著以 水對一 f基笨C型（、 」馬材枓，在該無機膜321 的一中央區域上形成一有機膜 ， ^ ^ χ 2亚同吟在該無機膜321 外圍區域t配合形成—環圍該有機膜322的障壁331 ; 之後’依序以前述的過程依岸 序乂虱化矽與聚對二甲基苯c 機…aryene C)為材料，交錯形成另三無機们2卜二有 機膜322與二障壁331，完成層 2 有 的製作，製得該承载層3。 ^…33 取後’進行步驟64，在該承载 配合蒸射式形成導^ 4㈤層上以銦錫減物， 續進扞右^ 製得該軟質基板2,進而可繼 …以顯不裝置其他結構的製備。 多'閲圖 4，由热"θ -7 光單元的結構體的有機電激發光顯示裝置之發 發光的發光單二=因應例如反向於基板方向 導電膜4 μ 过本备明的軟質基板2更可在該 等全屬及复人，以具有高反射係數的材料，例如銘、銀、始 光單Π =形成—反射膜5,而後，再依序建構發 操捲收折，”光'方：構（圖未示出)，製備出同樣地可以 各先方向不同的有機電激發光顯示裝置。 200806073 由上述說明可知，本發明主要是提出以聚對二甲 在（玻璃）载板上形成離如1，並配合以無機材料形成 热機膜321與有機材料形成有機膜322的順序，在離型膜 31上形成至少-層的無機膜321而構成層疊膜單元κ，構 成可直接自（玻璃）載板撕離的承載層3 ;接著於承載層3 表面製作導電膜4後，gp & #可古分A / 曰 即70成可直接自（玻璃）载板上撕 離的軟質基板2,而可進—步進行有機電激發光顯示裝置並 他結構的製作。 …Pa:ylene) ^ Example description. Door 200806073 The conductive film 4 is transparent and can be formed by a predetermined image on the laminated film unit 3 = top surface of the laminated film unit, such as indium tin oxide (TM) Subsequent to the supply of the organic electroluminescence structure (shown by the imaginary line in the figure) of Peng Youshan A and y, the electrode is combined with the other organic light-emitting display device to emit light by quantum effect. ...', the Is soft substrate 2 is similar to the glass substrate and plastic substrate currently used in the organic electroluminescence display device, and can be printed, for example, by vacuum steaming, _, chemical vapor 4 screen printing, and spraying. (4) Forming and illuminating by means of coating, coating, etc., followed by squeezing, guiding the two true 泠 泠 'day coating, aluminum falling and other ways to form another - conductive film as the corresponding electrode, and the organic electroluminescent light is produced = The other two are: 'Because the carrier layer 3 of the flexible substrate 2 of the present invention is: a release film 31 of the type, and a laminated film unit composed of the film 322, 32 = 隹 ^ Inorganic membrane 321 , organic sowing, therefore, in addition to the completion of 31 Γ V' shell not installed After the preparation of the body, it can be directly used to peel off the glass carrier on the self-supporting glass of the release film, and the film can be wound up _ "external to the finished product of the excitation light display device, and more because of the laminated film Γ32 inorganic The structure in which the film 321 and the organic film 322 are alternately laminated, and the barrier Γ 3 3 _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ Thermal stability, gas barrier, water repellency, and higher light transmittance. Multi-Fig. 3 The flexible substrate 2 described above can be more clearly understood after the manufacturing method is described. Tian Bai Advanced 仃Step 61 ' Plasma cleaning of the glass carrier; in this step 10 200806073 is not limited to the use of glass carrier, other carriers such as enamel, quartz, sapphire, polyimide, etc. can also be applied. Step 62, using Parylene as a material on the carrier, and cutting into the release film 31 by gas phase deposition, and then performing step 6.3, first accessing the new | Up > No 虱 虱 矽 as a material, and with the gas phase sink = type ' First, the inorganic film 32H is formed on the release film 31, and then an organic film is formed on a central portion of the inorganic film 321 by water-to-f-type C-type (, 马 枓 2). The sub-antimony is formed in the peripheral region t of the inorganic film 321 to form a barrier 331 surrounding the organic film 322; and then 'sequentially according to the foregoing process, the bismuth and the p-dimethylbenzene c machine are... C) is a material, and the other three inorganic layers 322 and the second barrier 331 are alternately formed, and the layer 2 is finished, and the carrier layer 3 is obtained. ^...33 After taking 'step 64, the carrier is matched The soft substrate 2 is obtained by vapor-depositing the forming layer 4 (5), and the soft substrate 2 is obtained by continuing to the right side. Further, the preparation of the other structure can be omitted. Fig. 4, the luminescence of the organic electroluminescence display device of the structure of the thermal quotation of the θ -7 light unit is singularly responsive to, for example, the conductive film 4 μ reversed from the substrate direction. The substrate 2 can be further versatile and versatile, and materials having a high reflection coefficient, such as inscriptions, silver, and illuminating single Π = forming-reflecting film 5, and then constructing the windings in sequence," Light 'square: structure (not shown), an organic electroluminescent display device which can be different in each of the first directions is prepared. 200806073 It is apparent from the above description that the present invention mainly proposes to carry out poly(p-dimethyl) in (glass) loading. In the order of forming the organic film 321 and the organic material forming the organic film 322 with the inorganic material, the inorganic film 321 is formed on the release film 31 to form the laminated film unit κ, and the laminated film unit κ is formed. The carrier layer 3 is directly peeled off from the (glass) carrier; then, after the conductive film 4 is formed on the surface of the carrier layer 3, gp &#可古分 A / 曰 70% can be directly peeled off from the (glass) carrier Soft substrate 2, and can be further stepped on organic electroluminescent display And he made structure. ...
本發明軟質基板2除了具有離型性而可直接與（玻璃 )載板分離’無須透過任何的雷射作用或者是姓刻製程， 而可降低生產製程成本之外，更藉由其層疊的構造而較習 知為單-層體結構的塑谬基板具有較佳的耐化性、熱參定 性，以及良好的阻氣性、阻水性及高穿透度，同時 膜體的厚度可以精確控制在G.Glmm以下，不但可確實達到 薄型化的目的，且撓曲特性更優於玻璃基板或是塑膠基板 ’而可真正的撓捲收折，直接應用在例如可以捲曲收折的 「電子紙張」，或是可以捲繞收納的「平面電視」等概念性 的電子產品中，達到本發明創作的目的。 淮以上所述者’僅為本發明之較佳實施例而已，當不 能以此限定本發明實施之範圍，即大凡依本發日㈣請:利 範圍及發明說明書内容所作之簡單的等效變化與修飾，皆 應仍屬本發明專利涵蓋之範圍内。 【圖式簡單說明】 圖1是一剖視示意圖，說明習知的有機電激發光顯示 12 200806073 裝置； ^ 圖2是一剖視示意圖，說明本發明有機電激發光顯示 • 裝置的軟質基板之一較佳實施例； 圖3是一流程圖，說明圖2之有機電激發光顯示裝置 的軟質基板的製造方法；及 圖4是一剖視示意圖，說明圖2之有機電激發光顯示裝置的 軟質基板再濺鍍形成一反射膜。 13 200806073 【主要元件符號說明】 1 有機電激發顯示裝置 32 層疊膜單元 11 基板 321 無機膜 12 第一導電膜 322 有機膜 13 發光單元 33 障壁單元 131 電洞傳輸層 331 障壁 132 電子提供層 4 導電膜 133 發光層 5 反射膜 14 第二導電膜 61 步驟 2 軟質基板 62 步驟 3 承載層 63 步驟 31 離型膜 64 步驟 14The flexible substrate 2 of the present invention can be directly separated from the (glass) carrier plate in addition to the release property, without the need to pass any laser action or the process of surname etching, and can reduce the manufacturing process cost, and the structure by lamination thereof. The plastic substrate which is known as a single-layer structure has better chemical resistance, thermal stability, good gas barrier property, water resistance and high penetration, and the thickness of the film can be precisely controlled. G.Glmm or less, not only can achieve the purpose of thinning, and the flexural characteristics are better than the glass substrate or the plastic substrate, and can be truly folded and folded, and can be directly applied to, for example, "electronic paper" which can be crimped and folded. Or the conceptual electronic product such as "flat TV" that can be wound up and stored, achieves the purpose of the present invention. The above description is only a preferred embodiment of the present invention, and the scope of the present invention cannot be limited thereto, that is, the simple equivalent change made by the scope of the present invention and the contents of the invention manual. And modifications are still within the scope of the invention. BRIEF DESCRIPTION OF THE DRAWINGS FIG. 1 is a cross-sectional view showing a conventional organic electroluminescent display 12 200806073 device; FIG. 2 is a cross-sectional view showing a flexible substrate of an organic electroluminescent display device of the present invention. FIG. 3 is a flow chart illustrating a method of fabricating a flexible substrate of the organic electroluminescent display device of FIG. 2; and FIG. 4 is a cross-sectional view illustrating the organic electroluminescent display device of FIG. The flexible substrate is sputtered to form a reflective film. 13 200806073 [Explanation of main component symbols] 1 Organic electro-excitation display device 32 Laminated film unit 11 Substrate 321 Inorganic film 12 First conductive film 322 Organic film 13 Light-emitting unit 33 Barrier unit 131 Hole transport layer 331 Barrier 132 Electron supply layer 4 Conductive Film 133 Light Emitting Layer 5 Reflecting Film 14 Second Conductive Film 61 Step 2 Flexible Substrate 62 Step 3 Carrier Layer 63 Step 31 Release Film 64 Step 14