TW200745365A - Cluster device having dual structure - Google Patents

Cluster device having dual structure

Info

Publication number
TW200745365A
TW200745365A TW096118243A TW96118243A TW200745365A TW 200745365 A TW200745365 A TW 200745365A TW 096118243 A TW096118243 A TW 096118243A TW 96118243 A TW96118243 A TW 96118243A TW 200745365 A TW200745365 A TW 200745365A
Authority
TW
Taiwan
Prior art keywords
transfer chamber
substrate storage
process chambers
dual structure
cluster device
Prior art date
Application number
TW096118243A
Other languages
Chinese (zh)
Inventor
Geun-Ha Jang
Chi-Wook Yu
Original Assignee
Jusung Eng Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Jusung Eng Co Ltd filed Critical Jusung Eng Co Ltd
Publication of TW200745365A publication Critical patent/TW200745365A/en

Links

Classifications

    • E—FIXED CONSTRUCTIONS
    • E04—BUILDING
    • E04G—SCAFFOLDING; FORMS; SHUTTERING; BUILDING IMPLEMENTS OR AIDS, OR THEIR USE; HANDLING BUILDING MATERIALS ON THE SITE; REPAIRING, BREAKING-UP OR OTHER WORK ON EXISTING BUILDINGS
    • E04G1/00—Scaffolds primarily resting on the ground
    • E04G1/28—Scaffolds primarily resting on the ground designed to provide support only at a low height
    • E04G1/30—Ladder scaffolds
    • E—FIXED CONSTRUCTIONS
    • E04—BUILDING
    • E04G—SCAFFOLDING; FORMS; SHUTTERING; BUILDING IMPLEMENTS OR AIDS, OR THEIR USE; HANDLING BUILDING MATERIALS ON THE SITE; REPAIRING, BREAKING-UP OR OTHER WORK ON EXISTING BUILDINGS
    • E04G1/00—Scaffolds primarily resting on the ground
    • E04G1/24—Scaffolds primarily resting on the ground comprising essentially special base constructions; comprising essentially special ground-engaging parts, e.g. inclined struts, wheels

Landscapes

  • Engineering & Computer Science (AREA)
  • Architecture (AREA)
  • Mechanical Engineering (AREA)
  • Civil Engineering (AREA)
  • Structural Engineering (AREA)
  • Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)

Abstract

A cluster device having a dual structure includes: a substrate storage containing a plurality of substrates, the substrate storage having an ATM robot that moves said substrates; a first cluster including a first transfer chamber having a vacuum robot, a plurality of first process chambers connected to the first transfer chamber, and a first load lock chamber connected to both the substrate storage and the first transfer chamber; a second cluster including a second transfer chamber under the first transfer chamber, a plurality of second process chambers connected to the second transfer chamber, each of the plurality of second process chambers positioned between the two first process chambers, and a second load lock chamber connected to both the substrate storage and the second transfer chamber.
TW096118243A 2003-01-10 2004-01-09 Cluster device having dual structure TW200745365A (en)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
KR1020030001522A KR20030023644A (en) 2003-01-10 2003-01-10 Cluster device which having dual structure
KR1020030048344A KR100747440B1 (en) 2003-01-10 2003-07-15 Cluster device having dual structure

Publications (1)

Publication Number Publication Date
TW200745365A true TW200745365A (en) 2007-12-16

Family

ID=27730215

Family Applications (2)

Application Number Title Priority Date Filing Date
TW093100595A TW200427863A (en) 2003-01-10 2004-01-09 Cluster device having dual structure
TW096118243A TW200745365A (en) 2003-01-10 2004-01-09 Cluster device having dual structure

Family Applications Before (1)

Application Number Title Priority Date Filing Date
TW093100595A TW200427863A (en) 2003-01-10 2004-01-09 Cluster device having dual structure

Country Status (2)

Country Link
KR (3) KR20030023644A (en)
TW (2) TW200427863A (en)

Families Citing this family (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR101359400B1 (en) * 2006-12-29 2014-02-07 주성엔지니어링(주) Vacuum chamber module for stable robot teaching
US9696097B2 (en) 2014-08-01 2017-07-04 Applied Materials, Inc. Multi-substrate thermal management apparatus
KR101695297B1 (en) * 2015-02-06 2017-01-16 김다정 Portable Memory Apparatus
CN106373907B (en) * 2015-07-22 2019-01-08 中微半导体设备(上海)有限公司 A kind of vacuum lock system and its processing method to substrate

Family Cites Families (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2965038B1 (en) * 1998-09-21 1999-10-18 日新電機株式会社 Vacuum processing equipment

Also Published As

Publication number Publication date
KR20070045168A (en) 2007-05-02
KR100747440B1 (en) 2007-08-08
TW200427863A (en) 2004-12-16
KR20030023644A (en) 2003-03-19
KR20040064585A (en) 2004-07-19

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