TW200742946A - Auto purge bubble liquid transportation apparatus of semiconductor equipment - Google Patents

Auto purge bubble liquid transportation apparatus of semiconductor equipment

Info

Publication number
TW200742946A
TW200742946A TW095115544A TW95115544A TW200742946A TW 200742946 A TW200742946 A TW 200742946A TW 095115544 A TW095115544 A TW 095115544A TW 95115544 A TW95115544 A TW 95115544A TW 200742946 A TW200742946 A TW 200742946A
Authority
TW
Taiwan
Prior art keywords
pipe
inlet
purge
outlet
semiconductor equipment
Prior art date
Application number
TW095115544A
Other languages
Chinese (zh)
Inventor
Hsin-Tang Peng
Original Assignee
Powerchip Semiconductor Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Powerchip Semiconductor Corp filed Critical Powerchip Semiconductor Corp
Priority to TW095115544A priority Critical patent/TW200742946A/en
Publication of TW200742946A publication Critical patent/TW200742946A/en

Links

Landscapes

  • Pipeline Systems (AREA)

Abstract

An auto purge bubble liquid transportation apparatus of semiconductor equipment including a transportation unit, an inlet pipe, an outlet pipe, a drain pipe, a purge pipe, a detector and a vale is provided. The inlet pipe, the outlet pipe and the purge pipe are communicated with the transportation unit respectively. Additionally, the purge pipe has an inlet and an outlet. The inlet is communicated with the transportation unit, and the inlet pipe is communicated with the purge pipe and located between the inlet and the outlet thereof. Moreover, the detector is disposed on the purge pipe, and located between the inlet and the joint of the inlet pipe and the purge pipe. The valve mentioned is located at the outlet of the purge pipe and electrically connected to the detector.
TW095115544A 2006-05-02 2006-05-02 Auto purge bubble liquid transportation apparatus of semiconductor equipment TW200742946A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
TW095115544A TW200742946A (en) 2006-05-02 2006-05-02 Auto purge bubble liquid transportation apparatus of semiconductor equipment

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
TW095115544A TW200742946A (en) 2006-05-02 2006-05-02 Auto purge bubble liquid transportation apparatus of semiconductor equipment

Publications (1)

Publication Number Publication Date
TW200742946A true TW200742946A (en) 2007-11-16

Family

ID=57914214

Family Applications (1)

Application Number Title Priority Date Filing Date
TW095115544A TW200742946A (en) 2006-05-02 2006-05-02 Auto purge bubble liquid transportation apparatus of semiconductor equipment

Country Status (1)

Country Link
TW (1) TW200742946A (en)

Similar Documents

Publication Publication Date Title
ATE392936T1 (en) FILTER FITTING WITH FLOW METER
GB2470839A (en) Plumbing sealing arrangement
GB2472152A (en) Valve apparatus for inflow control
EP2204507A3 (en) Washing device
MY163466A (en) Separating device and method with a return flow of heavy fraction
WO2007115000A3 (en) Chemical delivery apparatus for cvd or ald
NO20093429L (en) Hoytrykksregulator
MY146235A (en) High performance sewer system
DK2098647T3 (en) Connection
WO2011057774A3 (en) Integrated choke manifold system for use in a well application
DK1844261T3 (en) Equipment and device for connecting and transferring liquid and using such device
WO2013000764A3 (en) A fluid diverter system for a drilling facility.
WO2008146640A1 (en) Fluid device unit structure
SG157337A1 (en) Device for measuring the purity of ultrapure water
DE602005012419D1 (en) DRAIN TUBE FOR A SANITARY EQUIPMENT.
TW200742946A (en) Auto purge bubble liquid transportation apparatus of semiconductor equipment
CA2598345A1 (en) Arrangement related to a separator for the cleaning of such separator
WO2012035359A3 (en) An apparatus for purging water from a plumbing installation
GB2467669A (en) Improved urinal apparatus
MX2009012457A (en) Fittings for water storage tank.
ATE500389T1 (en) FIRE HYDRANT WITH CONNECTION DEVICE
ATE509707T1 (en) FLUID DISPENSER COMPRISING A BELLOWS
NZ602489A (en) Valve assembly
GB2456463A (en) Mains water meter
ATE516462T1 (en) FAUCET