TW200741185A - Optical wavefront sensor - Google Patents

Optical wavefront sensor

Info

Publication number
TW200741185A
TW200741185A TW095146676A TW95146676A TW200741185A TW 200741185 A TW200741185 A TW 200741185A TW 095146676 A TW095146676 A TW 095146676A TW 95146676 A TW95146676 A TW 95146676A TW 200741185 A TW200741185 A TW 200741185A
Authority
TW
Taiwan
Prior art keywords
manipulation device
wavefront
detector
wavefront sensor
controller
Prior art date
Application number
TW095146676A
Other languages
Chinese (zh)
Inventor
Xiang Li
Li-Ping Zhao
zhong-ping Fang
Krishna Asundi Anand
Lin-Seng Ong
Herawan Rinov
Original Assignee
Agency Science Tech & Res
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Agency Science Tech & Res filed Critical Agency Science Tech & Res
Publication of TW200741185A publication Critical patent/TW200741185A/en

Links

Classifications

    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B5/00—Optical elements other than lenses
    • G02B5/18—Diffraction gratings
    • G02B5/1876—Diffractive Fresnel lenses; Zone plates; Kinoforms
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J9/00—Measuring optical phase difference; Determining degree of coherence; Measuring optical wavelength
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B26/00—Optical devices or arrangements for the control of light using movable or deformable optical elements
    • G02B26/06—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the phase of light
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B5/00—Optical elements other than lenses
    • G02B5/18—Diffraction gratings
    • G02B5/1876—Diffractive Fresnel lenses; Zone plates; Kinoforms
    • G02B5/188—Plurality of such optical elements formed in or on a supporting substrate
    • G02B5/1885—Arranged as a periodic array

Abstract

An optical wavefront sensor comprising a light manipulation device; a detector for detecting light signals having been subjected to the light manipulation device; and a controller coupled to the manipulation device, the controller controlling the manipulation device to function as a lenslet array, each lenslet of the array focussing an incident portion of a wavefront onto the detector. The controller may also control the distance between the detector and the manipulation device. The spatial resolution of Shack-Hartmann sensors can be increased by digital scanning the wavefront with the manipulation device. The wavefront sensing can be dynamic adaptive by setting of parameters of the manipulation device.
TW095146676A 2005-12-13 2006-12-13 Optical wavefront sensor TW200741185A (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
PCT/SG2005/000417 WO2007070006A1 (en) 2005-12-13 2005-12-13 Optical wavefront sensor

Publications (1)

Publication Number Publication Date
TW200741185A true TW200741185A (en) 2007-11-01

Family

ID=38163207

Family Applications (1)

Application Number Title Priority Date Filing Date
TW095146676A TW200741185A (en) 2005-12-13 2006-12-13 Optical wavefront sensor

Country Status (3)

Country Link
US (1) US8158917B2 (en)
TW (1) TW200741185A (en)
WO (1) WO2007070006A1 (en)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN102735348A (en) * 2012-06-15 2012-10-17 中国科学院光电技术研究所 Wavefront measuring method based on Hartmann wavefront sensor
CN109506897A (en) * 2017-09-15 2019-03-22 东大光电股份有限公司 wavefront measuring system

Families Citing this family (23)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FR2938933B1 (en) * 2008-11-25 2011-02-11 Thales Sa SPACE OPTICAL SYSTEM COMPRISING MEANS OF ACTIVE CONTROL OF OPTICS
WO2011011385A2 (en) * 2009-07-20 2011-01-27 Thorlabs, Inc. Shack hartman sensor with removable lenslet array
FR2962536B1 (en) * 2010-07-06 2019-12-27 Commissariat A L'energie Atomique Et Aux Energies Alternatives LIQUID CRYSTAL MICROLENTINE WAVEFRONT ANALYZER
US10132925B2 (en) 2010-09-15 2018-11-20 Ascentia Imaging, Inc. Imaging, fabrication and measurement systems and methods
WO2012037343A1 (en) * 2010-09-15 2012-03-22 Ascentia Imaging, Inc. Imaging, fabrication, and measurement systems and methods
WO2013103725A1 (en) 2012-01-03 2013-07-11 Ascentia Imaging, Inc. Coded localization systems, methods and apparatus
US9739864B2 (en) 2012-01-03 2017-08-22 Ascentia Imaging, Inc. Optical guidance systems and methods using mutually distinct signal-modifying
US9628682B2 (en) * 2012-07-13 2017-04-18 Board Of Trustees Of The University Of Alabama, Fo High-resolution hyper-spectral orthographic imaging spectrometer
JP6080427B2 (en) * 2012-08-10 2017-02-15 キヤノン株式会社 Shack-Hartmann sensor and wavefront measurement method using it
JP2014102119A (en) * 2012-11-19 2014-06-05 Canon Inc Wavefront aberration measurement method, wavefront aberration measurement apparatus and optical system manufacturing method
CN102967380B (en) * 2012-12-09 2014-10-29 中国科学院光电技术研究所 Hartmann wavefront sensor based on unit photo-sensitive detector array
CN105264428B (en) * 2013-06-06 2018-06-29 浜松光子学株式会社 Method of adjustment, adaptive optics system and the recording medium for storing adaptive optics system program of adaptive optics system
JP6430770B2 (en) * 2014-10-02 2018-11-28 株式会社トプコン Ophthalmic equipment
JP6409511B2 (en) * 2014-11-04 2018-10-24 日本精機株式会社 Head-up display device
US10126114B2 (en) 2015-05-21 2018-11-13 Ascentia Imaging, Inc. Angular localization system, associated repositionable mechanical structure, and associated method
TWI589851B (en) * 2015-11-20 2017-07-01 九驊科技股份有限公司 Optical wavefront measuring device and method
CN107740002A (en) * 2017-06-13 2018-02-27 刘红宾 A kind of novel control nitrogen austenitic stainless steel and preparation method thereof
CN108151888B (en) * 2017-11-22 2019-09-27 中国科学院长春光学精密机械与物理研究所 A method of for scanning the error decoupling of Hartmann's detection device
NL2021357A (en) * 2018-01-31 2018-08-16 Asml Netherlands Bv Two-dimensional diffraction grating
WO2019244303A1 (en) * 2018-06-21 2019-12-26 三菱電機株式会社 Wavefront sensor, wavefront measurement device, and wavefront measurement method
GB2586612B (en) * 2019-08-28 2022-02-09 X Fab Semiconductor Foundries Gmbh CMOS wavefront sensors
CN112304443B (en) * 2020-10-30 2022-10-21 中国科学院光电技术研究所 Hartmann wavefront sensor with variable spatial resolution
CN117232785A (en) * 2023-08-18 2023-12-15 青岛芯微半导体科技有限公司 Device for improving optical wavefront error detection precision with controllable sub-optical path channel switch

Family Cites Families (19)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5864381A (en) * 1996-07-10 1999-01-26 Sandia Corporation Automated pupil remapping with binary optics
US5912731A (en) * 1997-12-04 1999-06-15 Trw Inc. Hartmann-type optical wavefront sensor
US6547395B1 (en) * 1998-02-06 2003-04-15 Wavefront Sciences, Inc. Methods of measuring moving objects and reducing exposure during wavefront measurements
FR2788597B1 (en) * 1999-01-15 2001-02-23 Imagine Optic Sarl HIGH DYNAMIC WAVEFRONT ANALYSIS METHOD AND DEVICE
US6184974B1 (en) * 1999-07-01 2001-02-06 Wavefront Sciences, Inc. Apparatus and method for evaluating a target larger than a measuring aperture of a sensor
US6376819B1 (en) * 1999-07-09 2002-04-23 Wavefront Sciences, Inc. Sub-lens spatial resolution Shack-Hartmann wavefront sensing
US6656373B1 (en) 1999-07-09 2003-12-02 Wavefront Sciences, Inc. Apodized micro-lenses for Hartmann wavefront sensing and method for fabricating desired profiles
US6707020B1 (en) * 1999-12-28 2004-03-16 Mza Associates Corporation Adaptive dynamic range wavefront sensor
US6550917B1 (en) * 2000-02-11 2003-04-22 Wavefront Sciences, Inc. Dynamic range extension techniques for a wavefront sensor including use in ophthalmic measurement
JP3599629B2 (en) * 2000-03-06 2004-12-08 キヤノン株式会社 Illumination optical system and exposure apparatus using the illumination optical system
US6430328B1 (en) * 2000-10-13 2002-08-06 William H. Culver Optical switch
US6784408B1 (en) * 2001-04-25 2004-08-31 Oceanit Laboratories, Inc. Array of lateral effect detectors for high-speed wavefront sensing and other applications
US6747781B2 (en) * 2001-06-25 2004-06-08 Silicon Light Machines, Inc. Method, apparatus, and diffuser for reducing laser speckle
US20030107814A1 (en) * 2001-12-11 2003-06-12 Altmann Griffith E. Method and apparatus for improving the dynamic range and accuracy of a Shack-Hartmann wavefront sensor
AU2002358137A1 (en) * 2001-12-14 2003-06-30 Technovision Gmbh Gesellschaft Fur Die Entwicklung Medizinischer Technologien Improved hartmann-shack wavefront sensor apparatus and method
US6666857B2 (en) * 2002-01-29 2003-12-23 Robert F. Smith Integrated wavefront-directed topography-controlled photoablation
US20050174535A1 (en) * 2003-02-13 2005-08-11 Lai Shui T. Apparatus and method for determining subjective responses using objective characterization of vision based on wavefront sensing
WO2003102519A1 (en) * 2002-05-31 2003-12-11 Wavefront Sciences, Inc. Methhod and system for sensing and analyzing a wavefront of an optically transmissive system
AU2003287536A1 (en) * 2002-11-05 2004-06-07 Triton Systems, Inc. Acoustically-controlled dynamic optical lenses and gratings and methods related thereto

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN102735348A (en) * 2012-06-15 2012-10-17 中国科学院光电技术研究所 Wavefront measuring method based on Hartmann wavefront sensor
CN102735348B (en) * 2012-06-15 2013-07-24 中国科学院光电技术研究所 Wavefront measuring method based on Hartmann wavefront sensor
CN109506897A (en) * 2017-09-15 2019-03-22 东大光电股份有限公司 wavefront measuring system
CN109506897B (en) * 2017-09-15 2020-10-16 东大光电股份有限公司 Wavefront measuring system

Also Published As

Publication number Publication date
WO2007070006A9 (en) 2008-01-10
WO2007070006A1 (en) 2007-06-21
US20090152453A1 (en) 2009-06-18
US8158917B2 (en) 2012-04-17

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