TW200737526A - TFT substrate, reflective TFT substrate and method for manufacturing such substrates - Google Patents

TFT substrate, reflective TFT substrate and method for manufacturing such substrates

Info

Publication number
TW200737526A
TW200737526A TW096102191A TW96102191A TW200737526A TW 200737526 A TW200737526 A TW 200737526A TW 096102191 A TW096102191 A TW 096102191A TW 96102191 A TW96102191 A TW 96102191A TW 200737526 A TW200737526 A TW 200737526A
Authority
TW
Taiwan
Prior art keywords
tft substrate
manufacturing
insulating film
substrates
reflective
Prior art date
Application number
TW096102191A
Other languages
Chinese (zh)
Inventor
Kazuyoshi Inoue
Koki Yano
Nobuo Tanaka
Original Assignee
Idemitsu Kosan Co
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Idemitsu Kosan Co filed Critical Idemitsu Kosan Co
Publication of TW200737526A publication Critical patent/TW200737526A/en

Links

Landscapes

  • Thin Film Transistor (AREA)

Abstract

Provided are a TFT substrate and a reflective TFT substrate, which can stably operate for a long period of time, prevent cross talk and remarkably reduce the manufacturing cost by reducing the number of steps in the manufacturing process. A method for manufacturing such substrates is also provided. A TFT substrate (1) is provided with a glass substrate (10); a gate electrode (23) and a gate wiring (24), which have their top surfaces covered with a gate insulating film (30) and are insulated by having their side surfaces covered with an interlayer insulating film (50); an n-type oxide semiconductor layer (40) formed on a gate insulating film (30) on the gate electrode (23); an oxide transparent conductor layer (60) formed on the n-type oxide semiconductor layer (40) by being separated by a channel section (44); and a channel guard (500) for protecting the channel section (44).
TW096102191A 2006-01-31 2007-01-19 TFT substrate, reflective TFT substrate and method for manufacturing such substrates TW200737526A (en)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP2006022332 2006-01-31
JP2006043521 2006-02-21

Publications (1)

Publication Number Publication Date
TW200737526A true TW200737526A (en) 2007-10-01

Family

ID=57913688

Family Applications (1)

Application Number Title Priority Date Filing Date
TW096102191A TW200737526A (en) 2006-01-31 2007-01-19 TFT substrate, reflective TFT substrate and method for manufacturing such substrates

Country Status (1)

Country Link
TW (1) TW200737526A (en)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
TWI470806B (en) * 2008-11-13 2015-01-21 Semiconductor Energy Lab Semiconductor device and method for manufacturing the same
TWI479663B (en) * 2011-12-22 2015-04-01 Au Optronics Corp Array substrate and manufacturing method thereof

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
TWI470806B (en) * 2008-11-13 2015-01-21 Semiconductor Energy Lab Semiconductor device and method for manufacturing the same
TWI479663B (en) * 2011-12-22 2015-04-01 Au Optronics Corp Array substrate and manufacturing method thereof

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