TW200737429A - Storage container of semiconductor equipment - Google Patents

Storage container of semiconductor equipment

Info

Publication number
TW200737429A
TW200737429A TW095111450A TW95111450A TW200737429A TW 200737429 A TW200737429 A TW 200737429A TW 095111450 A TW095111450 A TW 095111450A TW 95111450 A TW95111450 A TW 95111450A TW 200737429 A TW200737429 A TW 200737429A
Authority
TW
Taiwan
Prior art keywords
semiconductor equipment
storage container
preparing vessel
sprinkler system
preparing
Prior art date
Application number
TW095111450A
Other languages
Chinese (zh)
Inventor
Mu-Jung Wu
Ei-Fu Leu
Chia-Chen Tsai
Original Assignee
Powerchip Semiconductor Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Powerchip Semiconductor Corp filed Critical Powerchip Semiconductor Corp
Priority to TW095111450A priority Critical patent/TW200737429A/en
Publication of TW200737429A publication Critical patent/TW200737429A/en

Links

Landscapes

  • Packging For Living Organisms, Food Or Medicinal Products That Are Sensitive To Environmental Conditiond (AREA)

Abstract

A storage container of semiconductor equipment is suitable for storing the material required by the semiconductor equipment. The storage container of semiconductor equipment including a material-preparing vessel and a sprinkler system is provided. Moreover, the material-preparing vessel is communicated with the semiconductor equipment, and the sprinkler system is disposed in the material-preparing vessel movably.
TW095111450A 2006-03-31 2006-03-31 Storage container of semiconductor equipment TW200737429A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
TW095111450A TW200737429A (en) 2006-03-31 2006-03-31 Storage container of semiconductor equipment

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
TW095111450A TW200737429A (en) 2006-03-31 2006-03-31 Storage container of semiconductor equipment

Publications (1)

Publication Number Publication Date
TW200737429A true TW200737429A (en) 2007-10-01

Family

ID=57913682

Family Applications (1)

Application Number Title Priority Date Filing Date
TW095111450A TW200737429A (en) 2006-03-31 2006-03-31 Storage container of semiconductor equipment

Country Status (1)

Country Link
TW (1) TW200737429A (en)

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