TW200736872A - Chemically inert flow controller with non-contaminating body - Google Patents

Chemically inert flow controller with non-contaminating body

Info

Publication number
TW200736872A
TW200736872A TW095125095A TW95125095A TW200736872A TW 200736872 A TW200736872 A TW 200736872A TW 095125095 A TW095125095 A TW 095125095A TW 95125095 A TW95125095 A TW 95125095A TW 200736872 A TW200736872 A TW 200736872A
Authority
TW
Taiwan
Prior art keywords
chemically inert
coupled
conduit
flow controller
controller
Prior art date
Application number
TW095125095A
Other languages
Chinese (zh)
Other versions
TWI421660B (en
Inventor
Robert T Chinnock
Clifford Miller
Charles Meacham
Original Assignee
Entegris Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Entegris Inc filed Critical Entegris Inc
Publication of TW200736872A publication Critical patent/TW200736872A/en
Application granted granted Critical
Publication of TWI421660B publication Critical patent/TWI421660B/en

Links

Classifications

    • G—PHYSICS
    • G05—CONTROLLING; REGULATING
    • G05D—SYSTEMS FOR CONTROLLING OR REGULATING NON-ELECTRIC VARIABLES
    • G05D7/00—Control of flow
    • G05D7/06—Control of flow characterised by the use of electric means
    • G05D7/0617—Control of flow characterised by the use of electric means specially adapted for fluid materials
    • G05D7/0629—Control of flow characterised by the use of electric means specially adapted for fluid materials characterised by the type of regulator means
    • G05D7/0635—Control of flow characterised by the use of electric means specially adapted for fluid materials characterised by the type of regulator means by action on throttling means
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
    • F16K27/00—Construction of housing; Use of materials therefor
    • F16K27/02—Construction of housing; Use of materials therefor of lift valves
    • F16K27/0272—Construction of housing; Use of materials therefor of lift valves valves provided with a lining

Abstract

A flow controller including a unitary controller body with a chemically inert fluid conduit having an insertable constriction or orifice disposed within the conduit having a reduced cross-sectional area to thereby restrict the flow of fluid within the conduit allowing for reliable flow measurement. An integrated circuit or controller may be coupled to the control valve and also coupled to the pressure sensors by a lead structure including signal conductors surrounded by a Faraday cage, and a chemically inert housing coupled to the unitary controller body enclosing the control valve and the pressure sensors.
TW95125095A 2005-07-08 2006-07-10 Chemically inert flow controller with non-contaminating body TWI421660B (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US69748305P 2005-07-08 2005-07-08

Publications (2)

Publication Number Publication Date
TW200736872A true TW200736872A (en) 2007-10-01
TWI421660B TWI421660B (en) 2014-01-01

Family

ID=39892245

Family Applications (1)

Application Number Title Priority Date Filing Date
TW95125095A TWI421660B (en) 2005-07-08 2006-07-10 Chemically inert flow controller with non-contaminating body

Country Status (2)

Country Link
CN (1) CN101258351A (en)
TW (1) TWI421660B (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
TWI495851B (en) * 2009-10-01 2015-08-11 Horiba Stec Co Flow measuring apparatus, mass flow controller and pressure sensor

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN110186520B (en) * 2019-06-12 2020-12-15 成都市穆尔西仪表科技有限公司 Low-power consumption wisdom thing networking intelligent water gauge

Family Cites Families (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP3580645B2 (en) * 1996-08-12 2004-10-27 忠弘 大見 Pressure type flow controller
US6062256A (en) * 1997-02-11 2000-05-16 Engineering Measurements Company Micro mass flow control apparatus and method
US6578435B2 (en) * 1999-11-23 2003-06-17 Nt International, Inc. Chemically inert flow control with non-contaminating body
JP2001341013A (en) * 2000-05-31 2001-12-11 Yamazaki Mazak Corp Inner diameter working method
US6597580B2 (en) * 2001-11-30 2003-07-22 Agilent Technologies, Inc. Flexible shielded circuit board interface

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
TWI495851B (en) * 2009-10-01 2015-08-11 Horiba Stec Co Flow measuring apparatus, mass flow controller and pressure sensor
US9605985B2 (en) 2009-10-01 2017-03-28 Horiba Stec, Co., Ltd. Flow rate measuring mechanism, mass flow controller, and pressure sensor

Also Published As

Publication number Publication date
CN101258351A (en) 2008-09-03
TWI421660B (en) 2014-01-01

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