TW200736408A - Coating system for multi-stage recycle and reuse of the coating substance and gas - Google Patents

Coating system for multi-stage recycle and reuse of the coating substance and gas

Info

Publication number
TW200736408A
TW200736408A TW095111036A TW95111036A TW200736408A TW 200736408 A TW200736408 A TW 200736408A TW 095111036 A TW095111036 A TW 095111036A TW 95111036 A TW95111036 A TW 95111036A TW 200736408 A TW200736408 A TW 200736408A
Authority
TW
Taiwan
Prior art keywords
gas
coating
reaction chamber
reuse
vacuum
Prior art date
Application number
TW095111036A
Other languages
English (en)
Chinese (zh)
Other versions
TWI311590B (enExample
Inventor
Chia-Ming Hsu
Original Assignee
Univ Chienkuo Technology
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Univ Chienkuo Technology filed Critical Univ Chienkuo Technology
Priority to TW095111036A priority Critical patent/TW200736408A/zh
Publication of TW200736408A publication Critical patent/TW200736408A/zh
Application granted granted Critical
Publication of TWI311590B publication Critical patent/TWI311590B/zh

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  • Chemical Vapour Deposition (AREA)
  • Organic Low-Molecular-Weight Compounds And Preparation Thereof (AREA)
TW095111036A 2006-03-29 2006-03-29 Coating system for multi-stage recycle and reuse of the coating substance and gas TW200736408A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
TW095111036A TW200736408A (en) 2006-03-29 2006-03-29 Coating system for multi-stage recycle and reuse of the coating substance and gas

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
TW095111036A TW200736408A (en) 2006-03-29 2006-03-29 Coating system for multi-stage recycle and reuse of the coating substance and gas

Publications (2)

Publication Number Publication Date
TW200736408A true TW200736408A (en) 2007-10-01
TWI311590B TWI311590B (enExample) 2009-07-01

Family

ID=45072454

Family Applications (1)

Application Number Title Priority Date Filing Date
TW095111036A TW200736408A (en) 2006-03-29 2006-03-29 Coating system for multi-stage recycle and reuse of the coating substance and gas

Country Status (1)

Country Link
TW (1) TW200736408A (enExample)

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN110508333A (zh) * 2019-09-04 2019-11-29 北京国科环宇科技股份有限公司 一种真空实验系统及实现方法
CN112438727A (zh) * 2020-12-08 2021-03-05 北京海洋海泰科技有限公司 真空金属镀膜手印显现系统
CN113830049A (zh) * 2021-09-26 2021-12-24 浙江吉利控股集团有限公司 真空气压复合补偿系统及车辆
CN118086839A (zh) * 2024-03-04 2024-05-28 正泰新能科技股份有限公司 气相输运沉积设备

Cited By (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN110508333A (zh) * 2019-09-04 2019-11-29 北京国科环宇科技股份有限公司 一种真空实验系统及实现方法
CN112438727A (zh) * 2020-12-08 2021-03-05 北京海洋海泰科技有限公司 真空金属镀膜手印显现系统
CN112438727B (zh) * 2020-12-08 2024-05-17 北京海洋海泰科技有限公司 真空金属镀膜手印显现系统
CN113830049A (zh) * 2021-09-26 2021-12-24 浙江吉利控股集团有限公司 真空气压复合补偿系统及车辆
CN113830049B (zh) * 2021-09-26 2022-07-15 浙江吉利控股集团有限公司 真空气压复合补偿系统及车辆
CN118086839A (zh) * 2024-03-04 2024-05-28 正泰新能科技股份有限公司 气相输运沉积设备

Also Published As

Publication number Publication date
TWI311590B (enExample) 2009-07-01

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Legal Events

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MM4A Annulment or lapse of patent due to non-payment of fees