TW200726531A - Optical processing equipment having substrate cleansing device and processing method used thereby - Google Patents

Optical processing equipment having substrate cleansing device and processing method used thereby

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Publication number
TW200726531A
TW200726531A TW095101316A TW95101316A TW200726531A TW 200726531 A TW200726531 A TW 200726531A TW 095101316 A TW095101316 A TW 095101316A TW 95101316 A TW95101316 A TW 95101316A TW 200726531 A TW200726531 A TW 200726531A
Authority
TW
Taiwan
Prior art keywords
substrate
optical processing
cleansing device
method used
processing equipment
Prior art date
Application number
TW095101316A
Other languages
Chinese (zh)
Other versions
TWI268814B (en
Inventor
Feng-Zhong Li
Wen-Bin Li
Original Assignee
Au Optronics Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Au Optronics Corp filed Critical Au Optronics Corp
Priority to TW95101316A priority Critical patent/TWI268814B/en
Application granted granted Critical
Publication of TWI268814B publication Critical patent/TWI268814B/en
Publication of TW200726531A publication Critical patent/TW200726531A/en

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  • Cleaning In General (AREA)

Abstract

The present invention is to provide a substrate cleansing device, optical processing equipment having the same, and a processing method used thereby. The optical processing equipment mainly comprises a substrate cleansing device, an optical processing platform and a material spreading device. The optical processing platform has a substrate base; the material spreading device is preferably disposed on the substrate base and capable of moving in relation to the substrate base; the substrate cleansing device mainly comprises a venting device and a gas supplier; the venting device is disposed at the front end corresponding to the material spreading device; the gas supplier is connected to the venting device for providing gas to the venting device. In front of the substrate or the film on the substrate base of the material spreading device, the substrate cleansing device may emit gas onto the substrate or the film so as to remove the dust or other particles thereon.
TW95101316A 2006-01-13 2006-01-13 Optical processing equipment having substrate cleansing device and processing method used thereby TWI268814B (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
TW95101316A TWI268814B (en) 2006-01-13 2006-01-13 Optical processing equipment having substrate cleansing device and processing method used thereby

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
TW95101316A TWI268814B (en) 2006-01-13 2006-01-13 Optical processing equipment having substrate cleansing device and processing method used thereby

Publications (2)

Publication Number Publication Date
TWI268814B TWI268814B (en) 2006-12-21
TW200726531A true TW200726531A (en) 2007-07-16

Family

ID=38291341

Family Applications (1)

Application Number Title Priority Date Filing Date
TW95101316A TWI268814B (en) 2006-01-13 2006-01-13 Optical processing equipment having substrate cleansing device and processing method used thereby

Country Status (1)

Country Link
TW (1) TWI268814B (en)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
TWI382555B (en) * 2008-09-19 2013-01-11 Neo Solar Power Corp Processing apparatus
TWI380856B (en) * 2009-05-07 2013-01-01 Univ Minghsin Sci & Tech Glass substrate cleaning apparatus and method

Also Published As

Publication number Publication date
TWI268814B (en) 2006-12-21

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Legal Events

Date Code Title Description
MM4A Annulment or lapse of patent due to non-payment of fees