TW200726531A - Optical processing equipment having substrate cleansing device and processing method used thereby - Google Patents
Optical processing equipment having substrate cleansing device and processing method used therebyInfo
- Publication number
- TW200726531A TW200726531A TW095101316A TW95101316A TW200726531A TW 200726531 A TW200726531 A TW 200726531A TW 095101316 A TW095101316 A TW 095101316A TW 95101316 A TW95101316 A TW 95101316A TW 200726531 A TW200726531 A TW 200726531A
- Authority
- TW
- Taiwan
- Prior art keywords
- substrate
- optical processing
- cleansing device
- method used
- processing equipment
- Prior art date
Links
Landscapes
- Cleaning In General (AREA)
Abstract
The present invention is to provide a substrate cleansing device, optical processing equipment having the same, and a processing method used thereby. The optical processing equipment mainly comprises a substrate cleansing device, an optical processing platform and a material spreading device. The optical processing platform has a substrate base; the material spreading device is preferably disposed on the substrate base and capable of moving in relation to the substrate base; the substrate cleansing device mainly comprises a venting device and a gas supplier; the venting device is disposed at the front end corresponding to the material spreading device; the gas supplier is connected to the venting device for providing gas to the venting device. In front of the substrate or the film on the substrate base of the material spreading device, the substrate cleansing device may emit gas onto the substrate or the film so as to remove the dust or other particles thereon.
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
TW95101316A TWI268814B (en) | 2006-01-13 | 2006-01-13 | Optical processing equipment having substrate cleansing device and processing method used thereby |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
TW95101316A TWI268814B (en) | 2006-01-13 | 2006-01-13 | Optical processing equipment having substrate cleansing device and processing method used thereby |
Publications (2)
Publication Number | Publication Date |
---|---|
TWI268814B TWI268814B (en) | 2006-12-21 |
TW200726531A true TW200726531A (en) | 2007-07-16 |
Family
ID=38291341
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
TW95101316A TWI268814B (en) | 2006-01-13 | 2006-01-13 | Optical processing equipment having substrate cleansing device and processing method used thereby |
Country Status (1)
Country | Link |
---|---|
TW (1) | TWI268814B (en) |
Families Citing this family (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
TWI382555B (en) * | 2008-09-19 | 2013-01-11 | Neo Solar Power Corp | Processing apparatus |
TWI380856B (en) * | 2009-05-07 | 2013-01-01 | Univ Minghsin Sci & Tech | Glass substrate cleaning apparatus and method |
-
2006
- 2006-01-13 TW TW95101316A patent/TWI268814B/en not_active IP Right Cessation
Also Published As
Publication number | Publication date |
---|---|
TWI268814B (en) | 2006-12-21 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
MM4A | Annulment or lapse of patent due to non-payment of fees |