TW200725953A - Soft piezoelectric plate structure and synthetic method - Google Patents
Soft piezoelectric plate structure and synthetic methodInfo
- Publication number
- TW200725953A TW200725953A TW094147328A TW94147328A TW200725953A TW 200725953 A TW200725953 A TW 200725953A TW 094147328 A TW094147328 A TW 094147328A TW 94147328 A TW94147328 A TW 94147328A TW 200725953 A TW200725953 A TW 200725953A
- Authority
- TW
- Taiwan
- Prior art keywords
- plate structure
- synthetic method
- piezoelectric plate
- electrode layer
- soft piezoelectric
- Prior art date
Links
Landscapes
- General Electrical Machinery Utilizing Piezoelectricity, Electrostriction Or Magnetostriction (AREA)
- Piezo-Electric Transducers For Audible Bands (AREA)
- Transducers For Ultrasonic Waves (AREA)
Abstract
A soft piezoelectric plate structure and synthetic method thereof is provided. The soft piezoelectric plate structure is composed of a substrate, a bottom electrode layer, a piezoelectric film and a surface electrode layer. The bottom electrode layer is on the substrate. The piezoelectric film is on the substrate and the bottom electrode layer. The piezoelectric film has a continuous piezoelectric phase. The surface electrode layer is on the piezoelectric film.
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
TW94147328A TWI290778B (en) | 2005-12-29 | 2005-12-29 | Soft piezoelectric plate structure and synthetic method |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
TW94147328A TWI290778B (en) | 2005-12-29 | 2005-12-29 | Soft piezoelectric plate structure and synthetic method |
Publications (2)
Publication Number | Publication Date |
---|---|
TW200725953A true TW200725953A (en) | 2007-07-01 |
TWI290778B TWI290778B (en) | 2007-12-01 |
Family
ID=39327589
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
TW94147328A TWI290778B (en) | 2005-12-29 | 2005-12-29 | Soft piezoelectric plate structure and synthetic method |
Country Status (1)
Country | Link |
---|---|
TW (1) | TWI290778B (en) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
TWI399337B (en) * | 2009-12-21 | 2013-06-21 | Univ Nat Cheng Kung | Method for manufacturing nano-sensor |
Families Citing this family (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
TWI393279B (en) * | 2009-12-07 | 2013-04-11 | Nat Univ Chung Hsing | High pressure electrical properties of lead zirconate titanate silicon dioxide flexible film and its preparation method |
TWI406639B (en) * | 2010-04-21 | 2013-09-01 | 私立中原大學 | Security umbrella |
-
2005
- 2005-12-29 TW TW94147328A patent/TWI290778B/en active
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
TWI399337B (en) * | 2009-12-21 | 2013-06-21 | Univ Nat Cheng Kung | Method for manufacturing nano-sensor |
Also Published As
Publication number | Publication date |
---|---|
TWI290778B (en) | 2007-12-01 |
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