TW200725792A - Head movement controlling apparatus, controlling method and platform apparatus - Google Patents

Head movement controlling apparatus, controlling method and platform apparatus

Info

Publication number
TW200725792A
TW200725792A TW095133315A TW95133315A TW200725792A TW 200725792 A TW200725792 A TW 200725792A TW 095133315 A TW095133315 A TW 095133315A TW 95133315 A TW95133315 A TW 95133315A TW 200725792 A TW200725792 A TW 200725792A
Authority
TW
Taiwan
Prior art keywords
processing
head
yaw angle
correction quantity
controlling
Prior art date
Application number
TW095133315A
Other languages
Chinese (zh)
Other versions
TWI340305B (en
Inventor
Yasuo Minami
Original Assignee
Sumitomo Heavy Industries
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Sumitomo Heavy Industries filed Critical Sumitomo Heavy Industries
Publication of TW200725792A publication Critical patent/TW200725792A/en
Application granted granted Critical
Publication of TWI340305B publication Critical patent/TWI340305B/zh

Links

Abstract

The topic of this invention is correcting the deviation of several processing points of several heads and work pieces producing the inclination from the yaw angle. The solving means is using a head movement controlling apparatus 31 having correction quantity calculation section 441 ~ 445 and judgment section 461 ~ 465. The correction quantity calculation section 441 calculates the correction quantity Δ T corresponding to the yaw angle by using Y1, Y2 laser interferometer 36, 37 to calculate the difference distance (L1-L2) from measuring distance L1, L2. The judgment section 461 ~ 465 decides whether the value of correction distance L1 +/- Δ T agrees with the processing position or not. It will output the processing signals of head 301 ~ 305 in agreement condition. The head 301 ~ 305 corresponding to the yaw angle θ can shift and process at fixed time. It can carry out processing at a fixed time when the processing points of the base board placed in the movable plate 20 agrees with the processing point of head 301 ~ 305.
TW095133315A 2005-09-13 2006-09-08 Head movement controlling apparatus, controlling method and platform apparatus TW200725792A (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2005265785A JP4291313B2 (en) 2005-09-13 2005-09-13 Head operation control device, control method, and stage device

Publications (2)

Publication Number Publication Date
TW200725792A true TW200725792A (en) 2007-07-01
TWI340305B TWI340305B (en) 2011-04-11

Family

ID=37940091

Family Applications (1)

Application Number Title Priority Date Filing Date
TW095133315A TW200725792A (en) 2005-09-13 2006-09-08 Head movement controlling apparatus, controlling method and platform apparatus

Country Status (3)

Country Link
JP (1) JP4291313B2 (en)
CN (1) CN1945484B (en)
TW (1) TW200725792A (en)

Families Citing this family (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP5317627B2 (en) * 2008-10-28 2013-10-16 株式会社牧野フライス製作所 Error correction method
CN104820344A (en) * 2015-03-31 2015-08-05 合肥芯硕半导体有限公司 Precision positioning platform Yaw value measurement method
CN109541898B (en) * 2017-09-21 2020-05-01 上海微电子装备（集团）股份有限公司 Method for calibrating positioning error of planar grating ruler
CN112394678A (en) * 2019-08-13 2021-02-23 宝山钢铁股份有限公司 Control method for detecting cutting deviation of plate blank

Family Cites Families (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5847960A (en) * 1995-03-20 1998-12-08 Electro Scientific Industries, Inc. Multi-tool positioning system
CN1099938C (en) * 1996-11-07 2003-01-29 大隈株式会社 Error correction appts. for NC machine tool
CN100437407C (en) * 2000-01-11 2008-11-26 电子科学工业公司 Abbe error correction system and method

Also Published As

Publication number Publication date
JP2007079837A (en) 2007-03-29
JP4291313B2 (en) 2009-07-08
CN1945484B (en) 2010-06-02
TWI340305B (en) 2011-04-11
CN1945484A (en) 2007-04-11

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Legal Events

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MM4A Annulment or lapse of patent due to non-payment of fees