TW200725791A - Tool and method for positing substrate - Google Patents

Tool and method for positing substrate

Info

Publication number
TW200725791A
TW200725791A TW094145493A TW94145493A TW200725791A TW 200725791 A TW200725791 A TW 200725791A TW 094145493 A TW094145493 A TW 094145493A TW 94145493 A TW94145493 A TW 94145493A TW 200725791 A TW200725791 A TW 200725791A
Authority
TW
Taiwan
Prior art keywords
positing
substrate
opening
fixing blocks
blocks
Prior art date
Application number
TW094145493A
Other languages
Chinese (zh)
Other versions
TWI290750B (en
Inventor
Yb Wong
Original Assignee
Advanced Semiconductor Eng
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Advanced Semiconductor Eng filed Critical Advanced Semiconductor Eng
Priority to TW94145493A priority Critical patent/TWI290750B/en
Publication of TW200725791A publication Critical patent/TW200725791A/en
Application granted granted Critical
Publication of TWI290750B publication Critical patent/TWI290750B/en

Links

Landscapes

  • Auxiliary Devices For Machine Tools (AREA)
  • Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)

Abstract

A substrate positing tool including a horizontal positing base, multiple fixing blocks, and multiple movable blocks is provided. The horizontal positing base has an opening and multiple baffle plates extended to the opening, and the fixing blocks are disposed on the inner edge of the opening. In additional, the movable blocks corresponding to the fixing blocks are also disposed on the inner edge of the opening. Thus, a substrate is suitable for pushing to attach the baffle plates, and the fixing blocks and the movable blocks are individually disposed aside the substrate.
TW94145493A 2005-12-21 2005-12-21 Tool and method for positing substrate TWI290750B (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
TW94145493A TWI290750B (en) 2005-12-21 2005-12-21 Tool and method for positing substrate

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
TW94145493A TWI290750B (en) 2005-12-21 2005-12-21 Tool and method for positing substrate

Publications (2)

Publication Number Publication Date
TW200725791A true TW200725791A (en) 2007-07-01
TWI290750B TWI290750B (en) 2007-12-01

Family

ID=39327577

Family Applications (1)

Application Number Title Priority Date Filing Date
TW94145493A TWI290750B (en) 2005-12-21 2005-12-21 Tool and method for positing substrate

Country Status (1)

Country Link
TW (1) TWI290750B (en)

Also Published As

Publication number Publication date
TWI290750B (en) 2007-12-01

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