TW200725791A - Tool and method for positing substrate - Google Patents
Tool and method for positing substrateInfo
- Publication number
- TW200725791A TW200725791A TW094145493A TW94145493A TW200725791A TW 200725791 A TW200725791 A TW 200725791A TW 094145493 A TW094145493 A TW 094145493A TW 94145493 A TW94145493 A TW 94145493A TW 200725791 A TW200725791 A TW 200725791A
- Authority
- TW
- Taiwan
- Prior art keywords
- positing
- substrate
- opening
- fixing blocks
- blocks
- Prior art date
Links
Landscapes
- Auxiliary Devices For Machine Tools (AREA)
- Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
Abstract
A substrate positing tool including a horizontal positing base, multiple fixing blocks, and multiple movable blocks is provided. The horizontal positing base has an opening and multiple baffle plates extended to the opening, and the fixing blocks are disposed on the inner edge of the opening. In additional, the movable blocks corresponding to the fixing blocks are also disposed on the inner edge of the opening. Thus, a substrate is suitable for pushing to attach the baffle plates, and the fixing blocks and the movable blocks are individually disposed aside the substrate.
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
TW94145493A TWI290750B (en) | 2005-12-21 | 2005-12-21 | Tool and method for positing substrate |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
TW94145493A TWI290750B (en) | 2005-12-21 | 2005-12-21 | Tool and method for positing substrate |
Publications (2)
Publication Number | Publication Date |
---|---|
TW200725791A true TW200725791A (en) | 2007-07-01 |
TWI290750B TWI290750B (en) | 2007-12-01 |
Family
ID=39327577
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
TW94145493A TWI290750B (en) | 2005-12-21 | 2005-12-21 | Tool and method for positing substrate |
Country Status (1)
Country | Link |
---|---|
TW (1) | TWI290750B (en) |
-
2005
- 2005-12-21 TW TW94145493A patent/TWI290750B/en active
Also Published As
Publication number | Publication date |
---|---|
TWI290750B (en) | 2007-12-01 |
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