TW200725447A - Method and system for automatically wafer dispatching - Google Patents

Method and system for automatically wafer dispatching

Info

Publication number
TW200725447A
TW200725447A TW094146100A TW94146100A TW200725447A TW 200725447 A TW200725447 A TW 200725447A TW 094146100 A TW094146100 A TW 094146100A TW 94146100 A TW94146100 A TW 94146100A TW 200725447 A TW200725447 A TW 200725447A
Authority
TW
Taiwan
Prior art keywords
sheet
dispatching
wafer boat
tool
automatically
Prior art date
Application number
TW094146100A
Other languages
Chinese (zh)
Other versions
TWI296096B (en
Inventor
I-Hui Chang
Original Assignee
Taiwan Semiconductor Mfg Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Taiwan Semiconductor Mfg Co Ltd filed Critical Taiwan Semiconductor Mfg Co Ltd
Priority to TW094146100A priority Critical patent/TWI296096B/en
Publication of TW200725447A publication Critical patent/TW200725447A/en
Application granted granted Critical
Publication of TWI296096B publication Critical patent/TWI296096B/en

Links

Classifications

    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
    • Y02P—CLIMATE CHANGE MITIGATION TECHNOLOGIES IN THE PRODUCTION OR PROCESSING OF GOODS
    • Y02P90/00—Enabling technologies with a potential contribution to greenhouse gas [GHG] emissions mitigation
    • Y02P90/02—Total factory control, e.g. smart factories, flexible manufacturing systems [FMS] or integrated manufacturing systems [IMS]

Landscapes

  • Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
  • General Factory Administration (AREA)

Abstract

A method for automatically wafer dispatching. A tool sheet and a wafer boat sheet are provided. Dispatching criterion is defined according to the tool sheet or the wafer boat sheet. Calculation is implemented to data comprised in the tool sheet and the wafer boat sheet according to the dispatching criterion using an intelligent algorithm to obtain an index value. The data comprised in the tool sheet and the wafer boat sheet is sorted according to the index value.
TW094146100A 2005-12-23 2005-12-23 Method and system for automatically wafer dispatching TWI296096B (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
TW094146100A TWI296096B (en) 2005-12-23 2005-12-23 Method and system for automatically wafer dispatching

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
TW094146100A TWI296096B (en) 2005-12-23 2005-12-23 Method and system for automatically wafer dispatching

Publications (2)

Publication Number Publication Date
TW200725447A true TW200725447A (en) 2007-07-01
TWI296096B TWI296096B (en) 2008-04-21

Family

ID=45068647

Family Applications (1)

Application Number Title Priority Date Filing Date
TW094146100A TWI296096B (en) 2005-12-23 2005-12-23 Method and system for automatically wafer dispatching

Country Status (1)

Country Link
TW (1) TWI296096B (en)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
TWI575561B (en) * 2013-12-09 2017-03-21 格羅方德半導體公司 Method, storage medium and system for controlling the processing of lots of workpieces
CN112614795A (en) * 2020-12-16 2021-04-06 上海华力微电子有限公司 Dispatching optimization method of furnace tube process
CN112907014A (en) * 2019-12-03 2021-06-04 财团法人工业技术研究院 Fast screening dispatching rule method and device

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
TWI385589B (en) * 2009-03-17 2013-02-11 Univ Nat Taiwan Science Tech System and method for multi-objective capacity planning in panel

Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
TWI575561B (en) * 2013-12-09 2017-03-21 格羅方德半導體公司 Method, storage medium and system for controlling the processing of lots of workpieces
US9748088B2 (en) 2013-12-09 2017-08-29 Globalfoundries Inc. Method, storage medium and system for controlling the processing of lots of workpieces
CN112907014A (en) * 2019-12-03 2021-06-04 财团法人工业技术研究院 Fast screening dispatching rule method and device
CN112614795A (en) * 2020-12-16 2021-04-06 上海华力微电子有限公司 Dispatching optimization method of furnace tube process
CN112614795B (en) * 2020-12-16 2023-08-18 上海华力微电子有限公司 Dispatching optimization method for furnace tube process

Also Published As

Publication number Publication date
TWI296096B (en) 2008-04-21

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