TW200720544A - Idt electroded piezoelectric diaphragms - Google Patents

Idt electroded piezoelectric diaphragms

Info

Publication number
TW200720544A
TW200720544A TW094141399A TW94141399A TW200720544A TW 200720544 A TW200720544 A TW 200720544A TW 094141399 A TW094141399 A TW 094141399A TW 94141399 A TW94141399 A TW 94141399A TW 200720544 A TW200720544 A TW 200720544A
Authority
TW
Taiwan
Prior art keywords
region
central
idt
diaphragms
electrode
Prior art date
Application number
TW094141399A
Other languages
Chinese (zh)
Inventor
Susan Trolier-Mckinstry
Carl Baldwin Freidhoff
Silai V Krishnaswamy
Euniki Hong
Original Assignee
Penn State Res Found
Northrop Grumman Corp Corporate Headquarters
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Penn State Res Found, Northrop Grumman Corp Corporate Headquarters filed Critical Penn State Res Found
Publication of TW200720544A publication Critical patent/TW200720544A/en

Links

Landscapes

  • Reciprocating Pumps (AREA)

Abstract

The disclosed invention relates to achieving micromachined piezoelectrically-actuated diaphragms. The piezoelectric diaphragm includes a central, inactive electrode free region and an annular shaped interdigitated electrode adjacent to the outer periphery of the central region. The diaphragm also may have an inactive annular, electrode free region and an active central, interdigitated electrode region. The diaphragms may be used in, such as, miniature pumps. The pumps may include a plurality of chambers to generate peristaltic pumping of fluids.
TW094141399A 2004-11-26 2005-11-25 Idt electroded piezoelectric diaphragms TW200720544A (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US2004996604 2004-11-26

Publications (1)

Publication Number Publication Date
TW200720544A true TW200720544A (en) 2007-06-01

Family

ID=57912025

Family Applications (1)

Application Number Title Priority Date Filing Date
TW094141399A TW200720544A (en) 2004-11-26 2005-11-25 Idt electroded piezoelectric diaphragms

Country Status (1)

Country Link
TW (1) TW200720544A (en)

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