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Application filed by Penn State Res Found, Northrop Grumman Corp Corporate HeadquartersfiledCriticalPenn State Res Found
Publication of TW200720544ApublicationCriticalpatent/TW200720544A/en
The disclosed invention relates to achieving micromachined piezoelectrically-actuated diaphragms. The piezoelectric diaphragm includes a central, inactive electrode free region and an annular shaped interdigitated electrode adjacent to the outer periphery of the central region. The diaphragm also may have an inactive annular, electrode free region and an active central, interdigitated electrode region. The diaphragms may be used in, such as, miniature pumps. The pumps may include a plurality of chambers to generate peristaltic pumping of fluids.