TW200716480A - Method for fabrication of carbon nanotubes - Google Patents
Method for fabrication of carbon nanotubesInfo
- Publication number
- TW200716480A TW200716480A TW094137919A TW94137919A TW200716480A TW 200716480 A TW200716480 A TW 200716480A TW 094137919 A TW094137919 A TW 094137919A TW 94137919 A TW94137919 A TW 94137919A TW 200716480 A TW200716480 A TW 200716480A
- Authority
- TW
- Taiwan
- Prior art keywords
- carbon nanotubes
- fabrication
- spin coating
- magnetic fluid
- substrate
- Prior art date
Links
Landscapes
- Carbon And Carbon Compounds (AREA)
Abstract
This invention relates to a method for fabrication of carbon nanotubes. The method includes the following steps: providing a magnetic fluid and a substrate having two opposite surfaces, and spin coating the magnetic fluid on the two opposite surfaces for forming Catalyst layers thereon; loading the substrate into a chemical vapor deposition chamber; and introducing a gaseous carbon-containing source into the chamber for carbon nanotubes growth. Because the method of spin coating can simplify a fabrication process of the catalyst layer, and even has a low cost, therefore, this present invention can effectively lower the fabrication cost. Furthermore, the process of spin coating the magnetic fluid on the two opposite surface can effectively increase an area for carbon nanotubes growth.
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
TW094137919A TW200716480A (en) | 2005-10-28 | 2005-10-28 | Method for fabrication of carbon nanotubes |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
TW094137919A TW200716480A (en) | 2005-10-28 | 2005-10-28 | Method for fabrication of carbon nanotubes |
Publications (1)
Publication Number | Publication Date |
---|---|
TW200716480A true TW200716480A (en) | 2007-05-01 |
Family
ID=57911664
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
TW094137919A TW200716480A (en) | 2005-10-28 | 2005-10-28 | Method for fabrication of carbon nanotubes |
Country Status (1)
Country | Link |
---|---|
TW (1) | TW200716480A (en) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
TWI648809B (en) * | 2014-03-24 | 2019-01-21 | 德商愛思強歐洲公司 | a substrate carrier carrying a substrate on each of its two broad sides and a CVD reactor including the substrate carrier |
-
2005
- 2005-10-28 TW TW094137919A patent/TW200716480A/en unknown
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
TWI648809B (en) * | 2014-03-24 | 2019-01-21 | 德商愛思強歐洲公司 | a substrate carrier carrying a substrate on each of its two broad sides and a CVD reactor including the substrate carrier |
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