TW200716480A - Method for fabrication of carbon nanotubes - Google Patents

Method for fabrication of carbon nanotubes

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Publication number
TW200716480A
TW200716480A TW094137919A TW94137919A TW200716480A TW 200716480 A TW200716480 A TW 200716480A TW 094137919 A TW094137919 A TW 094137919A TW 94137919 A TW94137919 A TW 94137919A TW 200716480 A TW200716480 A TW 200716480A
Authority
TW
Taiwan
Prior art keywords
carbon nanotubes
fabrication
spin coating
magnetic fluid
substrate
Prior art date
Application number
TW094137919A
Other languages
Chinese (zh)
Inventor
Chi-Chuang Ho
Original Assignee
Hon Hai Prec Ind Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hon Hai Prec Ind Co Ltd filed Critical Hon Hai Prec Ind Co Ltd
Priority to TW094137919A priority Critical patent/TW200716480A/en
Publication of TW200716480A publication Critical patent/TW200716480A/en

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Abstract

This invention relates to a method for fabrication of carbon nanotubes. The method includes the following steps: providing a magnetic fluid and a substrate having two opposite surfaces, and spin coating the magnetic fluid on the two opposite surfaces for forming Catalyst layers thereon; loading the substrate into a chemical vapor deposition chamber; and introducing a gaseous carbon-containing source into the chamber for carbon nanotubes growth. Because the method of spin coating can simplify a fabrication process of the catalyst layer, and even has a low cost, therefore, this present invention can effectively lower the fabrication cost. Furthermore, the process of spin coating the magnetic fluid on the two opposite surface can effectively increase an area for carbon nanotubes growth.
TW094137919A 2005-10-28 2005-10-28 Method for fabrication of carbon nanotubes TW200716480A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
TW094137919A TW200716480A (en) 2005-10-28 2005-10-28 Method for fabrication of carbon nanotubes

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
TW094137919A TW200716480A (en) 2005-10-28 2005-10-28 Method for fabrication of carbon nanotubes

Publications (1)

Publication Number Publication Date
TW200716480A true TW200716480A (en) 2007-05-01

Family

ID=57911664

Family Applications (1)

Application Number Title Priority Date Filing Date
TW094137919A TW200716480A (en) 2005-10-28 2005-10-28 Method for fabrication of carbon nanotubes

Country Status (1)

Country Link
TW (1) TW200716480A (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
TWI648809B (en) * 2014-03-24 2019-01-21 德商愛思強歐洲公司 a substrate carrier carrying a substrate on each of its two broad sides and a CVD reactor including the substrate carrier

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
TWI648809B (en) * 2014-03-24 2019-01-21 德商愛思強歐洲公司 a substrate carrier carrying a substrate on each of its two broad sides and a CVD reactor including the substrate carrier

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