TW200714734A - Apparatus and method for making carbon nanotubes - Google Patents

Apparatus and method for making carbon nanotubes

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Publication number
TW200714734A
TW200714734A TW094135962A TW94135962A TW200714734A TW 200714734 A TW200714734 A TW 200714734A TW 094135962 A TW094135962 A TW 094135962A TW 94135962 A TW94135962 A TW 94135962A TW 200714734 A TW200714734 A TW 200714734A
Authority
TW
Taiwan
Prior art keywords
carbon nanotubes
making
making carbon
reaction chamber
substrate holder
Prior art date
Application number
TW094135962A
Other languages
Chinese (zh)
Other versions
TWI346715B (en
Inventor
Bor-Yuan Hsiao
Original Assignee
Hon Hai Prec Ind Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hon Hai Prec Ind Co Ltd filed Critical Hon Hai Prec Ind Co Ltd
Priority to TW094135962A priority Critical patent/TWI346715B/en
Publication of TW200714734A publication Critical patent/TW200714734A/en
Application granted granted Critical
Publication of TWI346715B publication Critical patent/TWI346715B/en

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Abstract

The present invention relates to an apparatus for making carbon nanotubes. The apparatus includes a reaction chamber, a substrate holder set in the reaction chamber, and a lift device used to lift the substrate holder during a process for carbon nanotubes growth. The present invention also provides a method for making nanotubes by making use of the apparatus.
TW094135962A 2005-10-14 2005-10-14 Apparatus and method for making carbon nanotubes TWI346715B (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
TW094135962A TWI346715B (en) 2005-10-14 2005-10-14 Apparatus and method for making carbon nanotubes

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
TW094135962A TWI346715B (en) 2005-10-14 2005-10-14 Apparatus and method for making carbon nanotubes

Publications (2)

Publication Number Publication Date
TW200714734A true TW200714734A (en) 2007-04-16
TWI346715B TWI346715B (en) 2011-08-11

Family

ID=55855816

Family Applications (1)

Application Number Title Priority Date Filing Date
TW094135962A TWI346715B (en) 2005-10-14 2005-10-14 Apparatus and method for making carbon nanotubes

Country Status (1)

Country Link
TW (1) TWI346715B (en)

Also Published As

Publication number Publication date
TWI346715B (en) 2011-08-11

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Legal Events

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MM4A Annulment or lapse of patent due to non-payment of fees