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Application filed by Hon Hai Prec Ind Co LtdfiledCriticalHon Hai Prec Ind Co Ltd
Priority to TW094135962ApriorityCriticalpatent/TWI346715B/en
Publication of TW200714734ApublicationCriticalpatent/TW200714734A/en
Application grantedgrantedCritical
Publication of TWI346715BpublicationCriticalpatent/TWI346715B/en
The present invention relates to an apparatus for making carbon nanotubes. The apparatus includes a reaction chamber, a substrate holder set in the reaction chamber, and a lift device used to lift the substrate holder during a process for carbon nanotubes growth. The present invention also provides a method for making nanotubes by making use of the apparatus.
TW094135962A2005-10-142005-10-14Apparatus and method for making carbon nanotubes
TWI346715B
(en)
Method for the removal of deposition on an optical element, method for the protection of an optical element, device manufacturing method, apparatus including an optical element, and lithographic apparatus
Catalyst for carbon nanostructure growth, process for producing carbon nanostructure, raw-material gas and carrier gas for producing the same, and apparatus for producing the same