TW200714414A - Polishing pad and method for manufacturing polishing pads - Google Patents
Polishing pad and method for manufacturing polishing padsInfo
- Publication number
- TW200714414A TW200714414A TW095131394A TW95131394A TW200714414A TW 200714414 A TW200714414 A TW 200714414A TW 095131394 A TW095131394 A TW 095131394A TW 95131394 A TW95131394 A TW 95131394A TW 200714414 A TW200714414 A TW 200714414A
- Authority
- TW
- Taiwan
- Prior art keywords
- particles
- polymer
- polishing pad
- polishing
- manufacturing
- Prior art date
Links
Classifications
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B24—GRINDING; POLISHING
- B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
- B24B37/00—Lapping machines or devices; Accessories
- B24B37/11—Lapping tools
- B24B37/20—Lapping pads for working plane surfaces
- B24B37/24—Lapping pads for working plane surfaces characterised by the composition or properties of the pad materials
- B24B37/245—Pads with fixed abrasives
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B24—GRINDING; POLISHING
- B24D—TOOLS FOR GRINDING, BUFFING OR SHARPENING
- B24D18/00—Manufacture of grinding tools or other grinding devices, e.g. wheels, not otherwise provided for
- B24D18/0009—Manufacture of grinding tools or other grinding devices, e.g. wheels, not otherwise provided for using moulds or presses
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B24—GRINDING; POLISHING
- B24D—TOOLS FOR GRINDING, BUFFING OR SHARPENING
- B24D3/00—Physical features of abrasive bodies, or sheets, e.g. abrasive surfaces of special nature; Abrasive bodies or sheets characterised by their constituents
- B24D3/34—Physical features of abrasive bodies, or sheets, e.g. abrasive surfaces of special nature; Abrasive bodies or sheets characterised by their constituents characterised by additives enhancing special physical properties, e.g. wear resistance, electric conductivity, self-cleaning properties
Landscapes
- Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- Manufacturing & Machinery (AREA)
- Mechanical Treatment Of Semiconductor (AREA)
- Finish Polishing, Edge Sharpening, And Grinding By Specific Grinding Devices (AREA)
- Polishing Bodies And Polishing Tools (AREA)
Abstract
A polishing pad comprising particles having an average diameter between 1 nanometer and 100 nanometers, wherein the total weight of the particles is greater than about 3% of the total weight of the pad. Also, a method of manufacturing a polishing pad comprises the steps of: mixing a pre-polymer and abrasive particles together; wherein the abrasive particles have an average diameter of between 1 nanometer and 100 nanometers in diameter, and wherein the abrasive particles comprise more than about 3% by weight of the polishing pad; mixing a curative with the mixed pre-polymer and particles; and pouring the mixture of pre-polymer, particles and curative into a mold. In one exemplary embodiment the particles are silica and the pre-polymer is a polyurethane pre-polymer.
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US11/162,068 US20070049164A1 (en) | 2005-08-26 | 2005-08-26 | Polishing pad and method for manufacturing polishing pads |
Publications (1)
Publication Number | Publication Date |
---|---|
TW200714414A true TW200714414A (en) | 2007-04-16 |
Family
ID=37603084
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
TW095131394A TW200714414A (en) | 2005-08-26 | 2006-08-25 | Polishing pad and method for manufacturing polishing pads |
Country Status (3)
Country | Link |
---|---|
US (1) | US20070049164A1 (en) |
TW (1) | TW200714414A (en) |
WO (1) | WO2007025226A1 (en) |
Cited By (7)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN112045557A (en) * | 2015-10-16 | 2020-12-08 | 应用材料公司 | Method and apparatus for forming advanced polishing pads using additive manufacturing processes |
CN114196327A (en) * | 2022-01-28 | 2022-03-18 | 淄博海泰新光光学技术有限公司 | Composite material for polishing optical parts and preparation method thereof |
US11446788B2 (en) | 2014-10-17 | 2022-09-20 | Applied Materials, Inc. | Precursor formulations for polishing pads produced by an additive manufacturing process |
US11724362B2 (en) | 2014-10-17 | 2023-08-15 | Applied Materials, Inc. | Polishing pads produced by an additive manufacturing process |
US11745302B2 (en) | 2014-10-17 | 2023-09-05 | Applied Materials, Inc. | Methods and precursor formulations for forming advanced polishing pads by use of an additive manufacturing process |
US11772229B2 (en) | 2016-01-19 | 2023-10-03 | Applied Materials, Inc. | Method and apparatus for forming porous advanced polishing pads using an additive manufacturing process |
US11958162B2 (en) | 2014-10-17 | 2024-04-16 | Applied Materials, Inc. | CMP pad construction with composite material properties using additive manufacturing processes |
Families Citing this family (7)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US7438636B2 (en) * | 2006-12-21 | 2008-10-21 | Rohm And Haas Electronic Materials Cmp Holdings, Inc. | Chemical mechanical polishing pad |
KR100881162B1 (en) * | 2008-03-28 | 2009-02-03 | 주식회사 세라코리 | Method for manufacturing a conditioning disc for polishing pad |
DE102009030297B3 (en) * | 2009-06-24 | 2011-01-20 | Siltronic Ag | Method for polishing a semiconductor wafer |
US8257152B2 (en) * | 2010-11-12 | 2012-09-04 | Rohm And Haas Electronic Materials Cmp Holdings, Inc. | Silicate composite polishing pad |
EP2997104A4 (en) * | 2013-05-15 | 2017-01-25 | Basf Se | Use of a chemical-mechanical polishing (cmp) composition for polishing a substrate or layer containing at least one iii-v material |
WO2015095154A1 (en) * | 2013-12-20 | 2015-06-25 | Cabot Corporation | Metal oxide-polymer composite particles for chemical mechanical planarization |
US10029346B2 (en) | 2015-10-16 | 2018-07-24 | Applied Materials, Inc. | External clamp ring for a chemical mechanical polishing carrier head |
Family Cites Families (10)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
KR100487455B1 (en) * | 1997-01-13 | 2005-05-09 | 롬 앤드 하스 일렉트로닉 머티리얼스 씨엠피 홀딩스, 인코포레이티드 | Polymeric Polishing Pad Having Photolithographically Induced Surface Pattern(s) and Methods Relating Thereto |
US6187824B1 (en) * | 1999-08-25 | 2001-02-13 | Nyacol Nano Technologies, Inc. | Zinc oxide sol and method of making |
KR100726303B1 (en) * | 2000-05-31 | 2007-06-13 | 제이에스알 가부시끼가이샤 | Abrasive Material |
JP4177100B2 (en) * | 2000-12-01 | 2008-11-05 | 東洋ゴム工業株式会社 | Polishing pad, method for producing the same, and cushion layer for polishing pad |
US6537665B2 (en) * | 2001-04-11 | 2003-03-25 | Nyacol Nano Technologies, Inc. | Nano-sized dispersible powders and method of making |
CN1268695C (en) * | 2001-09-11 | 2006-08-09 | 3M创新有限公司 | Smudge resistant nanocomposite hardcoats and methods for making same |
US6893476B2 (en) * | 2002-12-09 | 2005-05-17 | Dupont Air Products Nanomaterials Llc | Composition and associated methods for chemical mechanical planarization having high selectivity for metal removal |
WO2004053456A2 (en) * | 2002-12-09 | 2004-06-24 | Corning Incorporated | Method using multi-component colloidal abrasives for cmp processing of semiconductor and optical materials |
US6910951B2 (en) * | 2003-02-24 | 2005-06-28 | Dow Global Technologies, Inc. | Materials and methods for chemical-mechanical planarization |
DE602006010822D1 (en) * | 2005-01-28 | 2010-01-14 | Saint Gobain Abrasives Inc | GRINDING AND MANUFACTURING METHOD THEREFOR |
-
2005
- 2005-08-26 US US11/162,068 patent/US20070049164A1/en not_active Abandoned
-
2006
- 2006-08-25 TW TW095131394A patent/TW200714414A/en unknown
- 2006-08-25 WO PCT/US2006/033392 patent/WO2007025226A1/en active Application Filing
Cited By (7)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US11446788B2 (en) | 2014-10-17 | 2022-09-20 | Applied Materials, Inc. | Precursor formulations for polishing pads produced by an additive manufacturing process |
US11724362B2 (en) | 2014-10-17 | 2023-08-15 | Applied Materials, Inc. | Polishing pads produced by an additive manufacturing process |
US11745302B2 (en) | 2014-10-17 | 2023-09-05 | Applied Materials, Inc. | Methods and precursor formulations for forming advanced polishing pads by use of an additive manufacturing process |
US11958162B2 (en) | 2014-10-17 | 2024-04-16 | Applied Materials, Inc. | CMP pad construction with composite material properties using additive manufacturing processes |
CN112045557A (en) * | 2015-10-16 | 2020-12-08 | 应用材料公司 | Method and apparatus for forming advanced polishing pads using additive manufacturing processes |
US11772229B2 (en) | 2016-01-19 | 2023-10-03 | Applied Materials, Inc. | Method and apparatus for forming porous advanced polishing pads using an additive manufacturing process |
CN114196327A (en) * | 2022-01-28 | 2022-03-18 | 淄博海泰新光光学技术有限公司 | Composite material for polishing optical parts and preparation method thereof |
Also Published As
Publication number | Publication date |
---|---|
US20070049164A1 (en) | 2007-03-01 |
WO2007025226A1 (en) | 2007-03-01 |
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