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Application filed by Ind Tech Res Inst, Chi Lin Technology Co LtdfiledCriticalInd Tech Res Inst
Priority to TW94133325ApriorityCriticalpatent/TWI274189B/en
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Publication of TWI274189BpublicationCriticalpatent/TWI274189B/en
Publication of TW200712566ApublicationCriticalpatent/TW200712566A/en
A method of producing micro lens array structure. The method comprises the following steps: A substrate is provided. A mask is provided, which comprises a plurality of through holes arranged in an array with an appropriate distance between two through holes in a direction perpendicular to the mask moving direction. The mask is placed between a light source and the substrate. The mask is moved in a direction, whereby a plurality of continuous grooves is formed on the substrate and the junction of two grooves is sharp-angled.
TW94133325A2005-09-262005-09-26A method of producing micro lens array and mask ultilized in the method
TWI274189B
(en)