TW200712238A - Fixture for large-sized sheet of film-deposition - Google Patents

Fixture for large-sized sheet of film-deposition

Info

Publication number
TW200712238A
TW200712238A TW094130695A TW94130695A TW200712238A TW 200712238 A TW200712238 A TW 200712238A TW 094130695 A TW094130695 A TW 094130695A TW 94130695 A TW94130695 A TW 94130695A TW 200712238 A TW200712238 A TW 200712238A
Authority
TW
Taiwan
Prior art keywords
fixture
shanks
deposition
film
gear
Prior art date
Application number
TW094130695A
Other languages
Chinese (zh)
Other versions
TWI330668B (en
Inventor
Jin-Chi Cai
you-li Cai
Original Assignee
Bohhen Optronics Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Bohhen Optronics Co Ltd filed Critical Bohhen Optronics Co Ltd
Priority to TW094130695A priority Critical patent/TW200712238A/en
Publication of TW200712238A publication Critical patent/TW200712238A/en
Application granted granted Critical
Publication of TWI330668B publication Critical patent/TWI330668B/zh

Links

Landscapes

  • Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
  • Physical Vapour Deposition (AREA)

Abstract

The invention relates to a fixture for large-sized sheet of film-deposition. Mainly, a plurality of shanks extended through a bonding frame are disposed the bonding frame. One end of each of the shanks is engaged with a planetary gear. Another end of each of the shanks is connected with a clamp shelf. The planetary gears of the shanks simultaneously gnaw a sun gear with each other. Each of the clamp shelves is respectively locked with a wafer frame. By a driving shaft, a driving gear and a driven gear being gnawed with a driving gear, the bonding frame is operated. As a result, the sheet of film-deposition can be located in the fixture, and is in revolution and self-rotation at the same time.
TW094130695A 2005-09-07 2005-09-07 Fixture for large-sized sheet of film-deposition TW200712238A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
TW094130695A TW200712238A (en) 2005-09-07 2005-09-07 Fixture for large-sized sheet of film-deposition

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
TW094130695A TW200712238A (en) 2005-09-07 2005-09-07 Fixture for large-sized sheet of film-deposition

Publications (2)

Publication Number Publication Date
TW200712238A true TW200712238A (en) 2007-04-01
TWI330668B TWI330668B (en) 2010-09-21

Family

ID=45074589

Family Applications (1)

Application Number Title Priority Date Filing Date
TW094130695A TW200712238A (en) 2005-09-07 2005-09-07 Fixture for large-sized sheet of film-deposition

Country Status (1)

Country Link
TW (1) TW200712238A (en)

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
TWI586906B (en) * 2014-06-03 2017-06-11 Shincron Co Ltd Movable type rotating device and film forming device
TWI616270B (en) * 2016-05-05 2018-03-01 馗鼎奈米科技股份有限公司 Revolution and rotation disk module
CN109023254A (en) * 2018-08-13 2018-12-18 中国科学院光电技术研究所 Vacuum coating machine for preparing large-caliber optical film element
CN112626479A (en) * 2020-12-21 2021-04-09 贵阳航发精密铸造有限公司 Double-rotation equipment for improving coating uniformity of multi-arc ion plating equipment

Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
TWI586906B (en) * 2014-06-03 2017-06-11 Shincron Co Ltd Movable type rotating device and film forming device
TWI616270B (en) * 2016-05-05 2018-03-01 馗鼎奈米科技股份有限公司 Revolution and rotation disk module
CN109023254A (en) * 2018-08-13 2018-12-18 中国科学院光电技术研究所 Vacuum coating machine for preparing large-caliber optical film element
CN109023254B (en) * 2018-08-13 2020-10-16 中国科学院光电技术研究所 Vacuum coating machine for preparing large-caliber optical film element
CN112626479A (en) * 2020-12-21 2021-04-09 贵阳航发精密铸造有限公司 Double-rotation equipment for improving coating uniformity of multi-arc ion plating equipment

Also Published As

Publication number Publication date
TWI330668B (en) 2010-09-21

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Legal Events

Date Code Title Description
MM4A Annulment or lapse of patent due to non-payment of fees