TW200712238A - Fixture for large-sized sheet of film-deposition - Google Patents
Fixture for large-sized sheet of film-depositionInfo
- Publication number
- TW200712238A TW200712238A TW094130695A TW94130695A TW200712238A TW 200712238 A TW200712238 A TW 200712238A TW 094130695 A TW094130695 A TW 094130695A TW 94130695 A TW94130695 A TW 94130695A TW 200712238 A TW200712238 A TW 200712238A
- Authority
- TW
- Taiwan
- Prior art keywords
- fixture
- shanks
- deposition
- film
- gear
- Prior art date
Links
Landscapes
- Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
- Physical Vapour Deposition (AREA)
Abstract
The invention relates to a fixture for large-sized sheet of film-deposition. Mainly, a plurality of shanks extended through a bonding frame are disposed the bonding frame. One end of each of the shanks is engaged with a planetary gear. Another end of each of the shanks is connected with a clamp shelf. The planetary gears of the shanks simultaneously gnaw a sun gear with each other. Each of the clamp shelves is respectively locked with a wafer frame. By a driving shaft, a driving gear and a driven gear being gnawed with a driving gear, the bonding frame is operated. As a result, the sheet of film-deposition can be located in the fixture, and is in revolution and self-rotation at the same time.
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
TW094130695A TW200712238A (en) | 2005-09-07 | 2005-09-07 | Fixture for large-sized sheet of film-deposition |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
TW094130695A TW200712238A (en) | 2005-09-07 | 2005-09-07 | Fixture for large-sized sheet of film-deposition |
Publications (2)
Publication Number | Publication Date |
---|---|
TW200712238A true TW200712238A (en) | 2007-04-01 |
TWI330668B TWI330668B (en) | 2010-09-21 |
Family
ID=45074589
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
TW094130695A TW200712238A (en) | 2005-09-07 | 2005-09-07 | Fixture for large-sized sheet of film-deposition |
Country Status (1)
Country | Link |
---|---|
TW (1) | TW200712238A (en) |
Cited By (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
TWI586906B (en) * | 2014-06-03 | 2017-06-11 | Shincron Co Ltd | Movable type rotating device and film forming device |
TWI616270B (en) * | 2016-05-05 | 2018-03-01 | 馗鼎奈米科技股份有限公司 | Revolution and rotation disk module |
CN109023254A (en) * | 2018-08-13 | 2018-12-18 | 中国科学院光电技术研究所 | Vacuum coating machine for preparing large-caliber optical film element |
CN112626479A (en) * | 2020-12-21 | 2021-04-09 | 贵阳航发精密铸造有限公司 | Double-rotation equipment for improving coating uniformity of multi-arc ion plating equipment |
-
2005
- 2005-09-07 TW TW094130695A patent/TW200712238A/en not_active IP Right Cessation
Cited By (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
TWI586906B (en) * | 2014-06-03 | 2017-06-11 | Shincron Co Ltd | Movable type rotating device and film forming device |
TWI616270B (en) * | 2016-05-05 | 2018-03-01 | 馗鼎奈米科技股份有限公司 | Revolution and rotation disk module |
CN109023254A (en) * | 2018-08-13 | 2018-12-18 | 中国科学院光电技术研究所 | Vacuum coating machine for preparing large-caliber optical film element |
CN109023254B (en) * | 2018-08-13 | 2020-10-16 | 中国科学院光电技术研究所 | Vacuum coating machine for preparing large-caliber optical film element |
CN112626479A (en) * | 2020-12-21 | 2021-04-09 | 贵阳航发精密铸造有限公司 | Double-rotation equipment for improving coating uniformity of multi-arc ion plating equipment |
Also Published As
Publication number | Publication date |
---|---|
TWI330668B (en) | 2010-09-21 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
MM4A | Annulment or lapse of patent due to non-payment of fees |