TW200708818A - Heat treatment device - Google Patents
Heat treatment deviceInfo
- Publication number
- TW200708818A TW200708818A TW094129606A TW94129606A TW200708818A TW 200708818 A TW200708818 A TW 200708818A TW 094129606 A TW094129606 A TW 094129606A TW 94129606 A TW94129606 A TW 94129606A TW 200708818 A TW200708818 A TW 200708818A
- Authority
- TW
- Taiwan
- Prior art keywords
- rotatable rod
- another
- heat treatment
- spaced
- gap
- Prior art date
Links
Landscapes
- Furnace Charging Or Discharging (AREA)
- Heat Treatments In General, Especially Conveying And Cooling (AREA)
- Liquid Crystal (AREA)
- Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
Abstract
A work support device 12 is provided within the heat treatment chamber 11. The work support device 12 has aplurality of horizontal support rods 31 arranged in spaced and parallel relation with one another. At least one of said plurality of horizontal support rods 31 is acted as a rotatable rod 33 which rotates freely around its axis. On a plurality of base lines mutually spaced and extended in the circumferential direction of the rotatable rod 33, a plurality of support pins 34 are provided in spaced relationship with one another in the axial direction of the rotatable rod and projected outwardly in the radial direction of the rotatable rod. The gap between the support pins 34 on one base line is different from the gap between the support pins 34 on another base line.
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2005240784A JP2007057132A (en) | 2005-08-23 | 2005-08-23 | Thermal processing apparatus |
Publications (1)
Publication Number | Publication Date |
---|---|
TW200708818A true TW200708818A (en) | 2007-03-01 |
Family
ID=37920776
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
TW094129606A TW200708818A (en) | 2005-08-23 | 2005-08-30 | Heat treatment device |
Country Status (2)
Country | Link |
---|---|
JP (1) | JP2007057132A (en) |
TW (1) | TW200708818A (en) |
Families Citing this family (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
KR100978261B1 (en) * | 2005-12-29 | 2010-08-26 | 엘지디스플레이 주식회사 | Cassette for containing liquid crystal dispaly device |
JP6512707B2 (en) * | 2015-11-30 | 2019-05-15 | 中外炉工業株式会社 | Substrate loading cassette |
Family Cites Families (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH05243798A (en) * | 1992-02-27 | 1993-09-21 | Oki Electric Ind Co Ltd | Supporting device for printed-circuit board |
JP3052116B2 (en) * | 1994-10-26 | 2000-06-12 | 東京エレクトロン株式会社 | Heat treatment equipment |
JP3989384B2 (en) * | 2003-02-07 | 2007-10-10 | 東京エレクトロン株式会社 | Substrate processing apparatus and substrate processing method |
-
2005
- 2005-08-23 JP JP2005240784A patent/JP2007057132A/en active Pending
- 2005-08-30 TW TW094129606A patent/TW200708818A/en unknown
Also Published As
Publication number | Publication date |
---|---|
JP2007057132A (en) | 2007-03-08 |
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