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Priority to TW094123685ApriorityCriticalpatent/TW200702493A/en
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Internal Circuitry In Semiconductor Integrated Circuit Devices
(AREA)
Manufacturing Of Printed Circuit Boards
(AREA)
Abstract
A copper etchant includes an oxidizer, an acid, an alcohol solvent, and water is described. Wherein, the content of the oxidizer is between 1wt%-40wt%, the content of the acid is between 1wt%-90wt%, the content of the alcohol solvent is between 1wt%-50wt%, and the content of the water is between 20wt%-50wt%. Thereby, after etching the copper conductive wire is formed can provide a smooth edge cut.
TW094123685A2005-07-132005-07-13Copper etchant and method of etching copper
TW200702493A
(en)