TW200701215A - Optical head and optical etching apparatus with optical head - Google Patents
Optical head and optical etching apparatus with optical headInfo
- Publication number
- TW200701215A TW200701215A TW094121811A TW94121811A TW200701215A TW 200701215 A TW200701215 A TW 200701215A TW 094121811 A TW094121811 A TW 094121811A TW 94121811 A TW94121811 A TW 94121811A TW 200701215 A TW200701215 A TW 200701215A
- Authority
- TW
- Taiwan
- Prior art keywords
- sub
- light
- wavelength
- optical
- optical head
- Prior art date
Links
Abstract
An optical head and an optical etching apparatus with the optical head comprises a transparent substrate, a light-blocking film and a sub-wavelength surface structure, wherein the light blocking film comprises a plurality of sub-wavelength apertures, and absorbs light source from a incident light of an additional electromagnetic field through the transparent substrate and then via the sub-wavelength apertures of the light blocking film with the sub-wavelength surface structure to control the angle of each emitting light so as to obtain the sub-wavelength size light spots and amount after all the emitting light beams being mutually interfered and to use the distance between each sub-wavelength aperture to determine the focus of the interference light beam and the working distance.
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
TW94121811A TWI258759B (en) | 2005-06-29 | 2005-06-29 | Optical head and optical etching apparatus with optical head |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
TW94121811A TWI258759B (en) | 2005-06-29 | 2005-06-29 | Optical head and optical etching apparatus with optical head |
Publications (2)
Publication Number | Publication Date |
---|---|
TWI258759B TWI258759B (en) | 2006-07-21 |
TW200701215A true TW200701215A (en) | 2007-01-01 |
Family
ID=37765396
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
TW94121811A TWI258759B (en) | 2005-06-29 | 2005-06-29 | Optical head and optical etching apparatus with optical head |
Country Status (1)
Country | Link |
---|---|
TW (1) | TWI258759B (en) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN111198093A (en) * | 2018-11-16 | 2020-05-26 | 志圣工业股份有限公司 | Exposure light angle measurement |
-
2005
- 2005-06-29 TW TW94121811A patent/TWI258759B/en not_active IP Right Cessation
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN111198093A (en) * | 2018-11-16 | 2020-05-26 | 志圣工业股份有限公司 | Exposure light angle measurement |
CN111198093B (en) * | 2018-11-16 | 2021-11-26 | 志圣工业股份有限公司 | Exposure light angle measuring equipment |
Also Published As
Publication number | Publication date |
---|---|
TWI258759B (en) | 2006-07-21 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
MM4A | Annulment or lapse of patent due to non-payment of fees |