TW200701215A - Optical head and optical etching apparatus with optical head - Google Patents

Optical head and optical etching apparatus with optical head

Info

Publication number
TW200701215A
TW200701215A TW094121811A TW94121811A TW200701215A TW 200701215 A TW200701215 A TW 200701215A TW 094121811 A TW094121811 A TW 094121811A TW 94121811 A TW94121811 A TW 94121811A TW 200701215 A TW200701215 A TW 200701215A
Authority
TW
Taiwan
Prior art keywords
sub
light
wavelength
optical
optical head
Prior art date
Application number
TW094121811A
Other languages
Chinese (zh)
Other versions
TWI258759B (en
Inventor
Chih-Kung Lee
Chau-Shioung Yeh
Kuang-Chong Wu
Ding-Zheng Lin
Yi-Chun Chen
Yeong Feng Wang
Pei Ting Chou
Jenn Wei Lee
Tung Lin Yang
Original Assignee
Ind Tech Res Inst
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Ind Tech Res Inst filed Critical Ind Tech Res Inst
Priority to TW94121811A priority Critical patent/TWI258759B/en
Application granted granted Critical
Publication of TWI258759B publication Critical patent/TWI258759B/en
Publication of TW200701215A publication Critical patent/TW200701215A/en

Links

Abstract

An optical head and an optical etching apparatus with the optical head comprises a transparent substrate, a light-blocking film and a sub-wavelength surface structure, wherein the light blocking film comprises a plurality of sub-wavelength apertures, and absorbs light source from a incident light of an additional electromagnetic field through the transparent substrate and then via the sub-wavelength apertures of the light blocking film with the sub-wavelength surface structure to control the angle of each emitting light so as to obtain the sub-wavelength size light spots and amount after all the emitting light beams being mutually interfered and to use the distance between each sub-wavelength aperture to determine the focus of the interference light beam and the working distance.
TW94121811A 2005-06-29 2005-06-29 Optical head and optical etching apparatus with optical head TWI258759B (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
TW94121811A TWI258759B (en) 2005-06-29 2005-06-29 Optical head and optical etching apparatus with optical head

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
TW94121811A TWI258759B (en) 2005-06-29 2005-06-29 Optical head and optical etching apparatus with optical head

Publications (2)

Publication Number Publication Date
TWI258759B TWI258759B (en) 2006-07-21
TW200701215A true TW200701215A (en) 2007-01-01

Family

ID=37765396

Family Applications (1)

Application Number Title Priority Date Filing Date
TW94121811A TWI258759B (en) 2005-06-29 2005-06-29 Optical head and optical etching apparatus with optical head

Country Status (1)

Country Link
TW (1) TWI258759B (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN111198093A (en) * 2018-11-16 2020-05-26 志圣工业股份有限公司 Exposure light angle measurement

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN111198093A (en) * 2018-11-16 2020-05-26 志圣工业股份有限公司 Exposure light angle measurement
CN111198093B (en) * 2018-11-16 2021-11-26 志圣工业股份有限公司 Exposure light angle measuring equipment

Also Published As

Publication number Publication date
TWI258759B (en) 2006-07-21

Similar Documents

Publication Publication Date Title
RU2011118441A (en) BEAM DIRECTION CONTROL DEVICE AND LIGHT-RADIATING DEVICE
US20160285049A1 (en) Organic light emitting diode display panel and display device
WO2008090801A1 (en) Projection exposure device and projection exposure method
EP3875850A3 (en) Light-emitting device
WO2008000244A3 (en) Optoelectronic component and illumination device
WO2010004478A3 (en) Laser self-mixing measuring device
TW200710455A (en) Optical substrate, manufacturing method thereof, planar lighting device and electrooptical device
JP2005316068A5 (en)
EP1512999A3 (en) Optical device, illumination apparatus using the device, and projector using the illumination apparatus
FR2884931B1 (en) GUIDE LIGHT OF A CONTROL BUTTON EQUIPPED WITH A ROTARY INDEX
TW200734734A (en) Polarizing turning film
TW200712597A (en) Optical module of a light source module and a sensor module positioned on a frame
US9958596B2 (en) Display device, multilayer light guide plate structure and front light module
ATE481600T1 (en) LED DISPLAY DEVICE
EP2889657A3 (en) Lighting device using line shaped beam
JP2012169375A5 (en)
JP2018017816A5 (en)
KR101527002B1 (en) Laser beam generator
RU2014145868A (en) RADIATION DEVICE
TW200605054A (en) Optical element, objective optical system, optical pick-up apparatus, and drive apparatus of optical disk
EP3650904A3 (en) Lens for wide diffusion light
JP2013073081A5 (en)
WO2009085437A3 (en) Optical mouse
WO2013189605A3 (en) Laser scribing system
TW200701215A (en) Optical head and optical etching apparatus with optical head

Legal Events

Date Code Title Description
MM4A Annulment or lapse of patent due to non-payment of fees