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Application filed by Youtec Co Ltd, Hisayoshi YamotofiledCriticalYoutec Co Ltd
Publication of TW200644083ApublicationCriticalpatent/TW200644083A/en
A method of forming a zinc oxide layer, in which a zinc oxide layer can be formed with high productivity with the use of a solid zinc compound; and a zinc oxide layer forming apparatus for use in the practice of the method. A solution of solid zinc compound [for example, Zn(DPM)2 + toluene] is vaporized by means of a vaporizer, and at least a vapor from the zinc compound solution is fed onto substrate (48) (for example, sapphire substrate with plane A as its main surface) heated in chamber (44) of CVD section. Thus, a zinc oxide layer is grown on the substrate (48).
TW095107909A2005-03-102006-03-09Method of forming zinc oxide layer, zinc oxide layer forming apparatus and zinc oxide layer
TW200644083A
(en)