TW200643654A - Fluid dispensing and drop-on-demand dispensing for nano-scale manufacturing - Google Patents

Fluid dispensing and drop-on-demand dispensing for nano-scale manufacturing

Info

Publication number
TW200643654A
TW200643654A TW094123027A TW94123027A TW200643654A TW 200643654 A TW200643654 A TW 200643654A TW 094123027 A TW094123027 A TW 094123027A TW 94123027 A TW94123027 A TW 94123027A TW 200643654 A TW200643654 A TW 200643654A
Authority
TW
Taiwan
Prior art keywords
dispensing
nano
drop
scale manufacturing
demand
Prior art date
Application number
TW094123027A
Other languages
Chinese (zh)
Other versions
TWI290665B (en
Inventor
Pankaj B Lad
Ian M Mcmackin
Van N Truskett
Norman E Schumaker
Sidlgata V Sreenivasan
Duane Voth
Phillip D Schumaker
Edward B Fletcher
Original Assignee
Molecular Imprints Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority claimed from US11/143,092 external-priority patent/US20050270312A1/en
Application filed by Molecular Imprints Inc filed Critical Molecular Imprints Inc
Publication of TW200643654A publication Critical patent/TW200643654A/en
Application granted granted Critical
Publication of TWI290665B publication Critical patent/TWI290665B/en

Links

Landscapes

  • Application Of Or Painting With Fluid Materials (AREA)
  • Shaping Of Tube Ends By Bending Or Straightening (AREA)

Abstract

The present invention is directed to a method for dispensing a total volume of liquid on a substrate, the method including, inter alia, disposing a plurality of spaced-apart droplets on a region of the substrate, each having an unit volume associated therewith, with an aggregate volume of the droplets in the region being a function of a volume of a pattern to be formed thereat.
TW94123027A 2005-06-02 2005-07-07 Fluid dispensing and drop-on-demand dispensing for nano-scale manufacturing TWI290665B (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US11/143,092 US20050270312A1 (en) 2004-06-03 2005-06-02 Fluid dispensing and drop-on-demand dispensing for nano-scale manufacturing

Publications (2)

Publication Number Publication Date
TW200643654A true TW200643654A (en) 2006-12-16
TWI290665B TWI290665B (en) 2007-12-01

Family

ID=39327554

Family Applications (1)

Application Number Title Priority Date Filing Date
TW94123027A TWI290665B (en) 2005-06-02 2005-07-07 Fluid dispensing and drop-on-demand dispensing for nano-scale manufacturing

Country Status (2)

Country Link
MY (1) MY144018A (en)
TW (1) TWI290665B (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN111093836A (en) * 2017-09-21 2020-05-01 佳能株式会社 System and method for controlling placement of fluid resist droplets

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP5460541B2 (en) * 2010-03-30 2014-04-02 富士フイルム株式会社 Nanoimprint method, droplet arrangement pattern creation method, and substrate processing method
TWI673109B (en) * 2018-01-09 2019-10-01 精膜科技股份有限公司 Ultrasonic driving device with self-calibration funciton

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN111093836A (en) * 2017-09-21 2020-05-01 佳能株式会社 System and method for controlling placement of fluid resist droplets
US11448958B2 (en) 2017-09-21 2022-09-20 Canon Kabushiki Kaisha System and method for controlling the placement of fluid resist droplets

Also Published As

Publication number Publication date
MY144018A (en) 2011-07-29
TWI290665B (en) 2007-12-01

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