TW200641324A - Method and apparatus using focusing to measure height - Google Patents
Method and apparatus using focusing to measure heightInfo
- Publication number
- TW200641324A TW200641324A TW094115716A TW94115716A TW200641324A TW 200641324 A TW200641324 A TW 200641324A TW 094115716 A TW094115716 A TW 094115716A TW 94115716 A TW94115716 A TW 94115716A TW 200641324 A TW200641324 A TW 200641324A
- Authority
- TW
- Taiwan
- Prior art keywords
- surface areas
- focusing
- unit
- height
- outs
- Prior art date
Links
Landscapes
- Length Measuring Devices By Optical Means (AREA)
Abstract
Method and apparatus using focusing to measure height mainly apply to inspection of height difference among the numerous tiny tin balls on a flip-chip substrate. The device consists of a camera unit, a logic operation unit and a calculation process unit. The method uses the camera unit that by step moves precisely and finely along the direction perpendicular to the upper vision of the object under test (OUT) to pick an image of the OUT in each step, and then sends the images to the logic operation unit real-timely and uses OUTs' surface areas and their standard surface areas of the OUT that have already been pre-defined a random quantity to execute the focusing operation of each area, and finds out the position of the clearest image from the OUTs' surface areas and their standard surface areas, respectively by the calculation process unit, and finally, uses Gaussian distribution function analysis to derive an extreme value more precise than the step resolution and then get the precise height of the OUT.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| TW094115716A TW200641324A (en) | 2005-05-16 | 2005-05-16 | Method and apparatus using focusing to measure height |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| TW094115716A TW200641324A (en) | 2005-05-16 | 2005-05-16 | Method and apparatus using focusing to measure height |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| TW200641324A true TW200641324A (en) | 2006-12-01 |
Family
ID=57809954
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| TW094115716A TW200641324A (en) | 2005-05-16 | 2005-05-16 | Method and apparatus using focusing to measure height |
Country Status (1)
| Country | Link |
|---|---|
| TW (1) | TW200641324A (en) |
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN103257142A (en) * | 2012-02-15 | 2013-08-21 | 亚亚科技股份有限公司 | Optical detection apparatus |
| TWI558977B (en) * | 2015-01-06 | 2016-11-21 | All Ring Tech Co Ltd | Method and apparatus for analysis of object |
| CN112665509A (en) * | 2021-01-08 | 2021-04-16 | 中国工程物理研究院机械制造工艺研究所 | White light interferometry method for self-correcting scanning error |
-
2005
- 2005-05-16 TW TW094115716A patent/TW200641324A/en unknown
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN103257142A (en) * | 2012-02-15 | 2013-08-21 | 亚亚科技股份有限公司 | Optical detection apparatus |
| TWI558977B (en) * | 2015-01-06 | 2016-11-21 | All Ring Tech Co Ltd | Method and apparatus for analysis of object |
| CN112665509A (en) * | 2021-01-08 | 2021-04-16 | 中国工程物理研究院机械制造工艺研究所 | White light interferometry method for self-correcting scanning error |
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