TW200641324A - Method and apparatus using focusing to measure height - Google Patents

Method and apparatus using focusing to measure height

Info

Publication number
TW200641324A
TW200641324A TW094115716A TW94115716A TW200641324A TW 200641324 A TW200641324 A TW 200641324A TW 094115716 A TW094115716 A TW 094115716A TW 94115716 A TW94115716 A TW 94115716A TW 200641324 A TW200641324 A TW 200641324A
Authority
TW
Taiwan
Prior art keywords
surface areas
focusing
unit
height
outs
Prior art date
Application number
TW094115716A
Other languages
Chinese (zh)
Inventor
guang-zhong Peng
Original Assignee
Premtek Int Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Premtek Int Inc filed Critical Premtek Int Inc
Priority to TW094115716A priority Critical patent/TW200641324A/en
Publication of TW200641324A publication Critical patent/TW200641324A/en

Links

Landscapes

  • Length Measuring Devices By Optical Means (AREA)

Abstract

Method and apparatus using focusing to measure height mainly apply to inspection of height difference among the numerous tiny tin balls on a flip-chip substrate. The device consists of a camera unit, a logic operation unit and a calculation process unit. The method uses the camera unit that by step moves precisely and finely along the direction perpendicular to the upper vision of the object under test (OUT) to pick an image of the OUT in each step, and then sends the images to the logic operation unit real-timely and uses OUTs' surface areas and their standard surface areas of the OUT that have already been pre-defined a random quantity to execute the focusing operation of each area, and finds out the position of the clearest image from the OUTs' surface areas and their standard surface areas, respectively by the calculation process unit, and finally, uses Gaussian distribution function analysis to derive an extreme value more precise than the step resolution and then get the precise height of the OUT.
TW094115716A 2005-05-16 2005-05-16 Method and apparatus using focusing to measure height TW200641324A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
TW094115716A TW200641324A (en) 2005-05-16 2005-05-16 Method and apparatus using focusing to measure height

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
TW094115716A TW200641324A (en) 2005-05-16 2005-05-16 Method and apparatus using focusing to measure height

Publications (1)

Publication Number Publication Date
TW200641324A true TW200641324A (en) 2006-12-01

Family

ID=57809954

Family Applications (1)

Application Number Title Priority Date Filing Date
TW094115716A TW200641324A (en) 2005-05-16 2005-05-16 Method and apparatus using focusing to measure height

Country Status (1)

Country Link
TW (1) TW200641324A (en)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN103257142A (en) * 2012-02-15 2013-08-21 亚亚科技股份有限公司 Optical detection apparatus
TWI558977B (en) * 2015-01-06 2016-11-21 All Ring Tech Co Ltd Method and apparatus for analysis of object
CN112665509A (en) * 2021-01-08 2021-04-16 中国工程物理研究院机械制造工艺研究所 White light interferometry method for self-correcting scanning error

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN103257142A (en) * 2012-02-15 2013-08-21 亚亚科技股份有限公司 Optical detection apparatus
TWI558977B (en) * 2015-01-06 2016-11-21 All Ring Tech Co Ltd Method and apparatus for analysis of object
CN112665509A (en) * 2021-01-08 2021-04-16 中国工程物理研究院机械制造工艺研究所 White light interferometry method for self-correcting scanning error

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