TW200641171A - Tub target, particularly for coating TFT LCD screens, and methods for its manufacture - Google Patents

Tub target, particularly for coating TFT LCD screens, and methods for its manufacture

Info

Publication number
TW200641171A
TW200641171A TW095110105A TW95110105A TW200641171A TW 200641171 A TW200641171 A TW 200641171A TW 095110105 A TW095110105 A TW 095110105A TW 95110105 A TW95110105 A TW 95110105A TW 200641171 A TW200641171 A TW 200641171A
Authority
TW
Taiwan
Prior art keywords
target
manufacture
tub
methods
tft lcd
Prior art date
Application number
TW095110105A
Other languages
Chinese (zh)
Inventor
Martin Schlott
Christoph Simons
Hans-Joachim Pavel
Original Assignee
Heraeus Gmbh W C
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Heraeus Gmbh W C filed Critical Heraeus Gmbh W C
Publication of TW200641171A publication Critical patent/TW200641171A/en

Links

Classifications

    • G—PHYSICS
    • G02—OPTICS
    • G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
    • G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
    • G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour 
    • G02F1/13—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour  based on liquid crystals, e.g. single liquid crystal display cells
    • G02F1/1303—Apparatus specially adapted to the manufacture of LCDs
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/34—Sputtering
    • C23C14/3407—Cathode assembly for sputtering apparatus, e.g. Target
    • C—CHEMISTRY; METALLURGY
    • C22—METALLURGY; FERROUS OR NON-FERROUS ALLOYS; TREATMENT OF ALLOYS OR NON-FERROUS METALS
    • C22C—ALLOYS
    • C22C21/00—Alloys based on aluminium
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/32—Gas-filled discharge tubes
    • H01J37/34—Gas-filled discharge tubes operating with cathodic sputtering
    • H01J37/3411—Constructional aspects of the reactor
    • H01J37/3435—Target holders (includes backing plates and endblocks)
    • G—PHYSICS
    • G02—OPTICS
    • G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
    • G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
    • G02F1/35—Non-linear optics
    • G02F1/3501—Constructional details or arrangements of non-linear optical devices, e.g. shape of non-linear crystals
    • G02F1/3505—Coatings; Housings; Supports

Landscapes

  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Materials Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Nonlinear Science (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Plasma & Fusion (AREA)
  • Analytical Chemistry (AREA)
  • Manufacturing & Machinery (AREA)
  • Crystallography & Structural Chemistry (AREA)
  • General Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Physical Vapour Deposition (AREA)
  • Liquid Crystal (AREA)

Abstract

The invention relates to a tubular sputter target, particularly for the manufacture of TFT displays, with a target material in which a tubular area usable in the sputtering process is free from joints or seams, and the target material consisting of Al or an aluminum alloy.
TW095110105A 2005-04-13 2006-03-23 Tub target, particularly for coating TFT LCD screens, and methods for its manufacture TW200641171A (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
DE102005017191A DE102005017191A1 (en) 2005-04-13 2005-04-13 Tube-shaped sputter target useful in production of TFT liquid crystal displays has tube region devoid of shocks (sic) and seams (sic) and made from Al or Al alloy

Publications (1)

Publication Number Publication Date
TW200641171A true TW200641171A (en) 2006-12-01

Family

ID=37055368

Family Applications (1)

Application Number Title Priority Date Filing Date
TW095110105A TW200641171A (en) 2005-04-13 2006-03-23 Tub target, particularly for coating TFT LCD screens, and methods for its manufacture

Country Status (4)

Country Link
JP (1) JP2006291360A (en)
KR (1) KR20060108495A (en)
DE (1) DE102005017191A1 (en)
TW (1) TW200641171A (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN112048703A (en) * 2020-07-22 2020-12-08 基迈克材料科技（苏州）有限公司 Aluminum-neodymium alloy rotary sputtering target material and preparation method thereof

Families Citing this family (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE102009015638A1 (en) * 2009-03-24 2010-09-30 Wieland Dental + Technik Gmbh & Co. Kg Tubular sputtering target and method for its production
KR101273096B1 (en) * 2011-04-26 2013-06-13 김준년 Method of manufacturing a cylindrical target for a sputter
DE102015207602A1 (en) * 2015-04-24 2016-10-27 Gfe Metalle Und Materialien Gmbh Method for producing a tubular cathode for use in PVD ARC coating systems
CN115870505A (en) * 2022-12-09 2023-03-31 基迈克材料科技（苏州）有限公司 Preparation method of AlNd alloy target material

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN112048703A (en) * 2020-07-22 2020-12-08 基迈克材料科技（苏州）有限公司 Aluminum-neodymium alloy rotary sputtering target material and preparation method thereof

Also Published As

Publication number Publication date
DE102005017191A1 (en) 2006-10-19
KR20060108495A (en) 2006-10-18
JP2006291360A (en) 2006-10-26

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