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Application filed by Au Optronics CorpfiledCriticalAu Optronics Corp
Priority to TW94106104ApriorityCriticalpatent/TWI279164B/en
Publication of TW200633586ApublicationCriticalpatent/TW200633586A/en
Application grantedgrantedCritical
Publication of TWI279164BpublicationCriticalpatent/TWI279164B/en
Vaporization, Distillation, Condensation, Sublimation, And Cold Traps
(AREA)
Abstract
A sublimation system and method thereof are provided. The system includes several internal tubes having at least one kind of raw materials and an external tube encasing these tubes. Accordingly, the reduction of the loss of the raw materials and the time of sublimation and the quantity increasing of sublimated product may be achieved.
TW94106104A2005-03-012005-03-01Sublimation system and method thereof
TWI279164B
(en)