TW200632309A - Holder apparatus - Google Patents
Holder apparatusInfo
- Publication number
- TW200632309A TW200632309A TW095105064A TW95105064A TW200632309A TW 200632309 A TW200632309 A TW 200632309A TW 095105064 A TW095105064 A TW 095105064A TW 95105064 A TW95105064 A TW 95105064A TW 200632309 A TW200632309 A TW 200632309A
- Authority
- TW
- Taiwan
- Prior art keywords
- holder apparatus
- lift pin
- lock member
- objective
- transported
- Prior art date
Links
Landscapes
- Physics & Mathematics (AREA)
- Nonlinear Science (AREA)
- General Physics & Mathematics (AREA)
- Chemical & Material Sciences (AREA)
- Optics & Photonics (AREA)
- Crystallography & Structural Chemistry (AREA)
- Analytical Chemistry (AREA)
- Manufacturing & Machinery (AREA)
- Health & Medical Sciences (AREA)
- Life Sciences & Earth Sciences (AREA)
- Mathematical Physics (AREA)
- Biochemistry (AREA)
- General Health & Medical Sciences (AREA)
- Immunology (AREA)
- Pathology (AREA)
- Engineering & Computer Science (AREA)
- Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
- Physical Vapour Deposition (AREA)
- Investigating Materials By The Use Of Optical Means Adapted For Particular Applications (AREA)
- Testing Of Optical Devices Or Fibers (AREA)
- Liquid Crystal (AREA)
Abstract
The present invention has an objective such that in respect to a holder apparatus having a lift rotation mechanism, decreasing rigidity of the holder apparatus itself is prevented by a simple measure, and a substrate can be held stably by controlling a deformation or a vibration of the holder apparatus itself. Due to the objective, in the present invention, a lock member 61 movable back and forth by a going and returning cylinder 64 and the like, is provided at a guiding aperture portion 8-1 which is arcuate and on which a lift pin turns and moves by a ring supporting member 5. Except for time when the lift pin is transported, the lock member 61 is moved forward and is engaged with an engagement block 65 provided at a facing position. Therefore, the rigidity of the holder apparatus is increased. While the lift pin is transported, the lock member 61 is moved backward and unlocked, and the lift pin is movable.
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2005043876A JP2006226949A (en) | 2005-02-21 | 2005-02-21 | Holder device |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| TW200632309A true TW200632309A (en) | 2006-09-16 |
Family
ID=36935867
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| TW095105064A TW200632309A (en) | 2005-02-21 | 2006-02-15 | Holder apparatus |
Country Status (4)
| Country | Link |
|---|---|
| JP (1) | JP2006226949A (en) |
| KR (1) | KR20060093287A (en) |
| CN (1) | CN1825098A (en) |
| TW (1) | TW200632309A (en) |
Families Citing this family (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2015041749A (en) * | 2013-08-23 | 2015-03-02 | 東レエンジニアリング株式会社 | Holding device of transparent substrate |
| CN105091765B (en) * | 2015-05-15 | 2017-09-26 | 浙江工业大学 | A kind of method of discrimination of cage retainer positive and negative |
| CN106198547A (en) * | 2016-06-24 | 2016-12-07 | 华为技术有限公司 | A kind of display screen detection device |
| JP6409033B2 (en) * | 2016-08-10 | 2018-10-17 | 株式会社カイジョー | Bonding method |
| CN106672626B (en) * | 2017-01-17 | 2019-03-12 | 龙口科诺尔玻璃科技有限公司 | Suitable for different size of fold-line-shaped glass handling frame |
| CN106918934A (en) * | 2017-03-27 | 2017-07-04 | 武汉华星光电技术有限公司 | Substrate macro -graph machine |
-
2005
- 2005-02-21 JP JP2005043876A patent/JP2006226949A/en not_active Withdrawn
-
2006
- 2006-02-15 TW TW095105064A patent/TW200632309A/en unknown
- 2006-02-17 KR KR1020060015601A patent/KR20060093287A/en not_active Application Discontinuation
- 2006-02-17 CN CNA2006100083226A patent/CN1825098A/en active Pending
Also Published As
| Publication number | Publication date |
|---|---|
| CN1825098A (en) | 2006-08-30 |
| KR20060093287A (en) | 2006-08-24 |
| JP2006226949A (en) | 2006-08-31 |
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