TW200630166A - Slit nozzle - Google Patents
Slit nozzleInfo
- Publication number
- TW200630166A TW200630166A TW095100905A TW95100905A TW200630166A TW 200630166 A TW200630166 A TW 200630166A TW 095100905 A TW095100905 A TW 095100905A TW 95100905 A TW95100905 A TW 95100905A TW 200630166 A TW200630166 A TW 200630166A
- Authority
- TW
- Taiwan
- Prior art keywords
- storage part
- half body
- central part
- highest
- nozzle half
- Prior art date
Links
Abstract
The object of this invention is to provide a slit nozzle capable of uniforming the thickness of the coating film formed on a substrate. To achieve the above object, first and second storage parts (4) and (5) of a coating solution are formed on the surface of a nozzle half body (1) opposed to a nozzle half body (2). The first storage part (4) is highest at the central part in its width direction to be formed into a chevron shape so as to become low at both ends thereof and communicates with a coating solution supply hole (6) at its highest central part. Further, an air vent hole (7) communicates with the highest central part of the first storage part (4). The second storage part (5) is formed so as to be continued to the underside of the first storage part (4) and the depth thereof is made smaller than the first storage part (4) on the basis of the thickness direction of the nozzle half body (1). The base of the second storage part (5) is lowest at the central part in the width direction of the nozzle half body (1) and the second storage part (5) is planned so as to become a V-shaped inclined surface (8) becoming high toward to both ends thereof.
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2005012000A JP4619139B2 (en) | 2005-01-19 | 2005-01-19 | Slit nozzle |
Publications (2)
Publication Number | Publication Date |
---|---|
TW200630166A true TW200630166A (en) | 2006-09-01 |
TWI344863B TWI344863B (en) | 2011-07-11 |
Family
ID=36839134
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
TW095100905A TWI344863B (en) | 2005-01-19 | 2006-01-10 | Slit nozzle |
Country Status (4)
Country | Link |
---|---|
JP (1) | JP4619139B2 (en) |
KR (1) | KR101223766B1 (en) |
CN (1) | CN1806934B (en) |
TW (1) | TWI344863B (en) |
Families Citing this family (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP5202838B2 (en) * | 2006-12-12 | 2013-06-05 | 東京応化工業株式会社 | Slit nozzle |
KR100867893B1 (en) * | 2007-08-10 | 2008-11-10 | 주식회사 디엠에스 | Slit nozzle and coating apparatus having the same |
KR101357979B1 (en) * | 2012-02-11 | 2014-02-05 | 이인영 | Device for spreading fine coating film uniformly |
KR102106443B1 (en) * | 2013-05-24 | 2020-05-04 | 삼성에스디아이 주식회사 | Slit nozzle and slit coating apparatus using thereof |
KR102052061B1 (en) * | 2013-05-24 | 2019-12-04 | 삼성에스디아이 주식회사 | Slit nozzle shape determination apparatus and method therefor |
Family Cites Families (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US5234330A (en) * | 1991-06-14 | 1993-08-10 | Eastman Kodak Company | Dies |
JPH0550004A (en) * | 1991-08-24 | 1993-03-02 | Hitachi Maxell Ltd | Coating method for coating liquid and coating device therefor |
JP4458385B2 (en) * | 2000-01-26 | 2010-04-28 | 大日本印刷株式会社 | Application head |
JP2002086045A (en) * | 2000-09-20 | 2002-03-26 | Tatsumo Kk | Liquid material coating tool |
JP3838990B2 (en) * | 2003-04-14 | 2006-10-25 | 東京応化工業株式会社 | Slit nozzle and treatment liquid supply apparatus using the slit nozzle |
-
2005
- 2005-01-19 JP JP2005012000A patent/JP4619139B2/en active Active
-
2006
- 2006-01-10 TW TW095100905A patent/TWI344863B/en active
- 2006-01-18 KR KR1020060005328A patent/KR101223766B1/en active IP Right Grant
- 2006-01-19 CN CN200610006134XA patent/CN1806934B/en active Active
Also Published As
Publication number | Publication date |
---|---|
CN1806934B (en) | 2010-08-11 |
KR101223766B1 (en) | 2013-01-17 |
KR20060084378A (en) | 2006-07-24 |
CN1806934A (en) | 2006-07-26 |
JP2006198501A (en) | 2006-08-03 |
JP4619139B2 (en) | 2011-01-26 |
TWI344863B (en) | 2011-07-11 |
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