TW200630166A - Slit nozzle - Google Patents

Slit nozzle

Info

Publication number
TW200630166A
TW200630166A TW095100905A TW95100905A TW200630166A TW 200630166 A TW200630166 A TW 200630166A TW 095100905 A TW095100905 A TW 095100905A TW 95100905 A TW95100905 A TW 95100905A TW 200630166 A TW200630166 A TW 200630166A
Authority
TW
Taiwan
Prior art keywords
storage part
half body
central part
highest
nozzle half
Prior art date
Application number
TW095100905A
Other languages
Chinese (zh)
Other versions
TWI344863B (en
Inventor
Shinji Takase
Kazunobu Yamaguchi
Tatsuhiko Nakanishi
Atsuo Kajima
Original Assignee
Tokyo Ohka Kogyo Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Tokyo Ohka Kogyo Co Ltd filed Critical Tokyo Ohka Kogyo Co Ltd
Publication of TW200630166A publication Critical patent/TW200630166A/en
Application granted granted Critical
Publication of TWI344863B publication Critical patent/TWI344863B/en

Links

Abstract

The object of this invention is to provide a slit nozzle capable of uniforming the thickness of the coating film formed on a substrate. To achieve the above object, first and second storage parts (4) and (5) of a coating solution are formed on the surface of a nozzle half body (1) opposed to a nozzle half body (2). The first storage part (4) is highest at the central part in its width direction to be formed into a chevron shape so as to become low at both ends thereof and communicates with a coating solution supply hole (6) at its highest central part. Further, an air vent hole (7) communicates with the highest central part of the first storage part (4). The second storage part (5) is formed so as to be continued to the underside of the first storage part (4) and the depth thereof is made smaller than the first storage part (4) on the basis of the thickness direction of the nozzle half body (1). The base of the second storage part (5) is lowest at the central part in the width direction of the nozzle half body (1) and the second storage part (5) is planned so as to become a V-shaped inclined surface (8) becoming high toward to both ends thereof.
TW095100905A 2005-01-19 2006-01-10 Slit nozzle TWI344863B (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2005012000A JP4619139B2 (en) 2005-01-19 2005-01-19 Slit nozzle

Publications (2)

Publication Number Publication Date
TW200630166A true TW200630166A (en) 2006-09-01
TWI344863B TWI344863B (en) 2011-07-11

Family

ID=36839134

Family Applications (1)

Application Number Title Priority Date Filing Date
TW095100905A TWI344863B (en) 2005-01-19 2006-01-10 Slit nozzle

Country Status (4)

Country Link
JP (1) JP4619139B2 (en)
KR (1) KR101223766B1 (en)
CN (1) CN1806934B (en)
TW (1) TWI344863B (en)

Families Citing this family (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP5202838B2 (en) * 2006-12-12 2013-06-05 東京応化工業株式会社 Slit nozzle
KR100867893B1 (en) * 2007-08-10 2008-11-10 주식회사 디엠에스 Slit nozzle and coating apparatus having the same
KR101357979B1 (en) * 2012-02-11 2014-02-05 이인영 Device for spreading fine coating film uniformly
KR102106443B1 (en) * 2013-05-24 2020-05-04 삼성에스디아이 주식회사 Slit nozzle and slit coating apparatus using thereof
KR102052061B1 (en) * 2013-05-24 2019-12-04 삼성에스디아이 주식회사 Slit nozzle shape determination apparatus and method therefor

Family Cites Families (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5234330A (en) * 1991-06-14 1993-08-10 Eastman Kodak Company Dies
JPH0550004A (en) * 1991-08-24 1993-03-02 Hitachi Maxell Ltd Coating method for coating liquid and coating device therefor
JP4458385B2 (en) * 2000-01-26 2010-04-28 大日本印刷株式会社 Application head
JP2002086045A (en) * 2000-09-20 2002-03-26 Tatsumo Kk Liquid material coating tool
JP3838990B2 (en) * 2003-04-14 2006-10-25 東京応化工業株式会社 Slit nozzle and treatment liquid supply apparatus using the slit nozzle

Also Published As

Publication number Publication date
CN1806934B (en) 2010-08-11
KR101223766B1 (en) 2013-01-17
KR20060084378A (en) 2006-07-24
CN1806934A (en) 2006-07-26
JP2006198501A (en) 2006-08-03
JP4619139B2 (en) 2011-01-26
TWI344863B (en) 2011-07-11

Similar Documents

Publication Publication Date Title
USD538050S1 (en) Substrate with camouflage pattern
USD530663S1 (en) Fuel supply for fuel cells
TW200630166A (en) Slit nozzle
EP1630864A3 (en) Substrate with many via contact means disposed therein
CA118532S (en) Electronic media player/storage
TW200636850A (en) Semiconductor device and manufacturing method thereof
WO2005097506A3 (en) Features in substrates and methods of forming
TW200715456A (en) Substrate mounting base, method for manufacturing the same and substrate processing apparatus
SE0500381L (en) Metal substrate, article and procedure
WO2007021844A3 (en) Coated substrate with properties of keratinous tissue
TW200636923A (en) Memory device and fabrication method thereof
EP1329961A3 (en) Semiconductor light-emitting element and method of manufacturing the same
EP2521173A3 (en) Submount and method of manufacturing the same
WO2007021676A3 (en) Fuel cell component with coating including nanoparticles
SG119308A1 (en) Radiation generating device lithographic apparatusdevice manufacturing method and device manufactur ed thereby
WO2008130031A1 (en) Conductive reflecting film and method for manufacturing the same
WO2004093216A3 (en) Fuel cell with ultraphobic surfaces
TW200726646A (en) Reimageable printing member
TW200615135A (en) Carrier film for ceramic green sheet, ceramic green sheet processing method using it and manufacturing method of electronic part
EP1652966A3 (en) Hard-carbon coated sliding member
WO2004031497A3 (en) Graphite article useful as a fuel cell component substrate
USD566770S1 (en) Rotating pen and paper clip caddy
EP1873275A3 (en) Showerhead for a gas supply apparatus
TW200710920A (en) Microstructure and manufacturing method thereof
TW200531837A (en) Slotted substrates and methods of forming