TW200626288A - Method for improving HSS CMP performance - Google Patents

Method for improving HSS CMP performance

Info

Publication number
TW200626288A
TW200626288A TW094101545A TW94101545A TW200626288A TW 200626288 A TW200626288 A TW 200626288A TW 094101545 A TW094101545 A TW 094101545A TW 94101545 A TW94101545 A TW 94101545A TW 200626288 A TW200626288 A TW 200626288A
Authority
TW
Taiwan
Prior art keywords
improving
hss
cmp performance
performance
hss cmp
Prior art date
Application number
TW094101545A
Other languages
Chinese (zh)
Other versions
TWI289089B (en
Inventor
Hsin-Kun Chu
Teng-Chun Tsai
Kai-Gin Yang
Chih-Yueh Lee
Original Assignee
United Microelectronics Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by United Microelectronics Corp filed Critical United Microelectronics Corp
Priority to TW94101545A priority Critical patent/TWI289089B/en
Publication of TW200626288A publication Critical patent/TW200626288A/en
Application granted granted Critical
Publication of TWI289089B publication Critical patent/TWI289089B/en

Links

Landscapes

  • Mechanical Treatment Of Semiconductor (AREA)
  • Finish Polishing, Edge Sharpening, And Grinding By Specific Grinding Devices (AREA)

Abstract

Disclosed is a method for improving HSS CMP performance. After performing a HSS CMP process for a predetermined time, DI water is introduced and the polishing process is continued, so that the CMP rate and performance can be improved.
TW94101545A 2005-01-19 2005-01-19 Method for improving HSS CMP performance TWI289089B (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
TW94101545A TWI289089B (en) 2005-01-19 2005-01-19 Method for improving HSS CMP performance

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
TW94101545A TWI289089B (en) 2005-01-19 2005-01-19 Method for improving HSS CMP performance

Publications (2)

Publication Number Publication Date
TW200626288A true TW200626288A (en) 2006-08-01
TWI289089B TWI289089B (en) 2007-11-01

Family

ID=39294871

Family Applications (1)

Application Number Title Priority Date Filing Date
TW94101545A TWI289089B (en) 2005-01-19 2005-01-19 Method for improving HSS CMP performance

Country Status (1)

Country Link
TW (1) TWI289089B (en)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
TWI565557B (en) * 2014-09-24 2017-01-11 力晶科技股份有限公司 Chemical mechanical polishing process

Also Published As

Publication number Publication date
TWI289089B (en) 2007-11-01

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