TW200624369A - MENS switch with set and latch electrodes - Google Patents

MENS switch with set and latch electrodes

Info

Publication number
TW200624369A
TW200624369A TW094133428A TW94133428A TW200624369A TW 200624369 A TW200624369 A TW 200624369A TW 094133428 A TW094133428 A TW 094133428A TW 94133428 A TW94133428 A TW 94133428A TW 200624369 A TW200624369 A TW 200624369A
Authority
TW
Taiwan
Prior art keywords
mens
switch
latch electrodes
latch
electrodes
Prior art date
Application number
TW094133428A
Other languages
Chinese (zh)
Other versions
TWI403456B (en
Inventor
Clarence Chui
Original Assignee
Idc Llc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Idc Llc filed Critical Idc Llc
Publication of TW200624369A publication Critical patent/TW200624369A/en
Application granted granted Critical
Publication of TWI403456B publication Critical patent/TWI403456B/en

Links

Classifications

    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B26/00—Optical devices or arrangements for the control of light using movable or deformable optical elements
    • G02B26/001—Optical devices or arrangements for the control of light using movable or deformable optical elements based on interference in an adjustable optical cavity
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01H—ELECTRIC SWITCHES; RELAYS; SELECTORS; EMERGENCY PROTECTIVE DEVICES
    • H01H1/00—Contacts
    • H01H1/0036—Switches making use of microelectromechanical systems [MEMS]
    • H01H2001/0063—Switches making use of microelectromechanical systems [MEMS] having electrostatic latches, i.e. the activated position is kept by electrostatic forces other than the activation force

Abstract

A MEMS device is electrically actuated with a voltage placed across a first electrode (702) and a moveable material (714). The device may be maintained in an actuated state by latch electrodes (730a, 730b) that are separate from the first electrode.
TW94133428A 2004-09-27 2005-09-26 Mems device, mems switch, display system comprising mems switch, and methods of operating and making mems switch TWI403456B (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US61350104P 2004-09-27 2004-09-27

Publications (2)

Publication Number Publication Date
TW200624369A true TW200624369A (en) 2006-07-16
TWI403456B TWI403456B (en) 2013-08-01

Family

ID=36688831

Family Applications (2)

Application Number Title Priority Date Filing Date
TW94133428A TWI403456B (en) 2004-09-27 2005-09-26 Mems device, mems switch, display system comprising mems switch, and methods of operating and making mems switch
TW101136074A TW201302597A (en) 2004-09-27 2005-09-26 MEMS device, MEMS switch, display system comrpising MEMS switch, and methods of operating and making MEMS switch

Family Applications After (1)

Application Number Title Priority Date Filing Date
TW101136074A TW201302597A (en) 2004-09-27 2005-09-26 MEMS device, MEMS switch, display system comrpising MEMS switch, and methods of operating and making MEMS switch

Country Status (2)

Country Link
CN (1) CN1755477B (en)
TW (2) TWI403456B (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US8830557B2 (en) 2007-05-11 2014-09-09 Qualcomm Mems Technologies, Inc. Methods of fabricating MEMS with spacers between plates and devices formed by same

Families Citing this family (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN101995689A (en) 2009-08-11 2011-03-30 江苏丽恒电子有限公司 Switch array and display array of display device
US8804295B2 (en) 2009-10-15 2014-08-12 Altera Corporation Configurable multi-gate switch circuitry
US20120153970A1 (en) * 2010-12-21 2012-06-21 Qualcomm Mems Technologies, Inc. Capacitive touch sensing devices and methods of manufacturing thereof
US9293076B2 (en) * 2013-10-21 2016-03-22 Qualcomm Mems Technologies, Inc. Dot inversion configuration
GB2555510B (en) * 2016-06-30 2020-03-11 Cirrus Logic Int Semiconductor Ltd MEMS device and process

Family Cites Families (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5619061A (en) * 1993-07-27 1997-04-08 Texas Instruments Incorporated Micromechanical microwave switching
US6323834B1 (en) * 1998-10-08 2001-11-27 International Business Machines Corporation Micromechanical displays and fabrication method
WO2003007049A1 (en) * 1999-10-05 2003-01-23 Iridigm Display Corporation Photonic mems and structures
US6366186B1 (en) * 2000-01-20 2002-04-02 Jds Uniphase Inc. Mems magnetically actuated switches and associated switching arrays
CA2355450A1 (en) * 2000-09-29 2002-03-29 Nortel Networks Limited Hybrid attach mirrors for a mems optical switch
US6489857B2 (en) * 2000-11-30 2002-12-03 International Business Machines Corporation Multiposition micro electromechanical switch
US20020149834A1 (en) * 2000-12-22 2002-10-17 Ball Semiconductor, Inc. Light modulation device and system
US6614581B2 (en) * 2001-07-03 2003-09-02 Network Photonics, Inc. Methods and apparatus for providing a multi-stop micromirror
US6850133B2 (en) * 2002-08-14 2005-02-01 Intel Corporation Electrode configuration in a MEMS switch

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US8830557B2 (en) 2007-05-11 2014-09-09 Qualcomm Mems Technologies, Inc. Methods of fabricating MEMS with spacers between plates and devices formed by same

Also Published As

Publication number Publication date
CN1755477B (en) 2011-11-16
CN1755477A (en) 2006-04-05
TWI403456B (en) 2013-08-01
TW201302597A (en) 2013-01-16

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Legal Events

Date Code Title Description
MM4A Annulment or lapse of patent due to non-payment of fees