TW200622954A - Signal processing method for a heterodyne laser system - Google Patents

Signal processing method for a heterodyne laser system

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Publication number
TW200622954A
TW200622954A TW093140341A TW93140341A TW200622954A TW 200622954 A TW200622954 A TW 200622954A TW 093140341 A TW093140341 A TW 093140341A TW 93140341 A TW93140341 A TW 93140341A TW 200622954 A TW200622954 A TW 200622954A
Authority
TW
Taiwan
Prior art keywords
vibration
frequency
vibration amplitude
high frequency
signal processing
Prior art date
Application number
TW093140341A
Other languages
Chinese (zh)
Other versions
TWI268456B (en
Inventor
Shih-Kang Kuo
Chuan-Cheng Hung
Chang-Ching Lin
Koung-Ming Yeh
Original Assignee
Metal Ind Res & Dev Ct
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Publication date
Application filed by Metal Ind Res & Dev Ct filed Critical Metal Ind Res & Dev Ct
Priority to TW093140341A priority Critical patent/TWI268456B/en
Publication of TW200622954A publication Critical patent/TW200622954A/en
Application granted granted Critical
Publication of TWI268456B publication Critical patent/TWI268456B/en

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  • Measurement Of Mechanical Vibrations Or Ultrasonic Waves (AREA)

Abstract

This patent presents a method for measuring high frequency vibration based on a hetrodyne laser interferometry system. In a heterodyne system, an electro-optic modulator is used to split the laser light into a two frequency light source with orthogonal polarization state. Usually the frequency is at least ten times higher than the vibration to be measured. However, as the high frequency measurement is desired, the conventional locking amplifier and phase lock loop cannot be applied. Therefore, a method for computing vibration amplitude based on frequency domain analysis is presented in this patent. The acquired sigani is stored and is processed by fast fourier transform to obtain the spectrum of the signal. It was found that the peak values on the spectrum provides the information of vibration amplitude and is utilized for obtaining vibration amplitude.
TW093140341A 2004-12-23 2004-12-23 Signal processing method for a heterodyne laser system TWI268456B (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
TW093140341A TWI268456B (en) 2004-12-23 2004-12-23 Signal processing method for a heterodyne laser system

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
TW093140341A TWI268456B (en) 2004-12-23 2004-12-23 Signal processing method for a heterodyne laser system

Publications (2)

Publication Number Publication Date
TW200622954A true TW200622954A (en) 2006-07-01
TWI268456B TWI268456B (en) 2006-12-11

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Family Applications (1)

Application Number Title Priority Date Filing Date
TW093140341A TWI268456B (en) 2004-12-23 2004-12-23 Signal processing method for a heterodyne laser system

Country Status (1)

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TW (1) TWI268456B (en)

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
TWI403988B (en) * 2009-12-28 2013-08-01 Mstar Semiconductor Inc Signal processing apparatus and method thereof
TWI670135B (en) 2017-11-15 2019-09-01 財團法人金屬工業研究發展中心 Method and device for laser preheating control
CN109834468B (en) * 2017-11-29 2020-12-08 财团法人金属工业研究发展中心 Laser preheating control method and laser preheating control device

Also Published As

Publication number Publication date
TWI268456B (en) 2006-12-11

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