TW200622526A - System and method for real-time quality detection - Google Patents

System and method for real-time quality detection

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Publication number
TW200622526A
TW200622526A TW093141358A TW93141358A TW200622526A TW 200622526 A TW200622526 A TW 200622526A TW 093141358 A TW093141358 A TW 093141358A TW 93141358 A TW93141358 A TW 93141358A TW 200622526 A TW200622526 A TW 200622526A
Authority
TW
Taiwan
Prior art keywords
real
offset
time
quality detection
weighted value
Prior art date
Application number
TW093141358A
Other languages
Chinese (zh)
Other versions
TWI273361B (en
Inventor
Ming-Wei Lee
Fu-Kuan Hsiao
Original Assignee
Ind Tech Res Inst
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Filing date
Publication date
Application filed by Ind Tech Res Inst filed Critical Ind Tech Res Inst
Priority to TW93141358A priority Critical patent/TWI273361B/en
Publication of TW200622526A publication Critical patent/TW200622526A/en
Application granted granted Critical
Publication of TWI273361B publication Critical patent/TWI273361B/en

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  • Testing And Monitoring For Control Systems (AREA)
  • Feedback Control In General (AREA)

Abstract

A process control system capable of real-time-quality-state detection. The system comprises a model analysis unit, a detection unit, and a control unit. The model analysis unit defines model parameters according to historical data of a process. The detection unit determines whether larger offset occurs according to real-time process data and the model parameters. If so, the control unit obtains and compares an offset value with an offset threshold, obtaining a corresponding weighted value according to comparison results, and implements corresponding operations according to the weighted value.
TW93141358A 2004-12-30 2004-12-30 System and method for real-time quality detection TWI273361B (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
TW93141358A TWI273361B (en) 2004-12-30 2004-12-30 System and method for real-time quality detection

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
TW93141358A TWI273361B (en) 2004-12-30 2004-12-30 System and method for real-time quality detection

Publications (2)

Publication Number Publication Date
TW200622526A true TW200622526A (en) 2006-07-01
TWI273361B TWI273361B (en) 2007-02-11

Family

ID=38621487

Family Applications (1)

Application Number Title Priority Date Filing Date
TW93141358A TWI273361B (en) 2004-12-30 2004-12-30 System and method for real-time quality detection

Country Status (1)

Country Link
TW (1) TWI273361B (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
TWI625615B (en) * 2016-11-29 2018-06-01 財團法人工業技術研究院 Prediction model building method and associated predicting method and computer software product

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US8224475B2 (en) * 2009-03-13 2012-07-17 Taiwan Semiconductor Manufacturing Company, Ltd. Method and apparatus for advanced process control
TWI801921B (en) * 2021-07-05 2023-05-11 力晶積成電子製造股份有限公司 Yield correlation-driven in-line tool matching management method

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
TWI625615B (en) * 2016-11-29 2018-06-01 財團法人工業技術研究院 Prediction model building method and associated predicting method and computer software product
US10579026B2 (en) 2016-11-29 2020-03-03 Industrial Technology Research Institute Building a workpiece quality prediction model

Also Published As

Publication number Publication date
TWI273361B (en) 2007-02-11

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