TW200622226A - Optical method for detecting the surface structure on thin film of nano crystal - Google Patents
Optical method for detecting the surface structure on thin film of nano crystalInfo
- Publication number
- TW200622226A TW200622226A TW093140978A TW93140978A TW200622226A TW 200622226 A TW200622226 A TW 200622226A TW 093140978 A TW093140978 A TW 093140978A TW 93140978 A TW93140978 A TW 93140978A TW 200622226 A TW200622226 A TW 200622226A
- Authority
- TW
- Taiwan
- Prior art keywords
- thin film
- nano crystal
- surface structure
- film
- optical
- Prior art date
Links
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- Length Measuring Devices By Optical Means (AREA)
- Investigating Or Analysing Materials By Optical Means (AREA)
Abstract
The invention is proposed a kind of optical method for detecting the surface structure on thin film of nano crystal. It utilities the gas phase deposition to get the property of surface structure with the low integral rate of nano crystal film. The thin film of the nano crystal is divided into high and low refraction index surface layers to generate the twin-structure with non-uniformity. Using the optical mode of twin-structure to simulate the performance of nano crystal. It is also to note that the thin film deposition process for thin film is done and if the film structure is fitted with optical mode of the twin-structure, it shows the nano crystal for the thin film. Thus, the surface structure and thickness of nano thin film in processing can be detected precisely using optical apparatus' measurement and optical parameters' calculation for the film and substrate.
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
TW093140978A TW200622226A (en) | 2004-12-28 | 2004-12-28 | Optical method for detecting the surface structure on thin film of nano crystal |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
TW093140978A TW200622226A (en) | 2004-12-28 | 2004-12-28 | Optical method for detecting the surface structure on thin film of nano crystal |
Publications (1)
Publication Number | Publication Date |
---|---|
TW200622226A true TW200622226A (en) | 2006-07-01 |
Family
ID=57808458
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
TW093140978A TW200622226A (en) | 2004-12-28 | 2004-12-28 | Optical method for detecting the surface structure on thin film of nano crystal |
Country Status (1)
Country | Link |
---|---|
TW (1) | TW200622226A (en) |
Cited By (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US10030306B2 (en) | 2012-10-26 | 2018-07-24 | Applied Materials, Inc. | PECVD apparatus and process |
CN112361973A (en) * | 2020-11-18 | 2021-02-12 | 华侨大学 | Method for detecting thickness and optical constant of diamond film |
TWI756454B (en) * | 2017-07-25 | 2022-03-01 | 美商克萊譚克公司 | Multilayer film metrology using an effective media approximation |
-
2004
- 2004-12-28 TW TW093140978A patent/TW200622226A/en unknown
Cited By (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US10030306B2 (en) | 2012-10-26 | 2018-07-24 | Applied Materials, Inc. | PECVD apparatus and process |
TWI632250B (en) * | 2012-10-26 | 2018-08-11 | 應用材料股份有限公司 | Pecvd apparatus and process |
TWI756454B (en) * | 2017-07-25 | 2022-03-01 | 美商克萊譚克公司 | Multilayer film metrology using an effective media approximation |
CN112361973A (en) * | 2020-11-18 | 2021-02-12 | 华侨大学 | Method for detecting thickness and optical constant of diamond film |
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