TW200615534A - Hydrogen sensor device and method for fabricating the same - Google Patents

Hydrogen sensor device and method for fabricating the same

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Publication number
TW200615534A
TW200615534A TW093133851A TW93133851A TW200615534A TW 200615534 A TW200615534 A TW 200615534A TW 093133851 A TW093133851 A TW 093133851A TW 93133851 A TW93133851 A TW 93133851A TW 200615534 A TW200615534 A TW 200615534A
Authority
TW
Taiwan
Prior art keywords
sensor device
hydrogen sensor
metal nanoparticle
fabricating
same
Prior art date
Application number
TW093133851A
Other languages
Chinese (zh)
Other versions
TWI274152B (en
Inventor
Hue-Ying Chen
Wen-Chau Liu
Yen-I Chou
Chia-Ming Chen
Hsin-Wen Pan
Original Assignee
Univ Nat Cheng Kung
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Univ Nat Cheng Kung filed Critical Univ Nat Cheng Kung
Priority to TW93133851A priority Critical patent/TWI274152B/en
Publication of TW200615534A publication Critical patent/TW200615534A/en
Application granted granted Critical
Publication of TWI274152B publication Critical patent/TWI274152B/en

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  • Electrodes Of Semiconductors (AREA)
  • Investigating Or Analyzing Materials By The Use Of Electric Means (AREA)

Abstract

A hydrogen sensor device and a method for fabricating the same are disclosed. The hydrogen sensor device is based on metal nanoparticle/semiconductor Schottky diode, wherein the metal nanoparticle layer is used as a Schottky gate. For the deposition of metal nanoparticle layer, an electrophoretic deposition technique combining with micro-manufacturing processes is employed. Due to high catalytic activity and large specific surface of nanoparticles, the sensor device exhibits superior sensing performances with high sensitivity, wide detection range and speedy response rate. In this fabrication process, the electrophoretic deposition has the advantages of easy operation, simple equipment and mass production.
TW93133851A 2004-11-05 2004-11-05 Hydrogen sensor device and method for fabricating the same TWI274152B (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
TW93133851A TWI274152B (en) 2004-11-05 2004-11-05 Hydrogen sensor device and method for fabricating the same

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
TW93133851A TWI274152B (en) 2004-11-05 2004-11-05 Hydrogen sensor device and method for fabricating the same

Publications (2)

Publication Number Publication Date
TW200615534A true TW200615534A (en) 2006-05-16
TWI274152B TWI274152B (en) 2007-02-21

Family

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Family Applications (1)

Application Number Title Priority Date Filing Date
TW93133851A TWI274152B (en) 2004-11-05 2004-11-05 Hydrogen sensor device and method for fabricating the same

Country Status (1)

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TW (1) TWI274152B (en)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN109187660A (en) * 2018-08-23 2019-01-11 电子科技大学 A kind of semi-conductor type hydrogen gas sensor based on graphene reticular structure
CN111855756A (en) * 2019-04-28 2020-10-30 中国科学院上海微系统与信息技术研究所 Hydrogen sensor based on Pd-Ag alloy nanocrystalline and preparation method thereof
TWI740325B (en) * 2018-12-28 2021-09-21 鴻海精密工業股份有限公司 Gas sensor and method for making same

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN104374819B (en) * 2014-11-04 2017-03-15 中国电子科技集团公司第四十八研究所 A kind of multilayer film Schottky diode hydrogen gas sensor core body and preparation method thereof

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN109187660A (en) * 2018-08-23 2019-01-11 电子科技大学 A kind of semi-conductor type hydrogen gas sensor based on graphene reticular structure
TWI740325B (en) * 2018-12-28 2021-09-21 鴻海精密工業股份有限公司 Gas sensor and method for making same
CN111855756A (en) * 2019-04-28 2020-10-30 中国科学院上海微系统与信息技术研究所 Hydrogen sensor based on Pd-Ag alloy nanocrystalline and preparation method thereof
CN111855756B (en) * 2019-04-28 2023-11-21 中国科学院上海微系统与信息技术研究所 Hydrogen sensor based on Pd-Ag alloy nanocrystalline and preparation method thereof

Also Published As

Publication number Publication date
TWI274152B (en) 2007-02-21

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